Polycrystalline diamond RF MEMS resonator technology and characterization

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Sepúlveda-Alancastro, Nelson

Date Published: 2005

Subjects: Building materials
Diamond crystals
Microelectromechanical systems
Polycrystals
Resonators

Degree Level: Doctoral

Language: English

Pages: xii, 127 pages

Permalink: https://doi.org/doi:10.25335/8e9c-va82

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