Electronic characterization and fabrication of CVD diamond piezoresistive pressure sensors
- In Collections
-
Electronic Theses & Dissertations
- Copyright Status
- In Copyright
- Material Type
-
Theses
- Authors
-
Sahli, Sondes
- Date
- 1997
- Subjects
-
Diamond thin films
Electric resistance
Microelectronics
Piezoelectric devices
Semiconductor doping
- Program of Study
-
Electrical Engineering
- Degree Level
-
Doctoral
- Language
-
English
- Pages
- xiv, 138 pages
- Permalink
- https://doi.org/doi:10.25335/7bwb-f948