THESE! feet This is to certify that the thesis entitled Joining of Ceramic Materials Using Spin-on Interlayer presented by JongeGi Lee has been accepted towards fulfillment of the requirements for I Master 3 _degree in Materials Science and Engineering 6%03er Major professor DateCDCEE ' '7’! $300 0-7639 MS U is an Affirmative Action/Equal Opportunity Institution LlahAnv Miehlgan State University "‘ -._, '— PLACE IN RETURN Box to remove this checkout from your record. TO AVOID FINES return on or before date due. MAY BE RECALLED with earlier due date if requested. DATE DUE DATE DUE DATE DUE 11m mus-p.14 JOHN} ()l‘ (TR up JOINING OF CERAMIC MATERIALS USING SPIN-ON INTERLAYER By Jong-Gi Lee A THESIS Submitted to Michigan State University in partial fulfillment of the requirements for the degree of MASTER OF SCIENCE Department of Materials Science and Mechanics 2000 JOINING 0i (i. R \\ .n‘ ’ . ‘ in». mm WW7 . . rm ~-.- .1 “ ' \ l n.‘ v 7“." \-¢..L him-(LIN; slfianu s: e U" . . 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I .. ~35 - :1 «L ' “43¢ \lidlrwf" J "l. -sb 5 ~ ABSTRACT JOINING OF CERAMIC MATERIALS USING SPIN-ON INTERLAYER By Jong-Gi Lee Using various spin-on materials with submicron initial coating thickness, oxide ceramics including alumina, partially stabilized zirconia, fully stabilized zirconia, alumina-zirconia composites, hydroxyapatite, and MaCorTM and non-oxide ceramics including silicon carbide and magnesium fluoride have been joined using either microwave heating or conventional heating with applied low external pressure for a range of 40 minutes to 60 minutes. Non-oxide ceramics including Mng and SiC were joined at a low temperature (700°C and 900°C) using ceramic precusor spin—on interlays transformed into an amorphous ceramic upon heating. SEM micrographs showed smooth bond layers with thickness ranging from ~0 to 10 microns. Prior to joining, notches about 400 microns in depth and 350 microns in width were cut into selected specimens using a low speed diamond saw for alumina-zirconia composites, partially stabilized zirconia, fully stabilized zirconia, hydroxyapatite, and MaCorTM. Microscopic investigation of the joined specimens showed that the notch dimensions had changed by less than 3 % on average- I. lnlmduction. J I‘ I " ’ ll .ivl'jtilli‘n 0’. i I‘ q r t l. Jig-Tin: ltm'miw . . |Q ' I Tom: Tammie 5 I 11 \l‘.;f;~t\.r~c lurk". .- ~ [\ptrimrntal Prowl L ..'. Him} Twit: ‘3‘ 3.3 Cid Prom: (Ca 1‘ P7347533? 0', R; ‘C R \ .p. a)" .V n—. SHIIR, ”I I r ‘\ Mi; ‘l\L\\ . ‘, A f at Satin-c: P't“ " I . rbAb\ ‘- . CuttirtaPrwt-ti ' ‘. \ i . . .k -\A.irl"Ku‘\CJki"‘.' ‘ I .L Ivy-9““? Ya ~Ltv‘.‘ - .u..l: \\\.§._.\. 4 ‘ -‘ijpv!"'.-. 1 ' ' “IMMJ‘JL \\, u ‘ I\. ‘H . ll Primate nt Pr- ‘ . :1‘ “Hr AKIII\J\C £J‘\ ‘1 . L- 3 ‘ "~ . l.\‘k\“d\a] :1 \ k"I.“ ‘ . --~. \JV‘thQ \ ‘1 (2“ Table of Contents page 1. Introduction. ............................................................................ 1 1.1 Classification of Ceramic Joining ................................................ 2 1.2 Joining Techniques Using interface ............................................. 2 1.3 Joining Techniques Without Using Without bond agent ..................... 7 1.4 Microwave Joining ................................................................ 9 2. Experimental Procedure. ............................................................. 17 2.1 Materials Used in This Study .................................................... 17 2.2 Cold Pressing Ceramic Powder Compacts ..................................... 22 2.3 Preparation of Refractory Insulator Used in This Study ..................... 22 2.4 Microwave Control System ....................................................... 24 2.5 Sintering Process Using Microwave Power .................................... 27 2.6 Specimen Preparation ............................................................. 33 2.7 Coating Procedure Prior to Joining .............................................. 35 2.8 Microwave Joining Procedure ................................................... 38 2.9 Joining technique for Non-Oxide Ceramics ................................... 41 2.10 Producing Notch Mechanically Using A Low Speed Saw. ................. 41 2.11 Procedure of Producing Notch Prior to Sintering ............................. 45 2.12 Mounting and Polishing of Joined Specimen ................................. 49 2.13 Vickers indentation Testing of Joined Specimen ............................. 49 2.14 SEM Observation of Bond-layer ................................................ 49 2.15 Infrared Transmittance Measurement of Mng ............................... 53 2.16 Microwave cavity cleaning ...................................................... 54 3. Results. .................................................................................... 59 3.1 Joining of Diamond Thin Film to Optical AndIR Materials. ................. 59 3.2 Microwave Joining of Particulate Composites. ................................ 80 3.3 Geometrical Stability of Holes and Channels During Joining of Ceramics and Ceramic Composites. .......................................... 96 3.4 Joining Ceramics To Produce Components With Precise lntemal Channels. .................................................................. 117 3.5 Joining of Non-Oxide Ceramics Using Conventional And Microwave Heating. .......................................................... 138 3.6 Protective Coatings for Infrared Materials. ....................................... 151 3.7 Joining Of Polycrystalline Ceramics And Ceramic Composites Using Microwave Heating. ......................................................... 164 3.8 Joining Dissimilar Ceramic Materials. .......................................... 175 4. Discussion and Conclusion. .......................................................... 196 4.1 Thermal Stress in the Dissimilar Ceramics Joined in This Thesis ............ 196 4.2 Summary of Results .................................................................. 204 iii 1 mi! \iJui‘i‘ .. 1pptndl\ 1an'i'xc ; SCkiIl.\n Ila-C 1ppendiiBSt. it‘TlYi .«i't' . energ\ ”‘1 ill be typrndiif \1:.'riig'.;;~‘:. . 11". it“; '.\ \t'. itiirtnces 4.3 Future studies ......................................................................... 207 Appendix A Literature surveyed joining techniques cited in introduction section. The number was set via references number .................... 208 Appendix B Sintering andjoining heating rate using the Microwave energy in this thesis. ........................................................ 225 Appendix C Micrographs of joined ceramic/ceramic not included in results section. ............................................................ 239 References. . ....... ................ . .......................................... 248 iibkl. Alumni 1.13111 liblt’ dezoiiipitzic ti liblei. Slilcnil intumiit. oi ( lib“. Infurtiiuiznn o. M. lIka. 111267.41 iniurttii“ 111)“. The spin-on 111.113? 11bit Iconiillliins 01' 5"" ..nn\ 11111725 thesis. .. t‘ .Iric' ltbltfii’cishzng 212i Valid-ed In this 11": twig piltsiicd. l? are reduced. ...... We 9. A sum 171m 01 175. immature. livid "‘9 m ‘l '\ - l ‘ I \\T‘1&Illlech-'TI;L lible 10. Eiptti mental ; I“ am silicon car's Wt 11. Type of flit-:5 .: l .3 . 111161.13p5 or hilt-rs .I '- I 1111113. The condim- .,.\i hit 14. C “1. v 4 .1...“ , ‘” - “1“‘lt11‘n1‘1: 'r Tab! - *1: Sinzssnz card»- rain 6‘ ",3 b Artur-Spied jt‘itif' 111)! . 1E 17. \‘ii‘ Ir 0 ' .t . . k ’ \‘V‘Lx'ilhi l. List of Tables Page Table 1. Alumina (TM-DAR, Taimi Co, Japan) powder information .................. 18 Table 2. Hydroxyapatite powder material (Cerac INC, Milwaukee, WI) information. .. 18 Table 3. Material information of two kinds of zirconia ..................................... 19 Table 4. Information of MaCorTM from vendor’s web site. ................................ 19 Table 5. Material information of Mng. ...................................................... 20 Table 6. The spin-on materials used for ceramic/ceramic joining. ........................ 20 Table 7. Conditions of Sintering for each of the commercial powder material used in this thesis. ............................................................................ 31 Table 8. Polishing time and diamond grit size for each of the ceramic materials included in this thesis. The time corresponds to seven mounted specimens being polished. If fewer specimens are polished simultaneously the times are reduced. ............................................................................. 31 Table 9. A summary of the interlayer materials, joining materials, joining temperature, hold time, and deadweight loading for all of the ceramic/ceramic joining included in this thesis. ................................... 44 Table 10. Experimental condition of conventional joining of silicon nitride and silicon carbide. .................................................................. 44 Table 11. Type of filters and detectors used to measure the IR transmittance of the Mng specimens. ............................................................. 52 Table 12. Type of filters and detector for various wavelengths. ........................... 68 Table 13. The conditions of joining both microwave and conventional furnace. ...... 68 Table 14. Calculation of the optical absorption factor, a ................................... 75 Table 15. Sintering conditions for powder materials used in this thesis. ................... 125 Table 16. Attempted joining conditions for joining MaCorTM and HAP. ............... 125 Table 17. Notch stability of joined HAP with MaCorTM before and after joining ....... 126 Wt 18. “it nitit‘h (54' 111119. Tn: nail: .1:.".':.' I" ‘9 r at! tomb». .u. hill 30. Tris notch 1131i; .1i'.fll(lil‘:ll‘.£ for ' 11bit :1. Wm] exam: 111122. lien! fund...‘ . o W 23. Young's mica}: lible21. Sim-mm ‘Oi‘IdZIh 11. b s Milt 15 PTlX‘LKNII“: 0.1-. 1.. Milk ”T Titmal prune .2; l w m, . 1116.1. Emil privpctftz 13ka Inertial expire.- I‘ . . 01:39. 10qu s mmjsii l ' ' 11130. Pawn 312:? 9 .t‘ _. libki -‘ ' .1.Ca.t..itcdihcttti. 11bit 31 A167. “Di-i ,- 3 Lining” \ T IM‘I.JOIE:IAC "V‘ . -: mags? ' :Ifi‘r‘fin e '“‘I:'.- .‘arbi C ”‘11..” l L' Lac; ’3'. \I '1: “113' \T '\ '3 t '11]?! - S :17 01 f7- 61'5‘AH \ 110. R F. :? Table i .Lkimw," I‘“Utr~‘.t. . ‘r ‘ “was .- r-r _ 'H. sum-2n, 'L S Table 18. The notch change before and afterjoining forjoined Z102 with MaCorTM. 126 Table 19. The notch dimension change before and after joining for joined ZrOz (8 mol % Y203). .................................. 127 Table 20. The notch dimension change before and after joining for joined Ale3/ZrOz composites. ................................. 127 Table 21. Thermal expansion coefficients for the Materials Included in this Study. 184 Table 22. Thermal Conductivites of the Materials Included in this Study. ............... 184 Table 23. Young’s moduli for the Materials Included in this Study. ....................... 184 Table 24. Sintering conditions for materials used in this study. .......................... 185 Table 25. Processing conditions for dissimilar materials using microwave power. 185 Table 26. Thermal properties of materials used in reference [59]. ....................... 199 Table 27. Thermal properties of materials used in reference [55]. ....................... 199 Table 28. Thermal expansion coefficients for the materials included in this thesis. ...... 205 Table 29. Young’s moduli for the materials included in this thesis. ..................... 203 Table 30. Poisson’s ratio for the materials included in this thesis. ...................... 203 Table 31. Calculated thermal stress values of joined specimens. ........................ 203 Table 32. Averaged notch stability before and after joining in this thesis. .............. 207 Table A1. Joining materials, dimension, adhesive, thickness of adhesive, heating method, heating rate cooling rate, Tmax, hold time, bonding pressure, mechanical test, span length, dimension, loading rate, cross speed, micrograph, thickness of bondlayer, strength of material, bonding or shear strength, and atmosphere were written. Reference number 1 to 18 used bonding agent during joining. 209 Table A2. Joining materials, dimension, adhesive, thickness of adhesive, heating method, heating rate cooling rate, Tmax, hold time, bonding pressure, mechanical test, span length, dimension, loading rate, cross speed, micrograph, thickness of bondlayer, strength of material, bonding or shear strength, and atmosphere were written. The number was set via references number. Reference number 24 to 29 used no bonding agent during joining. ...... 220 vi figurtl Sthcmiiic 111.16 m pnngipic oi lb: martini ; 1 1C1 complete w.“ | 11211111.. '1\1".-'C ...:"..‘i1-.1. 1101111311? \LIi'?.I.. 1116 RBSC. 11h! 1. across the RSV 111611;}81121] figure 3. P415 "is 01 nu . 1 ml mitrtiuaxc I, 131121 Imitation of 31:. ' 1111111101311 iitim 8.11.1] FEHRD. LOSS. 114112;:8111 15 1,. an6, 41 PHUtUVy-th U? l 11‘ St‘htmaiic 0.1". Pruitt... i‘emd: 1C 111$ 11691 13417.41 m r T1116 31mm REIT 19 Mon 01‘6““; . “TM Ii \.1\t1d1111_1n ("I rct . 111M ph, 1111:11114ap.‘iffi 11;, W‘tersim mudc 01 \"u l \ F'VUR11-118C1‘iem.m uid1b41gh111 \lv-Q 111111611 P111 . it Q} 10161111159“ 1 . ““X‘t' List of Figures Figure 1. Schematic illustration of sessile drop formation: (a) principle of wetting denoted contact angle and (b) interfacial energy, (b) non-wetting drop, (c) complete wetting [21] . .............................................. Figure 2. A schematic illustrating diffusion bonding of free silicon onto a butting surface. (a) Migration of free silicon onto surface of the RBSC, (b) As force (pressure) is applied, the silicon spreads across the RBSC surface, (c) Free silicon forms a continuous interlayer [24]. ................................................................ Figure 3. Patterns of heating in (a) conventional furnace and (a) microwave (adapted from Sutton [31] and Lee [48]). .............. Figure 4 Interaction of microwaves with materials at ambient temperature (adopted from Sutton [31] and Lee [48]). ................................... Figure 5. Loss tangent (8 to 10 GHz) versus temperature [31]. .................... Figure 6. (a) Photograph of the presser used in this thesis, (b) Schematic sketch of pressing powder compact in a steel die. ....... Figure 7. Schematic illustration of the technique used to fabricate the cylindrical portion of the refractory casket. The starting material was a 30 cm long section of a zirconia refractory open cylinder. ..................................................... Figure 8. Illustration of refractory cavities used in this thesis. ..................... Figure 9. Photograph of the microwave cavity and the microwave power supply used in this thesis. ............................................ Figure 10. Schematic of specimen temperature measurement technique used in this thesis. ................................................ Figure 11. Schematic illustration of refractory casket arrangement used batch Sintering of ceramic specimens in this thesis. .............. Figure 12. Photograph of heater and aluminum plate used in mounting the specimens for polishing. Note that several specimens have been fixed to the plate via thermoplastic. ................................................. vii Page ....... 8 ....... 10 ll 12 23 25 26 28 ...... 30 ....... 32 36 YEW? 13. PML‘STJp'f‘. t“ w I'. figurell.Schcmuuc1 .. . ahzghsr'cdv ' ‘ 1v ‘- szure 1:. A phohg. .19. ”mm“ M C (.1. figure 1&3: Pha‘nngmp.“ . ffffdih‘r) (mi-u (b: Phuiugmp‘i :1ka min 11m- dead \sczehzs :r We”. Photograph vi. the spmmcn h. figurtlfl. Sghemang M in. cut nuzghw :ntw figure 19. Schemang pm oer (mpg; OI ..\ Fm 31}. Schematic 11iu~tt after Jmn ' . WIS 431d 1 J ' Pram. Synsmauc or V; FM] ‘1 --' -~ ‘ ' 1- 1.8.. dcmutlc 0? {fix the IR trummrth f‘ 1 W3. A us“ of the V Snoun are m:- :1 m4 ‘. “NRC shdzhu s Fm] ~1 ,MCU — . 1ptuppm ”e flnzer x1 5.. f .. ppm} €0.5qu ..us.a:\:z‘“»c* ' .A \d Figure 13. Photograph of the automatic polisher with the aluminum plate in place for polishing. .............................................. Figure 14. Schematic illustration of coating procedure using a high speed spinner. ....................................................... Figure 15. A photograph of the 2.45 GHz single mode microwave cavity used in this thesis. .................................... Figure 16. (a) Photograph of the type of zirconia/aluminosilicate refractory casket used during ceramic/ceramic joining, (b) Photograph of the bottom SALI plate of the refractory casket with the specimen, with the specimen setter and dead weights in place. ..................................................... Figure 17. Photograph of a low speed diamond saw after the specimen had been in the saw. ...................................... Figure 18. Schematic of the technique used to mechanically cut notches into the specimens. .......................................... Figure 19. Schematic of “stamping” notches into the green (unfired) powder compacts, prior to Sintering. .................................... Figure 20. Schematic illustration of mounting the specimen after joining and cutting. ................................................... Figure 21. Schematic of Vikers indentation near the bond layer. ................. Figure 22. Schematic of the apparatus used for measuring the IR transmittance of Mng specimens. ............................... Figure 23. A view of the microwave cavity disassembled for cleaning. Shown are the main microwave cavity, the lanch probe, and the sliding short ........................................................ Figure 24. Cavity top plate showing finger stock. The finger stock makes electrical and physical contact with the inner cavity wall. Thus, as the cavity top plate moves, the effective cavity length changes. ..................................................... Figure 25. For the launch probe part of the probe assembly includes small finger stack. ............................................... Figure 26. SEM image of the fracture surface of Mng. ........................... viii ........ 37 ........ 4O 42 ....... 43 46 ......... 47 ......... 48 50 51 ........ 52 56 57 58 ......... 61 figure 27. St'hcmiu, xl‘. used In £0.11? lure 28V Schcmitu wt '5 The dud \tt‘ig' Figure 29 Schematic u! the IR Irinxnzzt' llgunw SElemngr. the cun\t‘t‘:‘.1n' l3! MIJIMJ'. \ch (“gin \x, name 41 ”t! “gulf“. SEM lmdgc u: ‘ lhcstdum ~2T.. b) migrwuxc .' dad waist lla: llgurt32. lransrrgtmntc ' (at Ctmxcmznt. lbl Xlit‘rtm 4w 130R” Comp-in son Ul \lgFj From l‘. _' 531W. As Stllt’llisl'c \' v , -. . di'lUUF tratcffa, F . {Mimi SE.\l muni- lbl is a a.-. T IQl_‘\-‘I| I” FWMMI PL, I:l_‘ll“§.'.::‘,’; l casket dun} c [Kiln-“Tl SKL‘I n: ‘ t specmcn 3c"; .\&. Rm”. SEM m; Figure 27. Figure 28. Figure 29. Figure 30. Figure 31. Figure 32. Figure 33. Figure 34. Figure 35. Figure 36. Figure 37. Figure 38. Figure 39. Schematic showing the high-speed substrate spinner used in coating to the Mng substrates. ......................................... 62 Schematic of the refractory casket used for microwave joining. The dead weight loading also is illustrated [2]. ................................. 65 Schematic of the spectrophotometer used for the IR transmittance measurements. .............................................. 66 SEM micrographs of both the microwave and the conventionally joined Mng showing the bond-layer. (a) Microwave joined Mng (joining at 700°C for 20min with 60gm weight loading), (b) Conventional joined Mng (joining at 700°C for 20min with 85gm weight loading). .................... 70 SEM image of a Mngl Mng specimen joined using the sodium silicate solution. The specimen was joined by microwave heating at 700°C for 20min with a 60gm dead weight loading. ............................................................... 71 Transmittance for both microwave and conventionally heated MgFg. (a) Conventionally-heated Mng and MgFgl Mng joined and (b) Microwave-heated Mng and Mng/ Mng joins. .......................... 73 Comparison of transmittance for microwave and conventionally joined MgF2(From Figure 32). ............................................................ 74 As schematic showing the reflections at the various interfaces of a two-layer specimen (which gives m = 3). ............ 75 (a) SEM micrograph of a cured silica film on a MaCorTM substrate, (b) as a function of spin rate for cured silica coatings on MaCorTM [after 6]. 85 (a) Photograph of the zirconia/aluminosilicate refractory casket during specimen joining, (b) Photograph of the bottom SALI plate of the refractory casket with the specimen, specimen setter and dead weights in place. ...................................... 86 SEM micrographs of alumina/zirconia composites joined at 1450°C for 20 minutes showing interface. ........................... 89 SEM micro aphs of zirconia (3 mol % Y203) with MaCor joined at 1020°C for 20 minutes showing interface. ......... 90 SEM micrograph of HAP with MaCorTM joined at 1020°C for 10 minutes. The mica platelet rainforcement In lht‘ MAW lzllrt 40. SEM midi-u: huh \lit‘ur ‘ lgurtil. SEM mlt'rng' the tour mitt“ I lit alumina. figurell Procedure for ~ for notih :rwr‘ figural Schema; nt t: shown: the n'. Figure“. Schcmihc at It FRUIT 45- Microfif‘d‘i urn \ tut : 'l ~ with. St‘ilt’mallt' n" T" “ i F .. M48 Sthfimdiit‘ n! 71‘ Sllmtmg H“ n. Fm 49' A schemi'i ~ . 0 \i\ i]. Fm” 50- Nozch ‘ .. \(‘njjik r hm : ,re.l. .\l.iCOI'T\1lM.L lttri 51 ‘1‘ Figure 40. Figure 41. Figure 42. Figure 43. Figure 44. Figure 45. Figure 46. Figure 47. Figure 48. Figure 49. Figure 50. Figure 51. Figure 52. Figure 53. Figure 54. Figure 55. Figure 56. Figure 57. Figure 58. in the MaCorTM is evident in the micrograph. ................................. 91 SEM micrograph of SiC platelet reinforced alumina with MaCor joined at 1020°C for 10 minutes. .............................. 92 SEM micrographs of the fracture surfaces for the four materials included in this study, namely (a) alumina, (b) MaCorTM, (c) zirconia, and (d) hydroxyapatite ........... l 10 Procedure for sectioning the reference specimen for notch geometry in the “pre-joined” state (after [1]). ..................... lll Schematic of the microwave processing system, showing the microwave cavity and the power supply (after [20]). ......... 112 Schematic of the refractory casket used during joining (after [1]). ......... 113 Microstructures of the joint regions of the joined HAP specimens. ........ 114 A schematic for compact powder materials and Sintering. ..................... 128 Schematic of producing notches. ................................................ 129 Schematic of microwave processing system, showing microwave cavity and microwave power supply. .................. 130 A schematic of showing Vickers indentations placed near the bond layer. 131 Notch configuration in both HAP and MaCorTM specimens. ............... 132 MaCorTM notched specimen before and after joining. ....................... 133 HAP notched specimen before and after joining. ............................. 134 ZrOz notched specimen before and after joining. ............................. 135 2102 notched specimen before and after joining. ............................. 136 A1203/ ZrOz notched specimen before and after joining. ..................... 137 Schematic of the coating and joining technique. .............................. 145 Fracture surface of SiC used in this study. .................................... 146 (a) SiC joined at 900°C for 20 minutes in flowing N2 with a 20 gram deadweight applied during joining and [bl 51:11:: ‘i‘ ' m :11ch .1 o \ “THIS" [13111139. SE. 1 1 , ' heelt‘d (0113 L'.r m mieruwt‘ ' llgllfl‘w S lit'm I‘UI ls \ln ! UxCilln ‘4??in figure 61. ESE.“ C\.ii7.:: not added hex; 101 :0 X’ct‘iith . Figure 61 The piilieihfixli seizing ind t la) the film wig". intH grim hex.- spun 2113M!) rp.’ «hi the him wig. and 6 grim hem: spun at SUI It.) mrt: m Transmitlir‘ - 5 l lturett. I ‘un\m1iiur lgc l “M“ Tidi‘Slflj'th .3 - dl 501C “1'." d l “”65. T'di"\lhlit.1"i“[ 41600 C “Ill”: e l“! . litre 66. Schematic d: -. " “56d 10 3],“ [3' . lditf.’ Lee Cd\" figurt67. SChDIT 7141;; xii“ 3.. h tilt. ref lie \‘L\Ik, at L: ‘7‘“ dis; X'Sn “PM T? 3‘8 L \ Ernen' {Tn-it‘- "den" “31an S *1 mi “'1: 1L 0‘ '>_ InLnls Stud: :( ' (b) MgF2 specimens joined at 700°C for 20 minutes in air with a 60 gram deadweight applied during joining. .................. 147 Figure 59. SEM images of the SiC specimens that had been first heated conventionally at 900°C (Figure 58a), followed by (a) microwave heating at 1200°C for 20 minutes or by (b) conventional heating at 1200°C for 20 minutes. ........................... 148 Figure 60. Schematic showing the hi gh-speed substrate spinner used in applying the coatings to the MgF2 substrates. ........................ 157 Figure 61. ESEM examined polycarbosilane film which is not added hexane after coating spun at 3000 rpm for 20 seconds and cured at 100°C for 20 minutes in air. ..................... 158 Figure 62. The polycabosilane film thickness using ESEM after coating and transmittance of coated specimens. (a) the film solution of coated specimen was 1 gram PCS and 4 gram hexane mixed solution. The coated MgF2 was spun at 3000 rpm and cured at 400°C in N2, (b) the film solution of coated specimen was 1 gram PCS and 6 gram hexane mixed solution. The coated MgF2 was spun at 5000 rpm and cured at 600°C in N 2, (c) Transmittance for (a), and (d) Transmittance for (b). ..................... 159 Figure 63. Transmittance of both sides polished MgF2 specimen. ....................... 160 Figure 64. Transmittance of MgF2 coated with polycarbosilane at 500°C with different spin rate. ................................................ 161 Figure 65. Transmittance of MgF2 coated with polycarbosilane at 600°C with different spin rate. ............................................... 162 Figure 66. Schematic diagram of the microwave apparatus used to sinter and to join the ceramic specimens (after Lee, Case, and Asmussen, 1997). ........................................ 169 Figure 67. Schematic showing cross-sectional view of the microwave cavity, with the refractory casket centered along the cavity axis. The casket, composed of a hollow zirconia (ZYC) cylinder and disc-shaped aluminosilicate (SALI) endplates, encloses a ceramic specimen. The specimen temperature is measured by an optical pyrometer ............................................................................. 170 Figure 68. Schematic of the insulating casket used in this study for both microwave Sintering and microwave joining. ........ 186 xi M" 69. Pht‘lt,tgf,;plj . w used buth ti. 311d [010111 a: The PW‘UIt'l'. [eure'fli SEM mzerttg' alumni - 137. at i distem" ltgtttt 71. A Tlihl 17.1;1. the same 43...". an SEM Inter no Slinli‘ «'1' i\u-'\ latte 72. A SEM mt. r. -15 ‘? Imam. flatten. The nntthed 35 defined in 11;: ‘ 1p- ” mkli ( \Yffid‘ l'ettrti-i. .1 SEM mtgtv.‘ » FEM” "a. A TEX! I i‘lxri" ' for “high the“: interface h\ :t f 7 121m .6. A schemata i-t" tntm dlilt‘?" .411.“ of km Sen 1“ t) W hen . R78 . ‘\ wmlmtiu‘ g comp76§\l"e o}. .1. Shine '- u d “mm "~ Pet 5 ”31.4 grdph m. ' t ‘1’“ Sim mired dl I?” Figure 69. Photograph of the single-mode, 2.45 GHz microwave cavity used both to sinter the alumina, zirconia, alumina/zirconia powders and to join all specimens included in this study. The pyrometer and the insulating cavity (casket) also are shown. ......... 187 Figure 70. SEM micrograph of the bond region of a joined alumina - zirconia specimen. Note the absence of a discemable bond layer between the two joined specimens. ............ 188 Figure 71. A TEM micrograph of the bond region of the same alumina — zirconia specimen depicted by an SEM micrograph in Figure 70. In the TEM micrograph, no significant bond layer is visible. ............................................. 189 Figure 72. A SEM micrograph of a microwave-sintered 85 wt % alumina - 15 % zirconia specimen containing a “pressed-in” channel. ............. 190 Figure 73. The notched 85 wt % alumina — 15 wt% zirconia specimen depicted in Figure 72, joined with a partially stabilized zirconia (3 mol% yttria — zirconia) specimen. ........................................... 191 Figure 74. A SEM micrograph of the join between zirconia and MaCorTM. ......... 192 Figure 75. A TEM micrograph of the MaCorTM — zirconia join, for which there appears to be extensive wettinngf the interface by the glassy matrix phase of MaCor . ........................... 193 Figure 76. A schematic of the thermal stress induced in two different joined materials upon cooling. ............................... 197 Figure 77. A schematic of different thermal stress distribution between two materials that have been joined along a planar interface61].. 201 Figure 78. A continuous crack occurred in alumina due to compressive thermal stress. The spacing between alumina and interface was about 500 um and the crack started from the interface [55]. ................................................ 202 Figure Bl. A graph of sintering TM-DAR (Alumina). TM-DAR was sintered at 1300°C for 60 minutes with heating rate 10°C/min. ............ 226 Figure B2. A graph of sintering partially stabilized zirconia. Partially stabilized zirconia was sintered at 1375°C for 60 minutes with heating rate 10°C/min ............................................................................ 227 Figure B3. A graph of sintering fully stabilized zirconia. Fully stabilized xii ltrt‘nnti um l1] C'mm figure Bi. A graph at \1' Aluminum ht‘diln‘.‘ [L135 1 figure BE. A griph (it he at 'm C lot 2 @1136 A graph t‘lfl hit. it HUI] C tnr.‘ FM 37. A graph or ‘m- . Ilka ztreomi mm; _‘ i ‘ .‘I 115.71g 31.1.4 Etit‘. “$111 38 A $111111 01' i‘tt‘a' zmoma \xtth J ‘ .1 t ‘ \.. .. 5.22.4 tum “11‘. 1 figure 89. A graph ’01 he; jomed .11 1'13“ figure Bl0. A graph 01 he ZlICOl‘.ld\\:1:* Stltea ttlm W “are . 311. A graph of '5; £1le: we «21?: Silteti ftim (a. lr 574116 Hi 7.; C()m:x’\\l[fo D \\. i3 31 1450' C {1... harem A zirconia was sintered at 1350°C for 60 minutes with heating rate 10°C/min ............................................................................ 228 Figure B4. A graph of sintering alumina (85 wt %)-zirconia (15 wt %) composites. Alumin/zirconia composites was sintered at 1350°C for 60 minutes with heating rate 10°C/min. ........................................................... 229 Figure B5. A graph of heating rate of microwave joined MgF2/MgF2 joined at 700°C for 20 minutes using sodium silicate solution spin-on interlayer. 230 Figure B6. A graph of heating rate of microwave joined AKP 30/AKP 30 joined at 1400°C for 20 minutes using sodium a1 ginate spin-on interlayer ........ 231 Figure B7. A graph of heating rate of microwave joined partially stabilized zirconia/partially stabilized zirconia joined at 1500°C for 20 minutes using silica film spin-on interlayer. ............................................. 232 Figure B8. A graph of heating rate of microwave joined partially stabilized zirconia with alumina joined at 1500°C for 20 minutes using silica film spin-on interlayer. ................................................... 233 Figure B9. A graph of heating rate of microwave joined HAP with MaCorTM joined at 1020°C for 20 minutes using silica film spin-on interlayer. ...... 234 Figure B10. A graph of heating rate of microwave joined partially stabilized zirconia with MaCorTM joined at 1020°C for 20 minutes using silica film spin-on interlayer. ................................................... 235 Figure B11. A graph of heating rate of microwave joined SiC platelet reinforced alumina with /MaCorTM joined at 1020°C for 20 minutes using silica film spin-on interlayer. ................................................... 236 Figure B12. A graph of heating rate of microwave joined alumina/zirconia composites with alumina/zirconia composites joined at 1450°C for 20 minutes using silica film spin-on interlayer. ............ 237 Figure B13. A graph of heating rate of microwave joined fully stabilized zirconia with fully stabilized zirconia joined at 1450°C for 20 minutes using silica film spin-on interlayer. ................................. 238 Figure C1. ESEM micrographs of conventionally-joined AKP 3O (alumina) joined at 1400°C for 20 minutes using sodium a1 ginate spin-on interlayer (a) lower magnification of joined A1203 and (b) higher magnification of joined A1203. .................................... 240 Figure C2. ESEM micrographs of microwave-joined AKP 30 (alumina) joined xiii a] 11W t‘? 111’ ltl'sA'Cl m (bl htght‘t 7T. llgttrt C3. tilt A mutt 1.: mtli "i l" mtetlher \l indeniittnn . Figure C4. SE.\l mm at lttltt (‘ tit- llgttrt CS- SEM mung? tor l0 mzhtte lS endertt in t: Figure C6 SE.\l mterngru. jt‘lnt‘d it lttjtt letteC'l. ESEM mien -: jomed .it 151!) tat lottcr m2: ol'jmnetl A3,] “MIX SEM mtetm tr.“ \nh. b at ltjttl C 31.3.7. til letter trim. Oljt‘tmeu SEC . at 1400°C for 20 minutes using sodium alginate spin-on interlayer (a) lower magnification of joined A1203 and (b) higher magnification of joined A1203. .................................... 241 Figure C3. (a) A micrograph of microwave-joined alumina with zirconia (3 mol % Y2O3) at 1500°C for 20 minutes using silica spin-on interlayer showing interface and (b) a crack induced byVikers indentation was deflected from ZrO2 to A1203 through interface. ......... 242 Figure C4. SEM micrographs of zirconia (3 mol % Y2O3) with MaCorTM joined at 1020°C for 20 minutes showing interface. ................................. 243 Figure C5. SEM micrograph of HAP with MaCorTM joined at 1020°C for 10 minutes. The mica platelet rainforcement in the MaCorTM is evident in the micrograph. .................................................... 244 Figure C6. SEM micrograph of SiC platelet reinforced alumina with MaCorTM joined at 1020°C for 10 minutes. ................................................ 245 Figure C7. ESEM micrographs of microwave-joined ZrO2 (3 mol % Y203) joined at 1500°C for 20 minutes using silica spin-on interlayer (a) lower magnification of joined ZrO2 and (b) higher magnification of joined A1203. .................................................................. 246 Figure C8. SEM micrographs of conventionally-joined SiC joined at 1000°C for 20 minutes using Blackglass spin-on interlayer (a) lower magnification of joined SiC and (b) higher magnification of joined SiC. ..................................................................... 247 xiv Ceramic mJiCi'ldi\ 't‘ rennet. ind prote. th " :1-ireof'rom putt tiff". I :rrgfrent. lhe hnitle rut Sigsnents. 0tet the ldxt Chit} of processing eer Icteiszeg teehmeue to t .r "“ 31 did-mt» 10min: ts ti. -i.-.:r.-s stipes 0t ceramic .\ techniques that 1th. .. 5km! ‘ ° - - ‘ :. .thts. 1111817an tr ..,"7;J _ h INTRODUCTION Ceramic materials have many attractive properties in terms of high temperature application and protection against chemical attack. Ceramic materials are typically produced from powders, thus, a subsequent sintering process is required to form a dense component. The brittle nature of ceramics leads to difficulties in obtaining net-shape components. Over the last decade, many researchers have attempted to reduce the difficulty of processing ceramic materials. For this reason, joining has been studied as a processing technique to form a desired shape without additional processing. The main idea of ceramic joining is to produce a complex shape from simpler subcomponents using various shapes of ceramics such as bars, discs, tubes, and rods. There are many ceramic joining techniques that reduce processing difficulty, save processing time, and reduce energy costs. In terms of the joining processing techniques, microwave energy has been utilized as the main heating source in this thesis. thlol This Stud.‘ 11! this thesis. .1 pw tenses spmen llliCTid}t - 3751:; including .il'ir: 5.2) Slzf‘ililt‘d Itrt‘timi. ‘~ llf; ind SIC here _ltl'.l‘tt. ire raked tor .1 range 0 without heitme. ll Classification of (era [15 he 181 th 0 demo. ‘3‘ .\ tex Ceramic mot: l *3 "'f: . a L 31.4. .Ot pretexsmv q. “37“” '- 7---i..1101[\“|“ lhc d" ' s. ‘1 Chi. tie/ceramic him :1"?le \ ,_. MES 01 . - . TIE-ha]: "'4 I ~ ““01“ ascnt. \t it? .3 V 1llttini n . g ec"mttuest lili 44‘ . utiltul: {0 TNT” :15...“ lrta—i. . ltk! ldk‘c IT; .‘h U . w - LJT‘M ”‘1! Goal of This Study In this thesis, 3 possible ceramic/ceramic joining technique was proposed using various spin-on interlayers to join oxide and non-oxide ceramic materials. Oxide ceramics including alumina, alumina-zirconia composites, partially stabilized zirconia, fully stabilized zirconia, MaCorTM and hydroxyapatite, and non-oxide ceramics including MgF2 and SiC were joined to produce a smooth and thin bond layer. Low external loads were applied for a range of 40 minutes to 60 minutes via either microwave heating or conventional heating. 1.1 Classification of Ceramic Joining In the last two decades, many researchers have developed various ceramic joining techniques. Ceramic materials are mainly produced in a powder form, thus, sintering is essential for processing ceramic materials. The ceramics joining process is very important to form the desired various shapes from simpler components. Ceramic/ceramic joining techniques are classified as using bonding agents including metal brazes, glass powder, slurry, or spin-on materials. Diffusion bonding is performed without a bond agent. Microwave joining is another joining technique using microwave energy to join ceramic/ceramic materials as a heating method. 1-2 Joining Techniques Using Interface It is difficult to form ceramics into complex shapes without making simpler sub- components. Interface materials, which act as “glue’.’ to join ceramic materials, have been widely used by many researchers [l-18]. Various types of interfaces have been "iii ill CCIJmlt‘ {Chill}; 1‘. Ll“ 3,1373%“. 13. ll]. 112711516). 3”] F151. htuzng the; 151-7'3 prtress. \"lf‘tt't’ .1 ] :i’pi'ee' to the tern, ‘t.-.' referral properties he: :iiio'ttizei of thine hrs I 9"? 33.55.0111 l‘tiulls 1n 1 .' «A ' ' ' ..»..~ biL 81.x; ‘1.\1\P\c: ”fl 1, l ., .11 stresses LilOU'lLi 131:3; 17161.1“ '3‘:- t'flav r‘ “1...... 61.116 \\ .15 UFC A o 1 .. :sze and \ if: v.3 ,3 -51 hrperiture [I]. V - Is utthtn the t. 1" . _..‘\_ ‘rfir‘l. “91.» ‘ “m-Ttlk malt“ ‘. MAT used in ceramic/ceramic joining such as metal brazes [1, 4, 8. 10, 11, 16-18], glass materials [7, 12, 14], glass slurry [2, 3, 5, 6, 9, 13], glass powder [15]. or spin-on materials [19, 20]. First, brazing (liquid-solid state joining) technique is currently the most typical joining process, since a lower temperature (melting temperature of brazes) is required compared to the temperatures required by other joining techniques. However, different mechanical‘properties between the substrate and interface are one of the considerable disadvantages of using brazes as an interface. A different CTE (Coefficient of Thermal Expansion) results in thermal stress between the substrate and bond-layer. For example, nickel filler braze was used in joining of ZrO2 with Si3N4. The different CTE between nickel and Si3N4 (Nickel: 13.6 x10'°K" and 313m; 3 x10’°K") induced the highest residual stresses around the Ni-Si3N4 interface [1]. Thus, thermal expansion differences between metal braze and ceramic substrate induced thermal stress upon cooling from the bonding temperature [2]. The brazing technique has disadvantages for joining ceramic/ceramic materials; (1) high costs, since a large-scale vacuum furnace is needed, (2) oxides within the bond-layer can be a problem during heating, (3) it is difficult to produce a hole or channel during brazing, and (4) the bond-layer is much thicker and could induce a thermal mismatch through the interface causing poor mechanical properties [16, 23]. The brazing is performed by filling braze filler metal between two ceramic substrates and then heating to the melting temperature with or without external pressure. A braze filler metal alloy is chosen depending upon wettability (Figure 1) between the substrate material and metal braze. Additional components can improve the wettability ‘13 11.271 rescaleho h- :lri‘}. 1nd Tl-Sn .tliut than. Also. 4111111; .. 11:211. ll], To: 5:111:11. tenth". 13.1713). \Vt‘liéi‘iilih .' "i . g? .0 , .l ‘ I -[ r..i..\1&\ ‘1?th mt“ ccr‘. "f'r. ifuwhv- w H " ' .1. we: 1 as C‘t‘t'." & .. I 9:51 : t t... :1. h the intertdt'1c.‘ leteen $01111 .tild \dT“ wi- ., "f5i1n1451‘1r8 y 1 1A A\. i '1 ..I .I' I 3111:». W: iihu 1. '—. ' {Intt't . \.. Lh'l 1.4" ’1' H.1L' l‘t ., . . — 116531 liki\,\~ [4]. Many researches have developed brazes depending upon the wettability between substrate material and braze filler metal such as Ag-Cu alloy brazes [4, 18], aluminum [16,17], and Ti-Sn alloy braze [10] since bond strength improves with improved wetting behavior. Also, adding a third element can reduce the melting temperature of braze filler metal [10, 11]. For brazing, contact angle and interfacial energy states are directly connected with wettability. Wettability has been evaluated from the sessile drop technique [21,22] where the contact angle between liquid and solid phase is measured (Figure 1). A spreading theory of wetting has been developed by Harkins [21]. 7.. = rev —m 0089 (l) where 75L is the interfacial energy between solid and liquid, ygv is the interfacial energy between solid and vapour, fly is the interfacial energy between liquid and vapour, and 0 is the contact angle. When ygL is larger than st the value of the contact angle 0 is greater than 90°, no spreading occurs (Figure 1(b)). On the other hand, “when YSL is lower than st (contact angle 0 < 90°), the solid surface will be covered by liquid (Figure l(c))” [21], since liquid in contact with a solid reduces the surface energy of the solid [21, 22]. Thus, in order to obtain wetting and spreading, the following equation applies: YSL < st - YLV C050 (2) Equation (1) can also be written for the case of brazing a metal to a ceramic y, = ym c039 + yr," (3) where yo," is the interfacial energy between ceramic and metal, ym is the surface energy of metal, and ye is the surface energy of the ceramic. ~- '. . l ., lt the lntemtli. t! I i 6 . [iii llltl not \j‘Ttdu 11. ”M“ ‘1'“ ‘l 1"!" \l' wafsklnuitk J.-.\ . 5 9:5 sitiier illul‘. W .m: 3‘ "w l ‘ ...\..tethiten.m After a... I 1 b. . 2 kn. HiSl . A", o, 9'. .11. .td?\;1ll'1'.‘:t‘tii t'sC . firfipna ' *KU-u IE ICLllnikl'Jc i‘ ‘2' R71?“ 1w.“ ~ 4.1 -151. {ml‘chlure \ . 1£,,__ , tyfi"...1 "‘5 5k Lnrfl‘ ya x 9.11 If the interfacial energy van is larger than the ceramic surface energy 7... then the liquid will not spread freely or flow into capillary gaps. In this case c050 will be negative and the contact angle will be greater than 90°. On the other hand, when the contact angle 0 is smaller than 90° and y,.,,, is smaller than ye, then wetting is possible on the ceramic surface. Using a glass powder or slurry are other techniques for ceramic/ceramic joining. The bond agent is selected upon the basis of having nearly the same properties of the substrate materials. After heating at a desirable temperature, interface materials pyrolize and then are transformed into amorphous ceramics. For high temperature applications, the brazing technique is limited due to using low melting temperature metal brazes. Brazing can be used in high temperature applications using glass ceramic as a bond agent due to high temperature endurance of the bond agent. Using glass ceramic has certain advantages over using metal brazes since (1) chemical compatibility with substrate material is generally assured and (2) some physical properties such as viscosity, flow properties, and melting characteristics of glasses can be controlled over a wide range [3]. For example, sialon was joined using a Y-sialon slurry [2] and Si3N4 was joined using a Y2O3-SiO2—Al2O3-Si3N4 slurry [5]. Using a glass powder or slurry as a bonding agent reduced differences in CTE and elastic modulus at higher temperatures [2, 5]. Also, a MAS filler (MgO (99%, 0.5 pm), A1203 (99.99%, 0.2 um), SiO2 (99.9%, 0.8 pm» has been calcined to produce a slurry with almost the same CTE as SiC substrate [12]. F.» .2 n: l_ 3;. 'I a I) _ I- «mutt tt' .- .fflrp... \‘ “1“] a1“?! mm” M 5163171] If}? Vapour Vapour [Aqukl Liqukl My 0 21 DP Mn 'hv Sohd Sohd (a) (b) IAqukl * Sofid (C) Figure 1. Schematic illustration of sessile drop formation: (a) principle of wetting, where the contact angle and interfacial energy are noted, (b) non-wetting drop, and (c) complete wetting [21]. 13 luinlng Techniquo Another cert-ml. 1. 9.4: lending technlqit‘ '1': the 21m factors for ,. 33.111011“? ‘1‘“ foe.“ belt een lnter'. .1. 11:; temperature e' 13.22607 01' the \uhc- itspie 051 tiltiusrt'lr. h. 213% p.» w - .u '.Ld\.tlL\n‘bl°nLiL'Li \ l at. m sttficttt‘d 1'“ ' :23: {24]. lt-w n " tinné 03 dtxslmtid’ an»? ... . . 3:: grid n1:- hontilr " l f A u‘\ x (I .151“ "' ....\-§mrn\tere lt‘ ‘.: "rfl" u r '- 1..)511I60i I] (11 I l 11.5 about (I) '} tt &. 1'. ‘13P; L . .. “9&3an 136701“ . \1 ”his-«t «AC-k ‘f‘erh . .eitmn - - 5 41 1 :CLifl . 1- “OT-Al and \l .3- x‘“ ' [inhu'fl \ .w._l- :- . LT? ' “til 1"?- “l 'Qf: in .. eleme- b ‘ 1hrcc p 1"- tth. . H , ‘3 1.3 Joining Techniques Without Using a Bond Agent Another ceramic/ceramic joining technique is diffusion bonding which is a solid state bonding technique. A bonding agent is not applied in this case. Heat and pressure are the main factors for using diffusion bonding. The mechanism of diffusion bonding can depend on the viscous flow of the glassy grain-boundary phase, which can be diffused between interface [24]. High temperature and pressure are required to join ceramic/ceramic materials since at least 60 % of the substrate melting temperature is needed for significant diffusion. An example of a diffusion bonding mechanism is shown in Figure 2. The substrate was RBSC (reaction-bonded silicon carbide). As pressure and temperature were applied, the interface was softened by the glassy phase due to free silicon migration across the interface [24]. Joining of dissimilar ceramics was reported by Sato et al. [26] using microwave energy and no bonding agents. Alumina and magnesia rods with the dimension of 5 mm X 5 mm X 25 mm were joined for temperature ranges of 1577°C to 1877°C using an applied pressure of 0.03 - 0.5 MPa for 2-10 minutes. The 90 MPa of joint strength, which was about 60 % of the MgO bending strength (150 MPa) and 70 % for that of MgO specimen bending strength (130 MPa) heat treated at 1877°C for 4 minutes, was observed after heating at 1877°C for 4 minutes under 5 MPa applied pressure. Due to diffusion of Al3+ and Mg2+ across the joining plane, MgA12O4 formed at the interface after joining. A crack ran along the interface between the MgAl2O4 phase and the MgO phase during the three point bend test due to lower bending strength than alumina (340 MPa). Force and 1 Heating Free /‘:\0066 silicon /E or—Si (a) Force and 1 Heating £3365 0)) Force and 1 Heating Decent (C) Figure 2. A schematic illustrating diffusion bonding of free silicon onto a butting surface. (a) Migration of free silicon onto surface of the RBSC, (b) As force (pressure) is applied, the silicon spreads across the RBSC surface, (0) Free silicon forms a continuous interlayer [24]. 57.),- lltlnt title 10 the 11‘. }: height liter hertz;- :itirence h nut ldCdl a. ll llicmllale Joining Alumnae ener ' tires ihsorh interntl ._ 131““) F77“ ‘ . .vu‘.‘.\' liurc.‘i.1lll(\l s 7‘ a r ..-'=.~ lnll. At rwn‘. :e 617') g. - .r \ u with... .15le {HUSH-m l] S . la. ‘ .‘Hao, ‘. 6‘ a: .nrn the nude him [656‘]? ‘11,.“ in Aki!\ Lhflsvl‘ t.‘ . . .stghhelm 1.17"” ltethetelittl ti ‘ iL'x Applied pressures (20 MPa and 21 MPa) induced a large creep deformation in the Si3N4 joint due to the high pressure [27, 29]. The specimen dimension changed about 1 % in height after heating at 1500°C with applied 21 MPa for 1 hour. More than a 1 % difference is not ideal accuracy to form net-shape joining [27]. 1.4 Microwave Joining Microwave energy has been used to process ceramic materials since ceramic materials absorb microwave energy and heating can be generated from the inside to the outside (Figure 3 (a)). Conventional heating is generated from the outside to the inside (Figure 3 (b)). At room temperature, alumina is nearly transparent to microwave energy, however, above roughly 1000°C, alumina absorbs microwave energy (Figure 4) and starts heating from the inside. Many researchers have demonstrated the advantages of using microwave energy in ceramic processing. A key consideration when using microwave energy in ceramic processing is the loss tangent (tan 5), defined as the ratio of the effective relative loss factor to the relative dielectric constant, as given in equation (4) [31]. E. e" or tandz—flf—=—.+ . E 8 we 8 r r f 0 (4) where 8” = dielectric loss factor, 80 = permittivity of free space, 8’fo = effective relative dielectric loss factor, 6 = total effective conductivity caused by conduction and displacement currents, (u = frequency (219‘), and 8’, 2 relative dielectric constant. External Heating Source Specimen - ~ 1 e .. I 27> < i A i Furnace Insulation (a) Intern a1 H eating Microwave port / \\ / V \ \\ ¥/' Specimen \ \wa/ / \ , . t e . \‘ KLV i i .12,“ // A Insulation / /-\ ":i/ \ / l” t ’\ A/ /¥"" / Metal shell (b) Figure 3. Patterns of heating in (a) conventional furnace and (b) microwave (adapted from Sutton [31] and Lee [48]). 10 R ”‘5‘ .4324 5 ~ . Po. ‘llcraCtll-ln - I ..W 'a _, U] n- i-mxl', 1 ill “ ‘T l Material Type Penetration TRANSPARENT Total (Low loss insulator) OPAQL'E None (Conductor) M ABSORBER Partial to Total (Lossy insulator) °l . \ o; 4. 3 ‘- ABSORBER Partial to Total 2 °\ °"%‘- 0’ 50 (Mixed Matrix = low loss insulator Fiber/particles/additives = absorbing materials Figure 4. Interaction of microwaves with materials at ambient temperature (adopted from Sutton [31] and Lee [48]). ll 0.010 5) 0.008 ngcnt ( t _O C) CD (35 F F F I "i 0.004 0.002 hens -_ i 1.0331 /\ ‘fi-w-o‘; , d“;~\nt ’\ Temperature (° C) 200 g 600 1000 1400 I I l ot presse 97 A) pure 0.010 — BN A1203 5; Pyrolytic Si,N4 ’E . g 0.008 —— f, 310, 9". . 8’0 0 006 _9606 (Glass - Ceramic) ’ ‘ 00 pure g ' ’ 2 3 3 0.004 4 0.002 Figure 5. Loss tangent (8 to 10 GHz) versus temperature [31]. 12 Comm: mater: e:per.:ure mes .zbm -. rediyrex‘uizmg In J Leas: to more effect: a ' ' ;-":?_’.e::ng at a frequent from 1 mm In 1- irastna! apphwtmn. “3. In general. {he loss :1? the temperature h.- "‘ 74301} Mb the ad. 'I “.524 tan 0 Ms 1N Tne potential .10.: .A I I A}: f‘3 .7 ‘ {f‘fi'fl - t ‘Mthm the m 3. . Jud unce hedt-m ’tn. . ":4 ~41...“ [0 ' jOm term ”10 ;.4':."~L "~k”. p, 45431613011“ "1 «1. C10"!- .u.'.\ ind Sum",1 [a l l“- 5‘ ....t..“~f,‘ R hen [ha . ‘ \ .‘K ‘5. V‘ . TV t-‘Ae yerarl .. l t ' 0 rTm-z. 3““ “ ' 1 “551.1? . .vq'a Ceramic materials are transparent to microwave radiation. However, as the temperature rises above a certain temperature (critical temperature, Tm), tan 5 rises rapidly, resulting in a greater absorption of the microwave energy by the materials, which leads to more effective heating. Generally. microwaves are electromagnetic waves oscillating at a frequency between 0.3 and 300 GHz which correspond to wavelengths ranging from 1 mm to 1m. Magnetrons (microwave power supplies) commonly used in industrial applications operate at 2.45 GHz [32]. In general, the loss tangent (tan 8) initially rises slowly with increasing temperature until the temperature has reached a critical temperature (Tm). The loss tangent rises more rapidly with the addition of compositional additives and impurites. Thus, 99% pure alumina tan 5 was less susceptable to heating than that of 92% or 97% pure alumina (Figure 5)[31, 32]. The potential advantages of using microwave energy are; (l) a cost reduction is possible since less energy is required, (2) uniform heating is possible since heating is generated within the material, (3) a material’s microstructure and properties can be improved since heating is more efficient within ceramic material, and (4) less time is required to join ceramic materials using microwave energy since less energy is required to reach a same temperature compared to conventional joining technique [31, 32, 33]. Clark and Sutton [31] described the microwave joining process as “joining is most effective when the ceramic sufficiently absorbs microwaves and the grain boundaries contain phases that soften and ‘glue’ the surfaces of adjacent materials”. As mentioned in Figure 4, ceramic materials can absorb microwave energy efficiently as the temperature increases. 13 Alumina ~pet‘zme tget: Lil temperatures : in; .1 single mode re.‘ trim; HS done lflx l0:~ wed more et't'tgzertt B:r:rteret 41. [W2 ‘.' 5.: '7 dammit. The jm‘ 1.3:: when heited .0 tlx' \. .-:.*.;:r.son.alumtn tux". h", 4: ~.‘ etc Alulfl Ol .06 sneetmer gee.) dliiflbultd. ll“ ‘ an} to heat the ma'e‘ Selecttte and is»? it: ..v Fe. alumina'Ztreur T‘jrig‘ . 4...; §\l. ‘ ~ -.n.e the mate" .41. ex- rz.‘x_ ‘ , Dtmg micro“ a‘ Fae ° ' lltt reduction or it» - {ATOW d\ 63 hd\ ; \ -‘- ,titned qt LI: \ . .. “BSCHU‘EK ‘ ~' U?- \ 5.,1‘de,‘ Alumina specimens with purity of 92 % to96 % were joined without a bonding agent at temperatures above 1750°C with 0.6 MPa applied pressure for 3 minutes in air using a single mode rectangular microwave cavity [33]. The most successful microwave joining was done by lower purity alumina, indicating that the microwave energy was absorbed more efficiently for lower purity alumina. Binner et al. [19] investigated microwave joining via diffusion bonding of 94 % and 85 % alumina. The joined specimens showed the almost invisible layer (very thin bond layer) when heated at the highest temperature (16000C) and pressure (0.25 MPa). In comparison, alumina joined at 1400°C alumina clearly showed a visible bond layer across the width of the specimen and regions of contact between the opposing faces were sparsely distributed. High purity alumina 99.8 ‘70 was not successfully joined due to the inability to heat the material to a sufficiently high temperature. Selective and fast heating using microwave energy suggested by Aravindan et al. [13]. For alumina/zirconia composites, temperature could reach at 1000°C within 2 minutes since the material absorbed microwave energy very quickly via the amorphous phase. During microwave joining zirconia transformed from tetragonal to the monoclinic phase. The reduction of hardness at the interface was due to Al-Zr inter-diffusion [l3]. Microwaves have been used for other various joining techniques. Katz et al. [34, 35] joined silicon carbide using three different microwave methods: ( 1) Reaction bonded SiC (RBSC) tube specimens with an outer diameter of 3.5 cm, an inner diameter of 2.54 Cm, and a length of 2.54 cm were joined with temperatures range of 1410°C, l420°C, 1465°C, 1515°C, and 1565°C using an applied load of 0.23 MPa in a 2.45 GHz rectangular multimode cavity. No adhesive was used between the specimens, making 14 its an eumple 0t mt; handing. '.tht.‘h regain. travail) done it lil‘ lt‘t7zdeEC SiC spe.'trr.. : tee arterial tn the 4 p :Frpistta dais. 3.54 . Man-l ABA” Jill‘x e ~ firsttmtelt W." C M , .9, . . 13.. . _._~.t mttrtm .1‘~ e T” ’\ ...r.;}e.'0l braze allux t art. Hemmer. the tr; :iiftrted SiC 731C Ct tt‘: ” the: amt3 a perhmerp 141:3 :0 SlC p0“ do iittl ,"7 l . l-Féftti‘l’ l“ hand [34]. T zine“ t ,.he mleTCM a‘\ 6 wheel- .tLq I] erred in a try- this an example of microwave diffusion bonding. Compared to conventional diffusion bonding, which requires 2000°C and a long time (1 hour), SiC/SiC joining was successfully done within 5 minutes at temperature between l420°C and 15150C. The joined SiC/SiC specimens showed equal or greater fracture toughness than that of the base material in the 4 point bend test. (2) Continuous fiber-reinforced SiC/SiC composites disks, 2.54 cm in diameter and approximately 0.32 cm thick, were joined with Cusin-l ABATM active brazing alloy (2.54 cm diameter and about 0.005 cm thick) at approximately 900°C for 30 minutes in 95% N2 and 25% H2 atmosphere using a single mode (TE103) microwave cavity. The specimens showed a homogenous metallic interlayer of braze alloy that wet the ceramic composites and spread into pores in the SiC matrix. However, the mechanical behavior was not reported. (3) Continuous fiber- reinforced SiC/SiC composites plates of dimension 1.27 cm X 1.27 cm X 0.0.32 cm were joined using a polymer precursor (allyhydridropolycarbosilane (AHPCS) which was added to SiC powder to form a slurry). Prior to joining, the specimens were squeezed together by hand [34]. The refractory insulator was heated to lOOOOC for one to 1.5 hours and then the microwave cavity was evacuated to 6X103 psi with argon. The specimen was then heated in a microwave cavity at 1100°C for 30 minutes. Occasional porosity was observed throughout the interface. However, the interface was invisible and smooth but mechanical testing was not reported [34]. Many researchers have used microwave power as a heating source due to its selective heating of particular materials since each ceramic material has different microwave absorption ability. Microwave energy offers the potential of a new 15 :r;;.lt;'.‘erimt; ttttrtt' .t '1 H ‘ ’7'sal‘tctvll‘lt'ai' .14.». rut ceramic/ceramic joining processes because of absorption characteristics in ceramic materials and fast heating ability. 16 3 [XPERNENTi 2.1 Materials 1x111 in Cttmmeretal p. 3:14:13} Sial‘llllt‘d In. terms for this. thes' .‘sed in this thesis. 11}ditl\}:palllt‘ t fiftfisifilt‘llt'tn of dam; ’1.-.~Q\ ‘ .. . .Jalvé 92.9588 due In? "1|ng 4" "h :‘Uk‘\\dpd'11€ hub; . 5 . 1 “A? '1 ’1. 1’1 I V ....t_..p...te 15Cldxxffi 111"" "l ‘ | -605} thermcal ."w 111 0 1, «I .- klfius 0i [1' 3r. . ~ .0. ltrettmat and . ‘ - -\1-JC 01’TM . a N ,1. it'uft‘tz I r4 t “\l_& Ill, ‘ 1" eMCnL'm :7.fo Iv” -\1_ W. 5111!“ ' , ~ 1‘11 ”Hr - ‘uii‘p 11,1 .12“ aft... ‘§t\ .‘ {j ‘ 'thfk‘lSltm 1" .— 31:3”; H‘kd,‘ ‘ I it \ PG “34:5ch 1 r U "r. Hi, and] UL \‘-"\‘ s,” r .‘sch'1‘e1 TWICE?“ “3 ”l the rr~ 2 EXPERIMENTAL PROCEDURE 2.1 Materials Used in This Thesis Commercial powders of alumina (Table 1), fully stabilized zirconia (Table 3), partially stabilized zirconia (Table 3), and hyroxyapitite (Table 2) were used to fabricate specimens for this thesis. As—received MaCorTM (Table 4) and MgF2 (Table 5) were also used in this thesis. Hydroxyapatite (HAP) is a known bio-ceramic used for replacement, repair, or reconstruction of damaged human bodies. Hydroxyapatite and HAP composites are good bioactive glasses due to their resemblance to human bone. When human blood flows over hydroxyapatite, hydroxyapatite acts like human bone. Polycrystalline hydroxyapatite is classified in bio-ceramics as bioactive fixation meaning that it can be attached by chemical bonding directly to bone [36]. Two kinds of zirconia powder were used: (1) partially stabilized zirconia (3 mol % Y203 zirconia) and (2) fully stabilized zirconia (8 mol % Y203 zirconia). MaCorTM, a flurophlogopite mica platelet reinforced glass ceramic in the system - SiOz-Ale3-MgO-KZO-F was also used for this thesis. The properties of MaCor TM include (1) excellent physical properties, (2) high dielectric strength, (3) good electrical resistivity, (4) non-porous and non-shrinking, and (5) machinable into complicated shapes and precision parts using ordinary metal working tools. MaCorTM is used as an electrical or thermal insulator, for structural components, in semi-conductor processing, and in electrical and opto-electronic equipment in industrial fields. Randomly oriented mica platelets in the microstructure of MaCorTM are the key to its machinability [43]. 17 1.03:1 Alumina t'l.\f :tef't'tetent [38]. and \. -~——". (1'. L01 (‘09.. SLYa.1 Aterige ~ Pt.’ 117‘“ 1.1 . \- i !‘ A. \ (JYLK n x. x“ 1:"; -‘ ~ I heettenstt} utter he- h. Trier-"trial C\Pdn.\lt in \ hint liturtg’x r Easel derottmtttt- siettzctent [ll] Dixnptton PM... «0415030er 8311130’2 1 ' *s.g. hi“ ’ 1 y r“ \ dnda‘\\‘l‘ Table l. Alumina (TM-DAR, Taimi Co. Japan) powder information. Purity [37], thermal coefficient [38], and Young’s moduli and thermal conductivity[39] Grade TM-DAR Lot No 2831 Crystal form a Surface area 13.6 mZ/g Average surface size 0.21 um Purity 99.99 % Impurity Na (3 ppm), K (1 ppm), Fe (6 ppm), Ca (lppm), Mg (1 ppm), and Si (6ppm) Green density 2.32 g/cm3 Fired density after heating at 1350°C for 1 3.96 g/cm3 hour Thermal expansion coefficient (25°C- 8.8 X 10'6 K'I lOOO°C) Young’s moduli 390 GPa Thermal conductive 30.0—35.0 W/m -°C Table 2. Hydroxyapatite powder material information [40] and thermal expansion coefficient [41] Description Calcium hydroxylapatite Ca10(OH)2(PO4)6, Powder, 99 % Specific analysis or property Test for Found Theoretical Ca 37.28 % 37.00 % Spectrographic analysis Element Result (wt %) A] < 0.01 Cr < 0.01 Fe < 0.01 Mg 0.08 Mn < 0.01 Na < 0.01 Si 0.08 Sr < 0.01 Thermal expansion coefficient 25°C - 400°C 14.5 x 10°K" 400°C - 800°C 15.5 x 10'6K" 18 135133 31416041 tr.'. /— llaenrls ['(l‘tmol ‘it [30:11“ (11 Ntlltttt ‘1! specific surface Are- \ 3:103: Strenzth R l Fracture TtlUgllIlC\\ R 111% mUSl H:Cress«H\' 11h lla- 19.111.1ch diam-"- 5:. 1 ~ ' I...» lntorrttatzon 01 3 "‘yr '1' 194435th \ lengerature Ltr Dtezecme Cary. Deleetne Stren- ‘ Pttt ”V '— "$0115 Rdlitl Table 3. Material information of two kinds of zirconia [42] Materials TZ-3 YS (Partially TZ-8 YS (Fully stabilized) stabilized) Y203 (mol %) 3 % 8 % Y203 (wt %) 5.15 i 0.20 13.3 i 0.60 A1203 (Wt (70) .<. 0.1 S 0.1 SiOz (wt %) S 0.02 S 0.02 FeOz (wt %) S 0.01 S 0.01 NaZO (wt %) S 0.04 0.12 Specific surface Area (mZ/g) 7 i 2 7 1r 2 Density (g/cm‘) 6.05 5.90 Bending Strength R.T. (MPa) 1200 300 Fracture Toughness R.T. 5.0 1.5 (MPa mos) Hardness (HV 10) 1250 1250 Mean Particle diameter (pm) 0.59 0.54 Table 4 Information of MaCorTM [43] (Thermal expansion coefficient and Poisson’s ratio [56]) Temperature Limit 1000° C Dielectric Constant 1Khz at 25° C 6.03 Dielectric Strength 40KV/mm DC Volume Resistivity at 25° C >1016 ohm-cm Thermal Conductivity at 25° C 1.46 W/m° C Thermal expansion coefficient 25-300°C 9.3 /K x 10° 25-600°C 11.4/K x 10° 25-800°C 12.6/K x 10° Density 2.52 g/cm3 Modulus of Elasticity at 25° C 64 GPa Porosity 0 Poisson's Ratio 0.29 19 Lie 5. Material 11111 1‘."‘.‘.-....; Other r15: llemiCor-duti ' Hzghttiteiehzfr ' d Alumino- 2 cm silicate end plate C D T Q Cylindrical 3cm Zirconia ZYC Casket Vietz) hole L View hole Alumino- silicate Alumino- '2 cm silicateend plate Figure 8. Illustration of refractory cavities used in this thesis. 26 nsrde micron .11 e . .. stelt. first. the = ‘1 - 11111111141111) .. one :11. ° and shut 1-1; petite the enter 1e; 1131121158356le 1 1131111 on the screen. 51212116} 11115 pu~hetl in. .1 siting nttmher 51W Afterplaetne . aten the Opitt‘al par Tn \ \ . ' .te .mputer Lt.llliIt‘l. 1, "l g heating. The n [1261mm “.1: set to (1p; it't‘rl v." ‘ 1.11.1.0 kitten “.18 lit 1‘ . . 4 Smtenng PFOCW inside microwave cavity. After power on the pyrometer, it was automatically calibrated itself. First, the # 9 key was pushed and then the number 1 key was pushed. The screen showed black body after pushing the down arrow key and the right arrow key was pushed one time and showed pyrometer on the screen. The enter key was then pushed. After pushing the enter key, the right arrow key was pushed one time and then the screen showed sense type. The down arrow key was pushed one time and sense factor was shown on the screen. Sense factor was pushed following the # keys 1572 and than the enter key was pushed. After setting sense factor, the upper arrow key was pushed until showing number 500.00. After placing specimen inside the microwave cavity, the cooling water was turned on then the optical pyrometer, the microwave power, and the computer were turned on. The computer controlled the short and the probe position to minimize reflected power during heating. The reflected power meters were turned on. The initial value of the short position was set to approximately between from 10 cm to 10.05 cm while the probe’s initial position was from about 0.2 cm to 0.3 cm. 2.5 Sintering Process Using Microwave Power A maximum of seven compact powder specimens can be sintered simultaneously using a 10.3 cm in diameter refractory casket (Figure 11). First, the microwave input power was set to 100 watts and the input power was increased in 100 watt increments was performed every 3 minutes before coupling. The coupling was heat-starting point that material inside the microwave casket started to absorb the microwave energy then started heating after increment of power about 300 watts. Monitor (Control Short & Probe) S“Pp'y . - .44 ' ' M Reflected power Detector Microwave Figure 9. Photograph of the microwave cavity and the microwave power supply used in this thesis. 28 One prehle." 253:: :he mtertm 1x 1' {reeling 111111.111) 1. newline heating :. V. 1- - . its). 111115. 1n\r'\lc1‘ - l . ’ . mm 01 dt‘t‘ICJsll‘ . charging the short Jl‘t gt'rertndteatnr in mi. .‘t’t‘lttmtghl cause at. 511: off immediately 1:3“de ustem. 1:01 tempcm L.‘ 30571031116 11 prese‘ "1.): . 1111 C. 100 watt the EM; - ~. .....r1ture n as aha: 1116 tempera: HT.“ . sup“ 4 » a, . Allfi‘.’ read.“ 11 x ‘0?“ ~.:r'\‘ '~‘ “er , is... - ““r‘id hold 11 1.. "”53”,? the 3110“ d‘ 91». ”34.41... — “411110. w. , t 1&1. )2)" "'sfi’l‘.‘ .. “*d\a‘_ * WI‘ One problem encountered when heating the 7.5 cm diameter refractory casket using the microwave was that the temperature tended to decrease after coupling. Coupling typically occurred in the temperature range of 900°C to 1000°C. The microwave heating rate cannot be controlled at temperatures less than 1000°C in this thesis. Thus, increasing input power in 100 watt increments every 3 minutes solves the problem of decreasing temperature after coupling. Every time the input power increased, changing the short and probe positions minimized the reflected power. If the reflected power indicator in microwave power controller reached 45, the reflected microwave power might cause arcing in the microwave cavity. In this case, the microwave must be shut off immediately. The reflected power above 45 could cause damage to the microwave system. For temperatures above lOOOOC, increases in microwave power were controlled in order to give a preselected heating rate. For example, at 9 minutes temperature was 1100°C, 100 watt increments causes increasing temperature. After 19 minutes, if temperature was about 1200°C, heating rate was 10°C/min. The temperature was measured by an optical pyrometer though a view port in microwave cavity (Figure 10). After reaching a desired sintering temperature, the temperature was considered to be constant if the temperature changed by less than i 2°C for 5 minutes. After a pre- determined hold time at the sintering temperature, decreasing the input power without changing the short and probe position did cooling. Table 7 shows sintering temperature, time, and heating rate for of the each powder material used in this thesis. The microwave-sintered specimens were fractured using a hammer. The sintered specimens 29 112:1 C311 ESure [Q S; 11ers. Microwave Cavity w all '/ A Refractory Caseket A A A A A View hole JYJYV I> Optical Pyrometer =+f Figure 10. Schematic of specimen temperature measurement technique used in this thesis. 30 - E 111337. Condition: tens. 31.116.11.11 Alumtna .‘lllt’lllr 1:11 llTCOI‘sld 511101” 11:1) 7.1 It‘tlll l d Alumina —11re0 CflIIiH’1\':IL‘\ 1 1". f’lg‘ - ~ “131116515. The 11‘ 5m.- ..; - «“u tfiglmfnb LIT: \ 1111161101 Tn] 3“ I - 131.1. POllslllllL’ t' Alumina Smell \'-0-. Table 7. Conditions of sintering for each of the commercial powder material used in this thesis. Material Mass Sinter Temp Hold time Heating rate Alumina 2 grams 1300°C 1 hour 10°C/min 3m°'% I203 3 grams 1375 °C 1 hour 10°C/min zrrconra 8m°l% I203 3 grams 1350°C 1 hour 10°C/min zrrconra Alumna ‘Z?r°°“'° 3 grams 1350 °C 1 hour 10°C/min composrtes Table 8. Polishing time and diamond grit size for each of the ceramic materials included in this thesis. The time corresponds to seven mounted specimens being polished. If fewer specimens are polished simultaneously the times are reduced. Material 35 um 17 pm 15 um 10 pm 6 ptm 1 pm Alumina 20 min 30 min 30 min 30 min 30 min 30 min 3mol% Y.203 20 min 30 min 30 min 30 min 30 min 30 min zrrconra 8mol% Y.203 20 min 30 min 30 min 30 min 30 min 30 min zrrconra A'“"“"° “z.”°°“‘° 20 min 30 min 30 min 30 min 30 min 30 min composrtes Silicon Nitride 5 min 10 min 10 min 10 min 10 min 10 min Silicon Carbide 5 min 10 min 10 min 10 min 10 min 10 min MaCorTM 2 min 10 min 10 min 10 min 10 min 10 min MgF2 N/A 10 min 10 min 10 min 10 min 10 min 00m; 111:6 312cm < 3-- Cylindrical 3 cm View Zirconia ZYC [1019\E’ 038k“ Seven batch \e compact powder t I W 1r \ m p\ U U U Figure 18. Schematic of the technique used to mechanically cut notches into the specimens. 47 €36 19 S; Filter 10 Smift‘. @ Monofilam - fishing line K Die Punch Compact Powder > After Making Notches Figure [9. Schematic of “stamping” notches into the green (unfired) powder compacts, prior to sintering. 48 112 )ltluntit 101nm {transmit l .1, Ld i1 ll\ll iMl.| lflCJEfllT‘lfl at , Silfilflifls \\ 2.12 Mounting and Polishing of Joined Specimen Joined specimens were cut into two or more pieces using a low speed diamond saw. Joined and cut specimens were then mounted in diayllyl-phthalate powder (Compression Mounting Powders, LECO Corporation, St. Joeph, MI) using a press with a 1 inch diameter rum (Figure 20). At least 3 of the joined and mounted specimens were required to polish using the automatic polisher. During polishing, 3 mounted specimens were balanced without inclining of a polishing holder. As mentioned in section 2.6, joined and mounted specimens were polished as using diamond grit size from 35 pm to 1 pm. After polishing, cleaning was performed in DI water using the ultra-sonic cleaner for 20 minutes. 2.13 Vickers indentation Testing of Joined Specimen The fracture toughness of joined specimens was estimated from the crack deflection at an interface using Vikers indentation (Figure 21). Indentation was applied away from the interface to near the indentation using Vikers indentation then applied more indentations to near interface as shown in Figure 21. Same load and load speed were applied onto joined specimen to observe the deflection of bond layer after joining compared with mother material. 2.14 SEM Observation of Bond-layer Joined and mounted specimens were coated with gold using a sputter coater, (Emscope SC 500) coating for 1 minute produced 7 nm gold coating. Carbon paint, 49 r-it ‘ -0. 3 Joined A cross-sectional Sectioned specimen cut through the specimen specimen ©E Diayll Thlate mounted material Mounted specimen Figure 20. Schematic illustration of mounting the specimen after joining and cutting. 50 l’lclel llldetltl VleCl‘S l -y - i are} . ,l lndentor (y EL Mounted specimen Figure 21. Schematic of Vikers indentation near the bond layer. 51 lable l l. specimens Fl» ‘§- ' T l ~‘e s“ ' 3??» Ml}: Table 11. Type of filters and detectors used to measure the IR transmittance of the MgF2 specimens. Wavelength range Types of filters Types of detectors 400-650nm Transparent filter 813-SL 650-840nm Red filter 813-SL 850-1650nm Black filter 800-IR {:3 33.3 .33 Optical power meter MEAL Dill] Eli] (NewportCo., Model 835) F” 33 333 3 , Wavelength Specimen selector Filter Condenser lens Detector Holder \ / \. '1? ~33 to Light source \ \ /' Condenser Monochromator ]ens (OrielCo.,Model77200) Figure 22. Schematic of the apparatus used for measuring the IR transmittance of MgF2 specimens. £5in The s f‘ i “-‘l sh ; ~i‘\.- . -ltt Y‘s. «11 T71 a” ‘r‘ which was carbon based black liquid (Ted Pella, Inc. Redding, CA), was applied before gold coating from edge of the joined specimen to end of the mounted side to the specimen to prevent charging during SEM observation. A JEOL 6400 SEM was used to examine bond layer. The best image resolution was obtained using accelerating voltage of 20 kV, a working distance 15 cm, and condenser lens intensity setting of 9. A set of notched and joined specimens was mounted to an aluminum stub using carbon tape in order to observe changes in notch dimensions before and after joining. The specimens mounted onto aluminum stub also were coated with gold for 1 minute. 2.15 Infrared Transmittance Measurement of MgF2 The transmittance of polished, coated, and heated Mngspecimens was measured for wavelength from 400 nm to 1650 nm using a spectrophotometer (Oriel Co, Model 77200) (Figure 22). Transmittance was first measured without the specimen in the spectraphotometer and then measured with the specimen in the spectrophotometer. Transmittance was calculated after measuring both without specimen and with specimen. Transmittance was calculated from dividing the measurement of without specimen data into measurement of with specimen data. Which was Transmittance measurement from with specimen. Transmittance measurement from without specimen Transparent filter transmitted UV light only in range of wavelength 400-650nm, red filter transmitted infrared only in range of wavelength 650-840nm, and black filter transmitted only infrared in range of 850-1650nm shown in Table 11. Two types of detectors were used to get correct data at each range. 53 ll ”5.“. ‘ Lnk 5 55 ill 'I'J I. hrs a .3 ;\L 3 ..‘-I. _ ’A r Cl: 15 ~l 2.16 Microwave cavity cleaning The microwave cavity was cleaned every each month. Volatile components of the spin-on coatings deposit on the water-cooled microwave cavity walls. The microwave cavity is cleaned using metal polish (No. 22 Metal and Chrome Polish, Blue Ribbon Products Division, Indianapolis, IN) and commercially pure alcohol. The microwave cavity is composed of the main cavity, the sliding short assembly, and the probe (Figure 23). Inside the microwave cavity, the short assembly and the probe are gold coated. Before removing either the short assembly or the probe assembly from microwave cavity, the short was positioned at 17 cm and the probe positioned at 0.0 cm to prevent possible damage while removing the short and probe parts. After setting both the short and the probe to the proper position, they were removed from the main microwave cavity using proper screwdriver. The short and the probe assembly each have finger stock (Figure 23, 24, and 25). Finger stock distributes microwave energy inside the microwave cavity during heating are very brittle. Thus, separating the short and the probe parts must be done carefully to avoid breaking the finger stock. The inside of the main microwave cavity is coated with gold and the bottom of the microwave cavity (which does not move) has finger stock (Figure 23). The cavity top plate is the sliding short, which has also finger stock, and is goal coated (Figure 24). Each of the separated parts (short, probe, and main microwave cavity) were cleaned by first applying metal polish to metal part and then cleaned by alcohol. Cotton swaps and cotton balls were used to clean the microwave cavity. Cotton swaps were often used inside the microwave cavity, the short assembly, and the probe part that can be 54 reach tings. reached with one’s hands. The cotton balls were used to clean the finger stock since the finger stock is very fragile. After cleaning the main microwave cavity, the short assembly, and the probe assembly, careful reassembly is required. In this case, the short was positioned at about 17 cm and the probe was positioned at 0.0 cm. After replacement, the short was positioned to about 10.2 cm and the probe was positioned at about 0.6 cm to prepare the cavity for its next use. 'Jl LII 3 Microwave - Cavity Figure 23. A view of the microwave cavity disassembled for cleaning. Shown are the main microwave cavity, the lanch probe, and the sliding short. 56 F343 34 Hither] Co Figure 24. Cavity top plate showing finger stock. The finger stock makes electrical and physical contact with the inner cavity wall. Thus, as the cavity top plate moves, the effective cavity length changes. 57 Eire 25. Figure 25. For the launch probe part of the probe assembly includes small fingers stack. 58 jMwM 3,1 Joint“?~ 0 JOHN .tBSTRif Mall) 1 spectrum (St prc'tect such difficult. sin exertion. amend tiln l. lNTROD Cerdn A Jllt‘ mate: ‘3w «.1 Based slumln 3. Results 3.1 Joining of Diamond Thin Film to Optical and IR Materials JOINING OF DIAMOND THIN FILM TO OPTICAL AND IR MATERIALS J. G. Lee, K. Y. Lee and E. D. Case Materials Science and Mechanics Department, Michigan State University East Lansing, MI 48824 ABSTRACT Many materials that are transparent in both the visible and infrared regions of the spectrum (such as ZnS and MgF2) are easily scratched. Hard coatings may help to protect such materials, but direct deposition of diamond films onto such substrates is difficult, since the materials tend to degrade at the temperatures required for diamond deposition. We discuss attempts to make MgF2/MgF2 joins, as well as efforts to bond diamond films to MgF2. 1. INTRODUCTION Ceramic/ceramic joining has been done successfully for a variety of structural ceramic materials, including alumina, SiC, and zirconia. For example, Case et al. has joined alumina, MacorR, and zirconia using spin-on layers [1-2]. In addition to structural J. G. Lee, K. Y. Lee and E. D. Case, “Joining of Diamond Thin Films to Optical and IR Materials," Ceramic Transactions, Volume 94, American Ceramic Society, Inc., Westerville, OH. pp. 509-520 (1998) 59 ennuinnnil penne.ienc thnnerhem hnnllinnh mhmmnd Thspn hunnndthln l 35.53th as a ‘- NERD ll'lhfieri Asre ififiedpnh Steed d1 amt. ceramics, optically-transmitting ceramics have been joined, usually at high joining pressures. Yen et al. [3] joined MgF2 specimens using a direct diffusion bonding technique at temperatures of 800°C and greater, using pressures of 17 MPa to 25 MPa. Yen et al. attributed a drop in the joined MgF2 specimens’ transmittance to grain growth in the polycrystalline MgF2 specimens. This paper discusses attempts to bond (1) MgF2 to MgF2 and (2) polycrystalline diamond thin films to MgF2. For successfully joined specimens, the transmittance is measured as a function of wavelength and the optical absorption coefficient, 0t, in order to compare the optical qualities of joined and unjoined specimens. 2. EXPERIMENTAL PROCEDURE 2. 1. Materials As received commercial MgF2 (Itran I, Eastman Kodak Company) is a hot- pressed polycrystalline material with a mean grain size of approximately 2.8um (Figure 26). Specimens were sectioned into roughly lcm X 1cm and 2mm thickness using a low speed diamond saw. After cutting, the specimens were polished by an automatic polisher (LECO Corporation) using the following series of diamond grit sizes 17, 10, 6, and 1pm. The specimens were polished on both sides to facilitate IR transmittance measurements before and after joining. The polished specimens were coated with a sodium silicate solution (Columbus Chemical Industries Inc.) using a high-speed spinner (Figure 27). After spinning at a rate of 2000 rpm to 5000 rpm, coating was uniform in thickness and smooth. 60 Figure 26. SEM image of the fracture surface of MgF2. 61 ll We 77 his 33' ubst IEQPJ l Spinningoontml Figure 27. Schematic showing the high-speed substrate spinner used in coating to the MgF2 substrates. 62 5355 “(a mean at 41!. hit it 5:063." Uhfdsr 0310 3 “(re p [56 ggd In this study, two silicate solutions were used as bonding agents. A commercial sodium silicate solution (Columbus Chemical Industries, Inc.) was used as one of the joining media. Although the sodium silicate was very viscous, after spinning on the hi gh-speed substrate spinner, the coatings were quite smooth. A second bonding agent that was used was an organically-based silica solution, which pyrolyses to an amorphous silica film upon curing at 200°C. However, the silica film was not successful in either the MgF2/MgF2 bonding or the diamond film/Mng bonding. The diamond films used in this study were between 3 to 4 microns thick, with a mean grain size of approximately one micron. The films were microwave plasma-deposited at 400°C to 500°C under 28 torr pressure onto (100) oriented single crystal silicon wafers that were 0.048 to 0.053 cm thick and 5.08 cm in diameter. The diamond-coated silicon specimens were fractured into 1 cm X 1 cm sections using a razor blade. Following ultrasonic cleaning in deionized water, the diamond-coated silicon specimens were placed onto MgF2 substrates that had been coated with sodium silicate solution. The specimens were placed such that the diamond film coating on the diamond-silicon specimens contacted the sodium silicate coating on the MgF2 substrates. Prior to joining, the bonding agents were spun onto the MgF2 substrates. Using a pipette, a few drops of either sodium silicate or the silica film was placed onto a polished MgF2 substrate and the film was spun between 2000 and 5000 rpm using a hi gh-speed substrate spinner (Figure 27). 2.2. Joining Procedure Coated specimens were heated in either a single mode microwave cavity (Sairem, Model MWPS 2000) or in a conventional electrical resistance furnace. For joining the 63 .llgf: to.) lint it using the 5 heights 01‘ 13. lR It All lR Co. \lttlel Prior tt stretiment it or tier ti hut not jun til-rte on the lll .‘iS‘POllI 13' Ptnilshed tIlPohshed 311’. In alu'ttlo 14» ' “33C abate. 1 3333335 it e Eittlmeng l'elt MgF2 to MgF2 using the silica film, the annealing temperatures ranged from 500°C to 1200°C with applied dead weight loads of 20 gm to 85 gm. The MgF2/MgF2 joining using the sodium silicate solution utilized temperatures of 500°C to 800°C and dead weights of 20 gm to 85 gm. 2.3. IR Transmittance Measurements All 1R transmittance measurements were performed using a monochromator (Oriel Co, Model 77200) over wavelength range of 800 nm to 1600 nm (Table 12). Prior to the transmittance measurements on the joined specimens, a series of experiments was done to determine the effect of (1) heating the polished but uncoated MgF2 at or near the temperature used for joining and (2) coating and heating the MgF2 substrates (but not joining them). In order to examine these effects, transmittance measurements were done on the MgF2 substrates having the following surface treatments: (1) As-polished specimens, (2) Polished specimens which were subsequently heated at 700°C in air, (2) Polished specimens that were coated (without joining) and then heated at 700°C in air. In addition to the three “comparison” surface treatment/heat treatment conditions listed above, polished specimens were coated, and then the coated surfaces of the two specimens were placed in contact. The specimens were then heated in an effort to join the specimens (either MgF2/MgF2 joining or diamond/Mng joining). figure 28. “fight l0,“ (l U .___Top Alumina SALI end plate a____ Zirconia ZYC Dead weights Joined Specimens Specimen setter .__ Bottom Alumina SALI end plate Figure 28. Schematic of the refractory casket used for microwave joining. The dead weight loading also is illustrated [2]. 65 “gun I! Tiltiiftttetni {- F 7‘ ‘ , 'C’ ‘ lllll u'l'l'l lLJLJ 7‘ {'1 WT F [iii Optical power meter (Newport Co., Model 835) Wavelength Specimen selector Holder \ l / \ t l l i 3 i ip<— - 3 1 Condenser lens Filter Detector \ / Condenser Monochromator Light source lens (Oriel Co., Model 77200) Figure 29. Schematic of the spectrophotometer used for the IR transmittance measurements. 66 jpmt’ oi the WW polisher. tht‘ 17.10.03” SE.\l Sfigrmt‘nS. - sectioned “in SEM eiumtl 3. RESl'lJ 3.1. Joining For 1 TM usrng contentions MMmh mlfitnttal'ej contentions! ”SPHERE 30). hlterost turned ilgP/ The coutllltl0 Th: uit lfmpéfdiUl Joined specimens were cross—sectioned using a low speed diamond saw. A portion of the sectioned specimen was mounted in thermosetting powder. Using an automatic polisher, the mounted specimens were polished using a series of diamond grit, including 17, 10, 6, and lum. SEM examination determined the bond-layer thickness in the sectioned specimens. Since ceramic materials are not electrically conductive materials. the sectioned and mounted specimens were coated with a 0.7 nm thick layer of gold prior to SEM examination. 3. RESULTS AND DISCUSSION 3.1. Joining MgF2 using sodium silicate solution For the sodium silicate bonding agent, the MgF2/MgF2 joining was successful at 700°C using both microwave and conventional heating. For both the microwave and conventional heating, dead weight loading was used during joining (Table 13). The mean bond layer thickness for the MgF2/MgF2 specimens was 10 microns for the microwave-joined specimens and 15 microns for the specimens joined in the conventional furnace. The microwave and the conventionally-joined MgF2/MgF25pecimens showed very different microstructures near the bond layer (Figure 30). Microstructural differences between the microwave—joined and the conventionally- joined MgF2/MgF2 specimens may be related to the nature of microwave heating itself. The coupling of a material with microwave energy is a function of both the material and the temperature of the material, but if the material does absorb microwave power, heat can be generated within the specimen [4,5]. In this case, the microstructural differences 67 Table l Table 12. Type of filters and detector for various wavelengths. Wavelength range Types of filters Types of detectors 400-650nm Transparent filter 813—SL 650-840nm Red filter 813-SL 850-1650nm Black filter 800-IR Table 13. The conditions of joining both microwave and conventional furnace. Heating method Tmax(°C) Hold time(min) Dead Heating rate weight(gm) (°C/min) Conventional 700°C 20min 85 gm 10°C/min Microwave 700°C 20min 60gm 45°C/min 68 til-gills 30 C01“ Clilll‘l reaction it tilt'lerence Future stu \lticrs ll Sitiill‘ltll Shipped d material, bond by; The I R L'L‘zflsn ‘0 the [R i 1 ”an int Trr‘ a" Lei-A53”, Lb GI\£U 3‘1 Cal MgF2 Us (Figure 30) may be a function of differing chemical reaction kinetics between the conventional and microwave heating (hence forming differing sodium silicate/MgF2 reaction layers). Altematively, the microstructural differences may be linked to differences in microwave and conventional heating at and near the interfacial region. Future studies should address these points. A rough estimate of the bond-layer toughness was obtained by placing a 98N Vickers indentation crack near the bond-layer of a sodium silicate bonded MgF2/ MgF2 specimen (Figure 31). For the microwave joined MgF2, the Vickers indentation crack stopped at bond-layer, indicating the bond-layer material is not as strong as the matrix material. Similar results were obtained for Vickers indentation cracks placed near the bond layer for conventionally-joined specimens. The IR transmittance of the polished and heated (but not coated) specimens and the IR transmittance of the polished coated, and heated (but not joined) were nearly identical to the IR transmittance of the polished specimens (Figure 32). Thus, (1) heating without coating, (2) coating, heating and not joining gave an IR transmittance that was very similar to the as-polished specimens, and therefore heating and coating alone do not seem to significantly affect the IR transmittance of the MgF2 specimens. The microwave joined MgF2/MgF2 shows a considerably higher IR transmittance than the conventionally joined MgF2/MgF2 specimens (Figure 33). The differences in transmittance lead to differences in the calculated optical absorption coefficients, as will be discussed in Section 3.2 of this paper. 3.2. Calculation of Absorption Factor for microwave and conventionally joined MgF2 using sodium silicate solution 69 ll) rim ; Mng E F Bond layer 4‘ (b) Figure 30. SEM micrographs of both the microwave and the conventionally joined MgF2 showing the bond-layer. (a) Microwave joined MgF2 (joining at 700°C for 20min with 60gm weight loading), (b) Conventional joined MgF2 (joining at 700°C for 20min with 85gm weight loading). 70 “Sure SQlill‘il’l \ \ Vicker's indentation crack Figure 31. SEM image of a Mngl MgF2 specimen joined using the sodium silicate solution. The specimen was joined by microwave heating at 700°C for 20min with a 60gm dead weight loading. 71 TU tll ltltt‘tttlt the t 1113‘ used. it liltll‘dlltlll. (t ll ll “heft R l\ Gptlt’il ind, lite ratio I it normal To determine the optical absorption factor, or, for both the conventionally and the microwave joined MgFgl MgF2 specimens, the Lambert-Bouger law [6] 17- = 1, em (1) was used, where IT is intensity of transmitted radiation, his the intensity of the incident radiation, (1 is absorption factor, and x is the specimen thickness. If the optical reflection at each interface is taken into account, 17/11 is given by 17/1, = (1-R)"'e'“‘=T (2) where R is the reflectivity for normal incidence angles. R is a function of the optical index of reflection, n, and m is the number of interfaces for the specimen. The ratio IT/I, is the transmittance, T. For a planar slab, m = 2. At normal incidence, R, is given by ("—1)2 R: 3 (n+1)2 ( ) Solving for optical absorption factor, or, gives 1 r =——l ————— 4 a xn(l-R)m U The optical properties of bond-layer are unknown, but we estimated a by assuming a zero thickness bond-layer in equation (2) for the joined MgF2. For Mng/ MgF2 specimens, m is set equal to 3 (Figure 34). An optical absorption factor, a, was calculated from equation (4) using an optical index of refraction, n, of 1.3749 at a wavelength 1500nm [7]. The calculated optical absorption coefficients, a, were similar for the polished (unjoined) and for the microwave-joined 44“ ”1.4:. r-‘ F’illlre 3 (0131‘ sntl. 1.0 - i . * EOllfhsd Conventional * .__.__._. a . 8 0-3 e 6 Heating :: . ------ Coated g 0.6 ,. —-—- Jomed 0- E t m .. = 0.4 .1" a i L: F-t 0.2: / 0.0 A I L ' I l i l i i l i l I l L 800 900 1000 1100 1200 1300 1400 1500 1600 1700 Wavelength (nm) (a) 1.0 ' l l T. l T i i ' l T l l 1 ~ _ POhShed Microwave 8 0-8 r —_ Heated Heating = . ------ Coated E m _ r: 0.4 cu :- 0.0 L 1 1 i 1 I 1 l J A 1 I l l i i 800 900 1000 1100 1200 1300 1400 1500 1600 1700 Wavelength (nm) (b) Figure 32. Transmittance for both microwave and conventionally heated MgF2. (a) Conventionally-heated MgF2 and Mngl MgF2 joined and (b) Microwave-heated MgF2 and Mngl MgF2 joins. 73 33. Cut it are ” ~WO~V~L A: 3.1-v a . F- 09 1.0 . l . . l . l ' 1 1 - . r a T f /-_-____ ”—l—_ _ o \ Q 031' —9— MW—Jorned ‘ - E 1] —<—>~— CV—Joined j § 0.6~ 7”“ ’ “ ”‘ r” .- E 2 0.4~ -1 a h E" 0.2:» _ 0.0‘L1L11124L1111111 800 900 1000 1100 1200 1300 1400 1500 1600 1700 Wavelength (nm) Figure 33. Comparison of transmittance for microwave and conventionally joined MgF2(From Figure'32). 74 Figure . Sptt‘tme V 111 Figure 34. As schematic showing the reflections at the various interfaces of a two-layer specimen (which gives m = 3). Table 14. Calculation of the optical absorption factor, a. Processing Measured T R x(mm) a(mm") Polished 0.703 0.025 2.029i‘0.002 0.149 MW-joined 0.486 0.025 4.1341‘0009 0.156 CV-joined 0.229 0.025 4209:0012 0.342 75 and iht {ON ‘3" Indugc mqiddl the mi} N EEC center a £3 < H ranem mile 1 mic-mm mrrons themes; micron r specimens (0.149mm'l and 0.156mm", respectively Table 14). The a values for the polished (unjoined) and the microwave-joined specimens implied that the polished MgF2 and the microwave-joined MgF2 had a similar optical quality. The higher a for conventionally-joined MgF2 indicated optical losses resulting from IR scattering [8,9] induced by crystallographic phases formed in and near the bond region (Figure 30). The scattering of electromagnetic radiation depends on a number of factors, including (1) the mismatch in optical indices of refraction between the scattering center and the matrix material, and the (2) the relative size of the scattering center, compared to the wavelength of the incident radiation [9, 10]. If we let a = characteristic size of the scattering center and A = the wavelength of the incident light, then for scattering is significant for 0.1 < Na < 10, with a maximum in scattering at about Ma = 1. As an example of how effectively scattering can reduce the transmitted light intensity in a ceramic, consider the scattering of visible light by pores in a ceramic [10]. At the wavelength of red light (700 nm or 0.7 micron), a 3 percent volume-fraction porosity consisting of pores with a diameter of 2 microns reduces the transmittance to about 0.01 % compared to the transmittance for a theoretically-dense material [10]. When the pores have a diameter of 0.7 micron, then 0.7 micron radiation will be reduced by a similar amount for a volume fraction porosity of only one-percent [10]. From Figure 30, we see that the characteristic dimension of the scattering centers (second phase particles) is roughly a few microns. Thus, second phases that are several micron diameter should scatter the incident radiation used in this study (a wavelength range from 880 nm to 1600 nm, or equivalently 0.88 micron to 1.6 micron), since Na should be very roughly in the range from about 0.1 to 0.5. However, a detailed scattering study for non-spherical particles that are not uniform in size is extremely complex 76 {5.101, ' themes 33. Di; the 51hr rpm ant adtddt 0f fiou; maniC§ “Will 111 flow [8-10]. Therefore, attempts to extract further information from the transmittance curves (Figures 32 and 33) will be a topic of future study. 3.3. Diamond joining on MgF2 using sodium silicate solution Diamond/MgF2 joining was attempted for both the sodium silicate solution and for the silica film. For the sodium silicate bonding agent, the films were spun between 3000 rpm and 5000 rpm from for 20 seconds. Then, using a heating rate of 100 C per minute and a dead weight loading of 85 gm, the diamond/MgF2 specimens were heated in a atmosphere of flowing nitrogen at maximum temperatures of 5000C to 8000C for hold times of 20 minutes. However, the joining was not successful at any of these conditions. In separate experiments involving single-slab specimens of magnesium fluoride, it was found that even in flowing nitrogen, the specimens were discolored at temperatures above 800°C, presumably due to point defects that evolve during heating. Due to the degradation of the magnesium fluoride's optical properties, no joining attempts were made at temperatures higher than 800°C. In addition to the sodium silicate solution, the silica film was used to attempt both MgF2/MgF2 bonding and the diamond film/MgF2 bonding. The specimens were heated by a conventional furnace at maximum temperatures between 5000C and IZOOOC in an atmosphere of flowing nitrogen. Dead weight loads ranged from 20 gm to 85 gm. The MgF2/MgF2 bonding occurred only at for a maximum anneal temperature of lZOOOC, but at that temperature (despite the flowing nitrogen atmosphere) the surface of the MgF2 specimen was milky-colored (likely due to oxidation). The resulting transmittance of the MgF2 specimen was severely degraded by the hi gh-temperature reaction. 77 ha bet aROH '\ 41* t0mul 4. C0 smut: ¥?hfl mECl'O‘t the IR Ptcz'm acorn bfilll €€ fikkd Rm 1. rr Had the joining been successful, the silicon substrate (on which the diamond film has been microwave-plasma deposited) would have been etched away using a nitric acid or a KOH etching solution. The transmittance of the specimen, without the silicon substrate, could then have been measured. 4. CONCLUSIONS The MgF2/MgF2 specimens were successfully joined using: (1) spun-on sodium silicate interlayers, (2) both conventional and microwave heating and (3) low externally applied pressures. The microstructure of the bonded region was quite different for the microwave and the conventionally bonded MgF2/MgF2 materials (Figure 30). In addition, the IR transmittance of the microwave-bonded specimens, as determined from the optical absorption factor, on, was similar in optical quality to the polished but unjoined MgF2 specimens (Table 14). In contrast, the on for the conventionally-joined MgF2/MgF2 indicates a considerably degraded optical transmittance (Table 14). The difference in optical quality between the microwave-joined specimens and the conventionally—joined specimens may be related to IR scattering induced by second phases [8,9] in the bond region (Figure 30). REFERENCES 1. KY. Lee and ED. Case, “Microwave Joining and Repair of Ceramics And Ceramic Composites,” Ceramic Engineering and Science Proceedings, 21‘" Annual Cocoa Beach Conference and Exposition on Composites, Advanced Ceramics, Materials and Structure, Cocoa Beach, Florida, V18 543-550, 1997. 2. KN. Seiber, K.Y. Lee, and ED. Case, “Microwave and Conventional Joining of Ceramic Composites Using Spin-On Materials,” Proceeding of the 12:}: Annual Technical Conference Dearbom, MI, 941-949, 1997. 3. T.F. Yen, Y.H. Chang, D.L. Yu and ES. Yen, “Diffusion Bonding of MgF2 Optical Ceramics,” Material Science and Engineering, A147 309-321, 1991. 78 4.llL lllr‘ :ll 5.1..1! .llu'lr‘i 6 ill lmm l. “(If Hugh 8 P.[k 9. CF. PM» erV.[ 3nd! 10. ML. Santella, “A review of Techniques for Joining Advanced Ceramics,” Journal of the American Ceramic Society Bulletin, 71[6] 947-953 (1992). I. Ahmad and R. Silberglitt, “Joining Ceramics Using Microwave Energy,” Materials Research Society Proceedings, 314, 119-130, 1993. I.W. Donald and P.W. Mcmillan, “Review Infrared Transmitting Materials,” Journal ofMaterials Science, 13, 1151-1176 (1978). . Moses “Refractive Index of Optical Materials in the Infrared Region”; pp7-16, Hughes Aircraft Company, Culver City, CA 1970. . P. Debye, HR. Anderson, and H. Brumberger, Journal of Apply Physics., 28: 679, 1957. CF. Boren and DR. Huffman, Chaper 3 in AbsoLption and Scattering Light by Small Particles, John Wiley and Sons, New York, 1983. W. D. Kingery, H. K. Bowen, and D. R. Uhlmann, Introduction to Ceramics, 2nd Edition, pp 674-677, John Wiley & Sons, New York, NY (1976) 79 ll}. .le can CWT: LA “(15; 0} ll]: \Cfill'.’ MR1 3.2 Microwave Joining of Particulate Composites MICROWAVE JOINH\1G OF PARTICULATE COMPOSITES J. G. Lee and E. D. Case Materials Science and Mechanics Michigan State University East Lansing, MI 48824 ABSTRACT Using various spin—on materials with submicron initial coating thickness, oxide ceramics have been joined using microwave heating. Four different ceramic material combinations were joined in this study, where either one or both of the materials in a given pair was a particulate ceramic composite. The microstructure of the bond region was examined using Scanning Electron Microscopy. This study builds upon earlier work by the authors and co—workers, in which a variety of non—composite polycrystalline ceramics were joined. INTRODUCTION Recently, there has been considerable activity in bonding ceramics with metals [1- 5], bonding ceramics with other ceramics [6 - 10] and bonding ceramics with polymers [ll -12]. A number of researchers have used brazing techniques to join metals with ceramics such as silicon nitride [l], sialon [2], molybdenum disilicide [3], and aluminum nitride [4]. In addition, ceramics have been joined to ceramics using brazing, where a metallic interlayer is used to join the ceramic components. However, if ceramics are joined via J. G. Lee and E. D. Case, “Microwave Joining of Particulate Composites”, Advances in Ceramic Matrix Composites V, Ceramic Transactions Volume 103. American Ceramic Society, Inc., Westerville, OH, pp. 57 1-581 (2000) 80 hazing iron. comm: BACK' liming lump 313mm militia 3011; ll brazing the final bond thickness can be 40 to 50 microns thick or more [5]. In contrast, work done by the current authors and co-workers [6 - 10] has focused on minimizing the bond area thickness using spin-on interlayers. The joining work has included joining of the following particulate ceramics; (1) alumina/zirconia- 3 mol% yttria, (2) SiC platelet reinforced alumina/glass ceramic, (3) hydroxyapatite/glass ceramic, and (4) zirconia - 3 mol% yttria/glass ceramic, where the glass ceramic used was MaCorTM, a commercial glass ceramic reinforced by mica platelets. BACKGROUND Microwave heating of ceramic materials gives efficient, volumetric, and rapid heating [13-15]. The authors and co-workers have used microwave heating to join a number of polycrystalline ceramic materials, including the following pairs: alumina with alumina, zirconia with zirconia, MaCorTM with MaCorTM, hydroxyapatite with hydroxyapatite, and magnesium fluorite with magnesium fluorite [6 - 10]. In ceramic- cerarnic joining in these previous studies [6 - 10] produced high-quality joins. For example, the interfaces of the alumina-alurnina joins were relatively tough, as indicated by the fact by Vickers indentation cracks placed near the joined interface did not deflect as they transited the interface [6]. For the joined IR transmitting material magnesium fluoride, the infrared transmittance was especially unchanged by the presence of the interface for microwave joining [8]. However, the joining in the earlier studies [6 - 10] was limited to like ceramics, and none of the joined ceramics were composites. This study extends the previous work to include the joining of particulate-reinforced ceramic materials. 81 EXP! ml [filer mm] mdlt‘ Pll‘ll using mitts in a 3 'ili‘hl; ‘ 3 3 ”)0 P's UCU Wags, EXPERIMENTAL PROCEDURE The ceramics joined in this study included two polycrystalline materials, namely (a) ZrOz -3 mol % YZO3 and (b) hydroxyapatite (HAP) and three particulate-reinforced ceramic composites, including (a) Ale3/ZrOz particulate composites, (b) a mica platelet reinforced glass ceramic (MaCorTM) and (c) SiC platelet reinforced alumina. Of these materials, the ZrOz -3 mol % Y203, the hydroxyapatite (HAP), and the A1203/Zr02 particulate composites were sintered as part of this study, with all sintering being done using commercial powders. The sintering, as described below, was done either using a microwave cavity or a conventional tube furnace. The mica platelet reinforced glass ceramic (MaCorTM) and SiC platelet reinforced alumina were commercial materials which were received in billet form. Prior to the sintering that was performed as part of this study, all specimens were hard die pressed at 32 MPa in a uniaxial die, resulting in disc—shaped specimens with green dimensions of approximately 2.0 cm in diameter and 2.0 mm thick. Seven powder compact specimens of the zirconia - 3 mol % yttria powders (TZ- 3YS, Tosoh Ceramic Division, Bound Brook, New Jersey ) were sintered simultaneously in a 2.45 GHz single mode microwave cavity at 1375°C for 1 hour. The densities of sintered zirconia were about 97 % of the theoretical density, as measured using Archimedes method. For the 85 wt % alumina (TMDAR, Taimi Chemicals Co. LTD)/ 15 wt % zirconia - 3 mol % yttria powders (TZ-3YS, Tosoh Ceramic Division, Bound Brook, New Jersey ) particulate composites, the powders were prepared by milling the alumina and zirconia powders together for 24 hours using alumina grinding media in a plastic ball mill to produce uniform alumina/zirconia powder mixture. The alumina/zirconia compact powders were microwave sintered at 1350°C for 1 hour using a heating rate of approximately 10°C/min. Unlike the alumina/zirconia composites and the zirconia specimens included in this study, the calcium hydroxyapatite (Ca10(OH)3(PO4)6) powder (CeracTM Incorporated Specialty Inorganics) was sintered in a conventional furnace at 1300°C for 11 hours. The heating and cooling rate was approximately IOOC/minute. The as-received billets of MaCorTM (Corning Code 9658, a flurophlogopite mica platelet reinforced glass ceramic) and billets of the as-received 80 vol% A1203 / 20 vol % SiC platelet composites (Max Tech, Inc, Lansing MI) were cut using a low speed diamond saw. The final specimen dimensions were approximately 1 cm x 1 cm x 0.1 cm for the MaCorTM and about 1 cm x 1 cm x 0.5 cm for the 80 vol% A1203/ 20 vol % SiC platelet composites. All specimens used in this study were polished using an automatic polisher at 1200 rpm with a series of diamond paste grit of size ranging from 35 pm to 1 pm. After polishing, each of the specimens were cleaned first with acetone and then cleaned again in deionized water using an ultrasonic cleaner. After polishing and cleaning the specimens, the silica coating was applied to the specimens. An organic liquid (SilicaFilm, Emulsitone Company, Whippany, New Jersey) was utilized for the spin-on interlayer. Several drops of silica film on the specimens were deposited on the specimen surface using a pipette. The coatings were spun at 3000 rpm for 20 seconds, then coated specimens were cured in a conventional furnace at 200°C for 20 minutes. When heated, the SilicaFilm is pyrolyzed to an amorphous silica coating. 83 lit t‘ur will [ht For nm [hr .lerOt' For letting elector “Std d't “AR 0‘ Smirllg ill to and Q ‘ACCU' ‘m (11; . ll ‘ dame The cured silica coating is thin and uniform (Figure 35a), where the film thickness varies with the spin rate (Figure 35b). For the coated materials in this study, the cured silica coating was about 100 to 200 nm thick. Figure 35 a is a SEM micrograph of a 130 nm thick silica coating on one of the MaCorTM specimens used in this study. For all of the joining work included in this paper, the specimens were joined by heating in a 2.45 GHz single-mode microwave resonant cavity using the TM] H electromagnetic mode. A cylindrical zirconia refractory specimens enclosure (casket) was used during joining (Figure 36a). The refractory casket consisted of a top and bottom plate of an aluminosilicate fiber board (SALI, Zircoa) and a hollow yttria-partially stabilized zirconia cylinder (ZYC, Zircoa). The refractory casket serves two purposes: (1) to serve as a microwave susceptor to aid in heating the specimens at low temperatures and (2) to provide thermal insulation. Within the casket, the specimens were placed on a aluminosilicate setter (Figure 36b) and alumina dead weights of mass ranging between 20 gram to 50 gram were used to apply a normal load during joining (Figure 36b). The specimen temperature was measured via an optical pyrometer system (Accufrber Optical Fiber Thermometer, Model 10, Luxtron Co., Beaverton, OR). A 0.5 cm diameter circular hole in the zirconia-cylinder section of the casket (Figure 36b) allowed the optical pyrometer to be sighted on the specimen. The joining temperature was controlled by input power where the maximum input power ranged from about 400 watts to 900 watts. The heating rate was approximately 40°C/min for each experimental I'UI'I. After joining, the joined specimens were sectioned using a low speed diamond 84 Silica film —> .=> .6 Q \l . l Film Thickness(micron) 9 u 9 N 1000 2000 siloo Spin Rate (rpm) c u i— (b) Figure 35. (a) SEM micrograph of a cured silica film on a MaCorTM substrate, (b) as a function of spin rate for cured silica coatings on MaCorTM [after 6] 85 Alum_irra ‘ “ SALI Zirco_n_ia ZYC p66 . i " . Dead weight <_— Specimen'ts (b) i Figure 36. (a) Photograph of the zirconia/aluminosilicate refractory casket during specimen joining, (b) Photograph of the bottom SALI plate of the refractory casket with the specimen, specimen setter and dead weights in place. 86 it‘d Silt lei t4; Cm mitt saw to allow SEM observation of the bond region. The specimens were mounted in dially pthlate and then polished with a series of diamond grit. The surfaces were made sufficiently conductive for SEM examination by sputtering a 7 nm thick coating of gold onto the specimen surfaces. In conjunction with the SEM analysis, x-ray line scans and elemental mapping was performed. RESULTS AND DISCUSSION For the pairs of ceramic materials joined, either one or both of the materials joined was a particulate reinforced ceramic material. The ceramic materials that were successfully joined include: (1) alumina-zirconia composites joined with alumina- zirconia composites, (2) MaCorTM joined with ZrOz, (3) HAP joined with MaCorTM, and (4) SiC platelet reinforced alumina with MaCorTM. Of these materials, the particulate composites include the alumina-zirconia composites, MaCorTM, and the SiC platelet reinforced alumina. The alumina/zirconia particulate composite specimens were joined using microwave heating at 1400°C, 1450°C, and 1500°C for 20 minutes. During joining, a deadweight of approximately 50 grams was applied via sintered alumina disks placed on top of the specimen. As viewed in the SEM micrographs, no bond phase is apparent, and if a bond phase exists, it must be less and one urn thick (Figure 37). Quasi-elliptical pores are occasionally observed at the interface (Figure 37). MaCorTM was joined with zirconia - 3 mol % yttria upon heating at 1020°C for 20 minutes using a 20 gram deadweight loading. In contrast to the specimens of alumina/zirconia composite joined with alumina/zirconia composite (Figure 37), a bond 87 liter trill: mat 1050 liaise layer is visible at the MaCorTM /zirconia interface, where the bond region is on the order of 0.5 - 1 micron thick (Figure 38). Numerous micron-scale pores were visible along the interface region between the MaCorTM /zirconia interface. Hydroxyapatite was successfully joined with MaCorTM at 1020°C for 10 minutes using a 20 gram deadweight (Figure 39). As was the case with the alumina/zirconia composites specimens joined with alumina/zirconia composites (Figure 37), a bond phase at the interface was not apparent in the SEM (Figure 39). In Figure 39, the mica platelet reinforcement in the MaCorTM is evident to the right of the indicated interface. MaCorTM has a relatively low use temperature material, with a vendor-specified maximum use temperature of IOOOOC. The attempted joining of HAP with MaCorTM at 1050°C and 1070°C using a 50 gram deadweight failed since the MaCorTM melted under those conditions, when in contact with the HAP. Polycrystalline alumina reinforced with 20 vol% SiC platelets (Max Tech Inc., Lansing, MI) was joined with MaCorTM by heating at 1020°C for 20 minutes using a deadweight loading of about 20 grams. As was the case with joining HAP with MaCorTM, attempts at joining the alumina/SiC platelet composite with MaCorTM at 1050°C failed since the MaCorTM partially melted. After joining, a 10 micron-thick bond layer was observed at MaCorTM-alumina/SiC platelet interfaces (Figure 40). Since the thickness of the original silica coating layer (before joining) was roughly 130 nm, the 10 micron thick bond layer thickness likely represents a reaction zone between the SiC platelet reinforced alumina and the MaCorTM. Thus, only one of the four ceramic/ceramic material combinations included in this study formed a significant reaction zone during the joining process. 88 Figure millUI / — Interface Figure 37. SEM micrographs of alumina/zirconia composites joined at 1450°C for 20 minutes showing interface. 89 M 3C or Bond g layer 1 run Figure 38. SEM micrographs of zirconia (3 mol % Y203) with MaCorTM joined at 1020°C for 20 minutes showing interface. 90 M aC‘or <— Interface Figure 39. SEM micrograph of HAP with MaCorTM joined at 1020°C for 10 minutes. The mica platelet rainforcement in the MaCorTM is evident in the micrograph. 9| Alest/SiC ; ‘ Bond layer Figure 40. SEM micrograph of SiC platelet reinforced alumina with MaCorTM joined at 1020°C for 10 minutes. 92 she Cllllt the 1 C0.) .9413, :l ,- .. :40.) lle. . 11,5de Wt“; m, if" V’llfd \ inl’r . “5 lit l. X-ray line profiling of the composition of the bond region and the near-bond region was performed for each of the four ceramic material pairs joined in this study. However, for each of the joins (except the MaCorTM-alumina/SiC platelet joined interface, Figure 40) no “bond layer” could be identified, which was to be expected since the radius of the interaction volume [16] is typically large enough that the compositional information from the x-ray line profile is averaged over subsurface volumes that are several microns in radius. Thus the composition differences on the size scale of the sub- micron bond region (if present) would be impossible to detect with the x-ray line profiling. However, the preliminary x-ray line scan measurements of the bond region in the specimens consisting of alumina/SiC platelet composite joined with MaCorTM did show evidence of the reaction zone (for example, the concentration of aluminum ions was enhanced near the MaCorTM/reaction zone interface). Also, an elemental map indicated the possible presence of Mg and K rich precipitates in the reaction zone. CONCLUSIONS In this study, we joined the following particulate ceramics: (1) alumina/zirconia particulate composites with alumina/zirconia composites (2) a mica platelet reinforced glass ceramic (MaCorTM) with zirconia -3mol % yttria, (3) MaCorTM with polycrystalline hydroxyapatite and (4) SiC platelet reinforced alumina with MaCorTM. Except for the inter‘face was relatively free of porosity. For the alumina/zirconia particulate composites S13>eCimens in which the alumina/SiC platelet was bonded to MaCorTM, the region near the Joined with alumina/zirconia composites and the MaCorTM joined with polycrystalline hydroxyapatite, no bond layer was apparent on the SEM micrographs. 93 ill: En clc S In future work, Vickers indentation will be used to aid in estimating the nature of the residual stresses near the join. In addition, Transmission Electron Microscopy (TEM) will be performed in order to further analyze the interface region of the joined specimens. For the reaction layer alumina/SiC platelet composite - MaCorTM specimens, additional x-ray profiling of the bond layer compositions will be performed in order to better characterize the nature of the interface regions. ACKNOWLEDGMENTS The authors acknowledge the financial support of the Composite Materials and Structures Center and the Electronic Surface and Properties of Materials Center, College of Engineering, Michigan State University. The authors also acknowledge the use of the electron microscopy facilities at Michigan State University’s Center for Electron Optics. REFERENCES l . G. Chaumat, B. Drevet, and L. Vernier, "Reactive brazing study of silicon nitride to a metal joining", J. European Ceram. Society, 17[15-16]: 1925 - 1927 (1997). 2. A. P. Xian, "Joining of sialon ceramics by Sn-5 at% Ti based ternary active soders", J. Materials Science, 32[23]: 6387 - 6393 (1997). 3. S. D. Conzonne, D. P. Butt, A. H. Bartlett, "Joining of MoSiz to 316L stainless steel", J. Mater. SCI, 32[13]: 3369-3374 (1997). 4- D. Huh and D. H. Kim, "Joining AlN to Cu using In-base active brazing fillers", J. Materials Res., 12[4]: 1048 - 1055 (1997). 5- I... Esposito, A. Bellosi, S. Guicciardi, G. de Portu, "Solid state bonding of A1203 with Cu, Ni, and Fe: characteristics and properties", J. Mater. Sci., 33[7]: 1827 - 1836 (1998). 6- K. N. Seiber, K. Y. Lee, and E. D. Case, "Microwave and Conventional Joining of Ceramics using Spin-on Materials,“ pp. 941-949 in Proceedings of the 12th Annual Advanced Composites Conference, Technomic Publishing Co., Lancaster, PA (1997). 94 7. 10. ll. 12. 13. 14. 15. 16. E. D. Case, K. Y. Lee, and J. G. Lee, “Joining of Polycrystalline Ceramics and Ceramic Composites Using Microwave Heating,” pp. 17 - 20 in Proceedings of the 33rd lntemational Microwave Power Symposium, lntemational Power Institute, Manassas, VA (1998). E. D. Case, J. G. Lee, and K. Y. Lee, “Joining of Optical and Infrared Materials Using Spin-On Layers”, pp. 17 - 26 in Joining of Advanced and Specialty Materials, M. Singh, J. E. Indacochea, and D. Hauser, eds., ASM lntemational, Materials Park, OH (1998). E. D. Case, K. Y. Lee, J. G. Lee, and T. Hoepfner, “Geometrical Stability of Holes and Channels During Joining of Ceramics and Ceramic Composites,” pp. 27 - 34 in Joining of Advanced and Specialty Materials, M. Singh, J. E. Indacochea, and D. Hauser, eds., ASM lntemational, Materials Park, OH (1998). J. G. Lee, K. Y. Lee and E. D. Case, “Joining of Diamond Thin Films to Optical and IR Materials,” pp. 509 - 520 in Ceramic Transactions, Volume 94, American Ceramic Society, Inc., Westerville, OH (1998). C. Mukherjee, E. D. Case and A. Y. Lee, “Thin, Protective Silica Layers on Polymeric Materials”, Accepted for publication, Ceramic Eng. and Sci. Proc., Volume 20(1999). C. Mukherjee, E. D. Case, K. Y. Lee, and A. Lee, “Silica Coatings on BMI Polymeric Substrates,” submitted, Journal of Materials Science. K. Y. Lee and E. D. Case, “Steady-State Temperature of Microwave-Heated Refractories as a Function of Microwave Power and Refractory Geometry,” Accepted for publication, Materials Science and Engineering. K. Y. Lee and E. D. Case, “Microwave Sintering of Alumina Matrix Zirconia Composites Using a Single-Mode Microwave Cavity,” J. Mater. Sci. Lett., 201-203 (1999). K. Y. Lee, P. H. Dearhouse, and E. D. Case, “Microwave Sintering of Alumina Using Four Different Single-Cavity Modes,” Journal of Materials Synthesis and Processing, 7[3] Page numbers not yet determined (1999). P. J. Grundy and G. A. Jones, pp. 26 - 36 in Electron Microscopy in the Study of Materials, Crane Russak, Publishers, New York, NY (1976). 95 3.3 Geometrical Stability of Holes and Channels During Joining of Ceramics and Ceramic Composites Geometrical Stability of Holes and Channels During Joining of Ceramics and Ceramic Composites E. D. Case, K. Y. Lee, J. G. Lee, and T. Hoepfner Materials Science and Mechanics Department, Michigan State University East Lansing, MI 48824 Abstract An ultrasonic mill has been used to machine precise channels and holes in ceramic components that are subsequently joined via microwave heating. Microscopic inspection of the channels then indicates the stability of the channels during the microwave joining process. The information gained from joining such specimens can be crucial in the development of techniques for joining ceramics with complex geometries, including channels for fluid flow in intricate components that are joined from simpler ceramic subcomponents. E. D. Case, K. Y. Lee, J. G. Lee, and T. Hoepfner, “Geometrical Stability of Holes and Channels During Joining of Ceramics and Ceramic Composites,” Joining of Advanced and Specialty Materials, M. Singh, J. E. Indacochea, and D. Hauser, eds., ASM International, Materials Park, OH. pp. 27 — 34 (1998) 96 Introduction This paper deals with joining densified ceramic bodies that include channels or holes cut into one or more of the subcomponents. The need for such a technique is related to the nature of ceramic processing, which often involves (1) a difficulty in processing components of complex geometry and (2) the considerable shrinkage that is typical during densification. This paper discusses and compares work done by Case and co-workers on joining polycrystalline alumina and MaCorTM [1, 2] with more recent work in joining polycrystalline zirconia and hydroxyapatite. Background Ceramic Processing: Difficulty in Forming Complex Shapes Ceramic components are typically processed using a powder processing technique, that is, ceramic powders are formed into a shape, then the powders are densified at temperatures corresponding to homologous temperatures, TH, of 0.6 or greater. TH may be defined as the ratio TAMBIENT/T Mp, where the ambient temperature, TAMB 15m, and the melting point temperature, TMp, are both expressed in units of degrees Kelvin. In some processing methods, the shape forming and densification steps are combined (such as in hot-pressing or hot-isostatic pressing), but typically the shape- forming and densification steps are performed in sequential fashion [3]. The shape-forrning techniques often used in industry often involve either a pressing operation or slip casting. Pressing powders in a die usually required that the processed shaped be relatively simple disk or plates [3]. Rods of constant cross-section 97 may be extruded from a die [3]. Slip casting allows a greater range of geometry, but still the shapes produced are limited and the introduction of precise channels or holes within the part is problematic. Components With Complex Geometry: Fabricated From Ceramic “tapes” A technique that does offer more flexibility in terms of component geometry is that of building-up a complex shape for tape-casting ribbons. The unfired tape-cast materials are typically quite thin (on the order of one millimeter or less in thickness), and when cast with a high fraction of a plastic binder phase, the unfired tape-cast elements can be cut and compacted into a shape of relatively complex outer geometry. Organic binders are widely used in the ceramics industry. Organic binders, typically at the level of several volume percent, are added to increase the green (unfired strength) of a variety of components pressed from ceramic powders [3]. In the electronics industry, large volumes of organic binders and solvents are added to ceramic powders resulting in "tapes" that are flexible in the green state. Cutting and hole punching operations then are relatively straightforward in the flexible tapes, enabling the fabrication of multilayer ceramic capacitors and piezoelectrics. In addition, 50 volume percent or more of binder and lubricants are added to ceramic powders for injection molding of ceramic components. Difficulties with binder burnout in ceramic tapes. The benefits of adding organic binders to ceramic powders are at least partially offset by several disadvantages. The problems inherent to having a large volume fraction of binder in a ceramic compact focus on binder burnout, where the burnout process (1) can be very time consuming, (2) binder burnout can leave chemical residues that lead to 98 flaws and defects in the final sintered ceramic, and (3) the high shrinkage associated with binder burnout can lead to mechanical stresses that cause cracking. When the volume fraction of the binder phase is high and/or the ceramic components are thick (such as is the case for electronic components from multilayers of binder—laden ceramics) then the time required for binder burnout can be very long. For example, in multilayer ceramic piezoelectrics which may consist of 150 layers or more of ceramic “tape” [4] or mutilayer ceramic capacitors [5], delaminations (cracks) between the layers can occur at extremely low heating rates. Heating rates on the order of 0.015°C per minute, corresponding to a total binder burnout time of 250 hours (approximately 1.5 weeks) may still be rapid enough to induce delamination between layers of a multilayer ceramic piezoelectric component [4]. Binder burnout treatments can require up to several days for injection-molded ceramic components [6]. In addition to the long times required for burnout of multi-layered, binder-laden ceramic powders, binders also can leave a carbon or sulfur residue [7, 8], which has been shown to persist even after elevated (1500°C) heat treatments. Many researchers have linked binder residues with defects in the final, sintered ceramic bodies [9-11]. The high shrinkage inherent to the binder burnout process induces mechanical stresses which in turn can lead to flaws and cracking in the processed ceramics [12, 13]. It is worth noting that densification for a ceramic compact containing binders is essentially a two step process in which (1) the binder is first removed from the compact and (2) the densification of the ceramic powders themselves takes place. That is, after binder burnout is complete, the sintered powders must still densify. At the point that the binder is removed (typically at temperatures of a few hundred degrees Celsius), the 99 remaining ceramic powders have a volume fraction porosity of roughly 50 percent. During densification of the ceramic powders, the component thus must undergo considerable addition shrinkage upon sintering. When the fraction of binder is high enough to allow the green (unfired) tape cast material to plastically deform and therefore form a complex part by building it up layer by layer, then binder burnout can be a problem. As discussed above, the binder burnout problems can include: (I) the binder burnout step can be very lengthy for parts composed of many layers, (2) chemical residues from binder burnout can lead to defects in the final sintered part, and (3) cracks can form in the part as a result of the very high shrinkages that are inherent to the binder burnout process. Thus, the plasticity afforded to green (unfired) ceramics by virtue of their high binder concentrations can come at with a high cost in terms of processing difficulties. In addition, the act of compacting layer upon layer to build up the component from tape cast materials might deform precise channels or holes within the ceramic body, if such channels or holes were desired. One alternative way to fabricate ceramics of complex geometric shape is to joined simpler subcomponents of densified ceramics, in order to more the final component. This can have benefits in terms of quality control (the detection of flaws) and in terms of allowing one to include precisely machined channels and holes into the ceramic component. Ceramic/Ceramic Joining The joining of ceramic materials can help circumvent some of the difficulties associated with processing components of complex geometry. The fabrication of 100 complex parts can be accomplished by the joining of simpler subcomponents. In addition to avoiding the difficulties associated with the burnout of large volume fractions of a binder phase, a potential benefit of joining simple ceramic subcomponents is that the detection of flaws in simple subcomponents is easier than the detection of flawed components of complex shape. Thus, if a flaw is discovered in a subcomponent, it may be discarded before it is included in the final part. Often, joining is performed with the assistance of a flux that is placed between the ceramic pieces that are to be joined. Different joining techniques are distinguished in part by the (l) magnitude of the externally applied pressure and (2) the joining temperatures used. Diffusion bonding, for example, uses very high stresses and temperatures to join ceramics, such that the joining is accomplished under conditions conducive to creep in that material [14, 15]. In this paper, we use relatively low externally applied loads to join a variety of specimens, but in each instance we use a spin- on interlayer to assist in joining. Experimental Procedure Materials Used The materials joined in this study include polycrystalline alumina, hydroxyapatite, zirconia, and a mica-platelet reinforced glass ceramic. The alumina, hydroxyapatite, and the zirconia were sintered from commercial powders, while the glass ceramic was a commercial material, MaCorTM (Corning Code 9658). The alumina specimens were microwave-sintered from Sumotomo AKP 50 powders using a single-mode microwave cavity, described in the next section. The 101 AKPSO powders have a vendor-specified initial particle size of 0.23 microns and a purity of 99.95 percent. Alumina is used in a wide variety of electronic and structural applications of ceramics, due to its high hardness, good resistance to chemical attack, and low electrical resistivity. The calcium hydroxyapatite powder (HAP) used in this study (Cerac Inc., Specialty Inorganics, Milwaukee, WI, Item #C-2071-1, Lot#Xl6907) had a nominal purity (as reported by Cerac) of “typically 99% pure”. Calcium hydroxyapatite is an “bioactive” ceramic material, such that when exposed to blood or to a simulated biological fluid (SBF), HAP promotes the formation of bone on its surfaces [16]. HAP coatings have been used to coat biological implant materials. The HAP coatings can act to reduce corrosion of the metallic substrate materials, since the corrosion can lead to the release of toxic ions into the body [16, 17]. The MaCorTM specimens were cut from as-received billets of the material. Macor is a machineable glass ceramic material of the composition SiOz-A12O3-MgO-KzO-F. The machinability of the material stems from the flurophogopite mica platelets that are randomly dispersed in the material. Macor is used in a variety of electronic substrate applications, due to its good dielectric properties and its ability to be precisely machined by metal-working tools. The zirconia specimens were formed from 3-mol percent yttria partially- stabilized zirconia powders (TZ-3Y Grade zirconia powders, Tosoh Ceramics Division, Bound Brook, New Jersey) with a vendor-specified specific surface area of approximately 16 mz/gram. The standard vendor chemical assay shows that the major impurities in the zirconia powders are alumina, silica, iron oxide, and soda, with weight 102 percentages of less than 0.1, 0.02, 0.01, and 0.04, respectively. The initial particle size is roughly in the 0.1 micron range. Zirconia is used in a wide variety of ceramic applications. including as grinding media, high-temperature insulation, and in electronic components. Two materials were used as bonding agents in this study. “Silicafilm” (Emulsitone Company, Whippany, New Jersey) is an organically-based silicate, which upon heating at relatively low temperatures (say, 2000C) yields an amorphous silica film. The second bonding agent used was a sodium silicate solution Specimen Preparation Microwave and Conventional Sintering of the Specimens The alumina, hydroxyapatite, and zirconia powders were each dry pressed in a uniaxial, double-acting die at approximately 32 MPa. For the alumina, the nominal mass of each specimen was about 2 grams, with an as-pressed diameter of about 2 cm and an as-pressed thickness of about 2 mm. The alumina and zirconia specimens were then sintered in a single-mode microwave cavity (described below) while the HAP specimens were sintered in a conventional, radiant energy furnace (also described below). The HAP specimens were fired at maximum 1300°C for 30-60 minutes in a conventional tube furnace (MRL Thermtec, with an Eurotherm Controller and SiC heating elements), at a ramp rate of 10C/ minute. For the alumina and zirconia, the maximum temperatures ranged from about 1500 to 16000C for the alumina, while the zirconia and the HAP powders were sintered at about 1450 and 13000C, respectively. For both the microwave sintering and the microwave joining, the temperature was measured by an optical pyrometer (Accufiber Optical Fiber Thermometer, Model 10, Luxtron Co., Beaverton, OR). Cutting and coating the specimens The as-received MacorTM billets were approximately 7.8 cm X 7.8 cm X 0.18 cm. These billets were cut into 1 cm X 1 cm X 0.18 cm specimens using a low-speed diamond saw. Following sintering, the sintered HAP specimens were sectioned by a low- speed diamond saw into 12-15 mm square billets which were about 3-5 mm thick. The alumina and zirconia specimens were disk-shaped in the as-sintered form, and were not sectioned prior to coating, notching, and joining. The microstructures of the as-sintered specimens of alumina, zirconia, and the hydroxyapatite were characterized by Scanning Electron Microscope (SEM) micrographs of fracture surfaces (Figure 41). The fracture surfaces of the alumina and zirconia show relatively equiaxed grains with low porosity (Figure 41). However, the HAP material has a volume fraction porosity of about 0.10 and exhibits considerable transgranular failure on the fracture surface.(Figure 41) In addition, the fracture section of the MaCorTM material clearly shows the randomly oriented mica phase (Figure 41). All specimens were polished prior to joining using an automated polishing machine (Leco Corporation, St. Joseph, MI). Prior to beginning the polishing procedure, the edges of the specimens were slightly beveled to reduce wear on the polishing cloth. After beveling, three or more specimens were simultaneously mounted onto an aluminum disk, using a thermal plastic to hold the specimens in place. Polishing was done using a series of diamond grit ranging from 25 microns to 1 micron. 104 After polishing the specimens were coated with one of the bonding agents described above. A few drops of the coating was applied to the specimen using a pipette, and then the specimen was spun on a substrate spinnner to distribute the coating material over the surface of the material to be joined. The spinning rates varied from about 500 to 5000 rpm. After spinning, the Silicafilm coatings were cured in air, in a conventional furnace, using curing temperatures of 2000C and curing times of 20 minutes. For the PCS and the sodium silicate bonding agents, the film was not cured prior to bonding. Notching the Specimens Following the polishing, coating, (and in some cases, curing) steps, the specimens were then notched using a ultrasonic vibratory mill (Sonic Mill. Albuquerque, NM). The principal of operation of the vibratory mill is that a tool is mechanically vibrated at ultrasonic frequencies (say between about 1 - 10 kHz), and the vibrating tool in turn causes vibration in a boron nitride slurry which is placed at the tip of the tool. The cutting is then accomplished by the boron nitride itself, rather than the tool. The cutting tool used for many of the notches was a single-edge razor blade that had been mounted via silver soder on a “stub” supplied by the vendor (Sonic Mill) that allows one to fabricate cutting tools of a variety of shapes. In addition to the “razor-blade tool”, some wider notches were placed in polycrystalline alumina specimens using a tool made from a cold-rolled steel piece which also had been attached by silver soder to a stub. (The razor blade tool was capable of cutting notches of widths ranging from roughly 200 to 330 microns, while notches cut using the cold-rolled steel tool were on the order of 900 microns across). 105 Following the notching procedure using the sonic mill, a 3 to 5 mm section of each specimen was cut from the notched end of the specimen using a low-speed diamond saw (Figure 42). The section of the notched specimen was used as the reference for the dimensions of the notch prior to the joining procedure. Both the notched specimen and the reference piece were examined in the SEM to determine the geometrical stability of the notch duringjoining. Microwave and Conventional Processing A 2000 Watt, 2.45 GHz power supply (Sairem, Model MW PS 2000, Wavemat Inc., Plymouth, MI) was used to heat a 17.78 cm diameter cylindrical single-mode cavity (CMPR-250, Wavemat Inc., Plymouth, MI, Figure 43) [18, 19]. As the specimen’s temperature increased, the dielectric constants (both the real and the imaginary parts) of the heated ceramics changed, and thus the microwave system was tuned continuously to re-establish the resonant condition in the cavity. Cavity tuning entailed separate but coordinated movements of the cavity short position and the launch probe position via stepper motors that were interfaced with a computer [18, 19]. The specimens were joined using a TM111 cavity mode, with an initial input power of 100 Watts. The power was incremented by 50 Watts approximately every three minutes until the processing temperature was reached. During joining, the specimens were placed in an refractory enclosure (called a “Casket”). The casket (Figure 44) consisted of a hollow zirconia cylinder (ZYC, Zircar, Inc.) and two disc-shaped end caps made of an aluminosilicate refractory board (SALI, Zircar, Inc.) Before the specimens were loaded into the zirconia casket, from zero to 60 106 grams of dead weight were placed on the specimens. (The dead weights consisted of disc of microwave-sintered Sumitomo alumina, which each weighed about 20 grams and were about 4.1 cm in diameter and 4 mm thick). The specimens were loaded into the casket near its cylinder axis, and the casket was in turn centered along the cylinder axis of the microwave cavity. The conventionally joined specimens were joined in one of two radiant-heat furnaces. The MaCorTM specimens were joined in an electrical box-type furnace (CM, Inc.) which employed MoSi2 heating elements. The specimens were placed on an alumina setter, and an alumina crucible was inverted and placed over the specimen. Results The alumina and the MaCorTM were joined well using the silica spin-on layer, and notches cut into the specimens were quite stable during the joining process. Micrographs of the specimens obtained via the Scanning Electron Microscope (SEM) indicated that the width and depth of the channels machined into the alumina and MaCoRTM The alumina and the MaCorTM were joined well using the silica spin-on layer, and notches cut into the specimens were quite stable during the joining process. For notches widths in the range of about 200 to 330 microns, and for large notches about 900 microns in width, the “after joining dimensions” were within about 2 to 5 percent of the “before joining” dimensions. For the zirconia specimens, the geometrical stability of the notches has not yet been quantified, since the zirconia specimens (microwave sintered from 3 mol% Tosoh TZ-3Y Grade zirconia powders), however the authors believe that using 8 mol% zirconia 107 powders and/or a different bond phase might assist in the joining of the zirconia. While the polycrystalline HAP ceramics did not join using the silica spin-on interlayers, the HAP did join when the sodium silicate was used. The zirconia specimens did not join well at 14500C using microwave heating of the spin-on silica film, thus the stability of the notches can not be assessed that this time. Although the zirconia specimens were joined , the specimens broke apart upon cutting. Using the silica spin-on interlayers, the polycrystalline HAP ceramics did not join using either microwave or conventional heating at 12000C. After the joining attempt using the silica solution and both heating modes (conventional and microwave) the HAP specimens showed no indication of bonding whatsoever. However, when the sodium silicate solution was used as the bonding agent in place of the silica film, the HAP did bond at 12500C in air in the microwave cavity (Figure 45). The silica spin-on interlayers, the HAP did join when the sodium silicate was used. For the notch shown in Figure 45, for example, the notch width and depth before joining was about 166 microns and 322 microns, receptively. After joining, the width and depth was 169 and 319 microns, respectively. Thus, the joining process induced only a about a two-percent change in width and a one-percent change in depth, compared to the “before-joining state. Additional notches in the joined HAP showed similar results, with changes in individual notch dimensions uniformly within about 4-percent or less. Summary and Conclusions The alumina and the MaCorTM were joined well using the silica spin-on layer, and notches cut into the specimens were quite stable during the joining process. For the 108 zirconia specimens, the geometrical stability of the notches has not yet been quantified, since the zirconia specimens (microwave sintered from 3 mol% Tosoh TZ-3Y Grade zirconia powders), however the authors believe that using 8 mol% zirconia powders and/or a different bond phase might assist in the joining of the zirconia. While the polycrystalline HAP ceramics did not join using the silica spin-on interlayers, the HAP did join when the sodium silicate was used. In addition, the stability of the notches during the HAP was excellent, as was seen for alumina and MaCorTM specimens also. These results mean that precise channels can be cut into polycrystalline ceramics, and the dimensions of the channels can be maintained very well during joining. Acknowledgments The authors acknowledge the financial support of the Michigan Research Excellence Fund provided through the Electronic and Surface Properties of Materials Center, Michigan State University and by the Composite Structures and Materials Center. The authors also acknowledge the use of the Scanning Electron Microscope facilities at the Center for Electron Optics, Michigan State University. 109 (C) (d) Figure 41. SEM micrographs of the fracture surfaces for the four materials included in this study, namely (a) alumina, (b) MaCorTM, (c) zirconia, and (d) hydroxyapatite. 110 Top , co ted specrm en '/ > Joined specimen Razor blade with notch tool attached to sonic-millTM BOIIOéIl . coate specrmen Specimen ' with notch /—> — —} -’ — —- Specimen cut along this line Figure 42. Procedure for sectioning the reference specimen for notch geometry in the “pre-joined” state (after [1]). 111 Directional Power meter Cylindrical Single-mode coupler l microwave cavrty m 0 o o o Specimen Magnetron Circulator \. - + - — \ / — Dummy load fit? 0 . O ofo = Casket L" E E E: .5- Optical _ pyrometer Power supply controller Motor controller ———-——--= _ for probe L—J “ 1 "ti—— 1 I l. » . —- T”: — lllllllllg I :41; accufiber model 10 [33 33232322333223] , l l” Optical Fiber 00 0052:3000 3 j -_. __‘E Thermomete LET Motor controller for short Figure 43. Schematic of the microwave processing system, showing the microwave cavity and the power supply (after [20]). 7.6 cm Alumina SALI Al 'I 2cm t-——-t Zirconia ZYC Dead weights 7cm Specimen Alumina SALI specimen setter Alumina SALI 2.5 cm 1.3 cm 5.1 cm 1.3 cm Figure 44. Schematic of the refractory casket used during joining (after [1]). 113 (a) (b) Figure 45. Microstructures of the joint regions of the joined HAP specimens. 114 References l. 10. 11. 12. 13. 14. 15. 16. K. N. Seiber, K. Y. Lee. E. D. Case, pp. 941-949 in Proceedings of the 12th Annual Advanced Composites Conference, Technomic Publishing Co., Lancaster, PA (1997) K. Y. Lee, E. D. Case. and D. Reinhard, Ceramic Eng. and Sci. Proc., 18: 543-550 (1997) D. W. Richerson, Modern Ceramic Engineering, 2nd edition, p. 496-497, Marcel Dekker, Inc., New York (1992) M. Kahn and M. Chase, J. Am. Ceram. Soc., 75[3]: 649-656 (1992) S. Masia, P. D. Calvert, W. E. Rhine, and H. K. Bowen, J. Mater. Sci, 24: 1907- 1912 (1989) M. J. Edirisinghe and J. R. C. Evans, Int. J. High Technol. Ceram., 2: 249-258 (1986) H. Yan, W. R. Cannon, and D. J. Shanefield, J. Am. Ceram. Soc., 76[1]: 167-172 (1993) F. J. Klug, W. D. Pasco, and M. P. Borom, J. Am. Ceram. Soc, 65: 619- 626 (1982) S. J. Bennison and M. P. Harmer, J. Am. Ceram. Soc., 68, 591-597 (1985) F. F. Lange, B. 1. Davis, and E. Wright, J. Am Ceram. Soc., 69: 66-69 (1986) C. H. Hseuh, A. G. Evans, and R. C Coble, Acta. Metall., 30, 1269-1279 (1982) G. Bandyopadhyay and K. W. French, J. Europ. Ceram. Soc., 11[l]: 23-24 (1993) R. M. German, K. F. Hens, S.T.P. Lin, Am. Ceram. Soc. Bull., 70[8]: 1294-1302 (1991) T. F. Yen, Y. H. Chang, D. S. Tsai, S. L. Duh, and S. J. Yang, Mat. Sci. and Engineering, A154, 215-221 (1992) G. Elssner, W. Diem, and J. S. Wallace, pp. 629-639 in Surfaces and Interfaces in Ceramic and Ceramic-Metal Systems, Edited by J. Pask and A. G. Evans, Plenum Press, New York (1981) Ravaglioli and A. Krajewshi, Bioceramics, pp. 5 — 7, 413—415, Chapman and Hall. New York (1992) 115 17. A.Krajewshi, A. Ravaglioli and V. Biasin, “Plasma spray coating of prevalently titanium supports with various ceramics”, paper presented at the lntemational Conference of ‘Bioceramics and the Human Body’, Faenza, Italy (1992) 18. K. Y. Lee, E. D. Case, and J. Asmussen, Jr. , Ceramic Transactions. 59, 473-480, American Ceramic Society, Inc., Columbus, OH. (1995) 19. K. Y. Lee, E. D. Case, J. Asmussen Jr., and M. Siegel, Scripta Materialia, 35[l]:107-111 (1996) 20. K. Y. Lee, E. D. Case, J. Asmussen Jr., and M. Siegel, Binder Burnout in a Controlled Single-Mode Microwave Cavity, Scripta Materialia, 35[l]:107-111 (1996) 116 3.4 Joining Ceramics to Produce Components with Precise Internal Channels JOINING CERAMICS TO PRODUCE COMPONENTS WITH PRECISE INTERNAL CHANNELS J. G. Lee* and E. D. Case Materials Science and Mechanics Department, Michigan State University, East Lansing, MI 48823 ABSTRACT Geometrically complex ceramic parts are difficult to achieve, especially when one deals with an “internal” geometric complexity such as a component with internal channels, holes, or notches. Such components are potentially important for the flow of cooling fluids, fuel, or biological fluids through a ceramic component. This paper discusses microwave joining of ceramics (including alumina/zirconia composites, zirconia, MaCorTM, and hydroxyapatite) to form components with precise internal notches. The microstructure near the joined/notched regions also will be characterized. J. G. Lee and E. D. Case, “Joining Ceramics to Produce Components with Precise lntemal Channels”. in Innovative Processing and Synthesis of Glass, Composite, and Ceramic Materials 111, Volume 108, Ceramic Transactions, American Ceramic Society. pp. 433 — 442 (2000) 117 INTRODUCTION The difficulty of fabricating near net-shape components, due to the brittle characteristic of ceramic materials, has been a limitation for machining ceramic [1-4]. However, joining allows one to make complex shape from simpler subcomponents [1-4]. Features such as of interest channels, holes, or notches, are interesting in high temperature heat exchanger and engine application as well as biological fluids. Direct ceramic—ceramic joining utilizing microwave energy has been successfully done in recent year. The ability of rapid and volumetric heating is attractive advantages of microwave heating [3]. Desirable temperature can be reached at lower power compared to conventional heating. Case and Lee have been joined alumina, zirconia, MaCorTM and MgF2 also including notch stability before and after joining using spin-on materials [6-10]. In this study, notches were induced in alumina/zirconia composites, zirconia, MaCorTM, and hydroxyapatite. In order to observe the dimension difference before and after joining, notched and notched/joined specimens were compared by SEM micrograph. The joining was attempted in 2.45 GHz single mode microwave cavity with a low external pressure, provided by dead weight loading in air. The joined regions were characterized by Vikers indentation near the interface to perceive the toughness. EXPERIMENTAL PROCEDURE Materials used in this study Zriconia In this study, a 3 mol % yttria-ziconia and an 8 mol ‘70 yttria-zirconia powder (Tosoh 118 Ceramics Division, Bound Brook, New Jersey) were sintered in a 2.45 GHz single mode microwave. Microwave heating could achieve higher density after sintering when compared to that of conventionally annealed specimen [5]. Table 15 showed the sintering conditions for both powers including alumina/zirconia composites. Alumina/zirconia composites Alumina/zirconia composies composed of 85 wt % alumina powder (99.9 % pure alumina, TMDAR, TAIMI chemicals Co. LTD) and 15 wt % zirconia powder (3 mol % yttria-zirconia powder, Tosoh Ceramics Division, Bound Brook, New Jersey) were mechanically mixed for 24 hours using alumina grinding media in a plastic ball mill. After ball milling, the powder was sintered at 1350°C for 1 hour in the microwave cavity. MaCorTM MaCorTM (Corning Code 9658) is commercial machinable glass ceramic with a good tolerance for thermal shock that is used as an electrical or thermal insulator. The composition of MaCorTM is SiOz-Aleg-MgO-KzO-F. As received MaCorTM billets were cut into 1 cm X 1 cm using a low speed saw. Hydroxyapatite Nomially 99 % pure hydroxyapatite powder (Cerac Inc., Specialty Inorganics, Milwaukee, WI, Item#C-2071-1, Lot#X 16907) is an “bioactive” ceramic material which used for human bone and had a nominal purity. Unlike other power materials used in this study, hydroxyapatite(HAP) was sintered in an electrical resistance conventional furnace at 1300°C for 11 hours to a density about 2.974 g/cm3. Silicafilm 119 Silica film (Emulsitone Company, Whippany, New Jersey) was used for the bond phase. The film was cured at 200°C in a conventional furnace. Specimen Preparation The specimens of MaCorTM and sintered ZrOz, Ale3/Zr02 composites, and HAP specimens were polished followed a series of diamond grits size 35 um, 17 um, 15 um, 10 um, 6 um, and 1 pm using an automatic polisher (LECO Corporation, St. Joseph, MI). After polishing, the specimens were cleaned in DI water using an ultrasonic cleaner for 20 minutes. The silica film was dropped onto a substrate spun at 3000 rpm for 20 seconds using a high speed substrate spinner. Curing at 200°C for 20 minutes in a conventional furnace produce uniform and smooth films approximately, 0.13 um thick. After the applied silica films were cured, the specimens were notched on coated side using a low speed diamond saw (Figure 47). The coated and notched specimens were sectioned though the notches in order to observed the notch prior to joining. A pair of half sectioned specimens were attempted joining in a single mode microwave cavity 17.78 cm in diameter (Model CMPR-250, Wavemat Inc) using microwave power supply (Sariem, Model MWPS 2000) generates from zero to 2000 watts of microwave power at frequency of 2.45 GHz (Figure 48). During microwave heating, the specimens were placed in a cylindrical refractory insulator to reduce heat loss during joining. During joining, alumina deadweights in range of 20 grams to 50 grams were placed on top of the specimen being joined to provide low external loads. After joining, the specimens were sectioned using a low speed diamond saw, which Produced one specimen for SEM examination and one specimen for Vickers indentations. 120 Sectioned specimen enclosed notches was mount on stub with just notched specimen not heated for observing the notch dimension difference before and after joining using scanning electron microscope (SEM). The other piece was mounted using hot pressing presser and then polished finished I urn. To examine the bond layer or interface toughness, Vickers indentation was introduced near the bond layer or interface (Figure 49). Results and Discussion HAP with MaCorTM Notches were cut into both HAP and MaCorTM specimens (Figure 50). One set of MaCorTM and HAP were joined at 1020°C with 20 grams applied dead weights. Joining was failed at temperature range 1150°C to 1050°C with 50 grams dead weights. Table 16 was showed conditions of attempted joining of MaCorTM and HAP. For MaCorTM joined at 1020°C for 20 minutes, using a 20 grams deadweights, the difference between before and after joining was less than 6 %, which shows the geometrical stability of notches was quite stable after joining (Table 17 and Figure 51). For HAP, also three were introduced and measure (Figure 52) before and after joining (Table 17). The geometrical stability of HAP was in the range of l % to 4 %. Zro2 (3mol% YZO3) with MaCorTM ZrOz was joined with MaCorTM at 1020°C for 20 minutes with applied 20 grams dead weights. Four notches were made in ZrOz but the MaCorTM was not notched. Notch stability was determined from SEM mesurements of the notch dimensions, before and after joining. (Table 18 and Figure 53). The differences between before and after 121 joining values of depth range from 1 ‘70 to 5 % while the width changes ranged from I % to 2 %. Thus, the notch dimension was quiet stable afterjoining. ZrOz (8 mol ‘70 Y303) with Zl'Og (8 mol ‘70 Y203) Zirconia (8 mol ‘72: Y303) was joined to zirconia (8 mol % YZO3) via microwave heating at 1500°C for 20 minutes with 50 grams dead weights. Notches were at into both the 8 mol % yttria-zirconia specimens. The differences in notch width and depth before and after joining was less than 3 % (Table 19). After heating at 1500°C using microwave energy, notches made in ZrOz (8 mol % Y203) were not effected in terms of difference dimension changing. A1203 85 wt %/ 2102 (3 mol ‘70 Y203) 15 wt % composites joining. Ale3/ZrOz composites were successfully joined using microwave heating at 1500°C, 1450°C, and 1400°C for 20 minutes. In each case, a silica film spin-on interlayer was used as the bonding phase and a 50 gram dead weight was placed on the top of the specimens during joining. Three notches were observed the joined specimen at 1450°C. The notches were changed the dimension in depth of range 1 % to 2 % and width of range 1 % to 4 % (Table 20). CONCLUSIONS A number of different ceramic materials were notched and then successfully joined. The cerarnic-creamic material pairs that were joined include MaCorTM with HAP, MaCorTM with ZrOz (3 mol % YzO3), ZrOz (8 mol % YzO3), and Ale3/Zr02 composites. In each case, a spin-on silica coating was used as the bond phase. The dimensions of the notches induced in joined specimens were quite stable (less than 6 % for every attempted joining 122 specimen) during microwave joining process. These results indicate that channels and notches cut into in polycrystalline ceramics can maintain their dimensions during the joining process. REFERNCES 1. D.Palaith and R.Silberglitt, “ Microwave Joining of Ceramics,” Journal of American Ceramic Society Bulletin, 68[9] 1601-1606 (1989). RE. Loehman and AP. Tomsia, “Joining of Cermics,” Journal of American Ceramic Society Bulletin, 67[2] 375-380 (1988). ML. Santella, “A Review of Techniques for Joining Advanced Ceramics,” Journal of American Ceramic Society Bulletin, 71[6] 947-953 (1989). R.Silberglitt, I. Ahmad, W.M. Black, and JD. Katz, “Recent Developments in Microwave Joining,” MRS Bulletin, 18[7] 47-50 (1993). SA. Nightingale, D.P. Dunne, and H.K. Nomer, “Sintering and Grain growth of 3 mol % Yttria Zirconia in A Microwave Filed,” Journal of Materials Science, 31 5039-5043 (1996). ED. Case, K.Y, Lee, J,G, Lee, and T. Hoepfner, “Geometrical Stability of Holes and Channels During Joining of Ceramics and Composites,” Proceedings from Materials Conference ’98 on Joining of Advanced and Specialty Materials, 12-15 October 1998, 27-34. K.Y. Lee and ED. Case, Microwave Joining and Repair of Ceramics And Ceramic Composites,” Ceramic Engineering and Science Proceedings, 21‘" Annual Cocoa Beach Conference and Exposition on Composites, Advanced Ceramics, Materials and Structure, Cocoa Beach, Florida, 18 543-550, 1997. K.N. Seiber, K.Y. Lee, and ED. Case, “ Microwave and Conventional Joining of Ceramic Composites Using Spin-On Materials,” Proceeding of the 12'hAnnual Technical Conference Dearbom, MI, 941-949, 1997. J .G. Lee, K.Y. Lee and ED. Case, “Joining of Diamond Thin Film to Optical And IR Materials,” Innovative Processing/Synthesis: Ceramics, Glasses, Composites II, 509- 520, 1999. 123 10. ED. Case, J.G. Lee, and KY. Lee, “Joining of Optical and Infrared Materials Using Spin-On Layers,” Proceedings from Materials Conference '98 on Joining of Advanced and Specialty Materials, 12-15 October 1998, 17-26. 124 Table 15. Sintering conditions for powder materials used in this study. . . Pre- Heating Sintering Hold Cooling Mama” Mass Pressing Rate Temp (°C) Time(min) Rate 2102 (3 mol 0 0 . O , 0 _ % Y203) 3 cm 32 Mpa 10 C/rmn 1375 C 60 min 10 C/mrn 2102 (8 mol 0 o . 0 . 0 . % Y203) 3 cm 32 Mpa 10 C/mrn 1350 C 60 mm 10 C/mrn “203/2.02 2 gm 32 Mpa 10°C/min 1350°C 60 min 10°C/min composrtes Table 16. Attempted joining conditions for joining MaCorTM and HAP. Tmax (0C) Dead weights Hold time Heating rate Result Comments “50°C 50 grams 20 min ~ 40°C/min Not joined Macor melted 1 100°C 50 grams 20 min ~ 40°C/min Not joined Macor melted 1050°C 50 grams 20 min ~ 40°C/min Not joined Macor melted 1020°C 20 grams 10 min ~ 40°C/min Joined 1000°C No 20 min ~ 40°C/min Not joined 125 Table 17. Notch stability of joined HAP with MaCorTM before and after joining. Notch Notch Notch Notch Material # of Width, Width, Difference depth, depth, Difference Notched notches before after (%) before after (%) joining joining joining joining HAP 1 364 361 um I % 632 um 636 um I % um HAP 2 343 355 pm -4 % 643 pm 614 um 4 % um HAP 3 314 321 um -2 % 518 um 496 pm 4 % um MacorTM 1 343 335 um 2 % 371 ttm 385 pm -4 % um MatCorTM 2 321 335 11m -4 % 514 Mm 528 pm -3 % um MaCotTM 3 341 321 pm 6 % 407 pm 421 pm -4 % um Table 18. The notch change before and after joining for joined ZrOz with MaCorTM Notch Notch Notch Notch Material # of Width, Width, Difference depth, depth, Difference Notched notches before after (%) before after (%) joining joining joining joining ZrOz l 374 um 367 pm 2 % 246 pm 240 pm 3 % ZrOz 2 375 pm 379 pm -1 % 238 pm 225 u 5 % m Zr02 3 379 um 375 um I % 267 um 265 um I % k ZrOz 4 385 um 379 um 2 % 304 pm 296 um 3 % 126 Table 19. The notch dimension change before and afterjoining for joined Zr02 (8 mol % Y203) Notch Notch Notch Notch Material # of Width, Width, Difference depth, depth, Difference Notched notches before after (%) before after (%) joining Eining Joining joining ZrOz 1 314 pm 319 pm 2 % 421 um 407 um 3 % ZrOz 2 319nm 310 um 3% 381 um 386 pm -1 % ZrOz 3 319 pm 312 um 2% 402 um 410 pm -2% ZrOz 4 329 um 319 pm 2 % 460 um 452 um 2 % ZrOz 5 310 um 314 um -I% 433 pm 419 um 3% Table 20. . The notch dimension change before and after joining for joined A1203/ZrOz composites. Notch Notch Notch Notch Material # of Width, Width, Difference depth, depth, Difference Notched notches before after (%) before after (%) joining Joining joining joining A1203/Zr02 1 321 um 307 pm 4 % 321 pm 325 rim -1 % Ale3/Zr02 2 309 um 307 um I % 313 um 315 um -I % Ale3/Zr02 3 321 um 318 um I % 352 pm 346 um 2 % l g A ./’ Powder 45:25:) 1 l l '. 1 l l ,r b xy 1 Q Compact ‘ powder h Seven powder compact specimens Figure 46. A schematic for compact powder materials and sintering. 128 Coated Notched 5116011113“ specimen E3 - 9 Cut through Notched and Notch Joined specimen m p 1‘\2\L1_Ll/-/i “\\\~_~/ Figure 47. Schematic of producing notches. 129 Monitor (Control Short & Probe) Microwave Reflected power Detector Optical Pyrometer Figure 48. Schematic of microwave processing system, showing microwave cavity and microwave power supply. 130 Vickers lndentor .__ Mounted specimen Figure 49. A schematic of showing Vickers indentations placed near the bond layer. 131 MaCorn" I Figure 50. Notch configuration in both HAP and MaCorTM specimens. 132 200 um (a) MaCorTM before joining (b) MaCorTM after joining Figure 51. MaCorTM notched specimen before and after joining. 133 200 um (a) HAP before joining (b) HAP after joining Figure 52. HAP notched specimen before and after joining. 134 (a) ZrOz before joining (b) ZrOz after joining Figure 53. ZrOz notched specimen before and after joining. 135 200 u m (a) ZrOz before joining (b) ZrOz after joining Figure 54. ZrOz notched specimen before and after joining. 136 20011111 (a) A1203/ ZrOg before joining (b) A1203/2102 after joining Figure 55. A1203/ ZrOz notched specimen before and after joining. 137 3.5 Joining of Non-Oxide Ceramics Using Conventional And Microwave Heating JOINHVG OF NON-OXIDE CERAMICS USING CONVENTIONAL AND MICROWAVE HEATING Jong-Gi Lee and E. D. Case Materials Science and Mechanics Department Michigan State University East Lansing, MI 48824 ABSTRACT The nonoxide ceramic materials silicon carbide (a structural ceramic) and magnesium fluoride (an optical/IR ceramic) have been joined using conventional and microwave heating. Joining of both the SiC and MgF2 utilized a spin-on interfacial layer, which allowed joining with low external applied pressures. INTRODUCTION Non-oxide ceramics include many useful materials, including structural ceramics such as silicon carbide and silicon nitride, with their combination of relatively high toughness and low mass density. However, a second important category of non-oxide ceramics is infrared transmitting materials. Particular nonoxide ceramics are much better infrared transmitting materials than oxide ceramics due to basic physical nature of the metal-oxygen bond. The cutoff in infrared transmission as a function of wavelength is due to coupling of J. G. Lee and E. D. Case, “Joining of Non-Oxide Ceramics Using Conventional and Microwave Heating”. Ceramic Engineering and Science Proceedings 21(4]. American Ceramic Society. pp. 589-597 (2000) 138 the infrared photons with the lattice normal modes of vibration for the material [I]. High atomic mass and weak bonds tend to increase the effective cutoff wavelength such that in oxide ceramics, the metal-oxygen bond strongly absorbs infrared wavelengths longer than about 5 to 8 microns [2,3], but for nonoxides such as magnesium fluoride and zinc sulfide, the relatively low mass and weak bonds enhance the infrared transmission by pushing the IR cutoff to higher wavelengths. This paper addresses the joining of both optical/infrared nonoxide ceramics as well as structural ceramics. As is the case for oxide ceramics, non-oxide ceramics also are difficult to process in complex shapes and one method of fabricating ceramic components with complex morphologies is to “build them up” by joining sub-components of relatively simple geometry. Thus, there have been a number of efforts to join nonoxides via either conventional or microwave heating [4 - l4]. Nonoxide ceramics have been joined by conventional heating using a variety of metallic interlayers or braze filler materials. Young et al. fabricated AlN—Ni-Cu-Ni-AIN “sandwiches” by vacuum hot pressing at 600°C to 700°C at a pressure of 6.5 MPa for 30 minutes [4]. The AIN plates were coated with nickel, then a copper foil was inserted between the Ni-coated AIN plates prior to joining, resulting in a low-temperature bond about 100 microns thick [4]. Wang et al. used a CuNiTiB paste brazing filler to join Si3N4/Si3N4. Before joining, an interfacial layer consisting of a slurry of the metal powders was applied to the specimens [5]. Joining was done at temperatures between about 1000°C and 1120°C in a conventional vacuum furnace, with final bond layer thicknesses ranging between about 48 microns and 58 microns thick [5]. 139 A number of researchers used ceramic interlayers to join nonxoxide ceramics via either conventional or microwave heating. Xie et al. joined sintered Si3N4 using a slurry of a—S13N4, Y203, S102, and A1203 powders in a conventional furnace with a nitriding atmosphere [6]. The Optimum joining conditions were 1650°C with a 5 MPa applied load and a 30 minute hold time, giving bond layers approximately 15 microns thick [6]. Lee et al. joined sintered silicon carbide using a 1 mm thick MgO-A1203-SiOz (MAS) layer inserted between the two SiC plates [7]. Using zero applied external load, the SiC specimens were heated in a conventional graphite-element furnace from room temperature to 1000°C in vacuum, then from 1000°C to either 1500°C or 1600°C in an Ar atmosphere, yielding final bond thicknesses of 5 microns and 10 microns, respectively [7]. Silberglitt et al. used Si interlayers in the microwave joining of SiC at 1450°C for 5 - 10 minutes under an external load of 2 - 5 MPa [8]. The final bond widths were a function of the interlayer processing technique, with Si powders, a Si slurry, and a plasma-sprayed Si coating yielding final (as—joined) bond layer thicknesses of 50 microns, 5 microns, and approximately 3 microns, respectively. In addition to the joining of nonoxides using interlayers, Binner used a 2.45 GHz microwave cavity to directly join RBSN to RBSN [9]. However, although Binner et al. did not deposit an interlayer on the RBSN materials, the joining process itself generated a free-silicon interlayer between the joined RBSN specimens [9], where the free silicon was thought to “bleed” out the RBSN microstructure into the bond region due to the application of high temperature and pressure [9]. For the RBSN, a gap between the joined specimens diminished with increasing temperature and pressure, until at a joining 140 temperature of 1350°C, a joining time of about 15 minutes, and a joining pressure of 1.5 MPa, the silicon-filled bond layer had decreased to about 3 - 5 microns (whereas at 1190°C and 0.5 MPa, the “gap” was about 10 - 20 microns wide and only partially filled with Si). [9] Previously, the authors and coworkers successfully joined several ceramic oxide materials [10-14], including joining alumina, partially stabilized zirconia (PSZ), MaCorTM, and hydroxyapatite. Also, a number of dissimilar ceramic oxide pairs have been joined [12, 14]. This paper focuses on the joining of two nonoxides, SiC (a structural material) and MgF2 (an IR transmitting material). EXPERIMENTAL PROCEDURE The as-received billets of silicon carbide and magnesium fluoride were cut using a low speed diamond saw, with specimen dimensions of 1.6 cm X 0.4 cm X 0.3 cm for the SiC (Hexoloy) specimens and 1.0 cm X 1.0 cm X 0.2 cm for the magnesium fluoride specimens. After cutting, the specimens were polished using a series of diamond grit sizes, with a minimum 1 micron grit size. The spin-on layers used were applied to the polished specimen surfaces in a liquid form. Four to five drops of the spin-on liquid (BlackglasTM for the SiC and sodium silicate for the MgF2) were applied near the center of the polished specimen using a pipette. The specimen was spun for 20 seconds at speeds ranging from 3000 RPM to 5000 RPM using a substrate spinner. Following spinning, the coated surface of the specimen was placed in contact with another polished, uncoated specimen of the same material and was immediately loaded into the furnace (Figure 56). 141 The joining was done using both a conventional furnace and a microwave cavity. Conventional heating was done with a nitrogen flow rate of approximately 120 sccm and a heating/cooling rate of approximately 10°C per minute. The microwave heating was done in air using a 2.45 GHz single-mode microwave resonant cavity. The specimen temperature was monitored via an optical pyrometer system. A cylindrical zirconia refractory specimen enclosure (casket) was used during joining [10-14]. The SiC specimens were heated first in the conventional furnace at 900°C for 20 minutes, followed by microwave heating of selected specimens at 1200°C for 20 minutes. The MgF2 specimens were heated for 20 minutes either in the conventional furnace (with flowing nitrogen) at 700°C or in air in the microwave at 700°C. After joining, the specimens were sectioned on a low speed diamond saw and examined in a Scanning Electron Microscope (JEOL Model JSM-6400V). Vickers indentation testing was also performed on the joined and sectioned specimens. RESULTS AND DISCUSSION The microstructure of the SiC (Hexoloy) materials is shown in Figure 57 (a micrograph of the fracture surface), while for MgF2 a comparable fracture surface micrograph is given in reference 11. Joining the SiC at 900°C in flowing N2 in a conventional furnace results in a dense bond layer that was roughly 2 to 3 microns thick (Figure 58a). For the MgF2 specimens that were joined at 700°C both in flowing nitrogen in a conventional furnace and in a microwave cavity in air at 700°C, the resulting bond thickness was about 10 microns (Figure 58b shows the MgF2 bond due to microwave heating). For the SiC specimens 142 that were heated conventionally at 900°C, reheating the specimens at 1200°C in the microwave cavity did not appreciably change either the appearance or mean thickness of the bond layer (Figure 59). Previously, the authors found that the IR transmittance of the joined MgF2 was essentially the same as the unjoined MgF2, if microwave heating was used. However, the IR transmittance was degraded if the specimens were joined by conventional heating, in part due to IR scattering from the second phases formed in MgF2 bond layer in conventionally heated specimens [11, 14]. In order to investigate the relative interfacial toughness of the bonds in the joined specimens, a series of 49 N Vickers indentation cracks were placed near the interface of the conventionally and the microwave joined MgF2 and SiC specimens, such that the radial cracks were oriented approximately normal to the joined interface. In general, cracks approaching an interface can deflect at the interface (forming “T-shaped” cracks along the interface) if the interfacial fracture energy is less than about 60 percent of the matrix fracture energy [15]. Otherwise, the crack propagates across the interface, without deflection. For both the SiC and the MgF2 specimens included in this study, the indentation cracks did deflect at the interface, indicating that the relative interfacial fracture energy was less than 60 percent of the matrix fracture energy in both cases. SUMMARY Two nonoxide materials, SiC and MgF2 were joined using a spin-on interlayer. The bond phases produced were relatively thin and dense, but the interfacial fracture energy was low. 143 ACKNOWLEDGMENTS The authors acknowledge financial support of the Composite Materials and Structures Center of Michigan State University and the use of the electron microscope facilities at the Center for Electron Optics, Michigan State University. 144 Polished specimen 9 9" 9" @ Polished Coated with Coated specimen spin-on material specimen Microwave or conventional heating = / Joined specimen Figure 56. Schematic of the coating and joining technique. I45 Figure 57. Fracture surface of SiC used in this study. 146 Figure 58. (a) SiC joined at 900°C for 20 minutes in flowing N2 with a 20 gram deadweight applied during joining and (b) MgF2 specimens joined at 700°C for 20 minutes in air with a 60 gram deadweight applied during joining. 147 ‘hwklw‘h-u.~“' 2:: Figure 59. SEM images of the SiC specimens that had been first heated conventionally at 900°C (Figure 58a), followed by (a) microwave heating at 1200°C for 20 minutes or by (b) conventional heating at 1200°C for 20 minutes. 148 REFERENCES l. 10. 11. 12. M. W. Barsoum, pp. 618 - 635 in Fundamentals of Ceramics, McGraw-Hill, New York, NY, 1997. C. Kittel, pp. 107-116 in Introduction to Solid State Physics, 5th ed., John Wiley and Sons, New York, 1976. L. L. Hench and J. K. West, Principles of Electronic Ceramics, pp 351-360, John Wiley & Sons, New York, NY, 1990. CD. Young and J.G. Duh, “Bonding Mechanism of Electrodes Ni-P Film with AIN substrate and Cu Foil,” IEEE Transactions on Components Packaging and Manufacturing Technology Part A, 21 [2] 330-344 (1998). CG. Wang, H.P. Xiong and Z.F. Zhou, “Joining of Si3N4/Si3N4 with CuNiTib Paste Brazing Filler Metals and Interfacial Reactions of the Joints,” Journal of Materials Science, 34 [12] 3013-3019 (1999). R.J. Xie, L.P. Huang, Y. Chen and X.R. Fu, “Evaluation of Si3N4 Joints: Bond Strength and Microstructure,” J. Mat. Sci., 34 [8] 1783-1790 (1999). H.L. Lee, S.W. Nam, B.S. Hahn, B.H. Park and D. Han, “Joining of Silicon Carbide Using MgO-AIZO3-SiOz Filler,” J. Mat.Sci., 33 [20] 5007-5014 (1998). R. Silberglitt, D. Palaith, H.S. Sa’alaldin, W.M. Black, J.D. Katz, and RD. Blake, “Microwave Theory and Application in Materials Processing,” pp. 487 - 495 in Ceramic Transactions Vol 21, D. E. Clark, F. D. Gac, and W. H. Sutton, editors, American Ceramic Soc., Westerville, OH (1991). J.G.P. Binner, J.A. Femie, and PA. Whitaker, “An Investigation into Microwave Bonding Mechanisms via a Study of Silicon Carbide and Zirconia,” Journal of Materials Science, 33 [12] 3009-3015 (1998). KY. Lee, E.D. Case, D. Reinhard, “Microwave Joining and Repair of Ceramics and Ceramic Composites,” Ceramic EngSci. Proc., 18 543-550 (1997). ED. Case, J.G. Lee, and KY. Lee, “Joining Optical and Infrared Materials Using Spin-On Layers”,pp.l7-26 in Joining of Advanced and Specialty Materials, M. Singh, J .E. Indacochea, and D.Hauser,eds.,ASM lntemational, Materials Park, OH, 1998. K.N. Seiber, K.Y. Lee, and ED. Case, "Microwave and Conventional Joining of Ceramics using Spin-on Materials,“ pp. 941-949 in Proc. 12th Annual Advanced Composites Conference, Technomic Pub. Co., Lancaster, PA, 1997. 149 13. ED. Case, K.Y. Lee, J .G. Lee, and T. Hoepfner, “Geometrical Stability of Holes and Channels During Joining of Ceramics and Ceramic Composites,” pp. 27 - 34 in Joining of Advanced and Specialty Materials, M. Singh, J.E. Indacochea, and D. Hauser, eds., ASM lntemational, Materials Park, OH, 1998. 14. ED. Case, KY. Lee, and J.G. Lee, “Joining of Polycrystalline Ceramics and Ceramic Composites Using Microwave Heating,” pp. 17 - 20 in Proc 33rd Int. Microwave Power Symp., lntemational Power Institute, Manassas, VA., 1998. 15. W. Lee, S. J. Howard, and W. J. Clegg, Acta Mater. 44 3905-3922 (1996). 150 3.6 Protective Coatings for Infrared Materials PROTECTIVE COATINGS FOR INFRARED MATERIALS Jong-Gi Lee, E. D. Case and M. A. Crimp Materials Science and Mechanics Department J. Malik and D. K. Reinhard, Electrical Engineering Department Michigan State University East Lansing, MI 48824 ABSTRACT Solutions of polycarbosilane and hexane have been spun onto magnesium fluoride substrates, producing continuous and adherent coatings upon curing in flowing nitrogen. The study focused on the infrared properties of the films, which were maintained upon coating. INTRODUCTION The interaction of electromagnetic waves with ceramic materials involves reflectance, absorptance, transmittance and scattering, such that [1] S+R+A+T=l (D where S, R, A, and T are coefficients associated with scattering, reflectance, absorptance and transmittance, respectively. Each quantity in equation 1 is a function of a number of E. D. Case, J. G. Lee, M. A. Crimp, D. K. Reinhard, and J. Malik, “Protective Coatings for Infrared Materials”, Ceramic Eng. and Sci. Proc., Volume 20, American Ceramic Society, Inc., Westerville, OH, pp. 145-152 (1999) 151 variables, including the incident wavelength. In addition to the wavelength dependence, the scattering, S, is a function of the number density and dimensions of scattering centers, such as pores, rough surfaces, etc. Reflectance is a function of the index of refraction of the material and the angle of incidence. For the absorptance, A, in the infrared-visible-ultraviolet regime, there are two major absorption mechanisms that produce wavelength-dependent “cutoffs”. In the ultraviolet, the cutoff is due to electronic processes [1], while in the infrared, the cutoff is due to coupling of the infrared photons with the lattice normal modes of vibration [1,2]. The frequency of the lattice modes in turn depends on the bond strength and the atomic mass of the atoms that make up the lattice [3]. High atomic mass and weak bonds tend to increase the effective cutoff wavelength. For example, in oxide materials, the metal-oxygen bond tends to strongly absorb infrared wavelengths longer than about 5 to 8 microns [1,2], but if one selects ceramics with weaker bonds, such as magnesium fluoride, zinc sulfide, and zinc selenide, then one enhances the infrared transmission by pushing the IR cutoff to higher wavelengths. However, the weaker bonds tend to give fluorides, sulfides, and selenides relatively poor mechanical properties, such as low strength and hardness, which in turn makes infrared transmitting materials susceptible to abrasion and erosion damage. To reduce abrasion, erosion, and handling damage, one can add a protective coating to the surface of these materials. In this paper we discuss a method for fabricating a thin, adherent silicon-based coating on polycrystalline magnesium fluoride. EXPERIMENTAL PROCEDURE A commercial hot-pressed polycrystalline magnesium fluoride (Irtran 1, Eastman Kodak) was used as the infrared transmitting substrate for this study. The magnesium 152 fluoride had an equiaxed microstructure with a mean grain size of approximately 3 microns. The polycarbosilane (PCS) solution used as a spin-on coating in this study was either applied in a undiluted form to the MgF2 or it was diluted with hexane, using 1 gram of polycarbosilane to n grams of hexane, where the values of 11 used in this study were 4 grams, 6 grams, and 10 grams. Using a low-speed diamond saw, magnesium fluoride specimens roughly 1.0 cm X 1.0 X 0.2 cm were sectioned from as-received billets. Both of the 1.0 cm X 1.0 cm specimen faces were polished for each specimen, using an automated polishing machine (Leco Corporation, St. Joseph, MI) and a series of diamond grit sizes ranging from 17 microns to one micron. Using a pipette, several drops of the PCS solution were placed near the center of a 1 cm X 1 cm specimen face. The PCS coated specimens were then spun at rates between 500 and 6000 rpm for 20 seconds using a commercial substrate spinner (Figure 60). Curing of the coated specimens was done in both air and flowing nitrogen. For the curing in air, the coatings were heated at about 10°C per minute to maximum temperatures of up to 265°C with hold times of 20 minutes in a laboratory oven. The nitrogen-atmosphere annealing was done with a nitrogen flow rate of approximately 120 sccm to 130 sccm, with a maximum temperature ranging from 400°C to 600°C and a hold time of 20 minutes. For the nitrogen anneals, both the heating and cooling rate was approximately 20°C per minute. The infrared transmittance for both the coated and uncoated specimens was determined using a Beckman Spectraphotometer IR 4420, over the wavelength range from 2.5 microns to 9 microns (a wavenumber range from 4000 cm'l to 1100 cm"). A 153 scan speed of 150 cm'1 per minute was used for all of the transmittance measurements reported in this paper. The coated specimens were indented using a Vickers indenter with a 49 N load, a load time of 10 seconds, and a loading speed of 70 microns/second. RESULTS AND DISCUSSION The varying dilution of PCS (Starfire Systems, Watervliet, NY) with hexane produced coatings with differing thickness. Undiluted PCS spun at a 3000 rpm for 20 seconds produced a continuous coating about 11 microns thick upon curing in air at 100°C for 20 rrrinutes (Figure 61). Dilution of I gram PCS to 4 grams hexane (Figure 62a) and 1 gram PCS to 6 grams hexane (Figure 62b), both produced coatings about 2 to 3 microns thick when cured in flowing N2 at 400°C and 500°C, respectively. Specimens sectioned with a low speed diamond saw were mounted in thermosetting plastic, sputter coated with gold, and observed in an environmental scanning electron microscope (Figures 62a and 62b). A dilution of 1 gram PCS to 10 grams hexane produced films roughly 1 micron thick upon curing in flowing N2. The coatings annealed in air showed numerous strong and very broad IR absorptions, so the air-annealing of the specimens was not pursued past an initial measurement of the IR transmittance for several specimens. The polished, uncoated MgF2 (Figure 63) has transmittance comparable to that of the PCS coated specimens cured in flowing N2 (Figures 64 and 65). MgF2’s sharp absorption at a 2.763 micron wavelength is consistent with the literature for Irtran 1 [4]. Nitrogen atmosphere annealing at 400°C gave a broad absorption at about 4.737 microns or 2112 cm'I which corresponds well to a Si—H group absorption reported at 2120 cm'1 for PCS [5]. For N2 anneals at 5000C and 600°C (Figures 64 and 65) this absorption was absent, 154 which is consistent with temperature-induced changes in PCS chemistry, since anneals at 400°C in Ar yield considerable weight loss due to the evolution of C6H5 (phenyl) groups from PCS [6], but by 500°C the weight is stable to above 1200°C [5]. Other volatile species including H2 and CH4 may be evolved during annealing. In general, a coating on a substrate can either increase or decrease the transmittance relative to the uncoated substrate, depending on the optical indices of refraction of the two media and the coating thickness [6]. An increase in transmission is favored if the index of refraction of the coating is lower than that of the substrate and the coating thickness is on the order of 1/4 the wavelength of the incident radiation [6]. Thus, slight increases or decreases in the transmittance with respect to the uncoated specimens may be due to reflectance effects [6], and decreases in transmittance may be due to scattering or absorption effects. For the thicker (11 micron) coatings, 49N indentations produced coating delaminations about 300 — 400 microns across, in addition to the associated radial cracks, while the l to 3 micron-thick films showed a similar extent of delamination. Spalling of both the thick and the thinner films occurred relatively infrequently upon Vickers indentation at 49 N. However, Spalling radial coating cracks, and delamination for ceramic coatings is a function of coating thickness, indentor load, as well as the elastic and fracture properties of the coating and substrate [7]. Additional indentation work is underway for the coatings included in this study. 155 SUMMARY Thin, adherent coatings were successfully applied to polished MgF2 substrates using spin-on PCS and hexane solutions. Curing in flowing nitrogen at 500°C and 600°C produced continuous films about 1 to 3 microns thick, with IR transmittances that very similar to polished and uncoated MgF2 specimens. Thus, such coatings do not disminish the original IR transmittance of the MgF2 substrates. The coating thickness decreased as the hexane dilution increased, and as the coating thickness decreased from about 11 microns to about 1 micron, the tendency for coating delamination remained essentially unchanged. The indentation work done to date in this study is only a preliminary indication of the response of the coatings to point contact loading. Future work will include addition characterization of the mechanical integrity of the coatings. ACKNOWLEDGMENTS The authors acknowledge financial support of Composite Materials and Structures Center, Michigan State University, East Lansing, MI. The authors also thank W. Sherwood of Starfire Systems, Watervliet, NY for the PCS. 156 Figure 60. Schematic showing the high-speed substrate spinner used in applying the coatings to the MgF2 substrates. 0 Spin-on material 0 a Polished specimen Ki 6 D Coated specimen \ 43 3 after spinning fig High speed substrate spinner (500 rpm ~ 6000 rpm) \ / 157 Figure 61. ESEM examined polycarbosilane film which is not added hexane after coating spun at 3000 rpm for 20 seconds and cured at 100°C for 20 minutes in air. 3 E g .5 158 Figure 62. The polycabosilane film thickness using ESEM after coating and transmittance of coated specimens. (3) the film solution of coated specimen was 1 gram PCS and 4 gram hexane mixed solution. The coated MgF2 was spun at 3000 rpm and cured at 400°C in N2. (b) the film solution of coated specimen was 1 gram PCS and 6 gram hexane mixed solution. The coated MgF2 was spun at 5000 rpm and cured at 600°C in N2, (c) Transmittance for (a), and (d) Transmittance for (b) 'Fhermoset Transmittance 0.8 ~ _ 0.6 r _ 0.4 - 3 M PCS:HX=I :4, Cured at 400'C Spun at 3000 rpm 0.2 2 ~ 0.0 1 4 4L 4.; l 1 l Wavelength (micron meter) (C) 159 Transmittance 5 11 In 1.0 Tfi—fi l m —r 0.8 2 0.6 ' 0.4 i PCS:HX=1:6, Cured at 600'C Spun at 5000 rpm 0.2 P i 0.0 L I l 1 L l l L ' 2 3 4 5 6 7 8 9 Wavelength (micron meter) ((0 Figure 63. Transmittance of both sides polished MgF2 specimen. 1.0 0.8 0.6 0.4 Transmittance 0.2 0.0 T l A; 1 J. l 1 Wavelength (micron meter) 3 4 5 160 6 7 8 9 Figure 64. Transmittance of MgF2 coated with polycarbosilane at 500°C with different spin rate. l l 1.0 ~ 2 8 a 0.8 P —4 N t 33 .. "-1 0.6 e 1, a E T 500 rpm \ U) '2 G 0.4 - 20011 rpm in, - CB . ,. h . \‘3 1 E 401111 rpm ‘\.‘,;' 0.2 ” [JR 4 ' "' 6000 rpm 0.0 ‘ P i ' 1 g 1 . t . 1 . . 2 3 4 5 6 7 8 9 Wavelength (micron meter) 161 Figure 65. Transmittance of MgF2 coated with polycarbosilane at 600°C with different spin rate. 1.0 - f , o ” Wilt it“ “1er it" -. g 0.8 - l [.12. — CB 1: 1,, s-r t\ 1‘: 0.6 - E l ‘M—‘“ 500 rpm 11‘1“ g 0.4 * 2000 rpm 1’14. . In » . 11 1;“, 2, l 41" it rpm 11 H 0.2 - ‘3 j ’ ' ‘ 6000 rpm 0.0 1 ' 1 = 1 .1 1 1 1 1 L 2 3 4 5 6 7 8 9 Wavelength (micron meter) REFERENCES l. [\J L. L. Hench and J. K. West, Principles of Electronic Ceramics, pp 351-360, John Wiley & Sons, New York, NY (1990). M. W. Barsoum, pp. 618 - 635 in Fundamentals of Ceramics, McGraw-Hill, New York, NY (1997). C. Kittel, pp. 107-116 in Introduction to Solid State Physics, 5th ed., John Wiley and Sons, New York (1976). D. W. Gray, page 6-62 in American Institute of Physics Handbook, Second Edition, McGraw-Hill Book Co., Inc., New York, NY (1963). M. Eber and L. E. Jones, pp. 485 - 492 in Ceramic Eng. and Sci. Proc., Volume 19[3], American Ceramic Society, Westerville, OH (1998). M. V. Klein, pp. 201 - 209, Optics, Wiley and Sons, New York, NY (1970). D. F. Diao, K. Kato, and K. Hokkirigawa, “Fracture Mechanics of Ceramics Coatings in Indentation”, J. of Tribology, 116: 860 - 869 (1994). 163 3.7 Joining of Polycrystalline Ceramics And Ceramic Composites Using Microwave Heating JOINING OF POLYCRYSTALLINE CERAMICS AND CERAMIC COMPOSITES USING MICROWAVE HEATING ELDON D. CASE, KI-YONG LEE, AND JONG—GI LEE Materials Science and Mechanics Department Michigan State University, East Lansing, MI 48824 ABSTRACT Microwave energy can be used to join a variety of ceramics, including both structural ceramics and optical (infrared) transmitting ceramics. A thin, spin-on interlayer can be successful in joining such materials. For optical materials such as MgF2, microwave joining can produce joins that do not appreciably degrade the optical quality of the material. INTRODUCTION Microwave processing offers the potential for the rapid fabrication of ceramic/ceramic composite components of complex geometry. Spin-on layers are widely used for low-cost fabrication of electronic devices including integrated circuits and solar cells. Such layers provide protective layers, dielectric layers, and dopant sources. The E. D. Case. K. Y. Lee, and J. G. Lee, “Joining of Polycrystalline Ceramics and Ceramic Composites Using Microwave Heating,” Proceedings of the 33rd International Microwave Power Symposium, lntemational Power Institute. Manassas. VA, pp. 17-20 (1998) 164 spin-on material in liquid form is dispensed onto the surface to be coated. The substrate is then spun at high speeds, leaving a thin layer of the spin-on material. Techniques for ceramic joining can generally be divided among methods employing a high extemally-applied stress (such as diffusion bonding) and methods involving low external stress (such as brazing). Diffusion bonding joins materials at high temperatures and pressures, where solid state diffusion across the joined interface may be assisted by fluxes that enhance the mass diffusion rates (Sandhage, Schmutzler, Wheeler, and. Fraser, 1996; Santella, 1992). Diffusion bonding (and creep) can be a sensitive function of grain size, with the tendency for both creep and successful bonding increasing as the grain size decreases. For example, Elssner et al. showed that alumina plates with a mean grain size of 18 microns did not join, while similar alumina plates with a one micron average grain size did join when processed under nominally identical conditions (Elssner, Diem, and Wallace, 1981). In addition to structural materials such as alumina, optical ceramics, such as magnesium fluoride, have been joined using diffusion bonding (Yen ,. Chang Yu, Yen, Tsai, and Lin, 1991; Yen,. Chang, Tsai., Duh., and Yang, 1992). Brazing is another method that has been used to join ceramics. In general, "brazing" may be defined as "a joining process in which a filler metal and a flux are sandwiched between the workpieces" (Schaffer, Saxena, Antolovich,. Sanders, and. Waner 1995). At elevated temperatures, the filler /flux system wets the surfaces to be joined. For ceramics, brazing has utilized oxide glasses, oxynitride glasses, metal particles slurries, and metal layers to join ceramic components (Sandhage, Schmutzler, Wheeler, and. Fraser, 1996). In this study, joining is done via thin, spin-on interlayers of silica or sodium silicate. 165 MATERIALS AND SPECIMEN PREPARATION A number of polycrystalline ceramic materials have been joined by the authors and co-workers, including structural ceramics such as alumina and zirconia, electronic ceramics, such as alumina and MaCoRTM and optical ceramics, such as magnesium fluoride (Lee, Case, Reinhard , 1997; Seiber, Lee and Case, 1997). The magnesium fluoride specimens were a polycrystalline commercial, hot-pressed material (Irtran-l, Eastman Kodak Company) with a mean grain size of approximately 3 microns. MaCoRTM is a machineable glass ceramic (Corning Code 9658) that is reinforced with randomly-oriented platelets of fluromica. Rectangular specimens of the both MaCoRTM and the magnesium fluoride were cut from as-received billets using a low-speed diamond saw. For the polycrystalline alumina, disk-shaped specimens were pressed from as- received Sumitomo AKPSO powders having an average particle size of 0.23 microns. The smaller of the alumina specimens approximately 22 mm in diameter and two mm thick, when pressed uniaxially at pressures of approximately 32 MPa. Larger disks, having masses of up to 20 grams and as-pressed diameters of approximately 50 mm also were pressed and sintered. The polycrystalline zirconia specimens pressed in a similar manner to the alumina specimens, using Tsoh zirconia, 3-mol-percent yttria powders with an initial particle size of roughly 0.1 micron. The bonding agents (that were used as spin-on materials in this study) include a sodium silicate solution (Columbus Chemical Company) and Silicafilm (Emulsitone Company, Whippany, NJ). “Silicafilm” is an organic liquid, which when pyrolyzed produces a film of amorphous silica. 166 Using an automated polishing system, all specimens were polished using a series of diamond abrasive grit sizes ranging from about 25 microns to 1 micron. For the magnesium fluoride specimens for which optical and infrared transmittance was measured, the specimens were polished on both faces, while the remaining specimens were polished on only one face. The silica film and the sodium silicate solution were applied to the polished specimen using a pipette, then the specimens were spun at speeds between about 500 rpm to 5000 rpm for approximately 20 seconds. For the silica film, the coatings were typically cured in air at 200°C for 20 minutes. After coating and curing, selected alumina, zirconia and MaCorTM specimens, submillimeter-width notches were cut into the specimen surface using a stationary sonic mill (Sonic-Mill, Albuquerque, NM). SINTERING AND JOINING The microwave sintering of the alumina and zirconia powders, along with the subsequent joining of all of the specimens, was performed in a cylindrical single-mode microwave cavity, 17.78 cm in diameter (Model CMPR-250, Wavemat Inc., Plymouth, MI). The microwave power was generated by a 0 - 2000 Watt, 2.45 GHz continuous-wave power supply (Sairem Model MWPS 2000, Wavemat Inc., Plymouth, MI). The microwave system is equipped with automated sliding short and launch probe position controls (Figure 66). Details of the microwave cavity and power supply are given detail elsewhere (Lee, Case, Asmussen, and Siegel 1996). Prior to heating in the microwave, the specimens to be sintered or to be joined were placed in a cylindrical refractory enclosure, which was in turn centered along the axis of the microwave cavity. The refractory enclosure (typically called a "casket") consisted of a 167 hollow cylinder made from a partially-stabilized zirconia (ZYC, Zircar, Inc) with disc- shaped end plates made of an aluminosilicate refractory board (SALI, Zircar, Inc). The zirconia cylinder was 7 cm high with an outer diameter of 10.2 cm and the two aluminosilicate end plates were each 10.2 cm in diameter and 2 cm thick (Figure 67). Processing temperatures ranged from about 1050°C for the MarcorTM to about 1625°C for the alumina. The specimen temperatures were measured using an optical pyrometer (Acufiber Optical Fiber Themometer, Model 10, Luxtron Co., Beaverton, OR), which was aligned with a viewport in the microwave cavity and a 5 mm diameter circular hole in the casket wall (Figure 67). CHARACTERIZATION OF THE J OINED CERAMICS Using the silica film interlayer, fifteen pairs of MaCorTM specimens were successfully joined at temperatures between 1050°C and 1075°C. Five of the 15 specimens were joined with no extemally-applied loading, while the 10 remaining specimens were joined using a 20 gram dead-weight load applied during joining using a sintered alumina disk placed on top to the specimen to be joined. Notches cut normal to the joined surfaces (using the Sonic-Mill) retained their shape very well during the joining process. For example, for a notch 331 microns depth and 228 microns wide prior to joining, the notch dimensions after joining decreased by only about 5-percent, to a width of 314 microns and a depth of 215 microns. 168 Directional Power meter Cylindricalsingle-mode microwave cavrty coupler ”l”. O o 010 Specimen Magnetron Circulator / \. Z \ / : Dumm load {127 y o 01: Casket § © [2:] —[§° "E EOptical Power supply controller pyrometer Motor controller for probe 1‘“ ‘ l “III ‘1 III—l 000130 000 , 00090 000 l i—L E accufiber model 10 ll 2 Optical Fiber “HE Therm omete Motor controller for short Figure 66. Schematic diagram of the microwave apparatus used to sinter and to join the ceramic specimens (after Lee, Case, and Asmussen, 1997). 169 Cavity wall / -\ View port A Casket Spejcrmen View SALI / PortB\? zvc\ :11111éLJ E ,/ 1) ) ' : ------ 11111111 ”’1 1:1—1 Optical pyrometer SALI I 11 L '\ j Silica window Cavity bottom plate Figure 67. Schematic showing cross-sectional view of the microwave cavity, with the refractory casket centered along the cavity axis. The casket, composed of a hollow zirconia (ZYC) cylinder and disc-shaped aluminosilicate (SALI) endplates, encloses a ceramic specimen. The specimen temperature is measured by an optical pyrometer. 170 The microwave-sintered alumina specimens also were joined using a spin-on silica layer. Joining was accomplished at temperatures between about 1550°C and 1640°C. Microstructural examination in both a conventional Scanning Electron Microscope (SEM) and a Environmental Scaning Electron Microscope (ESEM) showed no apparent “bonding layer”, the microstructure seemed quite continuous across what was the plane of the join. (Unlike the SEM, no conductive metal specimen coating is required to examine ceramic specimens in the ESEM, thus the joint region in the specimens could be examined in the ESEM without possible interference from an applied conductive surface coating. The joined alumina specimens were fractured in bend, and the fracture plane did not deviate at the join. In addition, Vickers indentation cracks were induced into the joined alumina specimens (near the interface), and the subsequent Vickers cracks propagated undeflected across the interface. The macrocrack behavior and the indentation crack behavior both suggest that the alumina/alumina bond has very high mechanical integrity. In addition to the alumina specimens, zirconia specimens were joined at temperatures from about 1450°C to 1520°C, but the mechanical properties of the bonds have not yet been fully evaluated. The MgF2 specimens did not join using the spin-on silica film, but the MgF2 specimens did join upon heating at 700°C for 20 rrrinutes, using the sodium silicate solution as a bonding agent. The IR transmittance of the microwave-joined MgF2 specimens was measured over the wavelength range of 880 nm to 1600 nm using a spectraphotometer. For specimens of equivalent thickness, the transmittance of the microwave-joined specimens was nearly identical to the transmittance for un joined specimens over the measured wavelength range. MgF2 specimens also were joined at under the same conditions (sodium silicate solution bonding agent, heated to 700°C for 20 minutes), but using the conventional 171 radiant heating rather than microwave heating. Due to scattering at second phases observed only in the bonded region of the conventionally-heated MgF2, the transmittance of the conventionally-heated MgF2 was considerably lower than the microwave-joined MgF2 for specimens of equal thickness. At 1600 nm the transmittance of the microwave-joined specimens were about a factor of two higher than that for the conventionally-joined material. CONCLUSIONS Joins made using microwave heating of spin-on interlayers can be made both quite thin and quite strong. For the joined alumina specimens, the bond layer after joining could not be detected using a Scanning Electron Microscope. In addition, a Vickers indentation crack placed near the interface propagated across the interface without deflection. The transmittance of optical and infrared materials can be a function of the joining technique, as was observed for magnesium fluoride. Presumably, the degradation of optical properties is due to optical scattering by second phases that form in the bond region during firing. The genesis of the differences in microstructure between the conventionally-fired and the microwave heated specimens needs further study. Using spin-on interlayers and microwave joining, ceramic specimens can be joined without significantly perturbing either the dimensions or the geometry of submillimeter notches cut into the specimen (for the MaCorTM, alumina, and zirconia specimens). 172 ACKNOWLEDGMENTS The author acknowledges the financial support of the Michigan Research Excellence Fund provided through the Electronic and Surface Properties of Materials Center, Michigan State University REFERENCES 1. Elssner, G., Diem, W. and Wallace, J. S., 1981, pp. 629-639 in “Surfaces and Interfaces in Ceramic and Ceramic-Metal Systems”, Edited by J. Pask and A. G. Evans, Plenum Press, New York. Lee K. Y, Case E. D., Asmussen, J. Jr., and Siegel M., 1996, "Binder Burnout in a Controlled Single-Mode Microwave Cavity," Scripta Materialia, 35[l]:107-111. Lee K. Y, Case E. D., and Reinhard D., 1997, “Microwave Joining and Repair of Ceramics and Ceramic Composites,” Ceramic Eng. and Sci. Proc., 18: 543-550. Lee K. Y, Case E. D. and Asmussen, J. Jr., 1997, "The Steady-State Temperature as a Function of Casket Geometry for Microwave-Heated Refractory Caskets,” Materials Research Innovations, l[2]: 101-116. Sandhage K. H., Schmutzler H. J., Wheeler R., and. Fraser H. L, , 1996, "Mullite Joining by Oxidation of Malleable, Alkaline-Earth-Bearing Bonding Agents", J. Am. Ceram. Soc., 79[7]: 1839-1850. Santella M. L., "A Review of Techniques for Joining Advanced Ceramics", 1992, Amer. Ceram. Soc. Bull., 71: 947-954. Schaffer J. P., Saxena A., Antolovich S. D.,. Sanders T. H, Jr., and. Waner S. B, 1995, pp. 718 - 720 in The Science and DCSIQ of Engineering Materials, Irwin Press, Chicago. Seiber K. N ., Lee K. Y and Case E. D., 1997, "Microwave and Conventional Joining of Ceramics using Spin-on Materials,” pp. 941-949 in Proceedings of the 12th Annual Advanced Composites Conference, Technomic Publishing Co., Lancaster, PA. Yen T. F.,. Chang Y. H, Yu D. L., Yen F. S., Tsai D. S., and Lin I-Nan, 1991, “Diffusion bonding of MgF2 optical ceramics,” Mat. Sci. and Engineering, A147 121- 128. 173 10. Yen T. F.,. Chang Y. H, Tsai D. S., Duh S. L., and Yang S. J., 1992, “LiF-film-assisted diffusion bonding of MgF2 ceramics,” Mat. Sci. and Engineering, A154, 215-221. 174 3.8 Joining Dissimilar Ceramic Materials JOINING DISSIMILAR CERAMIC MATERIALS J. G. Lee, E. D. Case, L. Zeng, and M. A. Crimp Materials Science and Mechanics Department Michigan State University East Lansing, MI 48824 Abstract Bi-material ceramic joins will be discussed, where the joining was accomplished by heating in a single—mode microwave resonant cavity. The joined ceramics include the following combinations of polycrystalline ceramics: (1) alumina and a partially stabilized zirconia (2) SiC platelet reinforced alumina and a glass ceramic, (3) hydroxyapatite and a glass ceramic, (4) zirconia - 3 mol% yttria and a glass ceramic and (5) an 85wt% alumina - 15 wt% partially stabilized zirconia particle composite and partially stabilized zirconia. The glass ceramic used was a commercial glass ceramic reinforced by mica platelets. Introduction The past few years, researchers have bonded ceramics with a variety of metals, other ceramics and with polymeric materials [1 -13]. A number of researchers have used brazing techniques to join metals with ceramics such as silicon nitride [l], sialon [2], molybdenum disilicide [3], and aluminum nitride [4]. In addition, ceramics have been joined to ceramics using brazing, where a metallic interlayer is used to join the ceramic components. However, the final bond thickness can be 40 to 50 microns thick or more [5]. E, D. Case, J. G. Lee, L. Zeng, and M. A. Crimp, “Joining of Dissimilar Ceramic Materials”, Joining of Advanced and Speciality Materials 11, ASM International. Materials Park, OH. pp. 10-17 (2000) 175 In contrast with the studies that join ceramics using thick bond layers, work done by the current authors and co-workers [6 - 10] has focused on minimizing the bond thickness. While we have joined like materials (such as alumina to alumina, or silicon carbide to silicon carbide), dissimilar ceramics have been joined, including: (1) alumina/zirconia- 3 mol% yttria, (2) SiC platelet reinforced alumina/glass ceramic, (3) hydroxyapatite/glass ceramic, and (4) zirconia - 3 mol% yttria/glass ceramic, where the glass ceramic used was MaCorTM, a commercial glass ceramic reinforced by mica platelets and (5) an 85wt% alumina — 15 wt% partially stabilized zirconia particle composite and partially stabilized zirconia. As used in this paper, the term “dissimilar” refers to a number of material properties. For example, among the ceramic materials included in this study ( alumina, zirconia- 3 mol% yttria, SiC platelet reinforced alumina, hydroxyapatite, and a mica reinforced glass ceramic, MaCorTM) the linear coefficient of thermal expansion ranges from a 9 X 10'° K’1 for zirconia to 17.5 X 10“5 K" for HAP (Table 21). In addition, the thermal conductivites and the Young’s modulus for the materials included in this study also span a broad range of values (Tables 22 and 23). Experimental Procedure Materials Two of the materials used in this study were commercially obtained as densified billets, while the remaining materials were microwave sintered from commercially TM available powders. One of the commercial materials included in this study was MaCor (Corning Code 9658), which is a flurophlogopite mica platelet reinforced glass ceramic 176 in the system SiO2-AI2O3-MgO-K2O-F. In addition to MaCorTM , the other commercial material included was an A1203/SiC platelet composite material having 80 volume % alumina and 20 volume % SiC platelets (Max Tech, Inc, Lansing MI). The three commercial ceramic powders used in this study include a partially stabilized zirconia powder, an alumina powder, and a hydroxyapatite (HAP) powder (Table 24). The partially stabilized zirconia powder was a 3 mol % yttria-zirconia powder (TZ-3YS, Tosoh Ceramic Division, Bound Brook, New Jersey) powder having a vendor-specified initial particle size of 350 nm and 7 mZ/g specific surface area, as determined by BET measurements [14]. A 99.99 % pure alumina power (TMDAR, Taimi Chemicals Co. LTD) was also used, which has a vendor-specified specific surface area of 13.6 mzlg specific surface area and a 0.21 micron average initial particle size, and 2.32 g/cm3 green density. The calcium hydroxyapatite (HAP, Calo(OH)2(PO4)6) specimens were prepared using a nominally 99% pure powder (CeracTM Incorporated Specialty Inorganics) having an initial particle size of roughly one micron as determined by direct SEM measurements on the HAP powders. Specimen preparation The alumina, zirconia, and the alumina/zirconia composite powder specimens were first made into powder compacts using uniaxial pressing in a hard die at approximately 32 MPa. The as—pressed dimensions of the disk-shaped powder compacts were approximately 2 cm in diameter and 2 mm in thickness. All of the specimens sintered in this study were processed inside an aluminosilicate casket (Figure 68) using a microwave cavity (Figure 69). 177 For the alumina and zirconia powders, four to seven compact powder specimens were then sintered in a 2.45 GHz single mode microwave cavity (Model CMPR-250, Wavemat, Inc., Plymouth, MI, Figure 69). The microwave power supply was a Sairem, Model MW PS 2000, which generates from zero to 2000 Watts of microwave power. During sintering, the sintering temperature was controlled by adjusting an input power with automatic sliding short and probe [6 - 10]. Before sintering, the specimens were placed in a ceramic specimen enclosure (casket) composed of a hollow, porous partially stabilized zirconia cylinder capped on the top and bottom with disk-shaped aluminosilicate end plates (Figure 69). The casket was then placed in the microwave cavity, which the center of the casket aligned coaxially with the microwave cavity. The specimen temperature was monitored using an Optical pyrometer system (Accufiber Optical Fiber Thermometer, Model 10, Luxtron Co., Beaverton, OR), which was sighted through a 0.5 mm circular hole that was drilled through the porous zirconia cylinder that comprised the body of the casket. In contrast to the microwave sintering of the alumina and zirconia compacts, all the HAP specimens included in this study were sintered in air in a conventional furnace at 1300°C for 11 hours, giving relative densities of up to approximately 95 percent of theoretical. For the commercially densified materials, the as-received billets of both the MaCorTM and the Al2O3/SiC platelet composites (Max Tech, Inc, Lansing MI) were cut into specimens approximately 1 cm X 1cm using a low speed diamond saw. All of the ceramic materials included in this study were polished using a series of diamond paste, with grit sizes from 35 microns to 1 micron. After polishing, the 178 specimens were cleaned for 20 minutes in an ultrasonic cleaner using de-ionize water and detergent. After polishing and cleaning, the specimens were coated with the organic silica precursor liquid (Emulsitone Company, Whippany, New Jersey). In order to coat the specimens with a thin, uniform film of silica, the specimens were placed on a commercial high speed substrate spinner. Four to five drops of the silica precursor were pipetted onto the specimen surface. The specimens were spun at 3000 rpm for 20 seconds, followed by curing in air in an electrically heated furnace for 20 minutes at 200°C. Joining Procedure Joining was performed via microwave heating. The coated Specimens were placed in the same 2.45 GHz single-mode microwave cavity (Model CMPR-250, Wavemat Inc., Plymouth, MI) used in sintering the powder compacts. Also, the same cylindrical zirconia refractory casket insulated the specimens during joining. Alumina dead weights ranging from 20 to 50 grams were placed on the specimens prior to joining. The joining was performed at temperatures between 1020°C to 1500°C (Table 25). A summary of the joining conditions is given in Table 25. The joined specimens were then sectioned using a low speed diamond saw. The cut sections of the specimens were mounted with in a thermal setting polymer. The cut surfaces were polished with a series of diamond paste. The joined specimens were then examined in a Scanning Electron Microscope (SEM). TEM specimens were prepared by sectioning joined specimens in a low speed diamond saw. Disks 3 mm in diameter were then cut from the sections using an ultrasonic disk cutter. The disks were glued into Molybdenum rings and dimpled using a VCR 179 Model D5001 dimpler. The final thinning was done using a Gatan PIPS with single-sided milling at an angle of 4 degrees. TEM observations were made at 200 kV using a Hitachi H-800 microscope. Results and Discussion Dissimilar ceramics may also be taken to mean dissimilar in terms of their use. The ceramics included in this study represent a broad spectrum of current and potential uses, as will be briefly discussed here. MaCorTM is used as electrical and/or thermal insulators and structural components, as well as in electrical and opto-electronic devices [15]. MaCorTM is a very interesting material since it is machinable using ordinary metal working tools. The physical basis for the machinability of MaCorTM is the mica platelets that are randomly distributed in its glass ceramic matrix. Cracks that form during the machining of MaCorTM interact with the mica platelets such that when the MaCorTM is machined, cracks deflect around the platelets rather than propagating long cracks. Ceramic — ceramic joining that provides a machinable ceramic base for a component or component assembly has many potential advantages. For example, such machinable bases may aid in interfacing ceramic components in a variety of environments, such as allowing convenient attachments for engine or biological applications. HAP is a bioacitve ceramic material, in that when it is in contact with either blood or simulated biological fluid, bone grows on its surface. In fact, the major mineral constituent of both bones and teeth is HAP, although living bones and teeth have a 180 significant non-mineral content. Consequently, HAP is used for hard tissue implants because of its close resemblance to human bone and teeth. Alumina and zirconia have widespread use as ceramic materials. The 3 mol% yttria- partially stabilized zirconia included in this material has excellent fracture toughness. Both alumina and zirconia have important uses as bioinert ceramics [l9], ceramics that unlike HAP do not induce bone growth and their surfaces when subjected to biological fluids, and hence are use materials for replacement joint surfaces, where one does not wish to induce bone growth [19]. The alumina — zirconia joins (Figures 70 and 71) were quite interesting. The SEM micrograph (Figure 70) shows are very interface that lacks a discemable interface. In fact, the interface is slightly uneven (on the scale of the grain size within the specimen). In greater detail, the TEM micrograph (Figure 71) shows that after joining, the interface between the two materials lack an apparent interface layer, although a silica layer (approximately 150 nm thick) had been applied to both the alumina and the zirconia prior to joining. These types of microstructures are similar to those observed during Transient Liquid Metal Phase bonding in alloy materials [21]. Figure 72 shows a channel, approximately 400 microns wide at the “top” of the channel and about 175 microns deep that was formed in a 85 wt% alumina - 15 wt% zirconia specimen. Figure 72 depicts the channel following sintering of the 13500 C for one hour in the microwave cavity described in the experimental procedure section. The specimen was then polished and joined with a sintered and polished zirconia disk (Figure 73), where the joining was done at 1450°C, with a hold time of 20 minutes and a dead weight loading of 20 grams (Table 26). As was the case with the other joins, a silica 181 interlayer was used, where the silica film was applied to only the zirconia before joining. Such channels could be of interest in to distribute fluids (such as cooling fluids, fuels, or biological fluids) in a component. For the MaCorTM — 3 mol% yttria-zirconia bonds, SEM and TEM micrographs are shown in Figures 74 and 75, respectively. Figure 75 shows considerable grooving of grains at the MaCorTM — zirconia interface, which may be indicative of considerable local dissolution of the zirconia. It should be emphasized that although silica interlayers were applied to all specimens prior to bonding, preliminary TEM observations of the joints has revealed direct bonding of the base materials, with no evidence of interfacial bond layers. For example, Figure 75 shows the interface between MaCorTM and 3-mole% Y stabilized ZrO2, which shows extensive wetting of the ZrO2 by the glassy matrix of the MaCorTM. This results in significant interlocking along the interface. In comparison, the TEM micrographs of the A1203—Zr02 bonds (Figure 71), show some wetting, but the wetting that is observed is more limited than in the MaCorTM-Zr02 case. The A1203 and ZrO2 appear to have bonded directly and possesses sharp interfaces. These results indicate that there may be a number of joining mechanisms operative in this specimens as one spans the spectrum of materials with a considerable glassy phase (such as MaCorTM) to those materials with very limited grain boundary phases, such as the alumina and zirconia materials included in this study. Acknowledgments The authors acknowledge the financial support of the Composite Materials and Structures Center and the Electronic Surface and Properties of Materials Center, College of Engineering. Michigan State University. 183 Table 21. Thermal expansion coefficients for the Materials Included in this Study Materials Temp. Interval Thermal expansion (10'6 K' References MaCorw 25°C-300°C 9.3 15 A1203 25°C-1000°C 8.8 17 ZrO2 Room Temp 9 14 ZrO2 25°C-1000°C 1 l 14 HAP 25°C400°C 14.5 16 HAP 400°C-800°C 17.5 16 Table 22. Thermal Conductivites of the Materials Included in this Study Materials Thermal conductivity References MaCorm 1.46 W/m -°C A1203 30.0-35.0 W/m -K ZrO2 N/A HAP 0.013 J s'Tm" K" Table 23. Young’s moduli for the Materials Included in this Study Materials Young’s moduli References MaCorTM 64 GPa A1203 390 GPa ZrO2 190 GPa HAP 80 —100 GPa 184 Table 24. Sintering conditions for materials used in this study. Materials Initial Mass Sintering Sintering Final particle Temp Time Density size Alumina 021 um 2 grams 1300°C 1 hour 96 % Zirconia 0.59pm 3 grams 1375°C 1 hour 97 % HAP 10 grams 1300°C 11 hours 2.974 g/crn3 Table 25. Processing conditions for dissimilar materials using microwave power. Materials Joined Joining Hold Dead Spin-on interlayer Temp(°C) Time Weight (min) (gm) ZrO2 with A1203 Silica film 1500 20 50 HAP with MaCorTM Silica film 1020 20 20 ZrO2 with MaCorTM Silica film 1020 20 20 sick/(1121523113 “h Silica film 1020 20 20 185 10.3cmforlnrpeubt L 7.3cmtorsmallennui-t4I VI 1' Alumlno- —, sum 1 and plate '— 72cm glylnlonlam 3cm View l‘l010\ m V W ’— 3“ 4:05 cm NUI'I'III'IO- - fir— ..... ., and plate Figure 68. Schematic of the insulating casket used in this study for both microwave sintering and microwave joining. 186 Insulation cuv it)” Figure 69.Photograph of the single-mode, 2.45 GHz microwave cavity used both to Sinter the alumina, zirconia, alumina/zirconia powders and to join all specimens included in this study. The pyrometer and the insulating cavity (casket) also are shown. 187 A1203 4-Interface 5 um Figure 70. SEM micrograph of the bond region of a joined alumina — zirconia specimen. Note the absence of a discemable bond layer between the two joined specimens. 188 3 .- A1.“ Figure 71. A TEM micrograph of the bond region of the same alumina — zirconia specimen depicted by an SEM micrograph in Figure 70. In the TEM micrograph, no significant bond layer is visible. 189 Figure 72. A SEM micrograph of a microwave-sintered 85 wt % alumina — 15 % zirconia specimen containing a “pressed-in” channel. 190 A1203—Zr02 composite 106-Em Figure 73. The notched 85 wt % alumina — 15 wt% zirconia specimen depicted in Figure 72, joined with a partially stabilized zirconia (3 mol% yttria — zirconia) specimen. 191 Figure 74. A SEM micrograph of the join between zirconia and MaCorTM. 192 Figure 75. A TEM micrograph of the MaCorTM - zirconia join, for which there appears to be extensive wetting of the interface by the glassy matrix phase of MaCorTM. 193 10. ll. 12. 13. I4. 15. References . G. Chaumat, B. Drevet, and L. Vernier, J. European Ceram Society, 17 [15-16], 1925- 27 (1997). A. P. Xian, J. Materials Science, 32 [23], 6387-93 (1997) S. D. Conzonne, D. P. Butt, A. H. Bartlett, J. Mater. Sci, 32 [13], 3369-74 (1997) D. Huh and D. H. Kim, J. Materials Res, 12 [4], 1048-55 (1997) L. Esposito, A. Bellosi, S. Guicciardi, G. de Portu, J. Mater. Sci., 33 [7] 1827- 36 (1998) K. N. Seiber, K. Y. Lee, and E. D. Case, pp. 941-949 in Proceedings of the 12th Annual Advanced Composites Conference, Technomic Publishing Co., Lancaster, PA. (1997) E. D. Case, K. Y. Lee, and J. G. Lee, pp. 17 - 20 in Proceedings ofthe 33rd International Microwave Power Symposium, lntemational Power Institute, Manassas, VA. (1998) E. D. Case, J. G. Lee, and K. Y. Lee, pp. 17 - 26 in Joining ofAdvanced and Specialty Materials, M. Singh, J. E. Indacochea, and D. Hauser, eds., ASM lntemational, Materials Park, OH. (1998) E. D. Case, K. Y. Lee, J. G. Lee, and T. Hoepfner, pp. 27 - 34 in Joining of Advanced and Specialty Materials, M. Singh, J. E. Indacochea, and D. Hauser, eds., ASM lntemational, Materials Park, OH. (1998) J. G. Lee, K. Y. Lee and E. D. Case, pp. 509 - 520 in Ceramic Transactions, Volume 94, American Ceramic Society, Inc., Westerville, OH. (1998) C. Mukherjee and Eldon D. Case, submitted, J. European C eram. Soc. (1999) C. Mukherjee, E. D. Case, K. Y. Lee, and A. Lee, accepted for publication, J. ofMat. Sci. (1999) C. Mukherjee, E. D. Case and A. Y. Lee, Accepted for publication, Ceramic Eng. and Sci. Proc., Volume 20. (1999) For Tosoh TZ-3YS partially stabilized zirconia powders, data from vender web site (www.tosoh.com) MaCorTM data from vender (Corning) web site 194 16. Je-Won Choi, Young—Min Kong, and Hyoun- Ee Kim, J. Am. Ceram. Soc., 81 [7] 1743-48 (1998) 17. W.D. Kingery, H.K. Bowen, and D.R.U. Uhlmann, p 595, Introduction to Ceramics, Second Edition, New York, NY. (1976) 18. M. Barsoum Fundamental of Ceramics, p 401 and 505, First edition, McGraw—Hill, New York, NY. (1997) 19. L. L. Hench, J. ofAm. Cer. Soc., 81, [7] 1711 (I998) 20. Kijima T, Tsutsumi M, J. ofAm. Cer. Soc., 62, 455-60 (1979) 21. W. F. Gale, JOM, 51[2], 49 — 52, (1999). 195 Discussion and Conclusion 4.1 Thermal Stress in the Dissimilar Ceramics Joined in This Thesis In this thesis, the dissimilar ceramics were joined using a silica spin-on interlayer (section 3.8 in this thesis). The different thermal expansion between two dissimilar ceramics caused thermal stress in the joint. We shall use research of Ning et a1. [61] and Lee et al. [57] to help in our analysis of stresses developed in the materials joined in this thesis. Ning et al. [61] reported joining of Si3N4(13 mm square and 20 mm long) with a 99.992 % pure aluminum foil (no dimension was reported) to produce a 6 mm thick braze. The bond layer formed a silica —a1umina noncrystalline layer after the specimen was heated at 800°C between the Si 3N4 and Al braze. The thermal expansion mismatch caused thermal stress in the joint upon cooling. According to Ning et al. [61], “If two dissimilar materials can deform only elastically with stress and the stresses developing on both sides of the bond layer do not interfere with each other” [59]. Ceramic materials used in this thesis deform elastically to fracture. Ning et al. [61] evaluated the thermal stress of dissimilar joined specimens using the mismatch in coefficient of thermal expansion by [57, 61] E‘ El ( )AT (1) 0° =—0' - =—— at—a- ' 1 E,- + E j ’ l where E is Young’s modulus, or is the thermal expansion coefficient, ATis (Tfinal'Tinitial) and i and j are the materials being joined. Assuming elastic deformation, 0',- = E its,- and O'j = Ejej , where the thermal strain is given by 81: or iATand ej = (IjAT. In figure 76, material i, which has a lower thermal expansion coefficient, experiences a compressive stress and material j, which has a higher thermal expansion coefficient, experience a 196 Elastic deformation 0' = EaAT material 1' material j Upon cooling —8;' -> -— —- <- ' - ' - AT _, L; I materralz I :‘J ‘_ 4— 1 material j 1 81 -> alzajAT 4- -> -> 4- Compressive -> <- -> 4- stress 4- -> ° ‘_ _, Tensrle " + stress (I. = -6 Figure 76. A schematic of the thermal stress induced in two different joined materials upon coohng. 197 tensile stress. The tensile and compressive stresses are equal in magnitude, thus, 0',- = —0 j . Equation (1) may be derived as follows: O’iinS[=—O'j=EjEj (2) 5total = 8i “Ej (3) o- '0' 812—1. and£j=—Jf (4) 1 J 0i “j 0i 0i e :—--—-=——+—— o-z—o') 5) total Ei Ej Ei Ej( t J ( 1 l Etotal =01 (3+?) (6) l J solving for 0',- gives EiEj (7) 0" = ———-—-——8 t Ei + Ej total since Etotal = 8,- — 81° and Etotal = OtiAT- (IjAT: (01,-- Olj)AT (8) since ATthe same in both cases. Substituting equation (8) into (7) yields EiEj —Ei+EJ‘ O',‘ (Oti—aj)AT=—0'j Figure 77 showed different thermal stress distribution between two materials being joined. Compressive stress (lower thermal expansion) was denoted with minus Sign while tensile stress was denoted with plus sign. Ning et al. [61] assumed the silica —alumina noncrystalline layer to be mullite. The thermal stresses calculated according to equation (1) were (for the following dissimilar 198 Table 26. Thermal properties of materials used in reference [61]. Materials Thermal expansion (10’6 K") Young’s moduli Al 23 70 GPa Si3N4 2 300 GPa Mullite 5 100 GPa Table 27. Thermal properties of materials used in reference [57]. Materials Thermal expansion (10° 0C‘]) Young’s moduli Inconel 600 12.1 214 GPa Ti braze 8.9 106 GPa 199 material combinations) Si3N4/Al = 476 MPa, Si3N4/mullite = 114 MPa, and mullite/Al = 296 MPa, the data from Table 26. Ning et a1. [61] explained that the lower thermal stress in the 513N4 and silica-alumina noncrystalline layer due to smaller CTE difference between the Si 3N4 and silica-alumina noncrystalline layer than that of CTE difference between the 813N4 and Al. However, no cracks were reported for Si3N4/Si3N4 joint using the Al braze with a joint strength of 146 MPa. Thus, the strength of the joint was not strong enough to overcome the thermal stress. Following Ning et al. [61], Lee et al. [57] joined 10 mm x 10 mm x 5 mm bar of 99 % alumina that was joined with a 10 mm diameter and 5 mm height Inconel 600 disk. The Inconel 600/alumina specimen showed a crack in the alumina joint. Using table 27 and AT = 1000°C, the thermal stress was about 560 MPa. Due to the thermal stress, a crack was produced continuously at the alumina joint (Figure 78). As expected from Ning et al’s work [61], the joint strength was poor due to high thermal stress. Lower thermal stress was calculated 90 MPa (using table 27). When a Ti braze was used as a bond agent, no cracks were found. Table 31 shows calculated thermal stress values of joined alumina with zirconia (3 mol % yttria), zirconia (3 mol % yttria) and MaCorTM with HAP used data from table 28 and 29. These thermal stresses may exceed the strength of materials being joined and thus could produce a crack in the bond layer. However, unlike the results from Ning and Lee, no cracks were observed despite the difference in CTE (Coefficient of Thermal Expansion) between two substrates. Silica-film after coating and curing was about 130 nm (very thin), thus, the bond layer was ignored to calculate thermal stresses of joined A1203 with ZrO2 (Figure 70). HAP with MaCorTM (Figure 38), and ZrO2 with MaCorTM (Figure 74). 200 interface 1 lfigher g thennal ,: expansunr CID x lower _ thennal expansunr Figure 77. A schematic of different thermal stress distribution between two materials that have been joined along a planar interface [61]. 201 Alunnna A Him + lun Inconel600 SOOlun Figure 78. A continuous crack occurred in alumina due to compressive thermal stress. The spacing between alumina and interface was about 500 um and the crack started from the interface [57] 202 Table 28. Thermal expansion coefficients for the materials included in this thesis. Materials Temp. Interval Thermal expansion (10'6 K”) References 25°C-300°C 9.4 MaCorTM 25°C-600°C 11.4 58 25°C-800°C 12.6 A1203 25°C-1000°C 8.8 38 ZrO; Room Temp 9 60 ZrO2* 25°C-1000°C l l 59 HAP 25°C-400°C 14.5 41 HAP 400°C-800°C l 7.5 2102* : 3 mol % ytrri — zirconia (Tosoh InC) Table 29. Young’s moduli for the materials included in this thesis. Materials Young’s moduli References MaCorTM 64 GPa 43 A1203 390 GPa 39 ZrO2* 200 GPa 60 HAP 80 -100 GPa 36 ZrO2* : 3 mol % ytrri - zirconia (Tosoh InC) Table 30. Poisson’s ratio for the materials included in this thesis. Materials Poisson’s ratio References MnCorTM 0.29 58 A1203 0.25 39 ZrO2 0.30 60 HAP 0.28 62 Table 31. Calculated thermal stress values of joined specimens Joined Materials Calculated Thermal stress A12O3/ZrO2 501 MPa ZrO2/MaCorTM 100 MPa HAP/MaCorTM 247 MPa 203 Alumina with zirconia joined specimen showed an almost invisible bond layer and no cracks although occassional quasi-elliptical pores were observed in the bond layer. Alumina has a lower thermal expansion coefficient. From equation (1), the calculated thermal stress was 501 MPa which is a compressive in the alumina. The partially stabilized zirconia tensile strength was 520 MPa [63]. The calculated thermal stress in the partially stabilized zirconia was 501 MPa. Thus, the partially Stabilized zirconia tensile strength was higher than the thermal stress induced due to joining PSZ with alumina. The MaCorTM tensile strength was 90 MPa [64] and the calculated thermal stress in joined HAP with MaCorTM was 247 MPa. Due to the thermal expansion coefficients (equation 1) the stress in the MaCorTM should be tensile. Since the tensile stresses in MaCorTM far exceed its tensile strength, the MACorTM should fracture according to equation (1). However, no cracks were found with MaCorTM. 4.2 Summary of Results Thin and strong bond layers can be produced using spin-on interlayers as bonding agents in ceramic/ceramic joining. Using various spin—on interlayers, ceramic/ceramic joining was successfully done in this thesis. The joined ceramics include MgF2/MgF2 ([49], section 3.1 of this thesis), alumina/zirconia composites with alumina/zirconia composites, a mica platelet reinforced glass ceramic (MaCorTM) with zirconia -3mol % yttria, MaCorTM with polycrystalline hydroxyapatite and SiC platelet reinforced alumina with MaCorTM ([50], section 3.2 in this thesis), alumina with zirconia —3 mol % yttria ([56], section 3.8 in this thesis), and SiC with SiC ([53], section 3.5 in this thesis). 204 The optical transmittance of joined MgF2 [49] was higher for the microwave joined specimens than for the conventionally joined specimens. Microwave joined infrared material (MgF2) showed optical absorption factor or (0.156) which was similar to the or value measured for a polished MgF2 specimen (0.149). Conventionally joined MgF2 showed higher or (0.342) due to second phases in the bond-layer caused by optical scattering, where the higher or value indicates the conventionally joined specimens transmitted much less of the IR radiation than did the microwave joined specimens. Bond-layers of joined dissimilar ceramics were in range of 0 to 3 microns thick except SiC platelet reinforced alumina with MaCorTM joined specimen bond layer (10 microns, Figure 40) due to a reaction bond-layer. The “zero” thickness bond layer refers to those cases in which a bond layer was not observed by either SEM or TEM observation. Observation by TEM (work done by L. Zeng and M. A. Crimp in section 3.8 in this thesis) showed no apparent bond layers in joined alumina with partially stabilized zirconia. Ceramic/ceramic joining was successfully done without significantly changing the dimensions in alumina/zirconia composites, fully stabilized zirconia, partially stabilized zirconia, MaCorTM, and hydroxyapatite using a silica spin-on interlayer. The averaged notch dimension of about 400 microns depth and 350 microns width were measured and calculated from table 17, 18, 19, and 20 in this thesis. Table 32 shows each averaged notch dimension in depth and width. Each measured notch depth and width produced in one specimen was added, then divided by the number of notches. The dimension change notch was calculated by the following equation. Averaged notch depth before joining - Averaged width afterjoining X 100 Averaged depth before joining 205 Table 32. Averaged notch stability before and after joining in this thesis. . # of Notch Notch . Notch Notch . Material Width, Width, Difference depth, depth, Difference Notched “(2:11 before after (%) before after (%) joining joining joining Joining Ale3/Zr02 3 317nm 311 11m 2 % 329 pm 327 um I % **ZrOz 4 318 um 315 11m 1% 419 um 415 11m 1% *ZrO2 5 372 11m 375 um I % 264 11m 247 11m 3 % MaCorTM 3 340 11m 346 pm 2 % 431 run 444 um 3 % HAP 3 335 um 330 pm 2 % 431 pm 444 um 3 % *ZrO2: 3 mol % yttria-zirconia **ZrO2: 8 mol % yttria-zirconia *ZrO2 was joined with MaCorTM (no notches were made in MaCorTM) 206 The differences of the notch dimension before and after joining were 3 % in depth and 2 We in width after average difference of each single notch from table 17, 18, 19, and 20 ([52], 3.4 in this thesis). Using BlackglasTM spin-on interlayer, one conventionally joined SiC (Hexoloy) with SiC (Hexoloy) at 900°C showed smooth and thin (in range of 2 to 3 microns thick) bond layer ([53], section 3.5 in this thesis). 4.3 Future Studies Conventionally joined SiC with SiC followed heat-treatment by the microwave at 1200°C for 20 minutes showed a decreasing bond layer. Additional heating made a thinner bond layer. However, the nature of additional heating should be studied further. 207 Appendices APPENDIX A Literature surveyed joining techniques cited in introduction section. The number was set via references number. Table A1. Joining materials, dimension, adhesive, thickness of adhesive, heating method, heating rate cooling rate, Tum, hold time, bonding pressure, mechanical test, span length, dimension, loading rate, cross speed, micrograph, thickness of bondlayer, strength of material, bonding or shear strength, and atmosphere were written. Reference number 1 to 18 used bonding agent during joining. Refere Materials Dimension Adhesive Thickness of Heating -nces adhesive method 1 Si3N4 with 10 mm in diameter Pure nickel 0.2-0.8 mm Diffusio Zirconia 5 mm thick foil n bonding furnace Hot pressed Y-sialon sialon Hot pressed 1 5x1 5x 5mm bar or Y-sralon sralon hot ressed dic of Hot pressed p . Y-sialon Unknow 2 . 20 mm diameter Slurry sralon -n and 5 mm . Pressureless . Y-sralo . . thickness srntered sralon Pressureless Y-sialon sintered sialon Si3N4 with Not 3 Si3N4 20x20x8 mm glass Slurry Slurry reported Ag-Cu-Ti No AIN with Ag-Cu-Ti- No Convent 4 copper Not reported Co ional or tungsten Ag-Cu-Ti- furnace No Nb Sl3N4 With Y203-SIOz- 5 Si3N4 20x20x8 mm A12 03-Si3N4 Slurry Furnace 6 Sialon with 25x20x5 mm Y2O3-SiO2- Slurry Furnace sialon Ale3-SI3N4 . . methyl- 7 RBSIC.Wlth 76x7x6 mm3 hydroxyl- 18i4ltm Furnace RBSlC . sfloxane ZrO2/T1/ZrO 10 mm in diameter ZrO /Pt/T'/ZrO 5 mm height f°r Convent 2 ' TZP Ti-6wt%Al- . 8 2 lelel mm for 4wt%-V mm)“ mm mm“ ZrO2/Pt/ Ti- Ti furnace 6wt%Al- 4wt%-V 209 Refere Heating Cooling Tmax Hold time Bonding Mechani -nces rate rate pressure -cal test 1 5- lOoC/min 1000- 90 min 20-37 MPa Shear 25°C/min 1 100°C strength 1130°C 1 hour 5 MPa Not Not 1400:C 1 hour 5 MPa Microha 2 reported reported 1600 C 1 hour 5 MPa rdness 1600°C 1 hour 0 MPa test (Hv) 1600°C 1 hour 0 MPa Three 3 10°C/min NOI 145(1),- 10-20 min No pressure point reported 1750 C bend 820-920°C 0-30min Not reported 4 12:30 0.2 K/sec 820-920°C 0-30min 8:23:11 820-9200C 0-30min Three 5 regfied regcr’ied 1600°C 30 min 5 MPa point bend 6 100°C/mi 100°C/min 1600°C 10 min 2 MPa no 11 7 1°C/min 1°C/min 800-1200°C 1 hour No pressure no [328°C and 1-180 min 5 MPa Vickers 1494°C indentati N N t °" 8 repofied repoited 1162°C and 15-180 min 5 MPa Not 1245°C reported 1162°C and 90 min 5 MPa Not 1245°C reported 210 Refere Span Dimension loading cross Micrograp Thickness -nces length rate speed h of bond layer 1 no no no no Yes No Yes 5-10 um Yes 1-2 um Yes less than 0.5 urn 2 no no no no Yes less than 0.5 um Yes almost invisible 3 no 3x4x36mm no no Yes 20-35 1.1m Yes ~3-10 pm 4 no no no no Yes ~ 140} m Yes ~ 0.8—3.5 p. m 5 no no no 0.5mm/ Yes 12 um min 6 no no no no Yes 1.5 :05 um inner Yes 6.5, 4.5, 7 6mm 1.5x3x15m 0.2mm/ and 2.5um outer 12 m3 no min mm no no no no Yes Unknown 8 no no no no Yes Unknown no no no no Yes Unknown 211 References Strength of materials Bonding or Atmosphere shear strength 1 No No 4x 10’4 Pa (Vacuum) 1549 Hv 1371 Hv 1572 Hv 1550 Hv 2 1535 Hv 1553 Hv Flowing Nitrogen 1440 Hv 1431 Hv 1440 Hv No 3 700 MPa 400 MPa Flowing argon 118 MPa 4 Not reported 116 MPa Not reported 147 MPa 5 700 MPa (7) 550 MPa Flowing Nitrogen 6 No No Flowing Nitrogen 7 250:10 MPa 70-220 MPa Flowing argon 736 i 71 Hv Just annealed 8 metal 60 Hv Flowing argon Not reported Not reported Not reported Not reported IQ _ ls) Refere Materials Dimension Adhesive Thickness of Heating -nces adhesive method 9 Pressurelessly 20x20x8 slurry in the Slurry furnace sintered Si3N4 mm3 system of Y- with Si3N4 Si-Al-O-N 10 Sintered Sialon Bar Sn-5at% Ti 0.15 mm Cold (3x4x20mm alloy wall ) type of Vacuum furnace 11 Si3N4 with Si3N4 bar CuNiTiB No Vacuum (3x4x20mm paste Brazing furnace ) filler metal 12 Pressureless 15x25x20 MgO-Aleg- 1 mm Graphite Sintered SiC min S102 (MAS) vacuum filler furnace and Alumina tube furnace l3 A12O3-ZrO2 Block sodium Slurry Microw (30%) (15x4x4 silicate glass (powder ave composites mm) powder mixed with (2.45 glycerol) GHz, 700 W) Sintered A1203 ceramic 92 % 0.6 mm 3 mm 10 96 ‘70 A1203 MICI'OW- 14 A1203 diameter No No ave SN220 10 mm long Sheet of 0.6 mm SN501 SN501 No No A1203 (99%) disc( 10 mm sodium Slurry Microw- 15 x 6 mm) silicate glass (powder ave powder mixed with glycerol) Refractory Not reported sodium Slurry Microw- 15 alumina (low silicate glass (powder ave purity powder mixed with glycerol) 213 Refere Heating Cooling rate Tmax Hold time Bonding -nces rate pressure 9 10°C/min Not reported 1450- 10-20 min 0-5 MPa 1650°C 10 Not Not reported 827°C 20 min 8mPa reported (vacuum) 11 15 K/min 15 K/min 1007- 10 min Vacuum 1127°C 12 15°C/min 100°C/min 1500- 30 min No load 1600°C 13 within 2 Not reported 10000C 9 min No min at 1000°C 40°C/min 15°C/min 1601°C and 3 min 0-2.4MPa 1720°C [750°C or 3 min 0.6MPa 14 above No No 1720°C 3 min 6.2 MPa No reached at cool down ~1000°C ~ 5 min Not about fast after de reported 15 1000°C coupling within about10 min reached at cool down about fast after de 1000°C coupling within about10 min 214 References Mechanical Span length Dimension loading rate cross Speed test 9 Three point No 3x4x36mm 0.5mm/mi no bend 3 m 10 Four Point 27 mm No 0.2 18 mm mm/min l 1 Three Point No No 0.5 No mm/min 12 Three point No 3x4x35mm No 0.5 mm/min 13 Three point 30 mm no no no and Hv Hardness 14 Four point No No No No Hv No No No No 15 Hardness 215 Refere Microgr Thickness of Strength of Bonding or shear Atmosphere -nces -aph bond layer materials strength 9 Yes ~10 pm 700 MPa 650 MPa Flowing Nitrogen 10 Yes ~0.l mm 400 MPa ~100 MPa (Sn- Vacuum 5Ti-Ag active solder) l 1 Yes Vary with Not reported 224.8 (highest Vacuum braze (about joint) at 1353K (3.0-6.5x10' 48 — 58 3) Pa microns) 12 Yes 10 pm at 370 MPa 380 MPa Up to Ar flowing 1500°C 800°C and 80 5 11m at MPa at 9000C 1600°C No (but joint 13 Yes about 500 strength was 28MPa Not reported um stronger than glass phase) No No from 370 MPa Air 1 4 Yes ? reference 420 MPa No No 525 MPa ~390MPa N No No 344 MPa ~520 MPa 2 15 Yes About 300 Glass: 515 582-1100 Hv Air urn kg/mmz) 216 Refere Materials Dimension Adhesive Thickness Heating -nces of adhesive method A1203 with Convention A1203 al brazing A1203 with Convention A1203 15 mm al brazing A1203 with square face SQ Brazing A1203 20 mm (tightly length fixed) A1203 with 99.5 wt% SQ brazin 16 A1203 pure alumina NOt reported (loosely g contact) As received SQ brazing Si3N4 Pre- 15x 10x 10 SQ brazing Oxidation min (900°C) treated Si3N4 l7 Invar- disc 1mm Aluminum 0.5 mm fumace alumium- high and 13 (99.9 wt%) thick and 7 silicon mm in sheet mm in nitride- diameter diameter alumium- (SiC) Invar Invar Rod (7mm in diameter and 7 mm height ) 18 Ti-6Al-4V lmmx0.63 63 wt%Ag, 50 microns Furnace alloy sheets mm for 1.75 Ti , bal (840°C (brazing) with both brazing alloy eutectic T) alumina thin alumina and plates Ti alloy (7 layers) 217 Refere Heating Cooling Tmax Hold Bonding Mechan Span loading -nces rate rate time pressure ical test length rate 800°C 10min 0.01 MPa Three- 30 mm No point 800°C 0.01 MPa Not 6000& 50 MPa 16 reported No 800 C 600 & 50 MPa 800°C 600°C 50 MPa 25 mm 600°C 50 MPa 17 Not no 700°C- 2 to 0 to 0.15 Four 10 mm No reported 950°C 30min MPa point 18 15°C/min ~15°C/ 850°C 10 min 0.15 MPa Three 40 mm min point bending test 218 Refere Dimension cross Microg Thickness Strength Bonding Atmosp -nces speed -raph of bond of or shear -here layer materials strength 3x3x40 0.5 Yes 0 350 MPa Not Air mm mm/ joined min 10 49 MPa Flowin microns g Argon l 6 10 325 Air microns MP3 300 228 Air microns MPa 3x3x30 No 200 900 MPa 57 MPa Air mm microns 200 404 Air microns MPa 17 2x2x15 No Yes 10 to 20 400 to Ar, air, mm3 microns 500 and N2 MPa 18 50 mm 0.3 Yes Not A1203 263 Vacuu long, 5 mm mm/ reported :280 MPa MPa m (10‘ wide and min Ti alloy : 5torr) 4.4 and 1100 5.75 mm MPa thick for mutilayers 219 Table A2. Joining materials, dimension, adhesive, thickness of adhesive, heating method, heating rate cooling rate, Tmax, hold time, bonding pressure, mechanical test, span length, dimension, loading rate, cross speed, micrograph, thickness of bondlayer, strength of material, bonding or shear strength, and atmosphere were written. The number was set via references number. Reference number 24 to 29 used no bonding agent during joining. Refere Materials Dimension Adhesive Thicknes Heating Heating Cooling -nces s of method rate rate adhesive HPSC rod 0.6 °Cs' 4.6 °CS’ (5x5x50mm) ' ‘ RBSC disc . 2.0 °Cs' 3.0 °Cs’ (15x9mm) Microwave 1 1 24 Y-PSZ rod (7x40 “° "° 23°12”, 2'45 0.5 °Cs' 3.5 °cs Z, TE102 1 1 mm) Y-PSZ tube 2.8 °Cs‘ 4.0 °Cs‘ (I.8x6.4x45) ' ‘ Clay- Tube (1/2” & bonded 1”) SiC SALD 25 HiNicalo N o (Selective 11 Fiber in Area Laser SiC Deposition) Hexoloy Tube (1/2” & 3/8”) 26 A1203 5 mm X 5 No No Microwave 120°C/ 120°C/ with mm X 25 min min MgO mm 27 Si3N4 15x15x20m No (but No Diffusion No No with m heated in bonding Si 3N4 powder and then (A1203 bed) heat treated and Y203 at 19500C additives for 3.6Ks for sinterin g) 220 Refere -nces Materials Dimension Adhesive Thickness of adhesive Heating method Heating rate Cooling rate Zirconia with zirconia/ Hydroxy apatite composit es Alumina with alumina/ Hydroxy apatite composit es Not reported No No First CIP at 300 MPa and then HIP Not reported Not reported Si3N4 with Si3N4 15x15x20 min3 No No Diffusion bonding Not reported Not reported 221 Jr References Trudi Hold time Bonding Mechanical test pressure 1310°C - 0.5 MPa No 74 1190-1375°C up to 2 0.5-2.0 MPa No " 1400-1565°C 10 min 2,7 i 20 MPa Viker’s indent [230°C 10 min 3.2 i 2.0 MPa N0 . Vicker indenter 7 . ‘7 -5 Usrng Laser Beam (.) (500g load) 26 1577°C to 2- 10min 0.03-0.5 MPa Three point 1877°C 27 1500°C 3.6Ks 20 MPa Bending test 1225°C 1 hr 200 MPa . 7 "8 Fractured durin, CIP Three bending 29 1500°C 3.6Ks ] 21 MPa Three bending 222 References Span length Dimension loading rate cross speed No No No No 24 No No No No 25 26 30 mm no no 0.5 mm/min 27 outer 30 3x4x40mm No No mm inner 10 mm No 30x3.5x3.5 No No 28 mm3 29 No 3x4x40 No No mm3 223 Refer- Micro Thickness of bond layer Strength of Bonding or Atmosphere ences graph materials shear strength No No Yes from ((10-20 microns at “90°C, 0.5 MPa) to (3-5 24 microns at 1375°C, 2 No No Not reported MPa) Yes Invisible No No 25 Yes Hard to see Not reported Vacuum 26 Yes Almost impossible to MgO: 150, 70MPa Air fine out A1203I340 Joined :~0.3GPa 27 Yes Almost invisible about 0.8 GPa Joined and N2 annealed :~0.5GPa Zirconia : 916 845 MPa MPa Yes Not identical Z/HAP composites : 28 860MPa Not reported A1203: 577 MPa No Fractured Al/HAP. Fractured composrtes: 601 MPa 29 Yes occasionally porous about 0.8 GPa 148 MPa N2 gas (0.1 interface and 1 MPa pressure) 224 APEPPENDIX B Sintering and joining heating rate using the Microwave energy in this thesis. 225 1400 . . n 1300* 1200*- 1100" l 1 10001- 900 800:. 700 l 111 l 1 Temperature (0C) 7 . r 1 J 500 1 1 - l i l u l L l . 0 20 40 60 80 100 120 140 Time (minute) Figure B1. A graph of sintering TM-DAR (Alumina). TM—DAR was sintered at 1300°C for 60 minutes with heating rate 10°C/min. 226 1400 . - . t . r 1300; 1200’— 1100- Temperature (0C) 500 . 1 - l 1 1 m 1 Q l i 1 r 0 20 4O 60 80 100 120 140 Time (minute) Figure B2. A graph of sintering partially stabilized zirconia. Partially stabilized zirconia was Sintered at 1375°C for 60 minutes with heating rate 10°C/min. 227 1400 - 1300~ l 1200 1100~ Temperature (0C) 500 L 1 l 1 1 r l 1 1 m l 1 1 1 1 0 20 40 60 80 100 120 140 160 180 Time (minute) Figure B3. A graph of sintering fully stabilized zirconia. Fully stabilized zirconia was sintered at 1350°C for 60 minutes with heating rate 10°C/min. 228 Temperature (DC) 1400 1300: 1200!- 1100; 10001 900; 800; 7001 600; 500 H4 1 1 u l 1 1 1 1 l 1 l 0 20 40160180 100 120 140 100 180 200 Time (minute) Figure B4. A graph of sintering alumina (85 wt %)-zirconia (15 wt %) composites. Alumin/zirconia composites was sintered at 1350°C for 60 minutes with heating rate 10°C/ min. 229 8001- - Temperature (0C) 8 500 ' 1 l 1 1 . l 1 0 10 20 30 40 50 Time (minute) Figure BS. A graph of heating rate of microwave joined MgF2/MgF2 joined at 700°C for 20 minutes using sodium silicate solution spin-on interlayer. 230 1500 1400- A 1300- U O 1200 V 113 1100- 3 3 C6 1000” 33 goof a. . E 800- O.) . 1“ 700- 600- 500 40 60 180‘ Time (minute) Figure B6. A graph of heating rate of microwave joined AKP 30/AKP 30 joined at 1400°C for 20 minutes using sodium alginate spin-on interlayer. 231 I 1500 1400- 1300:- 1200- 1100- 1000’- 900- 800»- 700’- 600:- 5000’10’210’3040’50’60’70’80 Time (minute) Temperature (0C) Figure B7. A graph of heating rate of microwave joined partially stabilized zirconia/partially stabilized zirconia joined at 1500°C for 20 minutes using silica film spin-on interlayer. 232 1500 1400— 13001 1200- 11001 1000- 900’- 800: 700’- 600- 5000 ’ 110°20’310’4’0’50 60 70 8019101100 Time (minute) _T_T Temperature (0C) 1 J 1 L 1 L 1 Figure B8. A graph of heating rate of microwave joined partially stabilized zirconia with alumina joined at 1500°C for 20 minutes using silica film spin-on interlayer. 233 1100 - * l T l 1 l A 1000» - Q i O v 900- - O.) H :5 g 800- - H 8 1 . E 700- - Q) 1 I-1 600- - 500 1 1 I 1 l 1 l 0 20 30 40 50 Time (minute) Figure B9. A graph of heating rate of microwave joined HAP with MaCorTM joined at 1020°C for 20 minutes using silica film spin-on interlayer. 234 l 100 . l e l T l r 1 l A _ D 0 v —l O.) 3.1 D 4—r _ CU i-t 8. E .1 PO") 1 1 1 1 . l r 1 20 30 40 50 Time (minute) Figure B 10. A graph of heating rate of microwave joined partially stabilized zirconia with MaCorTM joined at 1020°C for 20 minutes using silica film Spin-on interlayer. 235 1100 l 1000*- 900 Temperature (0C) 2 700 — - 600 .- 2 500 1 l 1 l n l . 1 i L 0 10 20 30 40 50 Time (minute) Figure Bl l. A graph of heating rate of microwave joined SiC platelet reinforced alumina with IMaCorTM joined at 1020°C for 20 minutes using silica film spin—on interlayer. 236 1600 _ie.i..tiirn 1500- i 1400- 1 1300 1200 1100 1000- T lfil' T I T 800~ 700*- Temperature (0C) 500.111111111L11111L11 010 20 30 40 50 60 70 80 90100 Time (minute) Figure B12. A graph of heating rate of microwave joined alumina/zirconia composites with alumina/zirconia composites joined at 1450°C for 20 minutes using silica film spin- on interlayer. 237 1500- 1400: 1300 1200- 1100 l 1 Temperature (0C) 8 010’20’30 40 50 Time (minute) Figure B 13. A graph of heating rate of microwave joined fully stabilized zirconia with fully stabilized zirconia joined at 1450°C for 20 minutes using silica film spin—on interlayer. 238 APPENDIX C Micrographs of joined ceramic/ceramic not included in results section. 239 1 til-1«W‘htlmkifltanrttnltttlt Bond layer (b) Figure C 1. ESEM micrographs of conventionally-joined AKP 30 (alumina) joined at 1400°C for 20 minutes using sodium alginate spin-on interlayer (a) lower magnification of joined A1203 and (b) higher magnification of joined A1203. 240 1' W.MhM. to...“ [\J (b) Figure C2. ESEM micrographs of microwave-joined AKP 30 (alumina) joined at 1400°C for 20 minutes using sodium a1 ginate spin-on interlayer (a) lower magnification of joined A1203 and (b) higher magnification of joined A1203. 241 A1203 4—lnterface Interface Vickers Indentation (b) Figure C3. (a) A micrograph of microwave-joined alumina with zirconia (3 mol % Y203) at 1500°C for 20 minutes using silica spin-on interlayer showing interface and (b) a crack induced byVikers indentation was deflected from ZrO2 to A1203 through interface. 242 Figure C4. SEM micrographs of zirconia (3 mol % Y203) with MaCorTM joined at 1020°C for 20 minutes Showing interface. 243 / Interface Figure C5. SEM micrograph of HAP with MaCorTM joined at 1020°C for 10 minutes. The mica platelet rainforcement in the MaCorTM is evident in the micrograph. 244 ”I 5% it? i SiC/ MaCorTM AlZQlReaction -- . layer 1100 um Figure C6. 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