Post-depositional processing of diamond film using electron cyclotron resonance plasmas

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Chakraborty, Rabindra Nath

Date: 1995

Subjects: Diamonds
Microwave plasmas
Plasma etching

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xiii, 204 pages

Permalink: https://doi.org/doi:10.25335/sp02-2b79