L5": nnw DE: 55.. I". a. ‘ x m . . . . 11.‘ «.3.- J Er . 3 ,. a. v. a. .z‘.’:§v~rlfiw Front-end Fabrication A Epitaxy Oxidation Photolithography Plasma Etching Doping / Ion Implantation / Diffusion Metallization Back-end Fabrication UFHW< Wafer Acceptance Test Wafer Burn-in l Wafer Probe i Assembly Final Test l Burn-in Figure 1.2: Reliability’s Influence on IC Manufacturing Process and Yield [5]. Market I I Decline/ Introduction | I Obsolence L l | I L A WIV T | | Lifetime ——> Figure 1.3: Typical Product Life Cycle and Profit Revenue. Verification and analysis are serious bottlenecks for the timely design of systems and [Cs Verification can take up to one half of the total design process time. The time and added cost associated with life testing and screening is a major issue in product qualifica- tion. The dilemma is to determine how much time can be spent on life testing or screening; as broadly indicated in Figure 1.4. If too little qualification is done, then the product will be unreliable and this would eventually result in loss of customer. On the other hand, too much qualification bears the risk of not being competitive in the market at all. Hence, very high accelerated reliability testing techniques need to be developed that can screen products and that can be related to actual field reliability. Electrical or other screening that could eliminate bum-in is highly desirable, so that time to market can be reduced. let. in 1 (Mg \ T Unacceptable Cost Cost Amount of Screening ——-’ 1 Custom er Satisfaction Long Delivery Time Unreliable Product Amount of Screening —§ Figure 1.4: Effects of Amount of Screening on (a) Cost; (b) Customer Satisfaction. There are four major issues in system integration: marketability, manufacturability, testability, and reliability concerns. Yield and reliability are two important factors affecting the profitability of semiconductor manufacturing. In this study, the emphasis is on the qual- ity and reliability enhancement of CMOS analog/mixed-signal ICs at a low cost Oxide defects have been found as one of the major causes for the reliability prob- lems of CMOS integrated circuits [7,13-16]. Particulate contamination, crystalline defects in the substrate, spot defects, localized thin regions, or surface roughness can cause local- ized weak spots in an oxide [17]. In the manufacturing process of modern VLSI semicon- ductor devices, a plasma is ofien used to deposit or remove material on wafers [18,19]. The thit 10‘ par the ma tha Sta: mo resI Pee. end plasmas may cause destructive charges to be built on the wafers. If the charge buildup is large enough, and the charge has no other leakage path to substrate, a current flows through the connected transistor gate-oxide, causing degradation of the gate-oxide. The damaged gate-oxide may result in performance degradation of the affected transistor and cause reli- ability failures. Moreover, the quality and lifetime of a gate-oxide strongly depend on its thickness [16,20]. Oxide thinning occurs when the oxide thickness of a transistor is physi- cally or effectively thinner than expected. Oxide thinning can be due to localized thin spots, traps in the oxide, surface asperity, or locally reduced tunneling barrier height [21]. It can shorten the lifetime of a gate-oxide, increase oxide leakage current, or cause time-depen- dent dielectric breakdown. The term reliability as applied to an IC refers to the time that the circuit continues to work to specification after it has passed its initial tests and been designated as a yielding part [16]. Most electronic devices exhibit a decreasing failure rate in their early life; which results from the weak individuals that have shorter lives than the normal (stronger) ones. If the weak devices are released to customers or are used to assemble modules or systems, many of these defects will cause failure in their early lives; from experience it is known that, quite a few failures can be observed in the first year [5]. These high number of early stage failures are called early life failures, as shown in Figure 1.5. After early life, devices move into the steady-state hazard rate period with an almost constant failure rate. This cor- responds to the normal operation of an electronic device 'and extends well beyond the ex- pected life of most devices. Wear-out failures occur when the strong population reaches its end of life. Due to rapidly evolving manufacturing technology, the wear-out process may tha; of t 61110 Scre not be detected during product operational life [22]. For most semiconductors, wear-out does not occur until the product becomes obsolete or reaches its end of shelf life in case of military systems (usually 10 years). E: g : <— VVrthout Stress Testing .8 I E 4— Improper Stress o I :3 :4— With Stress Testing '8 I u. . . - - . 14 Early Life a, Random JAWear-out _ 1‘ w '1‘ 7 Log Time ———> Figure 1.5: Bathtub Curve. Stress testing is a technique used to weed-out early life failures by applying higher than usual levels of stress to speed up the deterioration of electronic devices. The concept of this screening process is to accelerate the lifetime of devices such that they begin oper- ation with a failure rate beyond the early life region. The industry standard methods for screening have been hi gh-temperature bum-in [23-25] and high-voltage screening [26,27]. Burn-in is effective in varying degrees for almost all circuits and assembly causes of pre- mature failure. Bum-in screening decreases failure rate of a product during the early field life, where overall cost and turn around time are of concern. The added manufacturing cost may range from 5% to 40% of the total product cost, depending on bum-in time, qualities “ CE X r by in t that be i WOl. Irate This do u, 81ers fOT c. of ICs, and product complexity. For example, Figure 1.6 shows a typical multichip module (MCM) production flow where bum-in is performed at two places [28], and Figure 1.7 il- lustrates hi gh-reliability screening flow, for plastic encapsulated packages, used by Maxim, where bum-in is performed for 160 hours [29]. During high-voltage screening, voltages ex- ceeding normal operating conditions are applied to ICs. For example, a 3.3V technology may be stressed at 6V whereas 8V may be used to stress a 5V technology. 1.1 Motivation This study was motivated from investigating the yield loss of a safety-critical mixed-signal IC, namely Product X. From the manufacturing test data, the yield of Product X was approximately 80%, where 60% of the 20% yield loss, i.e., 12% in total, was caused by its analog modules. The IC was tested by a hi gh-voltage stress test followed by a bum- in test to eliminate early life failures. From these manufacturing data [3 0], it was concluded that, if the analog modules were stressed properly by high voltage, almost all of them would be identified and screened out during the hi gh-voltage stress test process. As a result, there would be much less or no need of the bum-in test for defective analog modules. As illus- trated in Figure 1.5, high failure rate may still occur if the circuit is not properly stressed. This was the major reason causing the lost yield. The question that naturally arises is how do we properly stress analog modules? This led to this study for characterizing the param- eters that afi'ect the stressability of analog circuits and developing an analytical approach for conducting the hi gh-voltage stress test. 10 DIE Wafer Design Mount In Carrier Burn-in Substrate Design Full Test Carrier Remove r MCM Assembly fi— Rework Module Test & Diagnosis Burn-in Post Burn-in Test Encapsulation Cap Removal l Final Module Test Figure 1.6: MCM Production Flow. 11 SUBSTRATE I MODULE 1 || PEr Die Visual Inspection Temperature Cycling Pre-Bum-in Electrical Test (25°C) Burn-in (160 hours at 125°C) 100% Post-Bum-in Electrical Test 125°C) 100% Electrical Test QA Electrical Test External Visual Inspection Figure 1.7: Maxim High Reliability Screening Flow. 1.2 Objectives The research goal is to improve the quality and reliability of CMOS ICs without performing the high-cost bum-in process. Extreme-voltage stress testing can be used to 12 \‘0 ”it ule dE‘s cui for sire eliminate early life failures caused by defective gate-oxides in CMOS ICs. The voltage lev- el to be applied is selected to be the highest possible under the constraint that there is no introduction of failure mechanisms which are not encountered during operating life. This voltage level, hereafter, will be referred to as the extreme-voltage. Extreme-voltage screen- ing has been successfully implemented to enhance gate-oxide reliability of digital CMOS ICs. However, the success has not yet been extended to its analog counterparts. Today, al- most all IC manufacturers employ the digital circuit screening process for the analog mod- ules in mixed-signal CMOS ICs. In this study, an attempt has been made to analytically develop an efficient yet effective extreme-voltage stress test process for analog CMOS cir- cuits. The research objective is to develop the framework of an automatic stress test system for analog circuits, as depicted in Figure 1.8, that integrates three major components -- stress vector generator, stressability analyzer, and stressability design methodology. IIIIIIIIIIIIIIIIIIIII .1 I/;--a(‘;/$;;5{' . . . .. .. 2" >7} / \§§\ ‘ .1 z/I " ' "r I] ‘2 $’ 0 o ’ ‘" Stressability I r" . I Re U1 rements " i I, . I. ”4555’, v / '01-}: ,w. - " .v'rccttc-tt-Mcx ., Circuit / Descriptio 1 x I .. , nW/ II/l / I II IIr‘IIfI ”2r IIIIIJIA ..... ...... ------ .,,. Stress Vector Generator ' Stress Vectors Stressability Design Methodology ....... ............ ////////// 11111 /////// ------ STRESS TEST PROCESS Figure 1.8: Framework of Stress Test System. 13 Stress vector generator and stressability analyzer are analysis tools used by the stress test process to determine the stressability of a given circuit. Stress vector generator can provide optimal stress vectors for the given circuit and stressability analyzer deter- mines the stressability of the circuit based on the selected stress vectors. Stressability de- sign methodology of the stress test process is employed during design phase to ensure desired stressability of the circuit. This design methodology utilizes the two analysis tools and stressability enhancement strategy to meet stressability requirements during the design phase. 1.3 Organization The dissertation is organized as follows. Chapter 2 presents information related to the reliability of ICs. It also briefly reviews dominant failure mechanisms and currently used reliability stress tests for the CMOS technology. Chapter 3 presents the basic concepts and definitions required for proper stressabil- ity of analog CMOS ICs. It also describes the development of a stress vector generation procedure and a stressability analysis process. This chapter also presents algorithms to opti- mize the stress vectors based on the results of stressability analysis of a circuit, under dif- ferent stressability constraints. In order to effectively apply the extreme-voltage stress to large circuits, Chapter 4 describes hierarchical stress vector generation based on the topological structure. It also presents a circuit decomposition model to reduce the computational complexity of the problem. This chapter then deals with stressability enhancement of portions of the circuit 14 having poor stressability, that are identified by stressability analysis, and presents a stress- ability enhancement strategy using additional hardware. It also describes the developed stressability design methodology with the goal to achieve desired stressability during design phase. Chapter 5 first introduces the recent IC reliability trends in industry. It then analyzes the existing bum-in and suggests ways to improve it. This chapter compares the developed extreme-voltage stress test with extreme-temperature stress. It also discusses practical issues related to the implementation of extreme-voltage stress test. Finally, Chapter 6 summarizes the dissertation, outlines major contributions and proposes some directions for future research. 15 10 00 UI“. per by and fail Prir exis 2.1. Qua: Chapter 2 BACKGROUND Customers always expect high reliability, low cost, and versatile goods. According to the Sematech Reliability Roadmap, since 1994 reliability levels are no longer continu- ously improving and there is a real risk of degradation of reliability in the rapid, discontin- uous evolution of the IC industry. Recently, CMOS has become the dominant IC technology because of its low power dissipation which is of extreme importance for full portability of electronic systems. However, degradation of CMOS IC reliability is caused by the failure mechanisms such as oxide breakdown, hot carrier aging, electromigration, and etc. Among these failures, gate-oxide shorts have been found to be the most dominant failure mechanism in CMOS ICs. This chapter first reviews the information related to the IC reliability, describes the principal failure mechanisms that affect the CMOS IC reliability, and finally discusses the existing methods that enhance CMOS gate-oxide reliability. 2.1 IC Reliability Reliability is defined as the probability of a device performing its purpose ade- quately for the period of time intended under the operating conditions encountered. Hence, 16 thd 2.1 the probability that a system successfully performs as designed is called system reliability. In general, reliability is the ability or capability of the product to operate properly without failure, which is defined as the cumulative probability function at time t for a given time under the operating conditions. True reliability is never exactly known, which means the exact numerical value of the probability of adequate performance is not known, but numer- ical estimates quite close to this value can be obtained by the use of statistical methods. 2.1.1 Reliability Requirements There are three reliability requirements. Initial quality is determined by the devices that fail incoming inspection and is measured in ppm (parts per million). Early failures are the failures during the early life also measured in ppm. Long term reliability, measured in fits, is determined by the device failures after the early life period. A FIT is the failure unit and is defined as one failure in 109 hours of operation. 2.1.2 Bathtub Curve Systems and materials start to wear-out when they are used, and they can fail due to various failure mechanisms. A study of many systems during their normal life expectancy has led to the conclusion that failure rates follow a certain basic pattern. It has been found that systems exhibit a high decreasing failure rate during their initial period of operation, called the early life period. The operating period that follows the early life has a smaller failure rate and is called the usefiil life period, which tends to remain constant until the be- ginning of the next phase, called the aging period or wear-out period. This typical hazard 17 rate behavior of devices and systems is known as the bathtub curve. The bathtub curve, as shown in Figure 1.5, is basically an addition of three curves. As mentioned, most electronic devices exhibit a decreasing failure rate in their early life, which is caused by the weak individuals in the population. If these weak devices, having a significantly shorter life than the normal ones, are released to customers or are used to assemble modules or systems, many of these will cause failure in their early lives; from experience it is known that, quite a few failures can be observed in the first year. These early-stage high number of failures are called early life failures. Note that early life is viewed for the whole lot instead of for a single device. This failure curve is shown in Fig- ure 2.1(a). After early life, devices move into the steady-state hazard rate period with an almost constant failure rate. The constant failure rate is defined as the percentage of prod- uct failures that occurs during the time period when failures are generally attributed to sta- tistical chance rather than early life or product wear-out. This corresponds to the normal operation of an electronic device and extends well beyond the useful life of most devices. This failure curve is illustrated in Figure 2.1(b). Wear-out failures occur when the strong population reaches its end of life. It has been reported that for most semiconductor devices wear-out does not occur until product obsoletes. The wear-out failure curve is depicted in Figure 2.1(c). 2.2 CMOS Reliability A failure mechanism is defined as the chemical, electrical, physical, mechanical, or thermal process leading to failure. Failure mechanisms in the microelectronic devices are 18 Hazard Rate —> Earl Life Random Wear-out i4 y a: *——> Log Time —> (8) Hazard Rate —> ,AEarly Life .1- Random dAWear—out ‘ [V VIT 7" 7 Log Time —> (b) Hazard Rate ——§ Earl Life Random Wear-out .2 Y a: *——» Log Time —> (C) Figure 2.1: Failure Curves: (a) Early Life; (b) Random; and (c) Wear-out. 19 either categorized according to the type, or mode, of the failure precipitated, or according to the root cause, or mechanism. Failure modes include shorts, opens, or parametric drifts. 2.2.1 Failure Mechanisms The principal device failure mechanisms in CMOS devices are oxide breakdown, hot carrier aging, and electromigration [31]. Oxide breakdown is a failure mechanism which occurs in thin dielectric films, such as is used for the gate in a MOS device. The dielectric strength of an oxide layer is often expressed in terms of the electric field at which it loses its insulating properties and the in- sulator is irreversibly damaged. With a sufficiently high applied electric field, and after continued exposure to a constant applied voltage, dielectric films will breakdown. This phenomenon is called Time-Dependent Dielectric Breakdown. Hot carrier aging is defined as the degradation of intrinsic MOS device character- istics due to the trapping of charge in the gate dielectric. Hot carriers are those carriers (electrons or holes) that are not in thermal equilibrium with the rest of the semiconductor crystal lattice, i.e., the carriers whose energy does not correspond to that of the conduction and valence band edges. These are the carriers in the channel and pinchoff regions of a tran- sistor which have gained much energy from the lateral electric field produced by the drain to source voltage. This situation arises when the electric field seen by the carriers causes carrier acceleration between the collisions with the lattice, i.e., within a mean free path, to be sufficiently high to change their average energy. High energy hot carriers can cause a number of effects within a MOS device, including a change in device threshold voltage and transconductance, eventually resulting in circuit failure. 20 Z2 of frtl \'C‘ an 1'16 10 1 Electromigration is a failure mechanism which occurs in the interconnect metalli- zation tracks. It is the motion of ions in conductors, such as aluminum, due to the passage of electric current through it. Thermally activated ions of the conductor, which normally self-diffuse in all directions, are given a direction of net motion due to momentum transfer from the conducting electrons. Hence, the ions move downstream with the electrons. A di- vergence of the ion flux ultimately results in circuit failure. A positive divergence leads to an accumulation of vacancies to form a void in the metal and ultimately an open circuit. A negative divergence leads to a buildup of metal, called hillock, which can eventually lead to a short with adjacent or overlying metal. 2.2.2 CMOS Gate-Oxide Reliability Gate-oxide shorts have been found to be the most dominant failure mechanism in high reliability CMOS integrated circuits [7,14,15,32]. Gate-oxide defect is a transistor de- fect that causes a relatively low impedance path between a MOSFET gate and the underly- ing silicon (substrate, p- or n-well, source, drain). A gate-oxide defect in one or more transistors in a circuit may or may not effect the functionality of the entire circuit at normal operating voltage, i.e., the circuit may continue to meet the design specifications. But, such defects can subsequently change and effect the functionality of circuits. This would cause early-life failures of the circuits that contain transistors with gate-oxide defects. Thus, the devices will not meet the reliability requirements. Gate-oxide short in a MOS transistor results when the oxide between the gate and the underlying silicon breaks down. If the short is close to the source, a gate to source path is 21 CS Cd 2. established. Similarly, a gate to drain path is established if the short is close to the drain. An example of a gate-oxide short in an NMOS transistor is shown in Figure 2.2. Structural non-unifonnities in the gate-oxide or in the silicon substrate beneath the gate-oxide or in the silicon substrate can occur during the fabrication process. Metal ions, particulates, and crystalline defects reduce the dielectric strength of the gate-oxide. gate-oxide short substrate Figure 2.2: Gate-Oxide Shorts. Time dependent shorting process of gate-oxide is shown in Figure 2.3 [33]. Defects, such as in Figure 2.3(a), alter Si crystal or SiOz geometry such that an abnormally high lo- cal electric field is present when a voltage is applied to the transistor gate as in Figure 2.3(b). This higher electric field causes tunneling of electrons into the gate-oxide and a sub- sequent acceleration of charge through the gate-oxide. This time dependent buildup of local gate-oxide electric field leads eventually to a rupture as shown in Figure 2.3(c). The time required for rupture to occur depends on defect geometry, duration of applied gate voltage, gate-oxide thickness and magnitude of voltage and temperature applied to the transistor. 22 l A n A n‘ Defect substrate (a) Voltage Bias I | H6 9 A n substrate (b) substrate (0) Figure 2.3: Conversion of a Gate-Oxide Defect to a Gate-Oxide Short: (a) a MOSFET having a Physical Defect at Gate-Oxide to Well Interface; (b) Application of High Electric Field to Gate-Oxide from Gate Bias; and (c) Conversion of the Gate-Oxide Defect to Gate-Oxide Short. 23 During the random period of bathtub curve, semiconductor devices normally have low failure rates and long working lives. Failure rate can be down to 0.005% per thousands hours or lower. It is necessary to take actions to force the devices, that lie in the early life region, to fail within convenient time scales. Increase in failure rates is achieved by appli- cation of controlled stress. Stress tests or screens are defined as tests that subject 100% of the parts to the test conditions. Product quality and reliability are dependent upon the screens used to detect defects that are introduced during the manufacturing process. Stress tests subject devices to higher than usual levels of stress (e.g., voltage, temperature, humid- ity, corrosion, magnetic field, current, pressure, radiation, vibration, salt, and loading). Thus, stress testing is a technique used to screen out early life failures by accelerating the deterioration of electronic devices using higher than usual levels of stress. 2.3 Stress Tests Figure 2.4 illustrates the concept of the screening process that accelerates the lifetime of devices such that they begin operation with a failure rate beyond the early life region [34- 36]. Because of rapidly changing technologies, customer expectations for higher reliability, and more complicated products, reliability stress tests have become very important. Envi- ronmental Stress Screening (ESS) is a process of eliminating defective parts from the pro- duction batch [3 7]. In order to be competitive in the market, semiconductor companies are trying to achieve a failure rate as low as possible, referred to as the zero defects approach. The current industry practice is to use bum-in and high voltage stress testing for CMOS technology. 24 H67 [01‘ CO 1‘ tio.r 16c? IOQ dE‘I‘ Hazard Rate —> Earl Life R d W - t l: l :1]: an om M Log Time —> Normal Operation . - : : 1 Stressed Operation F 1 — ' ‘ ' Figure 2.4: Time-to-Failure for Normal and Stressed Operation. 2.3.1 Burn-in Burn-in can be defined in a number of ways. It is a pre-usage operation of compo- nents performed in order to screen out the substandard components, often in a severe envi- ronment [3 8,39]. Burn-in is also described as an effective means for screening out defects contributing to early life failures [40]. It has also been described as running units under de- sign or accelerated conditions for a suitable length of time [41]. However, in some defini- tions bum-in has been restricted to high stress only [42]. It has also been defined as a technique used to weed-out early life failures by applying higher than usual levels of stress to speed up the deterioration of electronic devices. Burn-in is complete when all the weak devices have failed, thus leaving the devices in a reliable state [5]. 25 Burn-in is an effective screening method used in predicting, achieving, and enhanc- ing field reliability of ICs. It is the most effective screen in detecting die related faults through time, bias, current, and temperature accelerating factors to activate the time-tem- perature-dependent failure mechanisms to the point of detection in a relatively short period of time. Early life failures are greatly influenced by the burn-in test, and a significant im- provement in failure rates have been reported after bum-in. Today, almost all IC manufac- turers perform 100% bum-in for various durations to screen defective products. One of the major problems associated with bum-in is the determination of exactly how long the bum- in process should continue, balancing appropriately the needs of reliability and the total costs [38]. Burn-in occurs between two final test stages, which are called the pre- and post- bum-in tests. A typical burn-in chamber consists of a temperature oven and a control sys- tem, which is either a PC or a workstation. The temperature oven contains power supplies, compressors, and an interface with the control system. Usually, a driver board goes with each bum-in board (BIB) to send and receive signals to the devices under test. The accura- cy, channel number, and precision of the driver boards greatly affect the price of the bum- in chambers. For static and simple dynamic bum—in systems, the driver boards may only send DC bias or simple signals to the devices under test (write operation) and may not be able to get the feedback of the devices (read operation). For these cases, devices are to be tested by independent testers and are to be loaded and unloaded from the bum-in chambers and testers for pre- and post-bum-in tests. This is a time consuming task and liable to dam- age due to mishandling. Mishandling may cause lead bending, BSD, and lost devices. The 26 modern test during bum-in (TDBI) system is able to perform write and read operations with short time delays, which makes it capable of detecting any failure during burn-in [43]. The control system is composed of a database to store programs and test results and the software tools for designing test programs, setting biases and temperatures, and writing the test pat- terns during stressing and functional tests. Burn-in time can be optimized based on the reliability requirements and trade-off between costs associated with burn-in and the field savings obtained from reduced failures. Two major issues must be checked when considering reduction of bum-in time. First, the stability of the bum-in failure rates must be established. The monitoring duration may be as long as three months to ensure that the trend of the bum-in failure rates can be verified. Second, one or more experiments simulating the effects of reduced bum-in time must be conducted. Another possible way to reduce bum-in time is to develop the wafer level bum- in. However, there are technical difficulties that need to be solved, such as wafer expansion coefficient of temperature, wafer handling, and a feasible method for applying bias and test patterns. Various bum-in methods are currently being used in the industry [7]. The types of possible defects and the extent to which these defects are activated by the various tech- niques determine the type of burn-in appropriate for a given device. The type of burn-in is selected based on the trade-offs among customers’ requirements, IC performance and char- acteristics, available equipment and raw materials, technology, time to market, and cost. Some common types of bum-in are static, steady-state, dynamic, test during burn-in, se- quential, and Markov burn-in. 27 2.3.2 Extreme-Voltage Stress As already discussed, gate-oxide defects are the major cause of quality and reliabil- ity problems in CMOS ICs. Time-dependent oxide breakdown occurs at weaknesses in the oxide layer due to poor processing or an uneven oxide growth. Failures of MOS devices due to oxide breakdown during device operational life should be as low as possible, so it is very important that any defective gate-oxides are detected before or at the final testing stage. An extreme-voltage gate stress can be more efficient for screening out defective ox- ides than bum-in because of the relatively small activation energy of only approximately 0.3 eV for thermally accelerating the oxide failure process [15]. Extreme-voltage stress testing aims at screening early life failures and intermittent failures to improve the reliability and quality level of CMOS ICs at a low cost without per- forming bum-in. It is useful at wafer sort, as it can screen out weak parts during a wafer- level test and avoid the cost of packaging them. This procedure has been practiced in in- dustry [44,45]. Some data which showed the effectiveness of extreme-voltage stress testing were reported recently [26,27,46]. In general, the breakdown is a result of charge trapping in the oxide due to the excessive field and the current in the SiOz. The lifetime of an oxide is determined by the time required for the charge to reach a critical value [20]. The time-to-breakdown of the oxide, tBD, can be modeled as follows. tBD : TO exp(GTeff/Vox) (2-1) where Vox is the voltage across the oxide and Teff is the effective oxide thickness, to is de- termined by the intrinsic breakdown time under an applied voltage of Vox, and G is the 28 slope of log(tBD) versus 1/E0x (the electrical field across the oxide). The typical values of G=350 MV/cm and 10:10 picoseconds were suggested in [20]. Magnitude and duration of the applied voltage can be used to control the time-to- breakdown of an oxide. Increasing the magnitude of applied voltage reduces the time to rupture of an oxide exponentially as shown in Figure 2.5. To stress defective oxides effec- tively while still avoiding damage to flawless oxides, the electrical field on must be con- trolled so that no excess tunneling currents are caused across the oxide. F owler-Nordheim tunneling currents may occur across flawless oxides if Box is larger than a critical value. The excess tunneling currents flowing through gate—oxides can damage the oxides resulting in increased oxide leakage currents even after the supply voltage is reduced to the normal operating voltage. Experimental results show that the critical value of Box is approximately 6 MV/cm [47-51]. Therefore, the stress voltage Vstress can be defined as the voltage that will result in application of the critical on across the oxide, i.e., Vstress = Tox“ 6 MV/cm = Tox * 0.6 V/nm (2.2) Time to Breakdown —-> Applied Voltage ——> Figure 2. 5: Relationship between Time to Breakdown and Applied Voltage of an Oxide. 29 3‘: 0xi Consider the HP AMOS 14TB 0.5um process technology [52], where the thickness of the gate-oxide is 9.7nm. Table 2.1 lists the lifetime of gate-oxide for various thicknesses, using Eqn. 2.1, at the normal operating voltage of 3.3V [53]. Table 2.1: Lifetime of Gate-Oxide for Various Thicknesses at 3.3V Thickness (nm) Lifetime Thickness (nm) Lifetime 9.70 (100%) 1.52x1026 years 4.85 (50%) 6.93x103 years 8.73 ( 90%) 5.16x1021 years 3.88 (40%) 86.17 days 7.76 ( 80%) 1.76X1017 years 2.91 (30%) 4.22 minutes 5.82 ( 60%) 2.04x108 years 0.97 (10%) 294 ns Since, for this technology the gate-oxide thickness Tox=9.7nm, so the stress voltage using Eqn. 2.2 is 5.82V. The lifetime of gate-oxide for various thicknesses at the stress volt- age of 5.82V is listed in Table 2.2. Table 2.2: Lifetime of Gate-Oxide for Various Thicknesses at 5.82V Thickness (nm) Lifetime Thickness (nm) Lifetime 9.70 (100%) 6.84x10° years 4.85 (50%) 46.44 seconds 8.73 ( 90%) 20028.7 years 3.88 (40%) 136 ms 7.76( 80%) 58.65 years 2.91 (30%) 398 us 6.79( 70%) 62.69 days 1.94 (20%) 1.17 us 5.82( 60%) 4.41 hours 0.97(10%) 3.41 ns For an oxide to have a lifetime of one year at 3.3V, by Eqn. 2.1, the thickness of oxide must exceed 4.016nm. To effectively stress the oxide at 5.82V, by Eqn. 2.], the stress 30 duration is approximately 0.31 seconds. It should be mentioned here that a flawless oxide, i.e., with a thickness of 9.7nm, has a life of 1.52x1026 years at 3.3V, while it has a life of 6.84x10° years at 5.82V. Consider the bathtub curve in Figure 1.5. Semiconductor devices normally have low failure rates and long working lives during the Random Period. Failure rate can be down to 0.005% per thousand hours or lower for a qualified process. For CMOS circuits, the early life regime is approximately six months. For simplicity of discussion and having a margin of safety, we shall assume the time period for early life to be one year. Figure 2.6 plots a general thickness distribution of fabricated devices for a qualified process which meets the reliability mode, i.e., bathtub curve. Here, Point A is the thickness of the oxides corresponding to the end of the early life period. For example, if the time period for early life is one year, the oxide thickness is 4.016nm at 3.3V. In this process, the thickness of the flawless oxide is the nominal 9.7nm. In practice, it is reasonable to assume that the process variation of a qualified process is within 10%. Thus, Point B is the oxide thickness corresponding to the minimum thickness of non-defective oxide. In this case, Point B is 8.73nm, i.e., 90% of the nominal 9.7nm. According to the bathtub curve, the devices distributed between Points A and B are relatively low and the failure rate is accept- able when the time period of early life was defined. As mentioned previously, the stress time for the thickness of 4.016nm is 0.31 seconds at 5.82V. On the other hand, the lifetime for 8.73nm is 20028.7 years at 5.82V. The non-defective oxides can be stressed for a rea- sonably long time without overstressing the devices [53]. 31 Point A Point B I 0 4.016 8.73 9.7 Thickness (nm) No. of Devices Figure 2.6: General Thickness Distribution of Fabricated Devices. Recently, an efficient stress test program, namely, SHOVE (Short Voltage Evalua- tion), was developed [26,27] and it aims at screening early life failures and improving the quality level of digital CMOS ICs. More specifically, a transistor in a CMOS IC must be stressed for enough time during this testing. To effectively stress an NMOS transistor, the gate of the transistor should be held at the stress voltage and the drain and source of the transistor at 0V. Similarly, to effectively stress a PMOS transistor, the gate of the transistor should be held at 0V and the drain and source of the transistor at the stress voltage. The stress voltage is derived from Eqn. 2.2, and the stress time is defined from Eqn. 2.] with the application of the stress voltage. Each stress vector must be held for at least the stress time for a transistor to make sure all transistors in a CMOS IC are stressed for enough time. Because not all transistors are stressed by each stress vector, some transistors may be stressed longer than others. During SHOVE, test vectors are run at hi gher-than-normal sup- ply voltage for a short period. 32 As mentioned, IDDQ test sets that target inter-gate bridging faults are not suitable for SHOVE testing. To stress all the transistors evenly and reduce the stress time for fully complementary CMOS logic gates, all-one and all-zero vectors can perform better than stuck-at test sets as the stress vectors. The algorithm for line justification used in existing ATPG programs can be modified to generate all-zero and all-one vectors. However, justi- fication is more complicated than existing ATPG programs and may be impossible due to the structure of a circuit under test. 33 Chapter 3 STRESS TEST OF ANALOG CIRCUITS As mentioned, analog circuits have been stressed improperly by applying the stress vectors generated for digital circuits. This chapter first introduces the fiJndamental concepts required for stressability of analog circuits, defines the proper stressability conditions, and then presents a stress vector generation procedure. It also describes a stressability analysis process that measures the stressability of a circuit with the generated stress vectors. Stress- ability analysis allows estimation of a circuit’s stressability before the extreme-voltage stress test is attempted by evaluating the stress coverage of the circuit. Based on the trade- offs between the stress coverage and the total stress time of a circuit, this chapter also pre- sents algorithms to optimize stress vectors generated for extreme-voltage stress testing, and finally discusses the stress requirements for CMOS capacitors and resistors. 3.1 Stressability of Analog Circuits Unless indicated otherwise, hereafter, we define the nominal operating voltage and the stress voltage to be Vnormal =3 .3V and VsUess=5.82V; the analog circuits under test are simulated with the HP AMOS14TB 0.5 pm process technology and their nominal oxide thickness is 9.7nm. In addition, the period of the early life is assumed to be 1 year for the 34 sake of discussion. As discussed in Chapter 2, for digital CMOS circuits, a transistor is fully stressed if its three terminal voltages (VD,VG,VS)=(VSS,Vstressts) for an NMOS transistor and (VD,VG,VS)=(Vst,eSS,VSS,Vsuess) for a PMOS transistor, as illustrated in Figure 3.1. Con— sider a 2-input NOR gate under extreme-voltage stress conditions, as shown in Figure 3.2. When both inputs A and B are equal to Vss, transistors PA and PB are ON while transistors NA and NB are OFF. So, the voltage at nodes X and Z is equal to the Vstress and transistors PA and PB are then fully stressed. Similarly, when the inputs A and B are equal to Vstress, transistors NA and NB are ON and transistors PA and PB are OFF. As a result, the voltage at node Z is equal to VSS and transistors NA and NB are fully stressed. Hence, the stress vectors for the 2-input NOR gate are (A,B)=(VSS,VSS) and (V Suessttress). Vstress H D __I S G | v LC] .____ vstress | B 55 B —I s —| D V Vstress SS (a) (b) Figure 3.1: Digital Stressability Definition (a) NMOS; (b) PMOS. Each transistor in a CMOS IC must be stressed long enough to make sure the de- fective oxide deteriorates significantly so that either oxide breakdown or stress-induced ox- ide leakage occurs in the defective oxide. To optimize the stress effect of each stress vector 35 and thus reduce the total stress time, each signal should be held at its full-swing signal level for enough time. V88 Figure 3.2: A 2-Input NOR gate. In order to evaluate the feasibility of the digital definition for analog circuits, con- sider the simple bias voltage generator circuit in Figure 3.3. It generates a bias voltage of 0.045V at 3 .3V and a 0.1 1 1V at 5.82V. Simulation results of the circuit show that both tran- sistors, M10 and M11, are not fully stressed under the definitions described in Figure 3.1. The question that naturally arises is how to properly stress analog circuits? Vdd Figure 3.3: A Bias Voltage Generator Circuit. 36 Two basic definitions for properly stressing analog circuits are introduced in this sub-section: Full Stressability and Stress Time. 3.1.1 Full Stressability Gate-oxide distributed in a transistor can be divided into three regions: GD (be- tween Gate and Drain), GB (Gate and Substrate), and GS (Gate and Source). Breakdown in the region GD causes a gate-oxide short between gate and drain, so do the other regions. Let VGD, V013, and VGS, be the voltages across the three regions, respectively. When a tran- sistor in digital circuits is stressed, the voltages VGD, VGB, and VGS are the same, i.e., the stress voltage. In fact, the stress voltages can be easily applied to the terminals with the carefully selected stress vectors, where the stress time is determined by the stress voltage. However, for analog circuits, the voltages VGD, VGB, and VGS may be different due to the work function difference and/or the circuit topology. So, for analog circuits, the regions GD, GB, and GS need to be considered independently while evaluating the stress condi- tions [53]. 3.1.2 Stress Time Another problem associated with analog circuits is that it may not be possible to achieve the desired stress voltage across a region due to the operating conditions and circuit topology. For example, the voltage across region GS of transistor M11 in Figure 3.3 will depend on the driving transistor M10. This issue can be resolved by using the fact that mag- nitude and duration of applied voltage can be used to control the stressing of a region. When 37 desired stress voltage cannot be obtained across a region, the required amount of stress can be achieved by applying the available lower voltage for a longer time [53]. Let t2 < t1 and Vdd < V2 < V1, then the following property holds. Property 3.1 A region that requires t2 seconds to be fully stressed at V1 can also be fully stressed by the application of V2 fort] seconds. The stress time of a region is determined by the maximum voltage appearing across it during normal Operation. It should be mentioned here that the time to breakdown of flaw- less oxides is much higher than the lifetime of the circuits, so almost any stress time can be selected without overstressing or damaging the circuit. Let Vyn be the maximum voltage across the region y (GD, GB, or GS) of a transistor at Vnmmal. It can either be given by the circuit designer, or obtained from Monte Carlo simulations with DC analysis during the de- sign phase. Let Vyst be the voltage across the region at Vsuess. Property 3.2 The stress time for the region y for a lifetime of Z seconds can be expressed as tstress = 1:0(Z/‘l:0)(Vyn/VySt) (3-1) Proof: By Eqn. 2.], the thickness of the gate-oxide for tBD = Z seconds is Terr = (Va/G) Ina/to) 38 Therefore, by Eqn. 2.1 with tBD = tStress and Vox = Vyst, we have tstress = 10 epr(GNyst)(Vyn/G) ln(Z/ 10)] = 1:0 eprVyn/Vyst) ln(Z/ 10)] This concludes that tsuess = 10(Z/t0)(vy“/VYS‘) Consider the stress time of the circuit in Figure 3.3. The maximum voltages across the three regions of the NMOS transistor at 3 .3V are VGDn=3 .255V and VGSn=VGBn=3 .3V. On the other hand, the voltages across the regions at 5.82V are VGDst=5.709V and VGSs1=VGBs1=5-82V- By Eqn. 3.1, the stress times are tsuessGD=O35 seconds and twess_ Gs=tstress_GB=0.31 seconds. Similarly, for the PMOS transistors, VSGn=VBGn=3.255V, VDGn=0V, VSGst=VBGm=57O9V and VDGst=0V, by Eqn. 3.1, the stress times are twess- SG=tstress-BG=O-3S seconds. Note that the region DG with 0V does not need to be stressed, and can be excluded from the calculation process, or tsUess_DG=0 seconds. Therefore, the circuit in Figure 3.3 can be fully stressed at 5.82V in 0.35 seconds, or the circuit has a full stressability at 5.82V in 0.35 seconds. The above stressability definition can also be applied to the digital circuits. Con- sider the 2-input NOR gate of Figure 3.2. The maximum voltages across the three regions of the NMOS transistors, NA and NB, at 3.3V are VGDn=VGsn=VGBn=3-3V- On the other hand, the voltages across the regions at 5.82V are VGDst=VGSst=VGBst=5-82V- By Eqn. 3.1, the stress times are tstressGD=tstressfiS=tstress,GB=0.31 seconds. Similarly, for the PMOS transistors, PA and PB, VSGn=VBGn= VDGn=3 .3V, ngst=VBGm=VDGst=5.82V, by Eqn. 3.1, the stress times are twesssg=tsuess,BG=tstress_DG=0.31 seconds. 39 The results obtained using this procedure are identical to the one obtained from dig- ital extreme-voltage stress test process. Hence, it can be concluded that extreme-voltage stress test of digital circuits is a special case of extreme-voltage stress test of analog circuits. 3.2 Stress Vector Generation The stress vectors are selected from the vectors for all possible combinations of the input voltages of VSS and Vdd of the analog circuit under test. The stress vector generation process is comprised of two steps: primary stress vector generation and stress time calcu- lation. 3.2.1 Primary Stress Vectors For simplicity, the level converter circuit [54] in Figure 3.4 is used to describe the developed stress vector generation procedure. The circuit is comprised of 6 transistors and has two inputs, in+ and in-. Thus, there are four possible candidate stress vectors, i.e., {(in+,in-)=(0,0), (0,3.3), (3.3,0), (3.3,3.3)}. The circuit is simulated with each candidate stress vector, and the resultant voltages across the regions of all transistors are listed in Table 3 . 1 , where the row "SV max" records the maximum voltage of the region correspond- ing to a column and the row "MC max" is the resultant maximum voltages with the Monte Carlo simulations or given by the circuit designer. The table shows that both rows "SV max" and "MC max" are identical. As discussed in [55], a MOS transistor has a nonlinear resistance. The resistance of a MOS transistor increases monotonically as the supply volt- age decreases. This has been matched to our empirical results, the "SV max" is the same as 40 "MC max" for all example circuits, and endorsed the effectiveness of using the digital-like input combinations as the candidate stress vectors for the circuit simulations. I out Figure 3.4: A Level Converter Circuit. Table 3.1: Level Converter Circuit Simulation Results in+ in- Ml M1 M1 M2 M2 M2 M3 M3 M3 M4 M4 M4 M5 M5 M5 M6 M6 M6 GS GD GE SG DG BG GS GD GB 80 DG BG GS GD GB SG DG BG 0.0 0.0 2.73 0 2.73 3.3 2.73 3.3 2.73 0 2.73 3.3 2.73 3.3 2.73 2.73 2.730.57 -270.57 0.0 3.3 0.26 0 0.26 0 -3.04 0 0.26-3.040.26 3.3 3.3 3.3 3.3 3.3 3.3 0 -3.3 0 3.3 0.0 2.73 0 2.73 3.3 2.73 3.3 2.73 2.73 2.73 0 -3.3 0 0 -3.3 0 3.3 3.3 3.3 3.3 3.3 0.26 0 0.26 0 -3.04 0 0.26 0 0.26 0 -3.04 0 0.26-3.040.263.043.043.04 SVmax 2.73 0 2.73 3.3 2.73 3.3 2.73 2.73 2.73 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 MC max2.73 0 2.73 3.3 2.73 3.3 2.73 2.73 2.73 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 The next step is to build up a stress vector selection table. The intersection of a row and a column in Table 3.2 is assigned a 1 if the voltage of the corresponding entry in Table 3.1 is the maximum voltage, i.e., if it is equal to the entry in the row "SV max" of the same 41 column. Otherwise, a 0 is assigned. In other words, the entry with a 1 means that the region can be fully stressed when the candidate stress vector is applied. Thus, the stress vector gen- eration problem is to select a minimal set of stress vectors from the candidate stress vectors such that all regions are fully stressed. In effect, it is a minimal covering problem, i.e., a minimal set of rows is chosen to cover all columns. A heuristic algorithm for minimum cov- ering can be employed to find the solution. In Table 3.2, the stress vectors (in+,in-)= (00,33) and (33,00) are selected. In this study, these vectors are referred to as primary stress vectors. Table 3.2: Stress Vector Selection Table M1 M1 M1 M2 M2 M2 M3 M3 M3 M4 M4 M4 M5 M5 M5 M6 M6 M6 “H m‘ Gs GD GB so DG BG GS GD GB 80 no BG Gs GD GB SG DG 80 0.0 0.0 1 1 1 1 1 1 1 0 1 1 0 1 0 0 0 0 0 0 0.0 3.3 0 1 0 0 0 0 0 0 0 1 1 1 1 1 1 0 0 0 3.3 0.0 1 1 1 1 1 1 1 1 1 0 0 0 0 0 0 1 1 1 3.3 3.3 0 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 3.2.2 Stress Time Calculation The stress time of the circuit is estimated based on the selected stress vectors. Table 3.3(a) lists the selected stress vectors for the level converter circuit of Figure 3.4, where only 1-entries are shown. The circuit is again simulated with the selected stress vectors, where the stress voltage 5.82V replaces the normal operating voltage 3.3V in both supply voltage and stress vectors. The resultant voltages across those regions which can be fully stressed, i.e., l-entries in Table 3.3(a), are recorded in Table 3.3(b). Finally, the bottom row lists the "SV max" voltages shown in Table 3.1. 42 Table 3.3: Level Converter Circuit Simulation Results with the Stress Voltage (8) in+ M1 GS Ml GD Ml GB M2 SG M2 DG M2 BG M3 GS M3 GD M3 GB M4 SG M4 DG M4 BG M5 GS MS GD M5 GB M6 80 M6 DG M6 BG 0.0 3.3 3.3 0.0 (b) in+ in- M1 GS Ml GD M1 GB M2 SG M2 DG M2 BG M3 GS M3 GD M3 GB M4 SG M4 DG M4 BG M5 GS M5 GD M5 GB M6 80 M6 DG M6 BG 0.0 5.82 5.82 5.82 5.82 5.82 5.82 5.82 5.82 0.0 4.73 4.73 5.82 4.73 5.82 4.73 4.73 4.73 5.82 5.82 5.82 SV max 2.73 2.73 3.3 2.73 3.3 2.73 2.73 2.73 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 3.3 In this implementation, a reduced table, as shown in Table 3.4, is used to calculate the stress times. The reduced table is constructed by grouping the equivalent regions in Table 3.3, where two regions are equivalent if they have the same column data. Table 3.4: Level Converter Reduced Table for Stress Time Calculation in+ in- C1 C2 C3 C4 0.0 5.82 5.82 5.82 0.0 4.73 5.82 SV max 2.73 3.3 3.3 c 1: M 1_GS, M1_GB, M2_DG, M3_GS, M3_GD, M3_GB; c2: M1_GD; c3: M2_SG, M2_BG, M6_SG, M6_DG, M6_BG; C4: M4_SG, M4_DG, M4_BG, M5_GS, M5_GD, M5_GB. As shown in Eqn. 3.], the stress time is a function of Vyn/V There are two dis- yst: tinct pairs of VYnIVyst in Table 3.4, i.e., (2.73/4.73) and (3.3/5.82). Thus, the stress times are tsuCSS(2.73/4.73)=0.47 seconds and tsuess(3.3/5.82)=0.31 seconds. As mentioned, the 43 region with Vyn=0 does not need to be stressed, and can be excluded from the stress time calculation process. The stress times for these pairs, TGi, i=0,1,2, are listed in Table 3.5. Table 3.5: Level Converter Calculated Stress Times Vyn/Vyst Stress Time TGO 0 0 seconds TGl 3.3/5.82 0.31 seconds TG2 2.73/4.73 0.47 seconds 3.2.3 Generation Procedure Algorithm I summarizes the stress vector generation process presented in the pre- vious sub-section. Here, the fully differential folded-cascode operational transconductance amplifier (OTA) [56], as shown in Figure 3.5, is used to describe the stepwise procedure of the algorithm. The circuit has 22 transistors and 6 inputs (VCM, VbiasZ, Vbias3, Vbias4, V+,V-). By Step 1.1, there exist 64 input combinations of 0.0V and 3.3V, i.e., there exist 64 candi- date stress vectors. In Step 1.2, the circuit is simulated with each candidate stress vector, and the resultant voltages across the regions of all transistors are listed in a table similar to Table 3.1. The table contains 72 columns (i.e., 6 columns for the inputs and 66 columns for the transistor regions) and 65 rows (i.e., 64 rows for the stress vectors and one row for recording “SV max.” In Step 1.3, vector selection table is built where the intersection of a row and a column is assigned a 1 if the voltage of the corresponding entry in the table gen- erated in Step 1.2 equals the entry in the row “SV max” of the same column. By Step 1.4, 44 Algorithm I Step 1: Primary Stress Vector Generation 1.1: Generate candidate stress vectors. 1.2: Simulate the circuit with various candidate vectors and tabulate the simulated results. 1.3: Generate a stress vector selection table. 1.4: Find a minimal set of stress vectors. Step 2: Stress Time Calculation 2.1: Simulate the circuit with each primary stress vector at Vsuess, and tabulate the simulated results. 2.2: Construct a reduced table. 2.3: Find distinct pairs VynNyst and calculate their stress times. 45 among the 64 candidate stress vectors, eight primary stress vectors in Table 3.6 are selected, where the vector (0,0,1,1,1,1) means the input voltages are assigned as VCM=Vbia52= 0.0V, and Vbias3=Vbias4=V+=V-=3.3V. Vbias3 Vbias4 {@114 i M” Figure 3.5: Fully Differential Folded-Cascode OTA. Table 3.6: OTA with CMFB Stress Vectors VCM VbiasZ Vbias3 Vbias4 V+ V- 0 0 l l l 1 15 l 0 0 0 1 0 34 l 0 l 0 0 l 41 l 0 l 0 l 0 42 l 0 l 1 0 0 44 l 0 1 1 0 1 45 l 0 l l l 0 46 I l 1 1 0 0 60 46 By Step 2.1, the circuit is simulated with each selected stress vector, and the simu- lation results are tabulated. In Step 2.2, a reduced table, i.e., Table 3.7, is constructed. By Step 2.3, seven distinct pairs of (Vyn/Vyst) are identified, i.e., (3.29/5.81), (3.3/5.82), (2.65/ 4.37), (2. 19/3 .38), (1.44/2.17), (1.40/1.92), and (0.47/0.49). The stress times for these pairs, TGi, i=0,1,2,...,7, are listed in Table 3.8. Table 3.7: OTA with CMFB Reduced Table for Stress Time Calculation C1 C2 C3 C4 C5 C6 C7 C8 C9 C10 C11 C12 C13 C14 C15 C16 C17 C18 C19 C20 15 5.82 5.82 5.82 5.82 5.82 5.82 5.82 5.82 0 34 5.81 5.82 5.82 5.81 5.82 0 41 5.82 5.81 5.82 5.82 0.49 5.82 0 42 5.81 5.82 5.82 5.82 0.49 5.82 0 44 5.82 5.82 5.82 5.82 1.92 5.82 0 45 5.82 5.82 5.82 5.82 2.17 5.82 0 46 5.82 5.82 5.82 5.82 2.17 5.82 0 6g 3.38 5.82 5.82 5.82 5.82 4.37 5.82 0 * 2.19 3.29 3.3 3.29 3.3 3.3 3.3 3.3 3.3 3.3 3.3 1.44 .47 2.65 1.44 0.47 3.29 1.40 3.3 0 *: SV max; Input vectors: (VCM,VbiasZ,Vbias3,Vbias4,V+,V-) C 1 : M5_SG,M5_DG,M5_BG,M6_SG,M6_DG,M6_BG,MF9_GS,MF9_GB,MF6_GD,MF7_GD; C2: M8_SG,M8_DG; C3: M8_BG,M7_BG; C4: M7_SG,M7_DG,MF8_GB; C6: M2_GB; C5: M2_GS,M2_GD,M1_GS,M l_GD,MF3_GD,MF4_GS,lVIF4_GD,1\/IF 1_GD,MF2_GS,MF2_GD; C7: M13_GS,M13_GD,M14_GD; C8: M13_GB,M10_GB,MF4_GB,MF2_GB,M9_GB; C9:M9_SG, M9_DG, M10_GS, M10_GD, M12_GD, M11_GD; C11: M1_GB; C12:MF8_GS; C10:M12_GS,M12_GB,M1l_GS,Mll_GB,Ml4_GS,Ml4_GB,MFl3_GS,MF3_GB,MF1_GS,MF l_GB; Table 3.8: OTA with CMFB Stress Times C13: MF8_GD; C14: MF6_GS,MF7_GS; C15: MF5_GS; C16: MF5_GD; C17: MF5_GB; C18: MF10_SG,MF10_BG; C19: 1V1F6_GB,MF7_GB; C20: MFlO__DG,MF9_DG. Vyn/Vyst Stress Time Vyn/Vysr Stress Time TGO 0 0 seconds TG4 2.19/3.38 9.68 seconds TGl 3.29/5.81 0.30 seconds TGS 1.44/2.17 18.87 seconds TG2 3.3/5.82 0.31 seconds TG6 1.40/1.92 5.14 minutes TG3 2.65/4.37 1.65 seconds TG7 0.47/0.49 64.16 days 47 3.3 Stressability Analysis A circuit is fully stressed, or has a full stressability, if all regions of all the transistors in that circuit can be stressed completely within a feasible stress time period. Table 3.9 rear- ranges the columns in Table 3.4 for the level converter by sorting their stress times in an ascending order. The number of regions included in each column and the stress time of each column are also listed. Table 3.9: Level Converter Stressed Regions and Stress Times in+ in- C2 C3 C4 CI 0.0 3.3 l 1 3.3 0.0 1 l 1 0.0 5.82 0 5.82 5.82 0.0 0 5.82 4.73 Number of regions 1 5 6 . 6 Column stress time 0 seconds 0.31 seconds 0.47 seconds Based on the information given in Table 3.9, for various stress times TGi’s, the number of regions are plotted in Figure 3.6(a). When a circuit is stressed in a time period of TGi, the regions with the stress time TGj’s, where j s i, will all be stressed. Thus, the number of regions can be stressed in a time period of T6, is the total number of the regions for TGj’s, j s i. Figure 3.6(b) plots the accumulated number of regions for each stress time TGi. The total number of regions in this circuit is 18. The stress coverage for a stress time TGi is defined as the ratio of the accumulated number of regions for TG, over the total num- ber of regions. Figure 3.6(b) also lists the stress coverages for various stress times, and it is referred to as a coverage chart. A 100% stressability can be achieved for this circuit in a 48 total stress time of 0.78 seconds by applying stress vectors (0,5.82) and (582,0) for 0.31 seconds and 0.47 seconds, respectively. > 3‘ g as s s «"3 o 3 S g b b ‘0 :8 {I} U3 El) m r: c: .9 2 CD CD 0 0 ad 05 ‘8 “5 TGO TGl T62 T00 T01 TGZ Stress Time Stress Time (a) (b) Figure 3.6: Level Converter Coverage Chart: (a) Stress Regions; and (b) Stress Coverage. Similarly, for the OTA with CMFB circuit shown in Figure 3.5, Table 3.10 rear- ranges the columns in Table 3.6, where the stress times are sorted in an ascending order and both the number of regions included in each column and the stress time of each column are tabulated. Based on the information given in Table 3.10, for various stress times TGi’s, the corresponding coverage chart is given in Figure 3.7, where the total number of regions in this circuit is 66. 49 Table 3.10: OTA with CMFB Stressed Regions and Stress Times C2 C4 C3 C5 C6 C7 C8 C9 C1 _I l l 0 1 0 0 1 0 0 0 0 0 0 0 1 ~...._.._.._.._.o._. 1 0 O 0 1 1 1 1 (DO—'OO—Or— 0 of regions (',u].—a._.._.._._.._a 1 1 1 1 1 1 1 1 2 0 Stress '9 X e\° e\° e\° e\° e\° ‘S § 3 m N M \o —- tr r\ \° in w ’3. " ‘5 '\. 9‘. 3‘. 3‘. E; g B m m N In 32 m o O m i —- r\ l\ e. o o «— 8 E 60 62 64 6° £2” 52” “5 '8 ,2 2 2 2 2 2 2' -. TGO TGI TG2 TG3 TG4 TGS TG6 TG7 TGO 'I'Gl TG2 '1‘G3 '1‘G4 TGS TG6 TG7 Stress Time Stress Time Figure 3.7: The Coverage Chart for OTA: (a) Stress Regions; and (b) Stress Coverage. 3.4 Stress Vectors Optimization There exists a trade-off between stress coverage and the total stress time for a given set of stress vectors [57]. The stress coverage may be increased at the cost of increasing the total stress time. The stress vector optimization problem can be formulated as follows. 50 Problem 1. (Stress Coverage Constraint) To generate a set of stress vectors that meet stress coverage requirements and result in the minimal total stress time. Problem II. (Total Stress Time Constraint) To generate a set of stress vectors that meet total stress time constraints and result in the maximum stress coverage. This sub-section presents two algorithms for the above two problems. 3.4.1 Stress Coverage Constraint Based on the primary stress vectors and the calculated stress times obtained in Algorithm 1 for a given circuit, the stress coverage constraint problem is first to derive a primary solution. The primary solution is then refined to obtain the optimal solution. We first consider the derivation of a primary solution. Given a required stress cov- erage q, the least stress time, TGi, is defined from the generated coverage chart, where TG, is the minimum stress time in the coverage chart that the corresponding stress coverage is greater than or equal to the required stress coverage q. The stress coverage of the regions in groups Cj’s, whose stress times TGj’s exceed TGi, are discarded. In other words, those stress vectors which were used to stress these regions can be removed from the selection table. Therefore, the selection table is reduced by removing the columns whose stress times are greater than TG,, and removing the redundant rows, if they exist, after removing col- umns. The remaining stress vectors in the reduced table must be linearly independent, and 51 their stress times are calculated. The set of stress vectors is referred to as the primary solu- tion. For example, assume a stress coverage of 92% is required for the OTA circuit in Figure 3.5. From the coverage chart in Figure 3.7(b), the least stress time is TGS, or 18.87 seconds, for a stress coverage of 93.94%. As listed in Table 3.10, the columns with the stress time of 18.87 seconds are "C12" and "C15" and stress times in that table are in an ascending order. Therefore, the columns "C18", "C13", and "C16" in Table 3.10 are removed. After removing these columns, the vectors "42" and "44" become redundant and are also removed. The primary solution {15,34,41,45,46,60} is resulted from Table 3.11. The next step is to calculate the stress times for these vectors. Table 3.11: Reduced Table for Stress Vector Selection C2 C4 1 C3 C5 C6 C7 C8 C9 1001111 11111 100010 101101 101110 111100 1 1 1101001 1 1 l Let tsuess(Ci) denote the stress time for the column Ci. The stress time of a stress vector is the maximum stress time of the columns covered by the vector. For example, in Table 3.11, the columns with the maximum stress time in the vector "15" is "C11". Thus, the stress time of the vector " 15" is TS15=tstress(C1 1)=O.31 seconds. Similarly, TS34=tsuess(C19)=0.31 seconds, TS4I=tweSS(C19)=0.31 seconds, TS45=tsuess(C12)=9.87 52 seconds, TS46=tstress(C15)=l8.87 seconds, and TS60=tstress(Cl)=18.87 seconds. Thus, the total stress time is TS15+TS34+TS41+TS45+TS46+TS60=4835 seconds. This concludes that application of stress vectors {15,34,41,45,46,60} in a total stress time of 48.35 seconds will achieve a stress coverage of 93 .94% which meets the coverage requirement of 92%. Once the primary solution is derived, the next attempt is to refine the primary solu- tion for the optimal solution, where the total stress time is decreased while keeping the stress coverage within limit. Note that the total stress time may be reduced by decreasing the stress coverage. Recall that the primary solution was derived by selecting the least stress time T6, whose corresponding coverage meets the requirement. For simplicity of discussion, let r be the number of columns having the stress time TGi, RTGi be the total number of regions included in the columns having the stress time TGi, and Rdiff be the minimum number of regions needed, together with all regions with the stress times less than TGi, to meet the coverage requirement. For example, in Table 3.10, r=2, i.e., there are two columns, "C12" and "C15", having the stress time TGS=18.87 seconds. In Figure 3.7(a), RTGS=2 Finally, Rdifl=61-60=l because the number of regions needed for the 92% coverage is 61 and the accumulated number of regions for TG4 is 60. Note that if r=1, i.e., there is only one column with TGi, or if r > 1 and the regions included in any combinations of any (r-l) columns is less than Rdiff, the coverage will not meet the requirement when a column is removed. Thus, there will be no improvement and the process will terminate. This is summarized in the following property. 53 Property 3.3 There will be no improvement if r=l; or r > 1 and the number of regions included by any combinations of any (r-l) columns is less than Rdiff. If r > 1, a number of tables are constructed for generating the stress vectors and their stress times and coverages. A combination of 2 columns, where 1 s z < r, including the number of regions larger than Rdiff is referred to as a candidate combination. A table is con- structed by including each candidate combination with all columns whose TGJ- < TGi. Its reduced table results in a set of linearly independent stress vectors. Based on the vectors, the total stress time TSx and stress coverage SCx are calculated. The solution is updated if this solution meets the coverage requirement and has lesser stress time. Otherwise, the next candidate combination is selected. The above process is repeated until there are no more candidates to be chosen. In this example, r=2. Two possible combinations are concluded: either including "C12" or "C15". In both cases, the same stress coverage of 61/66=92.4% is resulted. We first consider the first combination. The column "C12" combines with the columns with stress times less than TGS to form a table. In fact, this table is equivalent to removing the column "C15" from Table 3.11. The corresponding reduced table is given in Table 3.12, where the linearly independent stress vectors are {13,34,41,45,60}. Therefore, the total stress time is TS15+TS34+TS41+TS45+TS60=2948 seconds. Similarly, with "C15", the lin- early independent stress vectors {13,34,41,46,60} are obtained from the corresponding reduced table. The total stress time is also 29.48 seconds. 54 Table 3.12: Reduced Table after Excluding C15 from Table 3.11 2C2C41C3C5C6C7C8C91 111 1C1 l l 1 1 1001111 100010 101101 1 l 1 1 11010011 1 1 1 1111001 This concludes that the total stress time is improved from 48.35 seconds to 29.48 seconds at the cost of decreasing the coverage from 93.4% to 92.4%. But, it still meets the requirement. The above stress vector generation is summarized in Algorithm H. 3.4.2 Total Stress Time Constraint Given a total stress time requirement, Treq, the coverage chart is used to define an initial stress time and the associated stress coverage to work with. Let TG, be the maximum stress time that is less than or equal to Treq. Thus, a table is constructed by including all columns with TGJ- 3 TG,. A set of linearly independent stress vectors is generated from the corresponding reduced table. The total stress time for these stress vectors are calculated. If the total stress time is greater than Tr then the next smaller stress time, i.e., TGH, is CQ’ selected. The above process is repeated until the resultant total stress time is less than or equal to Treq. Without loss of generality, say, TGJ- is the selected stress time, and its corre- sponding coverage is SCj. The resultant set of stress vectors is referred to as the primary solution, and its coverage is SC,-. 55 Step 1: Step 2: Step 3: 3.1: 3.2: 3.3: 3.4: Step 4: 4.1: 4.2: 4.3: 4.4: 4.5: 4.6: 4.7 : Algorithm II Generate the Primary Stress Vectors and calculate Stress Times (Algorithm 1). Derive the Stress Coverage Chart. Generate the Primary Solution. Let TGi be the least stress time with a coverage exceeding the requirement. Construct reduced table by removing the columns with stress times TGJ- > T6,. Generate linearly independent vectors from reduced table. Calculate the total stress time TSx for the stress vectors. Improvement Find r and calculate Rdiff. IF Property 3.3 holds, STOP. Derive candidate combinations. Construct a table containing a candidate and the columns with TGJ- < TGi. Calculate the stress time TSx for the stress vectors from the reduced table. The solution is updated if the stress time is smaller. Repeat 4.4 until no candidates exist. 56 Suppose that the total stress time for the OTA with CMFB is allowed to be within 30 seconds, i.e., Treq=30 seconds. From the coverage chart in Figure 3.7(b), TG5=18.87 seconds _<. qu is the maximum one. A table that excludes columns "C18", "C13", and "C16" from Table 3.10 is constructed. The corresponding reduced table is exactly the same as Table 3.11. As discussed previously, the total stress time for the resultant stress vectors is 48.35 seconds. The time is greater than Treq=30. Thus, the stress time TG4=8.97 seconds is selected. A table that removes columns "C12" and "C15" from Table 3.11 is constructed. Table 3.13 shows the corresponding reduced table, where the set of linearly independent stress vectors {15,34,41,60} is the primary solution with the total stress time of 19.80 sec- onds < T By Figure 3.7(b), its stress coverage is SC4=90.91%. req~ Table 3.13: Reduced Table after Excluding C12 and C15 from Table 3.11 C20 C2 C4 C17 C3 C5 C6 C7 C8 C9 C10 C11 C19 C14 Cl 150 0 1 l 1 1 1101001 111100 1 341000101 1 1 Based on the primary solution with a coverage SCj, the next step is to increase the stress coverage while keeping the total stress time within the limit. The stress coverage may be increased at the cost of increasing the total stress time. In fact, the maximum stress cov- erage for the circuit lies between SC,- and SCJ-H. Consider the table consisting of all columns which have the stress time less than or equal to TGjH. Let r be the number of columns having the stress time TGj+1 and Tdiff is the 57 difference between the required stress time and the total stress time for the primary solu- tion. Similar to Property 3.3, the following property results. Property 3.4 There will be no improvement if F], or r > 1 and Tdiff < TGj+1. If r > 1 and Tdiff 2 TGj+1, then a number of tables are constructed for generating the stress vectors and their stress times and coverages. A combination of 2 columns, where 1 s z < r, is referred to as a candidate combination. A table is constructed by including each candidate combination with all columns whose TGi s TGj. Its reduced table results in a set of linearly independent stress vectors. Based on the vectors, the total stress time TSx and stress coverage SCx are calculated. The solution is updated if TSx < T req 311d SCx > SCj. Otherwise, the next candidate combination is selected. The above process is repeated until no more candidates are left to be chosen. In this example, r=2 and Tdiff=30-19.80=10.20 > 9.68 seconds. Two possible can- didate combinations are resulted, i.e., "C12" or "C15". We first consider the table consisted of "C12" and the columns with stress times TGi s TG4. This table is exactly the same as Table 3 . 12, where the linearly independent stress vectors {13,34,41,45,60} are resulted and its total stress time is TSls+ TS34+TS41+TS45+TS6O =29.48 seconds and the stress cover- age is 92.4%. Comparing with the primary solution, this solution meets the requirement and improves the coverage from 90.91% to 92.4%. Similarly, the candidate combination "C15" is processed, it results in a set of stress vectors {13,34,41,46,60} with a total stress time of 29.48 seconds and a coverage of 92.4%. 58 The above stress vector generation process is summarized in Algorithm 1H. 3.5 Stress Vectors for CMOS Capacitors and Resistors MOS capacitors are usually formed as parallel plate devices with gate-oxide as an insulator. In mixed-signal CMOS ICs, the digital circuitry usually requires only a single poly-silicon (poly) layer for the gates. However, for linear operation, the analog stages gen- erally require high linearity capacitors which are normally realized between two poly lay- ers, adding a second poly layer for this purpose. This increases the cost of fabrication significantly. Using poly-metal, metal-metal, or special poly-metal-metal sandwich con- struction, the second poly layer can be avoided, but the oxide used in these structures re- quires a large chip area per unit capacitance and yields a large parasitic capacitance to the substrate. Recently, there have been several attempts to use the gate to channel capacitance of MOSFETs as the capacitors needed in analog CMOS circuits [58-63], because of the several advantages gained. Hence, the stress test paradigms can readily be applied to such analog capacitors and the developed process can be used to generate the stress vectors. A MOSF ET can be biased to provide a non-linear resistor. Such a resistor provides much greater values than diffused ones while occupying a much smaller area. When the gate is shorted to the drain in a MOSFET, a quadratic relation between current and voltage exists and the device conducts current only when the voltage exceeds the threshold voltage. Under these circumstances, the current flowing in this resistor (i .e., the MOSF ET drain cur- rent) depends on the ratio of channel width-to-length [64]. Hence, to increase the resistor value, the aspect ratio of the MOSF ET should be reduced to give longer channel length and 59 Algorithm II] Step 1:Generate the Primary Stress Vectors and Calculate Stress Times (Algorithm 1). Step 2:Derive the Stress Coverage Chart. Step 3: Generate the Primary Solution. 3.1: 3.2: 3.3: 3.4: Step 4: 4.1: 4.2: 4.3: 4.4: 4.5: 4.6: 4.7: Let Treq be the required stress time. Let TGi be the maximum stress time in Stress Coverage Chart with TG, s Treq. Construct a table consisted of the columns with stress time 3 TG,. Generate linearly independent vectors and calculate total stress time TSX. IF TSx > Treq, i=i-1;GOTO 3.2. Otherwise, the set of vector is the primary solution. (TSX, SCj, and TG,- be the total stress time, coverage, and selected stress time.) Improvement Find r and calculate TdifTGj-Treq IF Property 3.4 holds, STOP. Derive the candidate combinations. Construct table containing a candidate and the columns with stress time < TGj. Calculate TSx and CVx for the stress vectors from the reduced table. The solution is updated if TSX < Tr and CVx increases. eq Repeat 4.4 until no candidates exist. 60 narrower channel width. Transistor M1 1 of voltage bias generator circuit, shown in Figure 3 .3, provides a resistor of this kind and its stress requirements have already been discussed in Section 3.2. Previously in most standard MOS processes monolithic resistors were implemented as polysilicon or n-well or n+/p+ diffusion strips acting as passive devices but current trend is to use MOSFETs for resistor implementation [56]. Resistors implemented using polysilicon or n-well or n+/p+ diffusion do not involve any gate-oxide and hence, do not need to be stressed. 3.6 Discussion This chapter showed that applying the extreme-voltage stress process for digital cir- cuits is inadequate for analog circuits, i.e., the analog circuits can not be properly stressed using the digital procedure. Basic concepts required for proper stressability of analog cir- cuits have been presented. It has been concluded that extreme-voltage stress test of digital circuits is a special case of analog circuits. Based on the fundamental concepts, stress vec- tors generation procedure for extreme-voltage stress of analog circuits has been described. It has been found that stress time is a major factor for determining the stressability of analog circuits. So, the stressability of an analog circuit should be defined as the percent- age of regions in a circuit that can be fully stressed in a given stress time. Full or 100% stressability can be achieved if there is no limit on stress time. However, in practice the stress time for a circuit will be selected by the manufacturer based on the trade-offs among customers’ reliability requirements, available equipment, technology, time to market and cost. Hence, in order to evaluate the stressability of a circuit for the selected stress vectors, 61 a stressability analysis procedure has been developed. Stressability analysis determines the relationship between stress coverage and stress time of the circuit based on the selected stress vectors. In order to improve the efficiency of extreme-voltage stress test, algorithms have been developed for two stress vectors opti- mization problems. Stress coverage constraint problem is to generate a set of stress vectors that meet the desired stress coverage requirements and result in the minimal stress time. Total stress time constraint problem is to generate a set of stress vectors that meet the required stress time constraints and result in the maximum stress coverage. The stressability analysis process allows estimation of a circuit’s stressability dur- ing the design phase. Once areas having poor stressability are found, the circuit may be redesigned or modified with extra circuitry in order to improve the final stressability. The goal will be to achieve the required stress coverage within the desired feasible time. Thus, it is necessary to develop a design methodology that provides some stressability enhance- ment strategy. Development of such a strategy is presented in the next chapter. 62 Chapter 4 STRESSABILITY DESIGN METHODOLOGY This chapter presents the stressability design methodology, a major component of the framework of an automatic stress test system for analog/mixed-signal circuits, as illus- trated in Figure 1.8. The stressability design methodology integrates the developed proce- dures of stress vector generation, stressability analysis, and stressability enhancement process in order to facilitate the design of analog circuits that can be stressed optimally. The methodology can be utilized in the design stage to evaluate the stressability of the circuit before the designs are finalized. Based on the stress vectors generated, stressability analysis will be employed to determine the feasibility of extreme-voltage stress testing under the desired stressability constraints. If it is not feasible to achieve the required stressability, modifications will be introduced in the design using stressability enhancement process such that the circuit meets the desired requirements. Stressability design methodology will be employed throughout the design cycle of the product to ensure the feasibility of extreme- voltage stress test of final design. Generalized overall flow of the developed stressability design methodology is shown in Figure 4.1. Given an analog circuit, and stressability requirements, in terms of ei- ther stress coverage or stress time or both, the first step is to generate the stress vectors. 63 Stressability analysis is then performed using the selected stress vectors. In case the desired stressability requirements are met, the process terminates. If it is found that the selected vectors do not adhere to the specified stressability, optimization of stress vectors is attempt- ed under the given stressability constraint. The process stops in case the required stressabil- ity is achieved with the optimized stress vectors. However, if these vectors still fail to meet the desired criterion, stressability enhancement strategy is employed to obtain the required level of stressability. In case of modifications to the circuit for stressability enhancement, the entire process is repeated starting from the stress vector generation of the redesigned circuit. START Stress Vectors Generation Stressability Analysis Yes Stressability Enhancement A Requirements Met? Stress Vectors Optimization No Requirements Met? Figure 4.1: Stressability Design Methodology Flow Chart. 64 In the stress vector generation process presented in the previous chapter, exhaustive simulation was used to generate the primary stress vectors. Use of exhaustive simulations is a major concern for large circuits as simulation times may become infeasible for very large circuits with large number of primary inputs. Thus, it is necessary to develop efficient, yet effective procedures for stress vector generation of large circuits. Section 4.] presents a partitioning scheme based on the control flow model and a hierarchical stress vector gen- eration based on the topological structure of the circuit. The stressability analysis process locates areas of a circuit having poor stressability, which usually cannot be discovered by the designers beforehand. The information obtained from stressability analysis allows estimation of a circuit’s stressability during the design phase. Hence, potential problem areas can be located earlier. Once those areas are found, the circuit may be redesigned or modified with extra circuitry in order to improve the final stressability. A strategy for stressability enhancement is presented in Section 4.2. 4.1 Stress Vector Generation Exhaustive simulation was used to generate the primary stress vectors in Chapter 3. More specifically, the stress vectors are selected from the vectors for all possible combina- tions of the input voltages of 0V and 3.3V of the analog circuit under test. The simulation results for all possible combinations are used to construct the stress vector selection table, such as Table 3.2. In case the number of inputs of a circuit is n, then it is simulated with 2n candidate stress vectors. Simulation of large circuits or circuits with large number of inputs may take a significantly long time. 65 In order to reduce the computational complexity, this section presents a hierarchical stress vector generation process and a hierarchical stressability analysis process. The stress vectors are generated based on the topological structure of the circuits/sub-circuits without performing circuit simulations. Both stress vector generation process and stressability anal- ysis process can be performed in a hierarchical fashion. In order to allow both processes to be performed hierarchically, a control-flow model (CFM) of CMOS circuits is introduced. 4.1.1 Control-Flow Model A MOS network can be described by a flow graph and a control graph. Since the drain current and gate voltage are two major parameters in the DC analysis of a MOS tran- sistor, the flow graph describes the current flow, while the control graph represents the gate control voltage. More specifically, the flow graph is constructed by converting each three- terrninal MOS transistor in a MOS circuit network into a two-terminal device, where the gate connection of each transistor is removed. A valid path is defined as a path that travels from Vdd to Vss. Both Vdd and VSS are referred to as terminal nodes and the others are primary nodes. A simple path partitioning scheme was developed to partition a flow graph using the following simple rules: Rule 1: Any valid paths which share at least a primary node will be in the same partition. Rule 2: A valid path forms a partition if it does not share a primary node with others. 66 Consider an operational transconductance amplifier (OTA) [65], as shown in Figure 4.2(a). The circuit comprises of four valid paths, as shown in Figure 4.2(b), where its flow graph can be divided into three partitions, namely Pl , P2, and P3. A primary node of a partition is called a controlling node if it connects to at least one gate of a transistor in the other partition, e. g., node n9 in P1, nodes n15 and n22 in P2. The flow “A-->B” in the flow graph, as shown in Figure 4.2(c), means a controlling node in Partition A connects to the gate of a transistor in Partition B. A primary partition is the one which is not controlled by any other partitions, e. g., P2. Figure 4.2(d) shows the circuit partitions resulted from the original circuit in Figure 4.2(a). 4.1.2 Generation Process For simplicity of discussion, we first consider a partition with a single valid path, as shown in Figure 4.3(a). The partition contains r cascaded transistor TRi, i=1,2,...,r, where each transistor has an input 1N, j=1,2,...,r. The transistor can be either NMOS or PMOS. A primary node PNJ- is located between two transistors TR]- and TRJ-H. Without loss of generality, the primary nodes are lined up and labeled in an ascending order, where let PN0=VSS and PNI=Vdd. The transistor TR]- is located between nodes PNH and PN,-. This circuit is equivalent to a number of NMOS or PMOS switches connected in series. Therefore, the node voltage to be VSS or Vdd can be easily obtained by turning ON and OFF the switches as described in the following property. 67 P1 P2 P3 M8 Vou M9 (b) Vbias Vin+ Vin- P1 P2 P3 Vdd — Tmax; GOTO 2. Otherwise, the desired stressability has been achieved. 86 4.2.2 Pin Overhead Reduction In this approach, the stressability of analog circuits has been improved using addi- tional transistors and input pins. However, pin overhead is generally very expensive. There- fore, how to reduce the number of external inputs for such applications becomes a very important and practical issue. In order to accomplish this, the modified circuit, that meets the desired stressability requirements, is examined again to determine whether it is possible to reduce the number of external inputs. Let q be the number of switches added in the stress- ability improved circuit. Since, additional circuitry has been used to enhance the stressabil- ity of the circuit which needs to be disabled during normal operation. So, at least one input pin is required that controls the normal and stressed operation and the following property results. Property 4.3 The minimum value of q = 1, for a stressability enhanced circuit. Input optimization is based on the selected stress vectors and the conditions required for normal operation of the stressability enhanced circuit. First step is to build an input minimization table, which lists the conditions of each additional input required for the selected stress vectors. The number of columns in this table is q. Ifthe table does not contain a row with values required for normal operation of the circuit, another row is added containing these values. For example, the input minimization table for the OTA cir- cuit of Figure 4.9(a) is shown in Table 4.2. The normal operation of the circuit requires 87 that Vstl = 0.0 and Vst2 = 0.0. Since, first row of the table already contains these values, no additional row is required. There are two columns in this table, so q = 2. Table 4.2: Input Minimization Table for OTA Vstl Vst2 0 O 1 l 1 l 1 1 If two columns of an input minimization table are identical, it means that the switch- es belonging to these columns can be controlled by the same external input. So, a reduced input table is constructed by merging the duplicated columns in the above table. Let s be the number of columns in the reduced table. Hence, the circuit will require 8 additional in- put pins and the following property results. Property 4.4 If s < q, then the number of additional inputs required is s. For the OTA circuit, since q is greater than one, a reduced input minimization table is built as shown in Table 4.3. The table contains only one column, indicating that s=1, and no further improvement is possible according to Property 4.3. Thus both inputs can be shared, i.e., both inputs can be merged as a single control input, as shown in Figure 4.10. 88 Table 4.3: Reduced Input Minimization Table for OTA Vstl 0 1 l 1 Vdd tat—+44 ' apt—44a Vin- #1 M3 M4 I—vm.» { M82 0— Vout Vbias —+E/15 Vstl4F-lE'1‘Sl E71} ”£9, V88 Y Figure 4.10: Modified OTA Circuit of Figure 4.2(a) with Two Additional Switches and One Input. As, an inverted output of an additional pin can be generated using an inverter. So, input minimization table is firrther reduced by eliminating the columns that are complement of other columns. This will remove those columns from the table that belong to the switches which can be controlled by true and complement values of the same external input pin. Let m and n be the number of rows and columns, respectively, in the updated reduced table. 89 The number of additional inputs required will then be determined based on the values of m and ii. If n s Ilogzml, then the number of inputs required is n. However, if n > Ilogzml, the number of inputs can be reduced to Ilogzml by designing a combinational circuit having Ilogzml inputs and n outputs. This is summarized in the following property. Property 4.5 The number of additional inputs required is n if n S Ilogzml, otherwise, can be re- duced to Ilogzml by adding extra hardware. The drawback associated with reduction of inputs using additional combinational circuit is that it is to be ensured that the added circuit can also be stressed with the already selected stress vectors, otherwise, stress vectors for the added combinational circuit need to be added in the set of stress vectors for the circuit. Consider the benchmark opamp circuit shown in Figure 4. 11(a) [66]. The circuit is comprised of transistors, capacitor, and resistor. In this implementation, capacitor is real- ized using two poly layers and the resistor is implemented using n-well. The circuit has two inputs (VN and VP) and produces an output VO. Based on the selected stress vectors, Fig- ure 4.11(b) shows the stressability analysis results, where the stress time is 202.4 seconds. Suppose that a feasible stress time of 0.60 seconds is required for the benchmark Opamp circuit. Based on the stressability analysis results in Figure 4. 11(b), two switches are 90 VO VN VP C1 C2 C3 C4 C5 C6 C7 C8 C9 C10 0 l l 1 1 1 1 1 1 l 0 1 1 l 1 l 1 Number of regions 3 2 l 5 l l 6 6 l l Column stresstime 0 0.02 0.31 0.34 24.3 65.6 202.4 C1: M1_DG,M2_GD,M4_GD; c2: M2_GS,M2_GB; c3; M3_BG; C4: M6_SG,M6_DG,M6_BG,M9_GS,M9_GB; cs: M9_GD; C6: M3_SG; C7: M3_DG,M4_GS,M4_GB,M7_GS,M7_GD,M7_GB; C9: M5_DG; C8: M1_SG,Ml_BG,M5_SG,M5_BG,M8_SG,M8_BG; c 10: M8_DG. (b) Figure 4.11: Benchmark Opamp Circuit: (a) Schematic; and (b) Stressability Analysis. 91 added as the modified circuit shown in Figure 4.12(a), one is realized by the PMOS tran- sistor MS] and the other by the NMOS transistor MS2, where both transistors are respec- tively controlled by the inputs Vstl and Vst2. With the aspect ratios 20 for MS] and 4 for MS2, the stressability analysis results are shown in Figure 4. ]2(b). The results show that the maximum stress time is 0.57 seconds which meets the requirement, and both the added transistors are fully stressed. Table 4.4 is the input minimization table for this circuit. For normal operation of the circuit, both MS] and M82 should be off which is accomplished by applying Vstl=3.3V and Vst2=0.0V. Since, second row of the table meets such condi- tions, no additional row is needed for normal operation. As the input minimization table contains two columns, so q = 2. Table 4.4: Input Minimization Table for Opamp Vstl Vst2 0 1 1 0 0 1 Since, q is greater than one, a reduced input minimization table is constructed as shown in Table 4.5. There are no identical columns in this table, therefore, s=2. However, the two columns of this table are complements of each other, so further reduction is possi- ble. The updated reduced table for the opamp is shown in Table 4.6. Since, there is only one column in Table 4.6, therefore n=1, and, no further improvement is possible according to 92 VO 0 1 1 0 0 1 Number of regions Vstl V512 VN VP C1 C2 C3 C4 C5 C6 C7 C8 C9 C10 0 l 1 1 2 4 5 1 l 1 8 1 7 Column stresstime 0 0.02 0.31 0.34 0.41 0.54 0.57 wu—nu—ou—n c1: M1_DG,M2_GD,M4_GD; c2: M2_GS,M2_GB; C3: MSZ_GS,MSZ_GB,MS]_SG,MSl_BG; C4: M6_SG,M6_DG,M6_BG,M9_GS,M9__GB; cs: M3_BG; C6: M9_GD; c7: M3_SG; C8: M82_GD,M1_SG,M1_BG,M5_SG,M5_BG,M8_SG,M8_DG,M8_BG-, C9: M5_DG; c 10: Ms1_DG,M3__DG,M4_Gs,M4_GB,M7_Gs,M7_GD,M7_GB. (b) Figure 4.12: Modified Benchmark Opamp Circuit: (a) Schematic with (W/L)(MS2)=4 and (W/L)(MS])=20; and (b) Stressability Analysis. 93 Property 4.3. This implies that the patterns of both Vstl and Vst2 are complemented to each other and the input signal of Vst2 can be generated by inverting the signal Vstl. Therefore, as shown in Figure 4. 13(a), a modified circuit is given with a simple CMOS inverter. The stressability analysis results in Figure 4.13(b) show that the regions of all transistors in F i g- ure 4.13(a) are fully stressed including the additional circuitry. Table 4.5: Reduced Input Minimization Table for Opamp Vstl Vst2 0 1 0 0 Table 4.6: Updated Reduced Input Minimization Table for Opamp Vstl 0 1 O The above pin overhead reduction process can be summarized as in Algorithm V. 4.3 Discussion This chapter presented a stressability design methodology for circuit designs that can not meet the desired stressability requirements. The goal is to enhance the stressability 94 MS2 (a) Vstl VN VP C1 C2 C3 C4 C5 C6 C7 C8 C9 C10 0 0 1 1 1 1 1 1 1 0 1 l 1 1 1 0 1 1 1 1 1 Number of regions 3 2 5 8 3 1 l 8 l 7 Commnsu’eSS‘ime 0 0.02 0.31 0.34 0.41 0.54 0.57 C 1: M1_DG,M2_GD,M4_GD; C2: M2_GS,M2_GB; cs M3_BG; C6: M9_GD; C3: M82_Gs,Msz_GB,M81_SG,Ms1_BG,P0_8G,P0_DG,P0_BG~, C4: M6_SG,M6_DG,M6_BG,M9_Gs,M9_GB,N0_GS,N0_GD,N0_GB-, C7: M3_SG; C8: MSZ_GD,M1_SG,M1_BG,M5_SG,M5_BG,M8_SG,M8_DG,M8_BG; C9: M5_DG; C 10: MS1_DG,M3_DG,M4_GS,M4_GB,M7_GS,M7_GD,M7_GB. (b) Figure 4.13: Modified Benchmark Opamp Circuit with Only One Input: (a) Schematic; and (b) Stressability Analysis. 95 Algorithm V Pin Overhead Reduction 1: Generate the input minimization table and find q. Let Elm,n be the minimum number of extra inputs required. IF Property 4.3 holds, STOP. Construct the reduced input minimization table; Update the reduced input minimization table to find in and n. IF n S Ilogzml; Elmin = 11; STOP. Elm,n = Ilogzml; Design combinational circuit with m inputs and n outputs. Check added combinational circuit stressability; Add stress vectors, if required. 96 of a given circuit, if required. Stressability requirements become a part of the design spec- ifications and will be determined based on the trade-offs among desired reliability, time to market, and cost. Stressability design methodology utilizes stressability enhancement sup- plemented by stress vector generation and stressability analysis to provide the means to design circuits that can be stressed under predefined constraints. It should be pointed out here that although the design methodology has been developed for analog circuits, yet it is readily applicable to digital and mixed-signal CMOS circuits. Computational complexity is a major concern for large circuits, but can be handled using hierarchical approach. A circuit partitioning scheme based on the control flow model has been proposed to reduce the computational complexity of stress vector genera- tion and stress time calculation. A hierarchical stress vector generation process based on the topological structure of the circuit has also been developed, in order to improve the efficiency of primary stress vector generation for large circuits. The effectiveness of using the hierarchical approach for large circuits has also been discussed. It can be concluded that it is feasible to enhance the stressability of a circuit by using extra hardware. A greedy approach is being employed to improve the stressability of a cir- cuit. Stressability analysis of the circuit is performed and the regions with maximum stress time are identified. Stress time is then reduced by enhancing the controllability of the node responsible for the maximum time. The rationale behind using this greedy approach is that in any case the stress time of the region having the maximum stress time has to be reduced for stressability enhancement. Also, the reduction of stress time for such a region generally results in improvement of stress time of some other regions having poor stress time. After enhancing the controllability of the region having the maximum stress time, stressability 97 analysis is performed again to check whether the requirements are met or not. In case fur- ther improvement is required, again the stress time of the region with current maximum stress time is reduced and the entire process is repeated until the desired requirements are met. The area overhead of the developed stressability enhancement technique is limited, and the performance overhead is negligible. The additional transistors consume DC power during stress testing but they are turned off during normal operation. The amount of im- provement in stress time using switches can be controlled by varying the area of the switch used. There exists a trade-off between stress time and area of the switch implementation. In case there are no constraints on the area of extra hardware, minimum stress time can be achieved. It has also been shown that the number of additional inputs can be reduced at the expense of supplemental hardware. 98 Chapter 5 EXTREME-VOLTAGE STRESS VS. EXTREME-TEMPERATURE STRESS The previous chapters have presented the development of various components of extreme-voltage stress test of analog CMOS ICs, such as stress vector generator, stressabil- ity analyzer, and stressability design methodology. This chapter evaluates the performance of the developed extreme-voltage stress test based on the recent IC reliability trends in industry. Section 5.] introduces the contemporary reliability calculations being used for ICs. Section 5.2 analyzes the existing bum-in process being followed by majority of the IC manufacturers and also suggests ways to improve it. Section 5.3 compares the developed extreme-voltage stress test with extreme-temperature stress and discusses practical issues related to the implementation of extreme-voltage stress test. 5.] Infant Mortality Period for IC Reliability As mentioned in Chapter 1, the IC reliability refers to the time that the circuit con- tinues to work to specification after it has passed its initial tests and been designated as a yielding part. Most electronic devices exhibit a decreasing failure rate in their early life, which results from the weak individuals in the total population. These weak devices have 99 significantly shorter lives compared to the normal (stronger) ones. Such devices are respon- sible for reliability problems in case these are released to customers or are used to assemble modules or systems. Majority of the failures caused by these devices lie in the early life pe- riod of the bathtub curve shown in Figure 1.5. With the advancement in technology and process stabilization, two distinct failure rates have been observed in the early life period. A very high decreasing failure rate initially, referred to as the infant mortality, follOwed by another decreasing failure rate which is substantially less than the one observed in infant mortality. After early life, devices move into the random regime with an almost constant failure rate. Random regime is followed by the wear-out period. Presently, wear-out does not occur until the product becomes obsolete or reaches its end of shelf life in case of mil- itary systems, for most semiconductor devices. Recent trend in IC reliability is to calculate reliability at the three periods illustrated in Figure 5.]: Infant mortality reliability, early life reliability, and long term reliability. For safety critical and highly reliable circuits, the devices lying in the early life period are screened out. However, for standard commercial products, elimination of devices that fall in infant mortality period meets the desired reliability requirements in most cases. The long term reliability is also referred to as the reliability of the expected life, a part of the product useful life period. For example, Intel Corporation calculates the reliabilities of infant mor- tality, early life, and long term using the periods 0-50 hours, 0-1 year, and 1-10 years, re- spectively [67]. For standard commercial products, early life is generally one year and the infant mortality period varies from fifty hours to about a few months depending on the process 100 stability. Reliability requirements of the product will determine the infant mortality period to be selected for stress testing. Selecting infant mortality period of 1 year will ensure that the devices start their operation with a failure rate of random regime. However, if a higher failure rate is acceptable, then infant mortality period defined for stress testing can be re- duced accordingly. The higher the acceptable failure rate, the lower the infant mortality pe- riod will be. Infant 3. Mortality I'—~;‘ H2 '8 -8 ; Expected Life. a: .4—v: “5’ I E " Useful Life I4——> : Wear-Out ary 1e . Log Time ——-> Figure 5.1: Bathtub Curve for Semiconductor Devices. The stress time required to screen out weak devices using extreme-voltage stress strongly depends on the time period defined for infant mortality. Table 5.1 lists the stress times for different infant mortality periods ranging from the standard commercial products with 50 hours to the safety-critical with 1 year under extreme-voltage stress, with the stress voltage of 5.82V. Results show that, for the standard commercial products, the infant mortality is assumed to be 50 hours and thus the stress time is 0.02 seconds. The stress time increase as the period defined for infant mortality is increased, and, hence for safety-critical products, where the infant mortality is considered to be 1 year, the required stress time is 0.31 seconds. 101 Table 5.1: Extreme-Voltage Stress Times for Various Infant Mortality Periods Infant Mortality Period Stress Time 1 year 310 ms 6 months 210 ms 3 months 140 ms 1 month 70 ms 15 days 50 ms 10 days 40 ms 7 days 30 ms 50 hours 20 ms 5.2 Bum-In Stress Burn-in is an effective screening method used in predicting, achieving, and enhanc- ing field reliability of ICs. Today, almost all IC manufacturers perform 100% bum-in for various durations to screen defective products. The major problems associated with bum- in are the determination of exactly how long the bum-in process should continue, balancing appropriately the needs of reliability and the total costs, and what stress vectors should be applied? This section describes the temperature-dependent oxide thinning model [68,69]. The model can be used to calculate the stress time required for high temperature and/or high voltage stress. This section also presents stress vector generation and stressability analysis for bum-in along with a comparison of extreme-voltage and extreme-temperature stresses. 5.2.1 Temperature-Dependent Oxide Thinning Model Figure 5.2 illustrates the concept of oxide thinning. Let Y and L be the gate oxide thickness and length, respectively. The defect size x refers to the amount of oxide thinning 102 at the localized defective spot. The effective oxide thickness due to defects is defined as Yeff = (Y - x). The oxide breakdown model is given by Gate x \g Y Oxide Yeff I Substrate Figure 5.2: Oxide Thinning Concept. tBr) = T0(T) CXP[G(T)Yeri/Vox)1 (5.1) where tBD time to breakdown (s); Vox voltage across the oxide (V); 10(T) temperature-dependent constant rom = {exp[(-Ea/k)((l/T)-(1/300))]}x10']1 (5.2) k Boltzmann’s constant (8.617x10'5 eV/K) 8 Activation energy; T Absolute Temperature (°K); G(T) Temperature-dependent constant (MV/cm) 103 G(T) = 350[1+(6/k){(1/T)-(1/300)}] (5.3) 5 characteristic constant for G(T). Note that the parameters 6 = 0.0167 and E8 = 0.28 eV are best fitted in the temper- ature range between 25°C and 125°C. For T=3 00°K, i.e., the room temperature 27°C, G(T)=350 MV/cm and tO(T)=10 picoseconds, Eqn. 5.] is exactly the same as Eqn. 2.]. In other words, the oxide breakdown mode in Eqn. 2.1 assumed a fixed temperature of 27°C. The thickness of oxide Yeff that will be broken when a voltage Vox is applied across it at a given temperature T for time period Z in seconds can be calculated as follows. Yar = [Vex/G(Dllnll/To(T)1 (5.4) Based on Eqn. 5.4, Figure 5.3 plots the effective thickness of oxide broken at volt- ages of 3.3V, 4.5V, 5V, and 5.82V, and at the temperatures of 27°C, 70°C, and 125°C. Tables 5.2-5.4 summarizes the sample points of the plot in Figure 5.3. Table 5.2: Oxide Thickness(nm) Broken at 27°C for Various Voltages 27°C 3.3V 4.5V 5V 5.82V 0.1 second 2.171 2.960 3.289 3.829 1 second 2.388 3.257 3.618 4.212 1 minute 2.774 3.783 4.203 4.893 1 hour 3.16 4.309 4.788 5.573 6 hours 3.329 4.540 5.044 5.871 8 hours 3.356 4.577 5.085 5.919 24 hours 3.46 4.718 5.242 6.102 104 Thickness (nm) 5.82V,70°C 5.82V,27°C sv,125°c 6-1 SV,70°C 5V,27°C 4.5V,]25°C 4.5V,70°C 5~ * 4.5v,27°c 4, 3.3v,125°c 3.3v,70°C 3.3v,27°c 5.82V,125°C H 1 1 1 1 1 i 1 1 1 10'2 10:1 100 101 102 103 104 105 1 6 C) Time (seconds) Figure 5.3: Thickness of Oxide Broken at Various Voltages and Temperatures. 105 Table 5.3: Oxide Thickness(nm) Broken at 70°C for Various Voltages 70°C 3.3V 4.5V 5V 5.82V 0.1 second 2.223 3.031 3.368 3.921 1 second 2.459 3.354 3.726 4.337 1 minute 2.879 3.926 4.363 5.078 1 hour 3.299 4.499 4.999 5.819 6 hours 3.483 4.750 5.278 6.143 8 hours 3.513 4.790 5.322 6.195 24 hours 3.625 4.944 5.493 6.394 Table 5.4: Oxide Thickness(nm) broken at 125°C for Various Voltages 125°C 3.3V 4.5V 5V 5.82V 0.1 second 2.283 3.113 3.459 4.026 1 second 2.541 3.465 3.85 4.481 1 minute 3.0 4.09] 4.545 5.291 1 hour 3.459 4.717 5.241 6.1 6 hours 3.66 4.991 5.545 6.455 8 hours 3.692 5.035 5.594 6.511 24 hours 3.815 5.203 5.781 6.729 Based on both Eqn. 5.] and Eqn. 5.4, the stress time calculation, stress vector gen- eration, and stressability analysis can be developed for bum-in stress process in a manner similar to the one used for the development of these processes in case of extreme-voltage SITCSS 1681. 106 5.2.2 Stress Time Calculation Let Vyn be the maximum voltage across the region y (GD, GB, or GS) of a transistor at Vnoma] and room temperature Tyn. Let Vyst be the voltage across the region at Vstress at temperature Tyst. Property 5.1 The stress time for the region y for a lifetime of Z in seconds can be expressed as t... = rename/r00...»[GUYS‘VG‘TWxVyn/W (5.5) Proof: By Eqn. 5.] with 18D = tsuess, T=Tyst, Vox = Vyst, and Ye“ in Eqn. 5.4, we have t..... = r00...) expt(G(Ty.)/Vy..)1vy./G(Ty.)1 lull/10(Tya)1} = rod...) exp1(G(Ty..>/G(Ty.»(vy./Vy..) Ina/roman This concludes thattstress = 10(Tyst)[(Z/tO(Tyn)][GUYS‘)/G(ryn)(VY“/VYS9] For conventional burn-in, we only consider the high temperature stress. The value of voltage appearing across various regions of transistors will depend on the stress vectors applied. If the circuit is subjected only to high temperature stress and vectors are selected in such a way that all the regions get their maximum voltage (V yn), then the stress time will be the same for all regions. In such a case, both voltages Vyn and V yst will be the same. Substituting Vyn/Vysfi] into Eqn. 5.5, the stress time for high temperature stress with proper stress vectors can be calculated as in the following corollary. 107 Corollary 5.1 The stress time for the region y for a lifetime of Z seconds, stressed only by tem- perature using vectors satisfying Vyn/Vysfil, can be expressed as t... = ro are linearly independent, and the union of all rows Ru’s cover all components {g1,g2,...,gm}. A row weight is defined as wRu = max{wgi | 311121, for i=1,2,...,m}, i.e., the maximum weight of the components gi’s covered by Ru. A MWC-weight is defined as the sum of all row weights, i.e., wMWC=wR1+wR2+...+ka. Let Su be an arbitrary subset of Ru with a row weight wSu, by definition, wsu s wRu. The minimum weighted covering problem is To find a set of Su’s, Su c_: Ru, u=1,2,...,k, such that the union of Su’s covers {g1,g2,...,gm}, and the MWC-weight is minimum. . Stressability enhancement optimization is currently being performed based on the selected primary stress vectors. Improvement in optimization may be achieved if candidate stress vectors are considered instead of primary stress vectors. This issue needs to be inves- ti gated and efficient algorithms should be developed to handle the complexity involved in such a case. 129 The developed extreme-voltage stress test should also be evaluated for other analog CMOS defects. For example, its effectiveness for via defects needs to be verified. The effect of extreme-voltage stress on hot carrier injection also needs to be investigated. Recently, analog test bus (ATB) (IEEE Standard 1149.4) has been introduced to enhance the testability of analog circuits. The 1149.4 standard requires every chip pin to have an analog boundary module (ABM), which provides the capability of disconnecting the analog circuitry from analog pin and applying the desired voltage on the pin. 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