Stress evolution during isothermal and isochronal annealing of sputtered NiTi thin films on (100)-Si

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Zhang, Jinping

Date Published: 1997

Subjects: Annealing of crystals
Sputtering (Physics)
Thermodynamics
Thin films

Program of Study: Materials Science and Mechanics

Degree Level: Masters

Language: English

Pages: x, 141 pages

Permalink: https://doi.org/doi:10.25335/w15w-an03

Full text