Investigation of the film properties and deposition process of a-C:H films deposited with a microwave ECR plasma reactor

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Kim, Bo Keun

Date: 2000

Subjects: Hydrocarbons
Thin films

Program of Study: Electrical and Computer Engineering

Degree Level: Doctoral

Language: English

Pages: xii, 167 pages

Permalink: https://doi.org/doi:10.25335/8hsc-g717