Optical emission spectroscopy investigation of microwave plasmas

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Sivagnaname, Jayakumaran

Date Published: 1998

Subjects: Diamond thin films
Interfaces (Physical sciences)
Microwave plasmas
Photoemission
Plasma-enhanced chemical vapor deposition

Program of Study: Electrical and Computer Engineering

Degree Level: Masters

Language: English

Pages: xi, 98 pages

Permalink: https://doi.org/doi:10.25335/j36a-7s49

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