Modeling the electromagnetic field and the plasma excitation in a moderate pressure microwave cavity plasma source

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Tan, Wen-yi

Date: 1994

Subjects: Diamond thin films
Microwave plasmas

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xv, 189 pages

Permalink: https://doi.org/doi:10.25335/9eew-6s28