Experimental characterization of a compact MPDR plasma source employing three different coupling geometries

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Khan, Amir Halim

Date: 1999

Subjects: Electromagnetic measurements
Microwave plasmas

Program of Study: Electrical Engineering

Degree Level: Masters

Language: English

Pages: xv, 151 pages

Permalink: https://doi.org/doi:10.25335/aq0q-tc82