Microwave assisted plasma CVD of diamond films using thermal-like plasma discharge

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Kuo, Kuo-Ping

Date Published: 1997

Subjects: Diamond thin films
Plasma-enhanced chemical vapor deposition

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xx, 258 pages

Permalink: https://doi.org/doi:10.25335/7e9e-ky72

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