Anodic growth and cathodic removal of silicon dioxide layers utilizing an electron cyclotron resonant microwave plasma disk reactor

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Salbert, Geoffrey Todd

Date: 1992

Subjects: Microwave plasmas
Silica

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xv, 215 pages

Permalink: https://doi.org/doi:10.25335/a71b-j068