Anodic growth and cathodic removal of silicon dioxide layers utilizing an electron cyclotron resonant microwave plasma disk reactor
- In Collections
-
Electronic Theses & Dissertations
- Copyright Status
- In Copyright
- Material Type
-
Theses
- Authors
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Salbert, Geoffrey Todd
- Date Published
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1992
- Subjects
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Microwave plasmas
Silica
- Program of Study
-
Electrical Engineering
- Degree Level
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Doctoral
- Language
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English
- Pages
- xv, 215 pages
- Permalink
- https://doi.org/doi:10.25335/a71b-j068