Anodic oxidation of silicon in a microwave plasma disk reactor

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Roppel, Thaddeus Adam

Date Published: 1986

Subjects: Silicon

Program of Study: Michigaan State University. Electrical Engineering and Systems Science

Degree Level: Doctoral

Language: English

Pages: xiii, 221 pages

Permalink: https://doi.org/doi:10.25335/y4mz-qc34

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