Adhesion and residual stress in sputter deposited nickel-titanium thin films on silicon

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Walles, Bethany J.

Date: 1993

Subjects: Nickel-titanium alloys
Silicon
Thin films

Program of Study: Materials Science and Mechanics

Degree Level: Masters

Language: English

Pages: v, 68 pages

Permalink: https://doi.org/doi:10.25335/3an4-ns77