The effect of substrate bias on sputtered hydrogenated amorphous silicon

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: McGruer, Nicol

Date: 1983

Subjects: Semiconductors
Silicon

Program of Study: Electrical Engineering and Systems Science

Degree Level: Doctoral

Language: English

Pages: 2, vii, 210 i.e. 212 pages

Permalink: https://doi.org/doi:10.25335/psdk-m431