Electronic characterization and fabrication of CVD diamond piezoresistive pressure sensors

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Sahli, Sondes

Date Published: 1997

Subjects: Diamond thin films
Electric resistance
Microelectronics
Piezoelectric devices
Semiconductor doping

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xiv, 138 pages

Permalink: https://doi.org/doi:10.25335/7bwb-f948

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