Electrical properties and physical characteristics of polycrystalline diamond films deposited in a microwave plasma disk reactor

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Huang, Bohr-ran

Date Published: 1992

Subjects: Diamond thin films
Microwave plasmas
Polycrystalline semiconductors

Program of Study: Electical Engineering

Degree Level: Doctoral

Language: English

Pages: xvi, 213 pages

Permalink: https://doi.org/doi:10.25335/x2dk-a004

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