Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Zhang, Jie

Date: 1993

Subjects: Diamonds
Microwave plasmas
Plasma etching

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xviii, 281 pages

Permalink: https://doi.org/doi:10.25335/4d87-1x70