Design and experimental investigation of a large diameter electron cyclotron resonant plasma source

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Sze, Fan Cheung

Date: 1993

Subjects: Cyclotron resonance
Ion sources
Microwaves
Plasma (Ionized gases)

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xviii, 265 pages

Permalink: https://doi.org/doi:10.25335/99ch-cr55