Improved utility of microwave energy for semiconductor plasma processing through RF system stability analysis and enhancement

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Rummel, Paul

Date: 2000

Subjects: Microwave plasmas
Plasma engineering
Radio waves
Semiconductors--Design and construction

Program of Study: Electrical and Computer Engineering

Degree Level: Masters

Language: English

Pages: vi, 56 pages

Permalink: https://doi.org/doi:10.25335/p1kc-2557