....g.;c,.m.fi . flu. . .... . .l 3.1.; 251...: ‘\. 1.4.2 :1 2‘... fin! : 2f. .5. a... 1.. . “to fir. ‘ i .1. . in n... In. «a. r k. .. 4.3:-.. . . . n1 . is .. .. 5 . .. .d .:_H‘nus§\v. 1 $3 11 1:: . a? .El 9.... i A: L: o.“ X: 2 i 411. RA 1...... :2: v.\ V lfii L 1.3.; «raw ,. .1}. . ‘ 1:.-. a .5395!) .64 This is to certify that the dissertation entitled MINIATURE MICROWAVE PLASMAS OF HYDROGEN AND ARGON INVESTIGATED USING OPTICAL EMISSION SPECTROSCOPY presented by DAVID STORY has been accepted towards fulfillment of the requirements for the PHD degree in ELECTRICAL ENGINEERING W ’IVlajor Professor’s Signature Mdy 26. 2006 / I Date MSU is an Alfinnative Action/Equal Opportunity Institution LIBRARY Michigan State University n.-.-0-.-l-'-0-.-l-.-.-C-.— PLACE IN RETURN Box to remove this checkout from your record. To AVOID FINES return on or before date due. MAY BE RECALLED with earlier due date if requested. DATE DUE DATE DUE DATE DUE 2/05 p:/ClRC/DateDue.indd-p.1 MINIATURE MICROWAVE PLASMAS OF HYDROGEN AND ARGON INVESTIGATED USING OPTICAL EMISSION SPECTROSCOPY By David Story A DISSERTATION Submitted to Michigan State University in partial fulfillment of the requirements for the degree of DOCTOR OF PHILOSOPHY Department of Electrical Engineering 2006 Abstract MINIATURE MICROWAVE PLASMAS OF HYDROGEN AND ARGON INVESTIGATED USING OPTICAL EMISSION SPECTROSCOPY By David Story Research on miniature microwave plasmas is motivated in part by the interest in generating on-chip plasma sources for applications such as miniature spectroscopy, sterilization of on-chip laboratories, and local area plasma-assisted etching and chemical vapor deposition. The goal of this work is to determine the properties of miniature plasma discharges generated by microwave energy. Specifically, small discharges of argon and hydrogen with volumes of less than 1 cubic centimeter are investigated. Various properties of the plasma discharges are measured including plasma gas temperature, electron density, and internal plasma electromagnetic field strength. The discharges are measured across a wide pressure range from 0.1 Torr to over 100 Torr using non-invasive optical emission spectroscopy techniques. Specific optical emission diagnostic techniques utilized includes Stark broadening of atomic hydrogen emissions to determine electron density, molecular hydrogen rotational temperature, Zeeman splitting in molecular hydrogen emissions to determine both the microwave magnetic field strength and the plasma temperature. Modeling of the plasma discharges is also done using particle and energy balance equations. ACKNOWLEDGMENTS I would like to thank my advisor, Dr. Timothy Grotjohn, and collaborators Dr. I es Asmussen and Dr. Donnie Reinhard for the opportunity to work in the plasma laboratory in the Department of Engineering Research at Michigan State University, and Mr. Terry Casey for generously supplying unlimited access to the machine shop. iii Table of Contents List of Tables .................................................................................................................... vii List of Figures .................................................................................................................. viii Chapter 1 Introduction ..................................................................................................... 1 Chapter 2 Background ..................................................................................................... 5 2. 1 Miniature Plasma Sources ................................................................................... 5 2.1.1 Micro-Cell Plasma Display Panels ............................................................. 5 2.1.2 Micro-Strip Line Sources ............................................................................ 8 2.1.3 Capacitive Sources .................................................................................... 10 2.1.4 Inductive Sources ...................................................................................... 12 2.1.5 Microwave Torch and Arc Discharges ..................................................... 13 2.1.6 Micro-Hollow Cathode Tubes .................................................................. 16 2. 2 Microwave Plasma Sources .............................................................................. 20 2.2.1 2.45 GHz Microwave Plasma Cavity Resonator ...................................... 21 2.2.2 Surface Wave Plasma Reactor .................................................................. 23 2.2.3 Electron Cyclotron Resonance (ECR) Reactor ......................................... 23 Chapter 3 Experimental Setup ....................................................................................... 27 3. 1 Miniature Microwave Plasma System .............................................................. 27 3. 2 Plasma Diagnositics .......................................................................................... 33 3.2.1 Optical Emission Spectroscopy ................................................................ 33 3.2.2 Optical Emission Spectroscopy Design .................................................... 38 3.2.3 Optical Emission Spectroscopy Test ........................................................ 43 3. 3 Preliminary Findings ......................................................................................... 43 3.3.1 Preliminary Experiments .......................................................................... 45 3.3.2 Preliminary Diagnostic Results ................................................................. 45 Chapter 4 Global Model Theory .................................................................................... 49 4. 1 Global Model .................................................................................................... 49 4.1.1 Low Pressure, Steady-State Approximations ........................................... 53 4.1.2 Intermediate Pressure, Steady-State Approximations ............................... 55 4.1.3 High Pressure, Steady-State Approximations ........................................... 58 Chapter 5 Spectroscopy Theory: Zeeman Effect ........................................................... 66 5. 1 Introduction: Quantum Theory ......................................................................... 67 5. 2 Eigenvectors ...................................................................................................... 69 5.2.1 Harmonic Oscillator .................................................................................. 70 5.2.2 Central Potential ........................................................................................ 74 5.2.2.1 Angular Momentum Operators ............................................................. 74 5.2.2.2 Central Potential Hamiltonian ............................................................... 82 5. 3 Electron Spin ..................................................................................................... 84 iv 5. 4 Angular Momentum Addition: C lebsch-Gordan Coefficients .......................... 88 5.4.1 Diatomic Hydrogen: Clebsch-Gorden Coefficients .................................. 91 5.4.2 Atomic Hydrogen: Clebsch-Gorden Coefficients ..................................... 96 5. 5 Perturbation Theory .......................................................................................... 96 5.5.1 Spin-Orbit Interaction ............................................................................. 100 5.5.2 Relativistic Mass Correction ................................................................... 104 5.5.3 Anomalous Zeeman Effect ..................................................................... 105 5. 6 Rotational Spectrum for Diatomic Hydrogen ................................................. 108 5. 7 Fine Structure of Atomic Hydrogen ............................................................... 110 5. 8 Nominal Fine Structure Transition Intensity .................................................. l 10 Chapter 6 Atomic Hydrogen: Stark Effect .................................................................. 122 6. l Stark Splitting: Spherical Coordinates ............................................................ 123 6.1.1 Perturbation Matrix ................................................................................. 123 6.1.2 Stark Energy Spectrum: Spherical Coordinates ...................................... 131 6. 2 Parabolic Coordinates ..................................................................................... 131 6.2.1 Parabolic Transform ................................................................................ 134 6.2.2 Runge-Lenz Vector ................................................................................. 139 6.2.3 Parabolic Energy Levels and Wave Functions ....................................... I43 6. 3 Stark Effect Perturbation ................................................................................. 146 6.3.1 Stark Effect: Parabolic Wave Functions ................................................. 147 6.3.2 Stark Effect: Fine Structure .................................................................... 151 6. 4 Coordinate Transforms ................................................................................... 157 6.4.1 Parabolic Ladder Operators .................................................................... 157 6.4.2 Clebsch-Gordan Coefficients .................................................................. 161 6.4.3 Semi-Parabolic Coordinates .................................................................... 163 Chapter 7 Results ......................................................................................................... 168 7. l Spectrometer Set-Up ....................................................................................... 168 7. 2 Argon Results .................................................................................................. 171 7.2.1 Global Model Results ............................................................................. 172 7.2.2 Argon Spectroscopy Measurements ....................................................... 172 7.2.3 Argon 4300.1 A Line Shape ................................................................... 178 7. 3 Hydrogen Results: Diatomic Hydrogen .......................................................... 178 7.3.1 Diatomic Hydrogen: Rotational Spectrum .............................................. 184 7.3.1.1 Diatomic Hydrogen Temperature: Interband Transitions ................... 184 7.3.1.2 Diatomic Hydrogen Temperature: Intraband Transitions ................... 191 7.3.2 Diatomic Hydrogen: Zeeman Shift ......................................................... 205 7. 4 Hydrogen Results: Atomic Hydrogen ............................................................. 206 7.4.1 Atomic Hydrogen: Stark Shift ................................................................ 210 7.4.1.] Stark Shift: Ha ..................................................................................... 211 7.4.1.2 Stark Shift: Hg ..................................................................................... 218 7.4.1.3 Stark Shifi: Hy ..................................................................................... 226 7.4.2 Electron Density ...................................................................................... 229 Chapter 8 Conclusion .................................................................................................. 233 8. 1 Experimental Results ...................................................................................... 233 V 8.1.1 Results: Electric Field Polarization ......................................................... 233 8.1.2 Results: Electric Field Magnitude ........................................................... 234 8.1.3 Results: Atomic Hydrogen Spectral Resolution ..................................... 238 8. 2 Discussion ....................................................................................................... 242 Appendix A Plasma System and Components ............................................................ 244 Appendix B Fiber Optic Feed-Through ...................................................................... 250 References ....................................................................................................................... 252 vi List of Tables Table 1 Global Model Predictions for Argon Plasmas. .................................................. 173 Table 2 Global Model Predictions for Argon Plasmas. .................................................. 174 Table 3 Global Model Predictions for Argon Plasmas. .................................................. 175 Table 4 Hydrogen Rotational Transitions. ...................................................................... 187 Table 5 Hydrogen Rotational Energy Levels .................................................................. 197 vii List of Figures Figure l Micro-Cell Plasma Display Panels. ...................................................................... 6 Figure 2 Micro-Stripe Line Sources. .................................................................................. 9 Figure 3 Miniature Mass Spectrometer (Capacitive). ....................................................... l I Figure 4 Inductive Sources. .............................................................................................. 14 Figure 5 Torch and Arc Discharges. ................................................................................. 17 Figure 6 Micro-Hollow Cathode Tubes. ........................................................................... 18 Figure 7 2.45 GHz Microwave Plasma Assisted CVD Reactor. ...................................... 22 Figure 8 Surface-Wave Microwave Plasma Assisted CVD Reactor. ............................... 24 Figure 9 Electron Cyclotron Resonance CVD Reactor. ................................................... 26 Figure 10 Experimental System. ....................................................................................... 29 Figure 11 Plasma Source. ................................................................................................. 30 Figure 12 Optical Emission Diagnostics ........................................................................... 35 Figure 13 Observed Electronic States (H2). ...................................................................... 36 Figure 14 Rotation Temperature (Gas). ............................................................................ 37 Figure 15 Optical Emission Preliminary Design. ............................................................. 39 Figure 16 Optical Emission Spectroscopy Design ............................................................ 40 Figure 17 Optical Emission F eed-through. ....................................................................... 41 Figure 18 Spherical Lens Design. ..................................................................................... 42 Figure 19 H3 (100 mT) Optic Test. ................................................................................... 44 Figure 20 Power Density in Argon Plasma ....................................................................... 47 Figure 21 Experimental Argon Ignition Power. ............................................................... 48 Figure 22 ngden~ vs. Te for Maxwell Electrons in Argon. .................................................. 59 Figure 23 Collisional Energy Loss vs. Te in Argon. ....................................................... 65 viii Figure 24 Angular Momentum Operator: Spherical Coordinates ..................................... 77 Figure 25 Angular Momentum Diatomic Hydrogen. ....................................................... 90 Figure 26 Precession of Vibrating Diatomic. ................................................................... 94 Figure 27 Zeeman Energy Levels. .................................................................................. 109 Figure 28 Ha Fine Structure Transitions. ........................................................................ 1 l 1 Figure 29 Hp Fine Structure Transitions. ........................................................................ l 12 Figure 30 Ha Fine Structure Relative Transition Intensity. ............................................ l 13 Figure 31 Ha Fine Structure Peaks Near Band Center .................................................... 120 Figure 32 Ha Fine Stucture: Absorption Spectroscopy, Pulsed Dye Laser. ................... 12] Figure 33 Ha Stark Energy Spectrum: Spherical Coordinates ........................................ 132 Figure 34 H3 Stark Energy Spectrum: Spherical Coordinates. ....................................... 133 Figure 35 Hyperbolic Transform of Constant z Surfaces. .............................................. 135 Figure 36 Parabolic Transform in the Complex Plane .................................................... 136 Figure 37 Classical Relationships for Runge-Lenz Vector ............................................. 140 Figure 38 Ha Stark Effect Transitions: Parabolic Coordinates. ...................................... 149 Figure 39 H5 Stark Effect Transitions: Parabolic Coordinates. ...................................... 150 Figure 40 Ha Stark Effect Fine Structure Splitting. ........................................................ 156 Figure 41 Semi-Parabolic Coordinate Representation of Stark, Zeeman Effect. ........... 167 Figure 42 PMT Noise Response. .................................................................................... 170 Figure 43 Global Model Predictions for Argon Plasma Electron Temperature. ............ 176 Figure 44 Global Model Predictions for Argon Plasma Electron Density. .................... 177 Figure 45 H5 Line, P2100 T, 60 W., FWHM=2.025 A. ................................................. 179 Figure 46 Argon Electron Density (40 W). .................................................................... 180 Figure 47 Argon Line Shape, 4300.] A., 100 Torr. ........................................................ 181 Figure 48 Argon Line Shape Ll. .................................................................................... 182 ix Figure 49 Argon Line Shape L2. .................................................................................... 183 Figure 50 Hydrogen Rotational Spectrum. ..................................................................... 186 Figure 51 Fortrat Plot. ..................................................................................................... 189 Figure 52 Rotational Energy Transition. ........................................................................ 190 Figure S3 Rotational Temperature vs. Pressure. ............................................................. 192 Figure 54 H2 Zeeman Splitting: Tight BPF, 0.5 Torr. .................................................... 194 Figure 55 H2 Zeeman Splitting: Relaxed BPF, 0.5 Torr. ................................................ 195 Figure 56 B Field (B=35 mT). ........................................................................................ 199 Figure 57 B Field vs. Pressure. ....................................................................................... 200 Figure 58 Intraband Energy Distribution. ....................................................................... 202 Figure 59 Intraband Temperature vs. Pressure. .............................................................. 204 Figure 60 H2 Zeeman Splitting: Cross-Correlation Filter, 0.5 Torr. ............................... 207 Figure 61 H2 Zeeman Splitting: 5.0 Torr, 60 W. ............................................................ 208 Figure 62 H2 Zeeman Splitting: 50 Torr, 60 W. ............................................................. 209 Figure 63 Ha Parabolic Transition Intensities ................................................................. 212 Figure 64 Ha Spectral Response: Gross and Fine Structure, 50 Torr. ............................ 213 Figure 65 Ha Experimental Spectrum, 50 Torr ............................................................... 214 Figure 66 Ha Spectral Response: 0-4000V. Continuum. ................................................ 215 Figure 67 Ha Experimental Spectrum, 5.0 Torr .............................................................. 216 Figure 68 Ha Experimental Spectrum, 0.5 Torr .............................................................. 217 Figure 69 H3 Parabolic Transition Intensities. ................................................................ 220 Figure 70 H3 Spectral Response: Gross and Fine Structure, 50 Torr. ............................ 221 Figure 71 H5 Experimental Spectrum, 50 Torr. .............................................................. 222 Figure 72 Hp Spectral Response: 0-4000V. Continuum. ................................................ 223 Figure 73 H3 Experimental Spectrum: 5.0 Torr .............................................................. 224 X Figure 74 HB Experimental Spectrum, 0.5 Torr. ............................................................. 225 Figure 75 Hr Parabolic Transition Intensities. ................................................................ 227 Figure 76 Hy Experimental Spectrum (Gross Structure), 50 Torr. ................................. 228 Figure 77 Electric Field vs. Pressure. ............................................................................. 230 Figure 78 HB Spectrum, 100 Torr, 60 W., FWHM=1.241 A. ........................................ 231 Figure 79 Hydrogen Electron Density vs. Pressure (60 W) ............................................ 232 Figure 80 Electric Field Polarization for Molecular Hydrogen. ..................................... 235 Figure 81 Electric Field in Resonant Reactor Chamber. ................................................ 239 Figure 82 Miniature Microwave Plasma System. ........................................................... 244 Figure 83 Gas Flow Meter Bank (4 Channel) ................................................................. 245 Figure 84 Electronics Control Board. ............................................................................. 245 Figure 85 Plasma Reactor Chamber. .............................................................................. 246 Figure 86 Fiber Optic Feed-Through (13 Channels). ..................................................... 247 Figure 87 Optical Fiber Micro-Positioner (OES). .......................................................... 247 Figure 88 Hydrogen Plasma; 0.5 Torr, 60 W .................................................................. 248 Figure 89 Hydrogen Plasma; 5.0 Torr, 60 W .................................................................. 248 Figure 90 Hydrogen Plasma; 10.0 Torr, 60 W ................................................................ 249 Figure 91 Hydrogen Plasma; 50 Torr, 60 W ................................................................... 249 Figure 92 Reactor Chamber with Fiber Optic F eed-Through ......................................... 250 Figure 93 Fiber Optic Feed-Trough. ............................................................................... 250 Figure 94 Feed-Trough Micro-Lens System (13 Channels). .......................................... 251 Figure 95 Feed-Through Construction Tool Set. ............................................................ 251 xi Chapter 1 Introduction The creation and characterization of miniature microwave plasma sources is a relatively new and under-investigated field. Some miniature plasma sources have been developed for the pixel cells in flat panel displays, as well as to investigate the possibility of bringing mass spectrometry and optical emission spectroscopy functions to the computer processor unit (CPU). However, none of the previously mentioned sources are created with microwave power, which allows for more flexible geometries and a wider range of pressure variations. The first objective of this investigation is to establish the operating conditions for a microwave plasma source that allows the creation of miniature discharges, and then to measure the properties of the resulting plasma discharges. An additional objective is to develop a predictive understanding of miniature microwave plasma behavior by using plasma global models, and by comparing model results to the measured plasma properties. The overall goal is to add to the scientific understanding and engineering design principles for miniature microwave discharges. To this end, investigations are performed in both noble and molecular gases (argon and hydrogen) across a range of pressure and microwave powers. The investigation includes the implementation of instrumentation for non-invasive optical emission spectroscopy. The plasma discharge properties focused on in this investigation include discharge shape and size, plasma power density, plasma electron density, plasma gas temperature, and electric and magnetic field strength in the plasma. In this investigation, hydrogen and argon plasmas are formed at pressures ranging from 0.1-100 Torr, and at powers from 5-60 W. To obtain both high optical emission sensitivity and spectral resolution a special optical system is designed to bring lenses to within 5 mm of the plasma center. The optical system permits non-invasive measurements of the intense plasma discharges. Argon discharges are analyzed experimentally to determine plasma density and plasma discharge power density. Two techniques are compared to determine the electron density from argon discharges. Analysis of hydrogen data was extensive, including plasma discharge size and shape, plasma power density, plasma electron density, plasma gas temperature, and electric and magnetic field strength in the plasma. Optical spectrum measurements reveal peaks in the diatomic hydrogen rotation spectrum used to estimate rotational temperature. Higher resolution measurements of the sub-band structure of diatomic hydrogen were used to determine resident magnetic fields consistent with Zeeman splitting. This suggests hydrogen plasmas have a partially discrete or constant magnitude magnetic field component, which varies with pressure. Atomic hydrogen spectroscopic readings demonstrated sub-band structure as well. Peaks within the hydrogen alpha, beta, and gamma bands were consistent with energy level splitting seen in the Stark effect. As a result, the magnitude of the resident electric field was estimated across the pressure regime. Chapter 2 provides a background for the study of miniature microwave plasma sources by presenting the current state of miniature plasma sources. Chapter 3 presents the experimental set-up. The experimental set-up includes designs and builds for both the plasma system and the diagnostic system, a multi-channel fiber optic feed-through. The diagnostic set-up required the build of a new optics system to penetrate the reactor and focus on the center of the plasma discharge. Chapter 3 concludes with test results for both the plasma reactor system and fiber optic feed- through. Chapter 4 presents the global model, a theory that describes the plasma physics of monotonic gases such as argon. Low to medium pressure plasmas can be described accurately with the global model. The global model is found ineffective at higher pressures; this was substantiated on preliminary test sets made during initial system testing. Chapter 5 presents the spectroscopic theory for diatomic molecules and for single electron atoms. Both sets of theory are directly applicable to hydrogen plasmas. Chapter 6 applies spectroscopic theory from Chapter 5 to predict the peak amplitude and splitting in atomic and rotational spectra associated with hydrogen. Chapter 6 introduces spectral theory specific to hydrogen-like (Rydberg) atoms, without which determination of the Stark spectrum would be impossible. Chapter 7 accumulates the experimental results, and makes direct comparisons between the experimental results and predictions made by the global model in Chapter 4 and the spectroscopy theory developed in Chapter 5 and Chapter 6. Chapter 7 records experimental results for diatomic and atomic hydrogen spectra, and matches these results to the Zeeman and Stark effects developed in Chapter 5 and Chapter 6. Chapter 8 summarizes project results, and lays the groundwork for future experiments aimed to get at the root of plasma behavior. Chapter 8 also suggests future experimental techniques to provide more insight into the nature of the hydrogen plasma behavior, specifically hi gh-pressure contraction. Chapter 2 Background The current research activity in miniature plasma sources and microwave plasma sources is presented in the following two subchapters. The miniature microwave plasma source designed for this project is detailed in Chapter 3. The miniature microwave plasma source design is similar to larger microwave plasma sources, but requires fundamental knowledge of miniature source operation to be successful. 2. 1 Miniature Plasma Sources This brief overview presents the current state of miniature plasma sources. The following plasma sources will be discussed in the proceeding paragraphs: Micro-cell plasma display panels, micro-strip line sources, capacitive sources, inductive sources, torch and are discharges, and micro-hollow cathode tubes. 2.1.1 Micro-Cell Plasma Display Panels Micro-cell plasma display pixel cells consist of two parallel glass plates fitted with electrodes on their surfaces, as shown in Figure 1 [1]. Each electrode is covered by thin dielectric layer and coated with MgO. The cell is filled with various combinations of Xenon, Neon, Helium, and trace amounts of Argon. The cell is sealed; the cell pressure can vary from 100 torr to 500 torr, depending on other cell parameters including gas mixture and excitation frequency. The cell is approximately 1 mm cubed in dimension. The MgO layer produces secondary electrons on impact by electrons, greatly multiplying the number of electrons in the plasma and the number of collisions that J I 4 Dielectric Plasma ‘i Phosphor Layer I Va I Electrode I Figure l Micro-Cell Plasma Display Panels. generate excited radicals. In fact, secondary electron emission is by far the main source of electrons in micro-cell plasma displays. The MgO layer provides a high secondary electron emission rate, and hence increases the cell efficiency rate. The cell efficiency rate is defined as the ratio of the power absorbed per unit volume that produces excited states of Xenon to the total power absorbed per unit volume. The breakdown voltage, or the voltage necessary to ignite the plasma, and the self-sustaining voltage are a function of the ionization energy of the fill gas, the frequency, the cell capacitance, lifetimes for each of the gas species, and the secondary electron emission rate of the MgO layer. The typical breakdown voltage for a cell is approximately 300 volts. During self-sustaining operation, at a frequency of 50 kHz, the plasma electron density is approximately 10'1-1012 electrons per cubic centimeter [2]. Application of a high voltage pulse across the electrodes initiates the plasma discharge. The energetic free electrons excite Xenon atoms through atomic collision. Excited Xenon atoms release photons as electrons fall from higher energy states (resonant, excimer, and metastable states) to the ground state. The photons are emitted in the ultraviolet range. The ultraviolet radiation reacts with the phosphor coating on the cell walls, which converts the ultraviolet light into visible light- red, green, or blue, depending on the type of phosphor coating. Investigation shows that the mixtures relatively lean in Xenon produce the lowest breakdown voltages while still delivering high ionization rates. Neon-Xenon and Helium-Xenon ratios of 95%-5% reduce the breakdown voltage from 300 volts, necessary for 100% Xenon cells, to approximately 125 volts. Xenon efficiency rates peak at 90% for 100% Xenon cells, and drop-off moderately to approximately 70% as the Xenon concentration is reduced to 5%. Cell efficiency rates are higher for Neon-Xenon mixtures than for Helium-Xenon mixtures in all concentrations. The effect of Argon as an additive is negligible [3]. Researchers have also studied the optimum shape and operating frequency of these plasmas. Two-dimensional modeling of the plasma cell predicts that much higher cell efficiency rates and electron densities can be achieved with a cylindrically shaped cell operating at radio frequencies (13.56 MHz) [4]. The cylindrical shape geometry allows for greater plasma volume for a given surface area. As a result, the cell can be made smaller, and the necessary breakdown voltage and self-sustaining voltage reduced. The advantages of smaller size cannot be realized if the frequency is not increased as well. Although much less mobile than the electrons, ionized Helium still has enough time to pass through the sheath to the walls at relatively low frequencies. Applying radio frequency voltage helps trap the Helium ions in the reduced plasma volume. As a result, plasma electron densities can be increased by a factor of five to ten, reaching 1.0 X 10'3 electrons per cubic centimeter. 2.1.2 Micro-Strip Line Sources Miniature microwave frequency plasma sources are targeted for on-chip applications, including micro-strip line technology. Micro-strip line sources, as shown in Figure 2 [5], consist of approximately one-millimeter square channels in fused silica dielectrics, or simply 0.3-1 mm silica tubes, and the corresponding ground plane and microwave matching elements formed on the top and bottom of the channel. Argon is flowed through the channel; the plasma is ignited with a piezoelectric sparking device and sustained with approximately 15 Watts of microwave power at 2.45 GHz. 8 .mouSom 0E..— oEbWSEE N 9...»:— EESEU muOREmmE L931— 2:835 25E 9590 2:1. .558an Na The resulting plasma is very bright as viewed looking into the open-ended channel. The micro-strip line plasma has been demonstrated at one atmosphere, allowing contaminants to be introduced from the environment, and hypothetically, detected by matching the contaminant to its atomic emission spectra. The benefit of a source of this type is an on-chip optical emission or atomic emission spectrometer. 2.1.3 Capacitive Sources A simple plasma source geometry is that of the capacitive source. In general, a high DC, rf (13.56 MHz) or microwave (2.45 GHz) voltage is set up across parallel plates. The resulting electric field ionizes neutrals, producing ions and free electrons. The free electrons accelerate under the influence of the electric field, and collide with neutrals and ions. If the free electrons are given sufficient energy, these collisions generate more free electrons, and the plasma becomes self-sustaining. In DC discharges, electron acceleration is strictly a function of the applied electric field and the mean free path of the electron, which is a function of pressure. In an RF or microwave power discharge, the effective mean free paths can be made shorter if collisions reverse the electron momentum at a frequency roughly equal to the frequency of the applied electric field. Optimal coupling occurs when the frequency of the applied power matches the electron collision frequency, which occurs at a pressure of approximately 5 torr for an applied RF power at 13.56 MHz. One specific capacitive source application is the miniature mass spectrometer, as shown in Figure 3 [6]. The plasma is coupled to the incoming gas by accelerating plasma electrons through a two-grid electrode system. The plasma electrons are focused into a narrow beam as they enter the sample gas ionization chamber to keep the ion 10 hOuUUCOQ CO— .AoZEmQaUV 3680583 332 23352 n 25w:— «ESE 28.585 02“. 80 conic— ouSomiz >\ _ooom-> + Ber. 30 ll energy distribution as narrow as possible. The electrons ionize the gas sample; the ions are then accelerated and deflected as they travel along the mass spectrometer channel by a series of alternating voltage pulses synchronized to periodically spaced terminals. Microwave power is the preferred source for two reasons. Firstly, sputter damage to the plasma cell walls is reduced as the plasma ions are trapped by the high frequency electric fields. Secondly, and more importantly, the high frequency electric fields used to generate the plasma discharge have a negligible effect on the heavy ions in the mass spectrometer channel. Obviously, since the theory of operation for the mass spectrometer is the ionization, acceleration, deflection, and accurate deflection detection of the gas species, spurious electric fields must be avoided or the entire system will be compromised. Technically, the micro-cell plasma display discussed in section 2.1.1 is a capacitive plasma source. Also, the micro-strip line plasma source presented in the previous section can be generated as a capacitve discharge or a surface wave discharge. 2.1.4 Inductive Sources Large-scale inductive sources dominate the microchip fabrication landscape. Miniature inductive plasma sources could be used as part of a microprocessor based emission spectrometer or mass spectrometer, or could be the basis for thrust generation in ion beam drives for space propulsion. Recent work has demonstrated the ability to create 5 mm, 10 mm, and 15 mm diameter planar inductively coupled plasmas (ICPs) at pressures below 10 torr, powered by 1-20 Watts RF power between 13.56 MHz-500 MHz. 12 Miniature planar ICPs, as shown in Figure 4 [7], are constructed by masking off a 20-turn spiral pattern, 15 mm in diameter for the largest of the three sources. The planar spiral is fixed directly above a 1.8-mm glass window, which contains the plasma. Two high-Q capacitors are placed in series with the helix to adjust the tuning; the tuning is effected by the inter-winding capacitance. The plasma containment vessel is filled with Argon or air, and operated at pressures between 0.01 torr and 10 torr. The miniature ICP sources accurately follows the same trends for plasma potential, electron temperature (when the plasma sheath is correctly removed from the calculation), and ignition frequency (electron elastic collision frequency equals rf source frequency) as do large-scale ICPs. But, both experimental Langmuir probe and interferometer measurements (35 GHz) yield electron densities (approximately 1.0 x 10'0 to 1.0 x 10H electrons per cm3) which are an order of magnitude lower than that predicted by global plasma models. This discrepancy is thought to be a function of wall recombination, resulting from the relatively low volume to surface area ratio. Similar effects were mentioned previously in the low frequency micro-cell plasma display cell. 2.1.5 Microwave Torch and Arc Discharges Torch and are discharges have been investigated for over four decades. In present torch and are configurations, gas is forced through a small (~lmm) diameter nozzle supersonically, and ignited by microwave power. The resulting plasma can take two forms in general, corona and torch. The plasma forms as the high electric field at the electrode or nozzle tip accelerates electrons into neutrals at a high enough velocity to ionize the neutrals. This form is known as the corona, and is concentrated at the very tip of the nozzle. 13 .3238 02.26:. v 0.532 528m 2:365 How” I L “2:. SO _ =8 ESSEJ AAAAAAAA.vavvvvvavV _ D I J kllrI—I Eczouamo mats... Boom .3580 As the plasma slowly begins to absorb more power, the vibration energy and translation energy in the gas increases, as well as the ionization. This reduces the effective electric field near the nozzle, gradually extinguishing the corona form of the plasma near the nozzle, but exciting the working gas that is farther from the nozzle. The plasma appears as a flame, with a hollowed center where the corona discharge is extinguished. This form of the plasma is called the torch. The electric field present when the corona discharge forms is approximately 14,000 volts per centimeter; the electric field in the torch discharge is approximately 300 volts per centimeter [8]. Electron temperatures in the range of 5000-5200K have been recorded for similar experimental sets [9]. As the gas flow rate is increased, the gas will flow around the torch, and the vibration temperature and translation temperature of the gas will be reduced due to gas cooling. The torch effectively runs out of fuel, the microwave energy again begins to accelerate electrons near the tip, and the corona form of the plasma returns as the torch appears to be blown out. When the microwave power dissipated in the torch discharge increases above a critical point, the sharp electrode edge is heated to produce thermionic electron emission. The resulting plasma looks more like a controlled arc than a torch, and is referred to as an arc torch discharge. The thermionic emission provides enough electrons to prohibit the return of the corona plasma form, stabilizing the discharge. Another attempt to stabilize the torch discharge is the introduction of a conical nozzle that contains, or redirects the working gas such that the plasma consumes nearly all of the flowed reactant. Typical electron densities, as measured by the resonant 15 frequency and bandwidth shift, registered approximately 1.0 x 109 to 1.0 x 10” cm’3 for this form of the plasma torch, operating at one atmosphere. This variation of the torch discharge is shown in Figure 5 [10]. Torch or are torch discharges have been developed for pressures ranging from 0.5 torr up to one atmosphere. Torch discharges have been used for surface treatment and cleaning, and for thin film depositions on internal cavity walls, holes, vias, and on substrates of complex shape. A variation of the torch or are torch is the microwave powered plasma pencil [11]-[13]. The experimental set-up is similar to that given for the microwave torch and are discharge. The difference is that the plasma pencil utilizes the gas delivery tube as a hollow cathode to supply the microwave power. Research in this area includes attempts to focus the plasma beam with a high-current magnetic lens system. This is similar to the focusing achieved in modern microscopy, such as the electron microscope. Plasma diagnostics of the plasma pencil yielded electron temperatures from 5200K to 5800K, with gas temperatures on the order of 700K to 950K, operating at one atmosphere [13]. 2.1.6 Micro-Hollow Cathode Tubes The micro-hollow cathode tube refers to a structure, as shown in Figure 6 [14], in which the plasma form-s between a hollow cathode and an arbitrarily shaped anode. The micro-hollow cathode tube is characterized by an initial pre-discharge. The initial pre- discharge plasma is shaped by the electric field. As the applied DC voltage and current are increased, the pre-discharge forms a column extending from the hollow cathode to the anode. l6 10mm rm] Wave Guide Gas Feed Figure 5 Torch and Arc Discharges. l7 ouoc< done. 25:30 3232-822 9 0.5»:— ae _ MH> «Emmi ./\ 8832: 038.05 ovofimu £5 18 The pre-discharge potential is pinned to the anode. As a result, the electrons follow electric field lines and accelerate radially inward. When the pressure is such that the mean free path of the electrons closely matches the diameter of the hollow tube, the electrons (fast electrons) gain enough energy to ionize the gas species and form a negative potential discharge within the hollow cathode tube. The electrons (fast electrons) oscillate between the negative discharge and negative cathode [15]. The electrons (fast electrons) generate ions and electrons on collision with the gas species. Ions and electrons follow field lines axially along the hollow cathode tube. As a result of these interactions, the plasma potential drops as the current through the plasma increases. This regime, where the effective resistance of the plasma is negative, is the normal operating regime and referred to as the ‘hollow cathode discharge’. The hollow cathode discharge often has a spherical shape, confined by the hollow cathode and the anode. With increasing current, the voltage begins to increase, and the plasma breaks into filaments, as commonly seen in high-voltage discharges between small, sharp-edged gaps. The critical discharge figure of merit for the hollow cathode discharge is pD; the plasma pressure (p) multiplied by the diameter (D) of the hollow cathode. The hollow cathode discharge forms for pD values from a fraction of a torr-cm to 10-20 torr-cm. Electron energies, determined by spectroscopy, are greater than 10 eV [14]. The anode and cathode are made from molybdenum [l4], and separated by a 250- micron mica layer. Argon gas is flowed through the hollow cathode tube. Hollow cathode discharges have been formed with hole diameters as small as 200 microns, and at pressures approaching 900 torr (17.9 torr-cm). l9 2. 2 Microwave Plasma Sources This study focuses on microwave plasma sources. Microwave plasma sources offer several advantages over plasma sources driven at lower frequencies. First, when microwave energy is focused in a resonator cavity, the electric field strength, which is a function of potential and wavelength, is strong enough to excite a discharge. Second, the microwave energy can propagate through dielectric media; hence, the microwave probe does not need to come in contact with the plasma itself, making the discharge electrodeless. This is not true with low frequency discharges, which require putting the electrodes in direct contact with the plasma. Potential damage to or contamination from metal electrodes by collisions with high-energy plasma species is eliminated. A second advantage to higher frequencies is seen in miniature plasmas. The fast electric field reversal maintains the electrons in the center of the discharge, reducing the number of collisions with the container wall. By trapping the electrons, fewer electrons are lost to the walls and more energy is absorbed by the electrons, resulting in greater ionization. This effect was discussed in section 2.1.1 when examining micro-cell plasma displays, which were dominated by secondary electron emission, in contrast to direct ionization within the plasma itself. In general, microwave plasmas operate with smaller plasma potentials, thus reducing the plasma sheath potential, which affects the energy at which the gas species exit the plasma. Such reduced gas species energy is necessary for the success of many surface reactions involved in plasma-assisted chemical vapor deposition (PACVD). The literature covering microwave plasma sources is extensive. The following subsections examine three common designs: the 2.45 GHz microwave plasma cavity 20 resonator, the surface wave plasma reactor, and the electron cyclotron resonance (ECR) reactor. 2.2.] 2.45 GHz Microwave Plasma Cavity Resonator A common microwave plasma source design, developed at Michigan State University, is the 2.45 GHz microwave plasma cavity resonator, shown in Figure 7 [l6]. Microwave power is introduced to a cylindrical cavity through a coaxial probe, penetrating the cavity axially from the top or the side. The height of the cavity and the probe depth are adjusted for cavity microwave field resonance with the applied microwave frequency. In one design, the cavity diameter is 17.8 cm, and the height is adjusted to 21 cm. The resulting resonant mode is TM 013. Microwave power levels range from 500W-5kW. Operating pressures run from 5 torr to 180 torr. Such systems have been developed for PACVD of diamond. The plasma discharge forms within a sealed quartz dome, mounted at the base of the cylindrical reactor. The discharge is initiated by the electric field focused in the quartz dome. The reactant gases are injected from the base plate of the reactor with high velocity, mixing in the quartz dome before ignition. Premixing the gases improves deposition uniformity in plasma assisted chemical vapor deposition (PACVD) reactions. Uniform deposition can be maintained on wafers up to four inches in diameter. The substrate holder is interchangeable and adjustable in height, to better interact with the plasma formed above it. In high-pressure experiments, the substrate holder has been water-cooled to better facilitate deposition. The system has been scaled up to accommodate 915 MHz power supplies. The 915 MHz reactor is 45 cm in diameter; the 21 Ar — A Adjustable Probe Ins Adjustable Short 45 I Microwave L Resonator Q Quartz Bell .Iar [ 1 I I Substrate Vacuum Holder Seals LL] ’7 Gas Jets Figure 7 2.45 GHz Microwave Plasma Assisted CVD Reactor. 22 largest possible substrate size is 33 cm. The 915 MHz reactor power requirement is 8kW-18kW. 2.2.2 Surface Wave Plasma Reactor The surface wave plasma reactor’s geometry is completely different from that of the 2.45 GHz-microwave plasma cavity. In the surface wave reactor, the microwave power is transmitted from the waveguide through a sealed 2.5-cm diameter quartz tube, into a waveguide surfatron, which functions as a double-stub tuner. The quartz tube is filled with reactant gases; the pressure can be adjusted from 1-60 torr. The surface wave reactor uses 1 kW microwave power at 2.45 GHz. The surface wave plasma reactor schematic is given in Figure 8 [17]. The plasma fills the quartz tube, and distends several centimeters below the waveguide structure at low pressures. The plasma excitation along the plasma column is facilitated by the propagation of microwave energy along the column via surface waves that travel along the boundary of the plasma. Below the waveguide structure, the quartz tube diameter can be increased to accommodate substrates up to 8 cm in diameter. The plasma expands to fill the quartz tube below the waveguide, allowing for complete coverage of the substrate during deposition. 2.2.3 Electron Cyclotron Resonance (ECR) Reactor The electron cyclotron resonance (ECR) reactor is similar in geometry to the 2.45 GHz-microwave plasma cavity, however the nature of the plasma is quite different. In the ECR reactor, electron heating -motion and collision- is a result of the electron 23 Quartz Tube / Tuning Stubs Waveguide Plasma F Figure 8 Surface-Wave Microwave Plasma Assisted CVD Reactor. Heater 24 cyclotron effect; the force imposed on charged particles that results from an oscillating electric field in the presence of a permanent magnetic field (875 gauss). In the reactors described previously, the most efficient heating occurs at pressures where the mean free path of the electrons give rise to a collision frequency that matches the microwave frequency. At the point of collision with an atom, the electron momentum is randomized. At the same instant, the electric field reverses to accelerate the electron, increasing its average velocity with each field reversal and collision, until the electron has enough energy to ionize the atom or molecule. In ECR reactors operating at resonance frequency, the electron revolves around the magnetic field lines with an angular rate equal to the frequency of the applied microwave power. Each field reversal accelerates the electron for one-half revolution before the next reversal. The electron will ionize an atom upon collision if it has been given enough time to build up sufficient energy. A specific example of an ECR source is the compact ion and free radical model #610 plasma source developed at Michigan State University, shown in Figure 9 [18]. The reactor is a stainless steel cylinder with 5.8-cm outer diameter. The front half of the cylinder is the coaxial microwave power feed, terminated with a loop antenna. The back half is filled with a 3.6-cm x 3.0-cm quartz reaction vessel. The operating pressure is kept between 0.1 mtorr and 3.0 mtorr, much lower than the operating pressure for the 2.45-GHz microwave plasma cavity resonator described in section 2.2.1. Microwave power levels range from 50W-200W. 25 “—5... "zan-~ 3.80m Q>U oocmcowom coho—9A0 5:85 a PSME Bum v.50 Sewn—2 “accustom $0 Efloou 2.3... A HMU _ O _ u Cosme—z Evans—Lon acol— mccoE< 860580 09:.-2 26 Chapter 3 Experimental Setup The primary research objective is to quantify the operating characteristics of miniature microwave plasmas with sizes ranging from 0.25-10mm. To this end, a new microwave plasma system must be built that can create miniature plasmas in the specified range at controlled pressures. Additionally, it should allow for multiple gas feeds at controllable flow rates. It should be safe, affordable, run at low power, and ideally, portable. Plasma diagnostics must be investigated and developed. Diagnostics must provide the following plasma characteristics: electron density, gas temperature, and plasma power density. Diagnostics should also be portable, requiring only standard laptop computer interface. The following section describes the design, construction, operation, test, and function of the miniature microwave plasma reactor and system designed specifically for this investigation. The next section describes the plasma diagnostic set, and the extra design work that was necessary to extract the required plasma characteristics from such a small, low-power source. Section 3.3 provides valuable initial test data from the plasma system, giving insight into plasma ignition and plasma operating conditions that drive diagnostic and theoretical development decisions. 3. 1 Miniature Microwave Plasma System A miniature microwave plasma source and experimental system was designed, built, and tested at Michigan State University. The experimental system, as shown in 27 Figure 10, consists of the plasma source, vacuum chamber, microwave power system, pressure control system, and gas delivery system. The microwave plasma source, shown in Figure l 1, is a 6.5-cm outer diameter coaxial waveguide, with lO-mm diameter center probe. The waveguide is terminated with an adjustable short. The center probe can be adjusted to vary the center conductor gap, where the plasma is formed. The distance from the short to the center conductor gap is adjusted to approximately one-half the wavelength of the applied microwave power (2.45 GHz). A quartz tube slips over the center probe, surrounding the gap and enclosing the plasma. The plasma source is connected to a 100 W microwave power supply (2.45 GHz) through a circulator and a series of directional couplers and terminators or loads. The circulator is fixed to the microwave source output to protect its magnetron from reflected power. Thermistors convert transmitted and reflected microwave power into current, which drives the associated power meters. The pressure control system functions to stabilize the system pressure. It consists of two Baratron pressure sensors (20 torr and 1000 torr), a 2-atmosphere pressure gauge, manual pressure sensor selector, three independent pressure control setting channels, two digital pressure display units, and automatic pressure control feedback circuitry to fix pressures from 1 mtorr to 1000 torr. The pressure control feedback drives a throttle valve, which determines the rate the reactant gas is evacuated from the system. An impeller pump (Alcatel, 40 liter/min) develops the vacuum. The automatic pressure control circuitry receives signals from the manually selected Baratron pressure sensors. The 20 torr head measures pressure accurate to l mtorr, for pressures less than 10 torr. The 1000 torr head measures pressure accurate to 28 Gas Exhaust - .2 I Ix .ilution “ ® I 'q— a .9 I: M. o c .. Icrowave " Source :I I C irculator, Power Meters J I: N2 I— : i— . :- Pressure Throttle ' Chamber Sensor Valve . II'II) (om-n l: ______ a ,— Isolation ‘. ‘7’ 14' Flow Control h 11:: Meters A III V),/ 52:: A III: Reaction II II II I: III: . II II .: IIII II 'P ------------------- I :::: -! :L'.'_-.:.: Flow Meter Control Panel _____________ Throttle _ ' ‘ Control Panel Valve Control Unit 0 Pressure . ......... Display Unit 0 . Pressure D' 1 't (Coarse) Baratron Select, Scale Factor, ISP éy Um (FIne) Pressure Set Figure 10 Experimental System. 29 Pressure Gauge (2-atmosphere) Coaxial Coupler a I l I . . f I I Dielectric fin Gas Feed : I I I \ Q as \ T ,, * . . g : Quartz u Microwave Power Viewmg , , Su 1 Window ' W Y Plasma / ,_. id Exhaust (To Vacuum) Short Adjustment Probe Adjustment WEE h ----------- Figure 11 Plasma Source. 30 0.1 torr, up to pressures of 1000 torr. The pressure controller compares the Baratron input to that of the selected pressure setting, and drives the throttle valve to converge to the control setting. The pressure and target pressures are registered on the digital displays. The gas delivery system includes a 4-channel bank of gas flow meters (Hastings: model #CPR-4A, MKS: Type 247). Three flow meters are rated for flows up to 1000- standard cubic centimeters per minute (seem); the fourth flow meter is limited to 10- sccm, and as a result, provides the highest resolution. The 4-channel flow control unit actuates all four flow meters. The controller drives the flow meters with the difference between the selected flow rate and the flow rate feedback from the flow meters. The flow rate through each of the four flow meters is registered on controller digital displays. Each gas channel is connected to 2500-psi gas cylinders, regulated to 15 psi. The gas cylinders are secured to the side of the plasma source system. The gas channels and gas canisters are completely interchangeable. This allows for experiments using any combination of up to four gases. The experimental system is sealed by metal-to-metal fittings (VCR seals, 64 total seals). The base pressure is less than 1 mtorr under normal operation (impeller pump only); the base pressure drops to less than 1.0 x 10'7 torr during leak tests, which requires the addition of an auxiliary turbo pump (Alcatel, 100 liter/min). Leak tests consistently register leaks less than 1 mtorr for 16-hour intervals. The system volume is 78 liters. To reduce contamination and water vapor accumulation, the system is closed during system purge. Argon, regulated to just under one atmosphere, brings the system back up to pressure when the experiment is complete. 31 The following chart summarizes the current state of the miniature microwave plasma source and experimental system. The system specifications include the plasma source, vacuum chamber, microwave power system, pressure control system, and gas delivery system. Base pressure (roughing pump): < lmtorr Base pressure (turbo pump): < 10'7 torr Leak rate (w/o reactor): < lmtorr/16 hrs Plasma ignition power: 10W Power meters: 1 forward power meter following 50/50 splitter l reflected power meter following circulator Gas channels: 3 1000-seem channels 1 lO-sccm channel Pressure heads: 1 1000-tort Baratron transducer 1 20-torr Baratron transducer 1 2-atmosphere head Pressure display for each pressure head: Digital display: Baratron heads Analog display: 2-atmosphere head Automatic pressure control select between 1000-torr and 20-torr Baratron heads Accurate automatic pressure control from 1 mtorr to 1000 torr Three pressure control setting channels Automatic Argon system purge to 1 atmosphere with adjustable pressure regulator Additional air valve isolation from roughing pump 32 Manual equalization valve to bring roughing pump to 1 atmosphere Nitrogen vent to roof: Adjustable Nitrogen flow rate Shut-off valve to prevent backflow from neighboring DLC system All seals metal-to-metal (VCR) fittings In summary, the following input parameters can be controlled and monitored: . Pressure: 0.5 torr-2 atmospheres . Power: 0.5-100 W . Probe diameter (plasma diameter): 0.2-10mm . Plasma height: 0.2mm-20mm . Gas flow: 1.25-10003ccm (velocity function of nozzle size) . Gas species: Argon, Nitrogen, Hydrogen, Air, Hydrogen/Methane mixture The flexibility in design allows for plasma investigation at a wide range of pressures, at different discharge aspect ratios, at power levels from 0.5 W to 100 W, and with reconfiguration capability on all four-gas channels. 3. 2 Plasma Diagnositics The plasma diagnostics proposed to investigate miniature microwave plasmas created by the plasma source built for this investigation are limited to spectroscopy due to the configuration of the source. The following sections describe the diagnostic set up for the optical emission spectrometer. 3.2.1 Optical Emission Spectroscopy Optical plasma diagnostic techniques include plasma-induced emission and laser- induced fluorescence [19]-[20]. Other radiation based non-intrusive techniques include 33 optogalvanic, infrared, spontaneous and stimulated Raman, and multi-photon spectroscopy [21]. Optical diagnostic techniques, specifically plasma-induced emission, will be used to estimate electron density, electron temperature, and gas temperature in this investigation. The experimental set up for plasma-induced emission, or optical emission spectroscopy (OES), is given in Figure 12. Line broadening is seen in high-density plasmas where high local electric fields are present, which result from localized charge imbalances. This effect is called Stark broadening, or electric field broadening. Estimates can be made from Stark broadening for translation temperature and electron density. Stark broadening of the Hydrogen Balmer series (Ha, Hg) as a function of electron temperature has been computed by Griem [22]. Electron density and temperature determine the broadening for purely Stark broadened Ha lines. Deconvolving the Stark shape from the total spectrum line leaves a Doppler broadened HOI curve, and gives an estimate for Hydrogen translation energy and electron density (assuming a Maxwell distribution) [23]-[24]. Gas temperature is measured using the optical emission lines corresponding to H2 and N2 rotational temperature; molecular Hydrogen electronic configurations and rotational energy levels and transitions are shown in Figures 13 -14 [25]. Rotational temperature transitions within the same electronic configuration and vibration energy produce line intensities in accordance with the Boltzmann distribution. (3.1) 1 = 1045“» epr_ Bv J (J +1)hc] kT, 34 I Plasma Source 1 I Gas Exhaust 7 C] 00 OO Circulator, Coupler, Load, Power Meters fl 1= O 00 Optical Emission Control Figure 12 Optical Emission Diagnostics. 35 Ilacuum Chambfl I E: I ' I II \ Q . I . Microwave d) Source [’/ I I I I I I I I I ' I— I I: fl Pressure L I {I Sensor ‘ g Spectrometer .ANIV 823m othoo—m @3330 m. 23w."— J ocodm #33me II ”50$me II N aflommomm N I 2552 N mw_bmmbm~ [III II #33me m m m m m v Ill 0 wN_bmmme v v v v OOC ON— 3.50%me 8. e. an. a. .5 an. I 9-8on p: n2 u: a: a: _ m: 903:8 A $0.35 I 36 530 UUUUU J, V0 Hydrogen Energy Level Diagram with P and R Branches Figure 14 Rotation Temperature (Gas). 37 Where: K -:-Constant for same electron configuration and vibration level v 5 Frequency of radiation S J' J" E Hoal-London factor B,» 5 Molecular rotation constant J ' E Rotation quantum number h E Planck’s constant c 2 Speed of light k E Boltzmann’s constant T r E Rotation temperature 3.2.2 Optical Emission Spectroscopy Design The intensity of the light that was gathered by the optical emission spectrometer from plasma emission was found to be so weak in preliminary testing that virtually no signal could be detected by the optical emission spectrometer. The plasma light intensity itself was well above any detectable threshold, very visible to the naked eye in all cases. However, the simple lens and fiber optic system used to focus the light into the McPherson model 216.5 optical emission spectrometer was insufficient. This preliminary design is shown in Figure 15. In an attempt to increase the emission intensity, the lens system was plunged into the plasma reactor, focusing the plasma emission on an array of optical fibers inside the reaction chamber. The vacuum was sealed with a double O-ring feed-through, similar to seals used in electron microscopy. Light was focused into the fibers, and collimated at the end of the fibers, by specially designed and cut spherical lenses. The collimated light at the end of the fibers was refocused into the McPherson 216.5 optical emission spectrometer. Figures 16-18 detail the diagnostic setup, fiber feed-through design, and spherical lens specifications, respectively. 38 Plasma Source Optical Fiber 3 @::::::::::1 Lens [ I" Spectrometer =I O O. Optical Emission Control Unit Figure 15 Optical Emission Preliminary Design. 39 Plasma Source f ' \/ bib—-—------ --—--—-—4 F eedthrough L [I I i_‘I T I Optical Fibers Spectrometer O I O . Lens (f=9”) Optical Emission Control Unit Figure 16 Optical Emission Spectroscopy Design. 40 mcoq msoom Loam 2.3 see .nwsocfiéoou— =o_mm_Em Rocco 5 95E". ........... ............ ........... ........... a“: 823 @2950 Em .uu ....... ............. ............. ............. ............ 141111411111 1 ............. III? IIIIIIII ............ .......... ...... >83. EEO Sor— 41 Radius=l .25 mm 0.88 mm Figure 18 Sphen'cal Lens Design. 42 3.2.3 Optical Emission Spectroscopy Test Initial test results for the optical emission spectroscopy design are given in Figure 19. Photomultiplier tube currents in excess of 200 nA were recorded for the Hp line with an accelerating voltage of ~900V. Vacuum pressures were unaffected by the new feed- through; there was no discemable difference in leak rate after the feed-through installation. The plasma formation was unaffected by the new feed-through, and there was no detectable microwave energy leak around the feed-through mount. To compensate the light blocked at the reactor window by the new feed-through, its unused fibers were used to channel light into the cavity to adjust the probe in the absence of the plasma. 3. 3 Preliminary Findings Preliminary findings are restricted to a set of experiments conducted immediately following the miniature microwave plasma system build (June-August, 200]). The first set of experiments tested the miniature microwave system functions, such as leak rate, base pressure, pressure control, flow control, and microwave power measurement. The second set of experiments was concerned with plasma formation and stability. In the second set of experiments, Argon plasmas were formed at pressures ranging from 1 mtorr-760 torr (1 atmosphere). These experiments were conducted to verify that plasmas could be formed, controlled, and operated safely over the required pressure range. The miniature microwave system leak rate registered less than 1 mtorr over a period of 16 hours. Base system pressure measured less than 9.0 x 10'8 torr while pumping with an auxiliary turbo pump. System pressure was monitored to 0.1 mtorr. 43 use 230 CE 8.1: 2 ESE 2. Sign; came come came come case coke once w oo+woo.o a . momood t .. cameo.»V . momood ., mo-moo.w (v) iuwno 1ch 1 so-woo.— . KOMONA T nomov. e 1-1L, Smog 44 System pressure could be stabilized with no gas flow at pressures as low as lmtorr. System pressure could be stabilized with gas flow at pressures approaching 10 mtorr. The pressure at which the miniature microwave system pressure can be stabilized is limited by the resolution of the flow meters, not the throttle valve feedback control loop. Argon plasmas were ignited at pressures between 5 torr-IO torr. The microwave power (2.45 GHz) necessary for ignition was approximately 30W-40W. The microwave power necessary for a self-sustaining plasma was as small as 0.2 W for pressures less than 100 torr. 3.3.1 Preliminary Experiments Preliminary experiments concentrated on Argon plasmas and their characteristics. Argon plasmas are easily formed, as monotonic gases ionize more readily. Plasmas were ignited at pressures between 10 ton-15 torr. Pressure settings were adjusted such that stable plasmas were formed at pressures from 1 mtorr-1000 torr. Argon plasmas formed at pressures below 1 torr diffused through the gaps in the quartz tube, filling the entire reactor. Plasmas formed at pressures greater than 400 torr began to collapse, pulling away from the quartz tube. Plasmas greater than 800 torr were spherical. In general, higher pressure Argon plasmas formed discharge filaments when the plasma impedance was not matched to the impedance of the microwave power circuit. 3.3.2 Preliminary Diagnostic Results Preliminary diagnostics were restricted to plasma size, shape, and power density, as recorded by digital imaging. Measurements for plasma size and shape were taken 45 directly from the digital image. Microwave power meters recorded transmitted and reflected microwave power. The resulting data is summarized in the series of plots given in Figures 20-21, first published June 15, 2001 [26]. Specifically, power density is recorded for pressures from 100 torr-760 torr for the Argon plasma, and plotted in Figure 20. The power density, calculated from the diagnostic data, is used in section 7.2.1 to calculate electron density and temperature using the global model. Ignition power was recorded for pressures from 5 mtorr-760 torr, and is plotted in figure 21. 46 .aEmmE coma/x E .3550 $30; an flaw:— Ato: 2:38A— oon 80 gm cow 8m com 00 _ \ Sm coo _ com _ ooom ocmm 25m b.8826 bison SBom 47 N2 Ate; 288.5 a: L: coach. 52:? com}. _S=oEtoaxm _N «Ema we we A: om Om ov Om cc CE woken 8:33 48 Chapter 4 Global Model Theory To complete the characterization of the miniature microwave plasma, it is necessary to model the plasma mathematically. Several models have been proposed for low-pressure plasmas [27]—[29], moderate pressure plasmas [30], and high-pressure plasmas (~1 atmosphere) [31]-[32]. Matching these models to the diagnostic estimates is necessary to prove the validity of these models, such that these models can be used in the future for miniature plasma source design. Global models for non-equilibrium plasmas calculate electron density (n) and electron temperature (Tc) as a function of input power (Pabs), pressure (P), gas concentrations and plasma reactor geometry. Briefly, global models require species balance, momentum balance, and energy balance in the Boltzmann transport equations. Conservation of these three quantities are commonly referred to as the zero, first, and second moment Boltzmann equations. The global models balance these equations macroscopically, as opposed to other finite difference analysis techniques [33] that balance these equations for each small volume element included in the microwave reactor system. Global models can incorporate chemical reactions and reaction rates for specific species. Global models do not consider convective flow dominated conditions, as found at higher pressures (> 100 torr). 4. 1 Global Model The global model development begins with the general Boltzmann transport equations. This set of equations can be simplified by limiting the plasma behavior. 49 ‘ .n-« “a.“ wv Pinning the plasma boundary conditions to the edge of a collisionless sheath reduces the equation set further. The resulting set of equations require pressure dependent relationships, valid over limited pressure regimes. The global model, in its final form, combines Boltmann transport particle, momentum, and energy balance equations, matched at the edge of a collisionless sheath. Solved iteratively, the global model predicts electron and ion densities, electron temperatures, and electron and ion flux. The mathematical development proceeds directly from texts by Bittencourt [34], Lieberman [35], Goldston [36], Bird [37], and Chen [38]. The global model requires balancing zero (mass/species), first (momentum), and second (energy) moments of the Boltzmann transport equations. More complicated mathematical models require balancing higher order Boltzmann transport equations; for example, heat transfer through convective flows requires balancing the third moment Boltzmann transport equation. These equations are critical in developing mathematical models. The zero moment Boltzmann equation is given as follows: 9%"t—a—+V ' (pmafia) = Sa (4.1) 3 so = —pa—’;’Q- = m€(Kine _ krnez _ kane) collision pm, 2 a density 17a, 5 a average velocity Sa, 5 a ionization rate me E electron mass ne 5 electron number density K ,- , k, , ka 5 ionization, recombination, attachment rates 50 Equation 4.1 is called the continuity equation, and represents the conservation of mass. Physically, the difference between the rate at which particles or flow from a differential volume (dV) and the rate the particles are generated (Sq) is equal to the time rate of change of the particles or within the differential volume. The first moment Boltzmann equation is given as, ” D _ 2 , - A = naqa (E + iiaxB) + pmag - VPa + Au pma Dt (4.2) 1.4.0, = 8(pmal70) a: col l ixion a acceleration due to gravity é Pa, 5 a partial pressure Aa, E a momentum collision rate Equation 4.2 is referred to as the equation of motion, and represents the conservation of momentum. Physically, as expected, the mass density times the time derivative of the average velocity is equal to the sum of the forces. In Equation 4.2, the forces are composed of the Lorentz force and forces resulting from gravity and pressure. a The additional term, A 0, represents the mean momentum change with respect to time of the a particles as a result of collisions within the plasma. 51 The second moment Boltzmann equation is given as, p a _ .. _. g g n . fill-3%) + (121](V o ua) + (VPO, 0 V) o ua + qa, = M0, — ua, 0 Ag, + (ua2/2)Sa 8(pma, < v2 >a, /2)I Ma 2 at , , col/Ismn Ma, 5 a energr collision rate (4.3) Equation 4.3 is called the energy transport equation, and represents the conservation of energy. The first term represents the total thermal energy rate of change of a differential volume moving with average velocity u. The second term represents the thermal energy entering and leaving the differential volume. The third term represents the work performed on the species within the unit volume by the forces (pressure) on the surface. The fourth term represents the heat flux through the differential volume. The terms on the right side of the equation represent the energy change as a result of particle collisions. The global model follows directly from the first three Boltzmann moment equations. Approximations to the Boltzmann moment equations can be made, given the plasma pressure regime. Sections 4.1.1-4.1.3 examines approximations made for the low, moderate, and high-pressure regimes, respectively. In each pressure regime, the plasma is assumed to be in steady state operation. 52 4.1.] Low Pressure, Steady-State Approximations The Boltzmann transport equations can be simplified dramatically by assuming no change in state in the plasma over time; that is, the plasma density function is constant in phase space, both distance and velocity, at every point in the plasma. At low-pressure, electron diffusion immediately counteracts the effects of internal forces, such as electric field. As a result, there is no net electron acceleration in the plasma, and the total derivative with respect to time is set equal to zero in Equation 4.2, when considering electrons. Ion diffusion is much slower; drift due to the electric field dominates diffusion. For ions, given a constant state, the partial derivative with respect to time is set equal to zero in Equation 4.2. Thus, —. mne—Dlltfie = eneE-I-Vl’e = —eneV¢+VPe = 0; where: E = —V¢ VPe = kTeV 0e isothermal plasma (4.4) :> fie = nOeWTe Boltsmann distribution formula I DEMui2+e¢i+(Pi/7li):0 (4'5) :>-;-Mu,-2+e¢,-=0; for: H50 53 Solving Equations 4.4 and 4.5 for u,, and substituting into Equation 4.1 gives: 1.. 1/2 V'(t777)=Y0 [_2€Teln_77_] 77 =v-Jl M I70 ’7 = ”e = ”i mo 0.425 (4.6) ,1,- < (R,L) xi,- 5 mean free path Us 5 density at edge of collisionless sheath 770 E bulkdensity The solution to Equation 4.6 can be found in closed-form. The ratio of the density at the edge of the plasma sheath to the bulk density is a constant. Combining Equations 4.4 and 4.5 with Poisson’s equation, that is, u B a Bohm velocity (velocity at sheath edge) (4 7) M 5 ion mass ° e W = —(n. — n.) «‘30 Poisson's equation 54 6‘0 (4.8) 1 2 e8s =3Mus 1/2 eTe :>u = — 4.9 B (M) ( ) The Bohm velocity (uB) is defined as the velocity on the edge of the plasma sheath, when the sheath is collisionless. In the global model development, the plasma sheath is always considered collisionless; the Bohm velocity development is valid for each of the pressure regions considered in this study. 4.1.2 Intermediate Pressure, Steady-State Approximations Intermediate pressures are defined as pressures in which ion motion is still dominated by drift. However, the mean free path is less than the plasma reactor dimensions. Therefore, the collision term in Equation 4.2 must be included at intermediate pressures. Thus, Vm =ui//I.,- 2e - l (4.10) ”i =flrE Vm E momentum reversal rate, xi, 5 ion mean free path M 5 ion mobility 55 Equations 4.10, taken with the Boltzmann distribution function and the time invariant continuity equation, Equation 4.1, gives the following non-linear differential equation: 1/2 _ 1/2 ”[321] iI_,,_42I =v,-..rz (4.11) The analytic solution to Equation 4.11 does not converge to the low-pressure analytic solution in section 4.1.1, as the mean free path goes to infinity. Godyak found an approximate solution that does converge to the low-pressure solution. According to Godyak, the following ratios are to be used to relate plasma density at the sheath edge to plasma density in the bulk, given a cylindrical discharge with radius R and length L: —I/2 112 = E a 0.86I3 +—€-I (4.12) 770 241 fl —I/2 hR = J; a 0.80I4 + ——I (4.13) 770 ’I'i And the ionization rate is given as: -I/2 vi, = 1’4 5 2.2i’iI4-15I (4.14) 770 R 47' The density ratios are used in the global model to find the ratio of the plasma volume to the effective plasma area; that is, 56 d ._l_5£__ ‘7” 2RhL+LhR ”SA = 770/1th7 (4. I 5) volume/ effective area deff 77s Aeff 5 effective area density at sheath edge In both low and intermediate pressure regimes, the plasma density is constant, or nearly constant, through the bulk of the plasma, and sharply driven to zero in the sheath between the bulk plasma and reactor walls. The flat distribution is due to the uneven diffusion rates of the two charged species, electrons and ions. At higher pressures, the ion diffusion rate is not negligible, and the bulk plasma density is no longer constant. Returning to Equation 4.], given constant densities: (IFOdS = IKizngndvol; where: K [277g 5 Viz, 77g 5 neutral gas densities S vol u 3770 (11,. 2m + h 22:18): KiZUgIIOIIzRZL) (4.16) K), _ l “B deffr;g Equation 4.16 is solved iteratively for Te, as both KI and uB are functions of T... The ratio den is used in the global model as part of the global model power balance equation. A description of the power balance equation can be found at the end of section 4.1.3. The relationship between ngden(Te) and Te for Argon in the low to moderate 57 pressure regime is shown in Figure 22 [19]. Figure 22 also gives ngdcn(Te) as a function of TC in the high pressure regime, which is addressed in section 4.1.3. 4.1.3 High Pressure, Steady-State Approximations High-pressures are defined as pressures in which the ion diffusion rate is not dominated by ion drift. That is, ion diffusion and electron diffusion, and the resulting drift due to internal electric fields, must balance such that ion density and ion flux is equal to electron density and flux at every point in the plasma. Accordingly, in steady- state, Equation 4.2 and the isothermal assumption gives: e kT 1‘0. = naE - 0‘ V’lar = #aUaE - DaV 77a mana ma ma ”1' = ”e = 77 (4.17) I“i :re :1“: ”iui :neuezllu at 5 ions, electrons Dar 5 a diffusion F = ”u = _.uiDe +fleDi V77 5 —DVr7 tut + .ue (4.18) D E ambipolar diffusion coejf Substituting Equation 4.18 into the continuity equation, Equation 4.1, gives the following second—order differential equation: 58 Min»- ' II p-55... dew}. E 30:85 :03me 5.. o... .m> teem: NN PSME :2 no. 23 :2 82 22 ES to. o ill-fl I/u/JI/ mowbfioma 2385-304 // N v // . fl mowbfioma BEBEéwE / L/e A>ov 838258... 28805 59 Solving Equation 4.19 in cylindrical coordinates gives the following solution set: I] = ”0J0[X2Ir]COS(%J I X0] = 2.405(15! zero 0f .10) 87] Id) X r (4.20) Fir Er—fluxatz F- =—D§l= X0113 212 0’ Br R TloJ1IX01 )COS(—l.—l J,(x0,)=0.519 Returning to the steady-state continuity equation, integrating with respect to volume, and applying Green’s theorem gives: «If-as = Iv,, 7](r,z)dvol (4.21) 5 vol Integrals on the right and left side of Equation 4.21 can be found in closed-form with the relationships given in Equations 4.20. Setting the right and left side of Equation 4.21 equal gives the following: 2 2 e1 14 viz -511: R L 1 2 D778 D ”g defl ”g (4.22) Kizngne E Viz7le 60 Equation 4.22 is of the same form as Equation 4.16, with D(Te) replacing uB(T,.). Equation 4.22 is solved iteratively for Tc, with the aid of the Figure 22 [39], which gives ngden(Te) as a function of TC in the high pressure regime. The energy conservation equation, Equation 4.3, is simplified by assuming relatively constant differential volumes, and by neglecting convection. These assumptions eliminate the third and fourth terms in equation 4.3. The assumption that the plasma is steady-state requires the partial derivative of thermal energy with respect to time to be zero. Applying the chain rule to the total derivative and gradient: 2I&I_§_I&I,2,.m Dt 2 at 2 2 (4.23) ~ 3 _. 3 - - 3- — VOIEPauJ=3PaVOu+EuOVPa D3130, 3--~3- a3]~(3-I — — +—PVou=Vo —Pu +— —P 2V0 —Pu 4.24 01(2l2a Izalaz(2“ 2" I) The derivative with respect to time on the left side of Equation 4.24 is equal to the total power absorbed in the plasma volume, defined as Sabs, less the power lost in electron-neutral collisions that ionize neutrals. The gradient on the right side of Equation 4.24 is equal to the thermal energy flux to the reactor walls. Specifically: 61 Sub], = e(ee + e,- )=[ 9] (4.28) Assuming only elastic collisions, the ions pass from the plasma bulk to the reactor wall with no change in energy. The difference between the bulk plasma potential and the reactor wall potential is equal to the energy flux per ion. The potential difference is found in two parts. Firstly, from the plasma bulk to the sheath edge; secondly, from the sheath edge to the reactor wall. The former potential (a) is found by invoking energy conservation from the center of the discharge to the sheath edge; the latter potential (b) is found by balancing electron and ion flux to the reactor wall. Thus, 63 2 I 2 I T a e =—Mu =—M —' : ,=—e () ¢e 2 B 2 £ J we 2 (b) Ifie : ri => gillsew /Te < Ve >= ”SUB (4.29) 3 "IIUSBIAW ”e (EST/2 = USIEXEJI I2 2 —¢W = %ln(3A;n—] (c122,- = .1, — a. = IZe—Ii +1.16%nd And, er = ee+e,- +56 2 2Te+-ge—Il+lnI3A7:—n-)I+gc(fe) (4.30) The rate energy is lost per unit volume per ionization collision is a function of electron temperature, and is given by the curve presented in Figure 23. Calculations of electron density and temperature for experimental data are given in chapter 7. 64 .cowE E oh .m> $04 35.5 .mcanoU 3 9...“...— 93 up No. .2. OS .2 lir/ //l / ,, M2 A>ov $04 33.5 3:23:00 65 Chapter 5 Spectroscopy Theory: Zeeman Effect Extracting information from spectroscopy results requires an understanding of Quantum Theory. Bohr-Sommerfeld Theory adequately explains simple atomic spectra classically, with given ad hoc quantization rules. For example, the Balmer formula, a direct result of Bohr-Sommerfeld, accurately accounts for the principle peaks in the visible atomic Hydrogen spectrum. The theory also accounts for the quantization of angular momentum, and applies to the vibration and rotation spectrum of simple molecules, and the normal Zeeman effect. However, Quantum Theory is necessary to explain complex atomic spectra, the anomalous Zeeman effect, and fine structure. Quantum Theory is necessary to formulate angular momentum coupling (spin-orbit) and coupling to magnetic moments. Quantum theory is necessary to address relativistic effects (Thomas Precession, Darwin Shift) and multi-body effects (Lamb Shift); effects that are pronounced in atomic Hydrogen spectra. Additionally, a systematic analysis of spectral data is not possible without the constructs of Quantum Theory. The first two sections introduce Quantum Theory fundamentals, followed by sections that describe the quantum effects of fields on particles. In a plasma, these quantum interactions effect changes in spectral lines. Specifically, the effects that contribute to spectral peak splitting found in atomic and diatomic hydrogen are discussed in the final sections. 66 5. 1 Introduction: Quantum Theory One starting point for Quantum Theory is the Schrodinger equation, proposed by E. Schrodinger in 1925. The Schrodinger equation defines the wave function state; that is, the wave function position and momentum. Classically, the equations of motion are found by following the stationary path defined by the action integral (Maupertuis, Hamilton). In Quantum Theory, the equations of motion —the Schrodinger equation- is found by following all possible paths. In 1948, R. Feynman developed the Schrodinger equation formally by summing all possible paths constrained by the action integral and uncertainty in conjagate state variables position and momentum. The Schrodinger equation is given as follows: 2 --r5—V2y/(x,t)+ Viz/(Lt): flirt/(Lt) (51) 2m 3! Setting the potential energy term (V) to the energy stored in the near parabolic energy well of an atomic bond, the Schrodinger equation yields Hermite polynomials as the wave function (‘1') solution for the harmonic oscillator. Setting the potential energy term to the potential that results from a central potential, the Schrodinger equation yields spherical harmonic functions (associated Legendre polynomials) as the wave function solution for a single electron orbiting the nucleus. It should be noted that the wave function solutions for the harmonic oscillator and the central charge can both be constructed without the use of the Schrodinger equation. 67 Dirac constructed eigenvectors and developed solutions for the harmonic oscillator based strictly on the constructs of Hilbert space and conjugate relations. Born, Heisenberg, and Jordan did the same with angular momentum operators to solve for the angle dependent solutions to a central potential. For the purpose of studying spectroscopy peaks, the Schrodinger equation will be temporarily set aside. First, the eigenvector equations and operator functions for the harmonic oscillator and central charge will be briefly illustrated. This tact will demonstrate the powerful nature of the eigenvector technique, particularly for spectroscopy, where the only results needed are the corresponding eigenvalues, which set the energy levels of the system. The eigenvector approach will introduce the angular momentum operators that are used to determine degenerate energy levels in central charge potentials. These operators will then be used to find the energy levels and degeneracies in coupled angular momentum problems. Perturbation theory will show how these energy levels split —the degeneracies are removed- with the effect of applied magnetic fields (Zeeman effect). Results will be applied to the hydrogen rotational spectrum. The Schrodinger equation will be used to address effects caused by changes made to the potential energy of the system. Perturbation theory is needed to calculate energy shifts that result from magnetic fields (Zeeman) and electric fields (Stark). The Schrodinger equation must be modified to account for the interaction of the electron spin with the orbital angular momentum of the electron. Also, the Schrodinger equation must be adjusted to account for the relativistic mass of the electron. Results will be applied to the diatomic and atomic hydrogen spectrums; the complete energy spectrum for diatomic 68 hydrogen is given in Chapter 6; the complete energy spectrum for atomic hydrogen (Ha, Hp, H7) is given in Chapter 7. 5. 2 Eigenvectors Mathematically, the eigenvector equation is given by the following: A | x) 2 11 | x) (5-2) Where A is a vector operator, x is a set of eigenvectors or eigenfunctions, and A is the eigenvalue diagonal matrix. Physically, the linear algebra terms observability and projection space mean the physical quantity or operator (A) can be observed and measured (7t) if the object (x) can be projected without distortion. An example is a microscope. The microscope objective lens operates (A) on the light reflected from the object (x -LHS) to create an image projected onto the focal plane (x —RHS) of the eyepiece. In this case, the operation of the objective lens is observable if the image is clear; that is, x-RHS = x-LHS. The eigenvalue for the microscope is simply its magnification. Operators that commute can be observed by the same set of eigenfunctions. This can be seen for operators A and B in the following: 69 A l X) = 1 | x) A | x') = II x') (x'l AB | x) = /l'(x' | B | x) (5.3) (x'lBAlx)=/i(x'|B|x) = (X— lX-r’l B l x> [A,B]=0:>(x'|B|x)=0:> B|x) =,t,,x For the microscope example, a compound objective lens commutes; it does not matter whether the higher magnification occurs first or second. The next two sections describe the operators for the harmonic oscillator and central potential. 5.2.1 Harmonic Oscillator The infinitesimal translator operator changes the wave function position argument asfollows: T(ax)=1—ax’-i=1—j.-jhi.31y=1—j.p.ajy (5.4) a ax 7’ ’1 Where p is the momentum operator, and is Hermitian. The Hamiltonian —the energy operator- is given by: 70 ——-H =—(P2+Q2) (5.5) p = w/mth (5.6) And mm2 is the spring constant (k) of the system. Q and P represent derivative position and momentum operators, which like true momentum operators p and q, do not COITIITIUIC. [Q.Pl = 1 (5.7) The one-dimensional harmonic oscillator potential energy is a fiinction of compression- or translation -which can be discretized; allowed transitions increase or decrease compression by one unit. Operators that change the energy of the wave function are commonly called “ladder operators”. Creation and annihilation operators [40] for the one-dimensional harmonic oscillator are given in the following. These operators are unitless, and represent the infinitesimal energy change that results from the infinitesimal translation, given in Equation 5.4. 71 (5.8) + l a = — - P JE(Q J ) And, [a,a+] =1 (5.9) Now, fiH2%(P2+Q2)=%(aa++a+a)=N+§ (5.10) Where, N = a+a (5-11) Returns the original wave function as the eigenvector, with eigenvalue equal to the number of units of energy stored in compression (n). In eigenvector notation: N|n)=n|n) (5.12) And with, [N,a] = [a+a,a] = a+[a,a]+ [a+,a]a = -a (5.13) [N,a+] = [a+a,a+] = a+[a,a+]+[a+,a+]a = a+ 72 It is clear that, Naln) =([N,a]+aN)| n) =(n—l)a | n) (5.14) Na+ ln) = ([N,a+]+a+N)| n) = (n+1)a+ In) Which implies a+|n> and a|n> are also eigenvectors of N, with eigenvalues n+1 and n-1, respectively. Relating Equations 5.13 and 5.14, it follows that: aln>=JZIn—1> (5.15) 61+ | n) =Jn+l |n+1) Returning to the Hamiltonian, H|n)=h¢{N+-;:)|n)=hw(n+l/2)|n) (5.16) Therefore, the energy levels for the one-dimensional harmonic oscillator are given by the eigenvalues: En=hw(n+1/2) (5.17) 73 5.2.2 Central Potential Understanding the central charge potential requires a thorough understanding of the angular momentum component, which contains the most interesting spectral information -—that of degenerate peaks that split in the presence of an applied electric or magnetic field. The angular momentum component and angular momentum operators will be covered in the next section. The central potential Hamiltonian will be presented in the following section. 5.2.2.1 Angular Momentum Operators The infinitesimal rotation operator changes the wave function position argument as follows [41]: (5.18) This is exactly analogous to the infinitesimal translation operator presented in the previous section. The second order expansion of the infinitesimal rotation operator leads directly to the angular momentum commutation relations: 74 R: (84>) = R2 (aw 2)R; (897 2) :(l-j'Jz 'a‘%h)(l_j'Jz 'a%h] =1—j-Jz'a%'J§(a%h)2 And, R.(a¢')Ry(a¢')— R,,(a¢')ze. [Janylz thz And, in general, [Ji’Jj]= jhg'ijk 75 (5.19) (5.20) (5.21) (5.22) The angular momentum components Jx, Jy, and JZ do not commute. Likewise, orbital angular momentum operators Lx, LV, and L2 do not commute. Recasting the components of L in spherical coordinates, as shown in Figure 24: I I I . I a . a L}, 2L1: =Lx ijL}, :[i£+jCOt65—6j (5.23) Where the primed coordinates are body-axis coordinates. Now, raising the operator dimension by one gives the horizontal component of the angular momentum magnitude, in both body-axis and inertial frame: I 2 _1 —a—sin B—a— + cot2 H-a—— Slng 86 86 a¢2 Li 4%, = —;-(L+ L_ +L_ L+ )2 — (5.24) [141’ L2] = 0 Here it is clear that L),2 and LI commute. Therefore, L2 and L2 commute and have the same eigenfunctions. L2 is identical to the Laplacian operator in spherical coordinates, and is given by: 2 1.2 l a ' a 1 _a_ (5.25) - ——sr n —+ 81118 86 86 sin2 9 a¢2 76 5/ j 8(1) —8/89 Figure 24 Angular Momentum Operator: Spherical Coordinates. 77 —cot6 5654) L2 is periodic about the z axis. Its eigenvector equation must be the following: 12117,"): m 1 Ylm> (5.26) 2 WW) = F(6)e-"""’ The eigenvector equation for L2 is different for each m. For m = l, the eigenvector equation is: 2 —a—sin6—a—+ [2 |)’/) L2|Y1’>=- . . $111936 86 sm 6 (5.27) L2 | sin, 9) = 1(1+ 1) | sin] 9) Where the corresponding eigenfunction and eigenvalue are sin'B and 1(l+l). The angular momentum ladder operators are the infinitesimal angular momentum operators from Figure 24 and Equation 5.23. More succinctly, they are given as: L+ = L,C 3‘.ij = [igag—mcotfi] (5.28) Where m is the eigenvalue for L2. Physically, m is the dimension of the divergence operator (V 0), and depends on the dimension —or eigenvalue- of the wave function. 78 Commutator relations are as follows: [2.2. 1: A [L2,L_]= —L_ [L+,L—]= 2L2 With Equation 5.24: L2 =L}, + L3. = %(L_L+ + L+L_)+ L‘Z: L_L+ = L2 -L,(L,. +1) L+L_ = L2 -L,.(L,_. —1) And, [L2,L,-]= o :5 [L2,L+]= [L2,L_]= 0 So, 1.221115"): 1:27- 11,m>=1(1+1>L_+_ Il,m> LzLi |l,m) = Li(Lz il) l I,m) = (mi1)L_t | l,m) :Lillam>:cillamil> 79 (5.29) (5.30) (5.31) (5.32) Equation 5.32 implies Lt |1,m) are both eigenvectors of L2 and L2, with eigenvalues 1 (1+1) and mil, respectively. Further, L: are ladder operators, analogous to the ladder operators for the harmonic oscillator found in Equation 5.15. Using Equation 5.30, and the fact the ladder operators are Hermitian: c3 = |L+ |1,m)]2 = (1,m I L_L+ |1,m) = [1(1 + 1) - m(m +1)](/,m |1,m) c3 = |L_ |1,m)|2 = (I,m I L+L__ |1,m) = [1(1+ l)—m(m —1)](1,m|1,m) (5.33) :>ci =,/1(1+1)-m(m:1) 12+. |1,m)=\/l(l+l)—m(mi1)|1,mi1):>—ISmS+l Before leaving this introduction, it is useful to see that the results given in Equation 5.33 can be arrived at be restricting oneself to the physical interpretation of the operators. The operators can be written as successive gradient/divergence operators, each changing the dimension of the waveform by one. As seen in Equation 5.30, the anti- commutation of L». and L- yields the Laplacian for the horizontal-plane component of angular momentum. Using the identity in Equation 5.28 for a given m: fi=%LQ+AL) l a . +(m+1) 1 a . _,,, L_L =- —sm -——s1n 6 5.34 + sin+zm+lj 6 39 sin-m 6 39 ( ) 1 a —(m-l). 1 +m 6 Ladder operators applied to the RHS of Li increase (decrease) the dimension by one; that is, the exponent on the sin function (m) increases (decreases) to reflect the dimension of the wavefunction. Starting with m = l, L: | Y,’) =1 I Y,’) , and applying the L. operator 3 times, m -> m —s, and the new wavefunction that satisfies Equation 5.34 is given by: LiL, 119’): LzL-i | Y,’) = (l—s) |( 151nm (9)175 (5.35) sin+m 6 39 The spherical harmonic function, Ylm(9,¢), is multiplied by the radial wave function component to complete the wave function. The complete central potential Hamiltonian and radial wave function component are covered briefly in the next section. Finally, the angular momentum operator can be connected to the harmonic oscillator (Schwinger) [42] by mixing the fields of uncoupled harmonic oscillators, each with independent commutation relations. One operator (L+) creates one unit of +h/ 2 angular momentum (L2) and annihilates one unit of —h/ 2 angular momentum. Likewise, its conjugate (L-) annihilates one unit of + h/ 2 angular momentum and creates one unit of —h/ 2 angular momentum. This connection reinforces the results from the Clebsch-Gordan calculation in section 5.4.]. 81 5.2.2.2 Central Potential Hamiltonian Returning to the Schrodinger equation, the central potential Hamiltonian (hydrogen atom) is given in spherical coordinates as: 2 2 H _ 31+ L + V(r) 2m 2mr2 h 1 8 r : 'T——r j r 8r (5.36) 2 L2 = -h2 . isinfli+_l___2_ 81116 86 86 sin2 6 a¢2 2 V(r) = —5- r And, H l W) = E I u!) (5.37) Substituting as follows: 82 : ’ : 2 h 2 2 = 5"- m (5.38) hc — 2E _l, rtfl = lee 2 v, Equation 5.37 can be rewritten: d2 a’ x—+(21+2—x)——-—(l+l—v) v,=0 (5.39) (1x7- dx Solving by Taylor series expansion gives [43]-[44]: v F(I + l + p — v) (214-1) x_ x-l-l—vex r(1+1—v) (21+1+p)1p1 x-—>°° v, = F(l+l—v,2/+2;x)= Z p=0 l —x :> ruI————>x"’e7- x—-)oo (5.40) Which does not converge for large r. However, “I! in Equation 5.38 does converge if the polynomial is finite, that is: 1+ 1 — v = O,—l,—2,—3,... :> v = n : n — (I + 1) = O,1,2,3,... (5.41) n=1,2,3,... H Iw>=nlw> :5 I=O,1,2...n-1=> L2 |y1)=1(l+1)|1//) -ISms+l Lz|W>=mW> 83 Where (n, l(l+l), m) are the eigenvalues —or quantum numbers- for a central potential. The principle quantum number, n, defines the energy level, l(l+l) the rotational energy (angular momentum), and m, bounded in Equation 5.33, the magnetic moment. 5. 3 Electron Spin Electron spin follows the eigenfunction precepts detailed for orbital momentum. However, spin is a more elusive concept. In 1922, 0. Stern and W. Gerlach carried out a series of experiments in Frankfurt (Stem-Gerlach Experiments) that illustrated just how illusive a concept spin is [42]. Randomly oriented electrons were ejected from a collimating slit, passed through a gradient magnetic field, and recorded on a screen. Two peaks were observed, corresponding to spin up and spin down orientations. These peaks were identified as 8; and 82'. Then, Sz+ is passed through a second gradient magnetic field, perpendicular to the first. Again, two peaks result, identified as 8: and Sx'. The SS beam of electrons was then passed through a third gradient magnetic field, oriented identically to the first. The result: both spin up and spin down peaks were observed (82+, 82'), even though 82' had been removed in the first step of the experiment. The conclusion is that the SC measurement —or filtering- restores the missing 8; spin. Mathematically, this can be seen with the following operator set: 84 h S. = 310 +><— 1)+ (I —><+ 1)] S). =§1—j<1 +><- 1)+j(1 —><+ 1)] (5.42) h S. = 51(1+><+ 1)— (1 —><— 1)] Physically, an exact measurement of SC means that there is no certainty to the measurement of S2 -that 8; and S; are equally likely- as Sx and Sz do not commute. This relationship is analogous to the relationship between position and momentum. Spin commutator relationships are identical to those of the orbital angular momentum commutators, given in Equation 5.22. [S,-, S )- ]= jive/15;. (5.43) In addition, spin has the following anti-commutator relationships: {S;,S-} =lh26, :5 52 =(—+—+—]h2 =31)2 (5.44) And spin ladder operators are given by: h 15.-’54.]: 55+ [3,,s_]= —%s_ (5.45) 71 [54-25;]: 2552 85 Where: Si |s,m) = Js(s+1)—m(mi 1) |s,mi l) :> -213 S m S +% (5.46) For a system of two spins, s=s,+s2 5'2 12> = (51 +5212 11> =srz2 12> (5.47) 512 11> = "1171120 52 Iz>=(Slz+Szz)lz>=(m1+m2)lz>=mlz> The full eigenfunction —or wavefunction- solution for the central potential problem is simply the product of the spatial and spin wavefunctions: 11/(r1t)= ¢(x,t)l(l,2) (5.48) 1713 = (¢(x1,x2)-¢(x2,x1))23(1,2) 1V1 = (¢(X1,x2)+¢(x2,x1))2’1(1,2) The Pauli Exclusion Principle excludes two identical particles from the same state (position, momentum) [45]; therefore, the wavefunction must be anti-symmetric. The first wavefunction (W3) is anti-symmetric in space, symmetric in spin; there are three 86 configurations of spin (triplets) that satisfy the symmetry condition. The second wavefunction (W1) is symmetric in space, anti-symmetric in spin; there is only one configuration of spin (singlet) that satisfies the anti-symmetry condition. In diatomic molecules, the triplet wavefunction density is lower between atoms than that of the singlet; that is, the inner product term in the square (exchange density) is smaller. The triplets represent anti-bonding orbitals, set at a higher energy than the singlet bonding orbitals. Triplet and singlet states can be built from individual spin states, using ladder operators and the orthogonality principle, as shown in the following. (|s=1,m=1)=|++) |s=1,m=0)=S_|s=1,m=1)=(Sl_+S2_)|s=l,m=1) 1 1 1 1 12> J1(1+1)—1(1—0) ls _ 1,m -0) _‘/3(-2-+1)—3(-2--1)(|—+)+1+—)) <=>|s=l,m=0)=-‘Tl_2—(|—1-)+|—I-)) |s=1,m=—1)=S_|s=1,m=0)=(Sl_+Sz_)|s=l,m=O) |:> fil+l)—O(0+1) Is =1,m =0) = ‘/%(%+l)-%(%-l)x/2(I —)+|—)) (5.49) 12>| s = 1,m = —1)=|—) And, 87 1s=0,m=0>=~/§(1—+>—1+—>) (5.50) :(s=o,m=0|s=1,m=0)=(72(|—+)—1+—))1J2(1—+)+1+—)))=0 Equations 5.49 and 5.50 convert individual spins to total spin. The total angular momentum is energy degenerate, but not so under the influence of a magnetic field. Total spin and total magnetic moment are needed to calculate this interaction. The next section shows how to combine angular momentum terms, spin and otherwise. 5. 4 Angular Momentum Addition: Clebsch-Gordan Coefficients The addition of angular momentum requires the conversion from the |11,m1;12,m2> (L12, L12; L22, L22) representation to the U.,j3;j,m> (J 12, .122; 12, J2) representation. The elements in the square matrix that perform this transformation are called the Clebsch- Gordan coefficients. The representation transformation is important in spectral analysis. All four elements in both representations commute for spherically symmetric groups. For groups that are cylindrically symmetric, but not spherically symmetric, only the latter representation commutes. Specifically, for diatomic molecules such as hydrogen, L o L: does not commute with L12 or L22. In spin-orbit coupling found in atomic hydrogen, L o S does not commute with L2 or 82. But in both cases, they do commute with all the elements in the latter representation; therefore, that representation is observable and complete. Equations 5.49 and 5.50 are an example of Clebsch-Gordan coefficients; in this case, transforming from (512, 8.2; 822, 822) to (812, 822; 82, SI) representations. For 88 diatomic hydrogen in the ground state (2g, 2,) —that is, no orbital angular momentum- two electron spins couple with the molecular angular momentum (R) to give the total angular momentum, as shown in Figure 25. For atomic hydrogen, one electron spin couples with its orbital angular momentum (spin-orbit coupling). These two cases are examined in the next two sections. 89 Spin 1/2 Magnetic Angular Moment Momentum (m) A) """"""""""" Rotational Angular Momentum Electron Orbital Spin l/2 Figure 25 Angular Momentum Diatomic Hydrogen. 90 5.4.1 Diatomic Hydrogen: Clebsch-Gorden Coefficients Special attention will be given to the portion of the rotational spectrum of diatomic hydrogen where electrons fall from the charge-transfer excited state (2”) molecular orbital to the ground (2g) molecular orbital. Each peak represents a transition from an angular momentum state one unit higher, lower, or equal to the final state [46]. Both 2” and 28 are degenerate in orbital angular momentum. Although they are both s-orbitals, and spherically symmetric, the angular momentum eigenvalue is unity (1:1); this is a result of the rotation about the axis perpendicular to the internuclear axis (m = +1, 0, -l), as shown in Figure 25 [47]. The spin degeneracy for two electrons, as described in section 5.3, accounts for an additional degeneracy in each of the orbital momentum states. Represented in triplet and singlet form, the spin degeneracy is unity (8:1). The total degeneracy in each ground state is equal to (21+1)(28+1) = 9. Equations 5.49 and 5.50 are a simple example of the Clebsch-Gordan coefficients; the angular momentum (s) and magnetic moment (52) of individual electrons are added to give the total angular momentum (S) and magnetic moment (82). The Clebsch-Gordan coefficients summing electron spins were found by applying operators S+ and S'. In general, Clebsch-Gordan coefficients summing angular momentum are found with the following recursion relationships, from application of the ladder operators J+ and J'. J(j:m)(j:m+1)(j1,j2;m1,m2 IjiJzulmJ—tl) = J01 f m1Xj1im1+11 91 Adding the diatomic hydrogen orbital angular momentum eigenvector to one electron spin eigenvector gives: (5.52) (5.53) _ l _ '=l+—,m I} 2 > = (5.54) , 1 IJ:I_Eam> 92 Addition of the second electron spin gives the following 3x4 matrix as the sum of orbital angular momentum and two electron spins: r - Im—l;+—,+-1-> |l+1,m) 2 2 MI+l,++ Ml+l,+- MI+l,-+ Ml+l,-— Ina-1:1) |1,m) = 114,,++ M,,+_ M,,_+ M,,__ f 3- (5.55) M1-1,++ Ml-l,+— M1—1,—+ MI—l ——j lm’"§’+'§> -11” 1”")3 |m+1-_l -1 |- 3 9 2 J An identical 3x4 Clebsch-Gordan coefficient matrix exists with m replaced by negative m. These two matrices are coupled for diatomic molecules. P. Zeeman discovered and explained the coupling physically in 1902. Simultaneous forward (m) and reverse rotations (-m) rotations sum to a single vibration, which precesses in the presence of a magnetic field [48]-[49], as shown in Figure 26. As a result, nine distinct degeneracies are present for each total angular momentum >0; three for rotation (+, 0, -), and three spin (+, 0, -) for each rotation. 93 +801) +50) +6) Lorentz Force (—(1)) A V Lorentz Force (-(u) AAAA VVYVV / +801) AA VVVV Figure 26 Precession of Vibrating Diatomic. 94 The following lists the matrix elements for the rotation matrix in Equation 5.55. 1 Ml+l,++ =(m1-l,+-;—,+-2-Il+l,m) :Jl+m\[l+m+l 21+] 21+2 l l l+m+l l-m+1 M _= m,+—,-— 1+l,m = ”1"“ <’ 2 2I > \/21+1 \/21+2 ] ] 1+m+11-m+l M _ = m,——,+-— l+l,m = ”1” <’ 2 2I > \/121+1\[21+2 l 1 m+l M __= m +1,--—, —— I ”l < ’ 2 2| "12> ’\/21+1\[21+2 l l I m+l l+m M = —1,+—,+— 1, — ”H ("1’ 2 2l m) [21+] ($21M [21+2 ] l ] 1+m+l 1+m+1 M/’+_ = (m,,+—,—— I 1,177) = -J121 "1le +\/ J 2 2 21+] 21+] 21+2 (5.56) 1+_]_|1+lm l+m_ l— m+l l—m+1 M,,_+=(m],-— 2 +2' 21+] 21+l 21+2 M,___=(m,+1,——,--l—|l,m)=Jll+m+1\/l-2[m l— m ’ 2 2 21+1+121+2 1 l l—m I—m+1 M_ = —1,+—,+— 1-1, = I l,++ (ml 2 2' m) J21 J 21+] 1 l l+m M_ _= ,+—,-— 1—1,m "’+ (m’ 2 2I >:\/21\/21+1 1 l l+m M _ ,——,+— 1-1, — " + (m’ 2 2l m) \/21\/21+1 ] l+m 1+m+l M __= m +1,—,——— I-l, 1-,1 <1 2 | '71:) \[211/21+1 Entries in the matrix for Equations 5.55-5.56 are the Clebsch-Gordan coefficients for the sum of orbital angular momentum and two electron spins for a diatomic molecule, such as hydrogen. These coefficients are combined to find rotation and spin degeneracies. 95 5.4.2 Atomic Hydrogen: Clebsch-Gorden Coefficients The total angular momentum and magnetic moment for atomic hydrogen can be found by the addition of one unit of orbital angular moment and one electron spin, as given in Equation 5.54 in the previous section. These coefficients are necessary to find the energy change as a result of spin-orbit coupling, a result that follows from perturbation theory. 5. 5 Perturbation Theory Perturbation theory allows additional operators to be included in the Hamiltonian to account for small changes in energy. Energy changes result from applied fields, and energy corrections can be made for the relativistic mass of the electron and spin-orbit coupling. Energy changes caused by electric (Stark) and magnetic (Zeeman) fields remove orbital and spin degeneracies. In general, the Hamiltonian can be appended with additional energy operators. The set of equations on the following page summarize the perturbation mathematics for non-degenerate energy levels, such as those found in the fine structure of atomic hydrogen. Further development later in this section allows for the perturbation of degenerate energy levels, found in the mixing of atomic wave functions. 96 Holno>=Eolno> (H0+/lV)| n0) 2 501(n0+%) n=no+723, =(4V—An)1n> ==0 (AV — An )1 108% An|n>=/1(n0|V|n)|n> (557) That is, the change in energy along the nth eigenvector is the projection of the potential operating on |n0>. Finding |n> should be as easy as applying (Bo-Ho)I to both sides of Equation 5.57, and it is. But, (Eu-H0) maps |n0> to 0, so (Ea-Ho)"l is ill-defined for n. However, (Bo-Ho)" is not ill-defined for HO , which is orthogonal to n. Defining (1),, orthogonal to n results in the following: 9,, 1 n>=(1—1no> 21n>+1123>=1no>+—&—(4V-An)1n> (ED—Ho) An=ll(n0|V|n) 1 Equation 5.58 can be solved iteratively for eigenvectors |n>; eigenvectors |ni> will be combinations of eigenvectors orthogonal to n0>, the set of eigenvectors for the 97 unperturbed Hamiltonian. Given the notation, the first and second order perturbations for energy level and eigenfunctions are given in the following two sets of equations [42]: Vkl= 732:0 (5.59) A1,, =(nOI/1V M8): ZVnn A2,,=(n0|V|n(l))=(n0|/1V ‘1’" 4V1n8>= Maw/122M”— (Bo-Ho) “"05" E1) Vk1= <1>,, =|n8)+———"——/1V|n0)+—"—/1V|——"——/lV|n8) (150—110) (150-170) (150—110 ) -| "OH/1 1k) glE—nV—L “Ek) (5.60) V V V V +112 [(1 1n )1 k)_ nn kn )lk> E15,“): “EkXEn—El) k;(—_EnEk) 98 Intuitively, Equations 5.59-5.60 state that the first order perturbation is the projection back to the zero order eigenvectors of XV, which operates on the zero order eigenvector set. The second order perturbation operates and projects a second time. On convergence, XV|n> projects back onto |n>, returning exactly the eigenvector equation. Equations 5.59-5.60 are predicated on the fact that E" at E 1- fork 1: n; that is, the energy levels are non-degenerate. For degenerate energy levels, Equations 5.59-5.60 fail to produce perturbed energy levels and wave functions. However, degenerate energy levels allow the freedom to mix eigenfunctions within a given level. The new eigenfunction representation can be composed such that the inner product terms an go to zero for each E" =Ekwherek ¢n. Returning to Equations 557-560: I Pm:21mi>=1D,,,|1j >=Z|m,. xm, 11,- > i=0 (5.61) o== I l =52 to |l>. Equations 5.59- 5.60 are now valid for degenerate energy levels; summation is over all remaining non- degenerate states, all states with unique, non-zero eigenvalues. The next three sections look at spin-orbit coupling in atomic hydrogen, the relativistic mass correction for atomic hydrogen, and the anomalous Zeeman effect. Each of these effects can be accurately approximated by perturbation theory. 5.5.1 Spin-Orbit Interaction A magnetic field will interact with the orbital angular momentum and electron spin of an atom, splitting the energy lines in the visible spectrum. This effect is called the anomalous Zeeman effect. But first, it is important to look at just the interaction of the orbital angular momentum with the electron spin —the spin-orbit interaction. The central potential in the Schrodinger equation is not strictly a central potential due to the shape of the electron cloud surrounding the nucleus. A moving electron accelerates radially in response to a field gradiant just as it would to an applied magnetic field, namely: V = e<1>(r) (5.62) B =-XxE=leV c ec The electron spin couples with B; the energy correction operator represents the work done to rotate the electron spin away from the magnetic field. 100 Thus, eS mec (5.63) Harm- 212[S.(,-,x_;3.d_V)]-[1) 2121.416.” mec r dr 2 mec r dr Where the extra multiplicative constant 1/2 is due to Thomas precession [50]. (L 0 S )does not commute with L2 or S2, but does commute with total angular momentum J2 and .12. There are two total angular momentum terms, from section 5.4.1: L-S =—l—(J2 -L2 —52) 2 2 ': ': h . . 3 ': ': 1 l 5712; j=l+l/2 '=/i1/2 '=/il/2 (Y/ ”"|1‘111..91Y1j ’m> =1 _[_+_1h2;j=1—l/2 l 2 ldV l '=1:1/ 2, °=11r1 / 2 Anlm :: __fi<__> (YIJ "7 l HLS 1Y1] ,m) Zmec r dr ”1 1 l —h2; j=1+l/2 A _ 1 <1a1V>< 2 nlm" 2 2 d 2mec r r n] _l_+_1h2;j=1_1/2 l 2 (5.64) 101 Equation 5.64 is Lande’s interval rule [42]. Referencing Equations 5.36-5.41, the potential gradient term can be found in steps: 2 l e (Wm/erVl‘PnOZZEn :-—2‘ a0 1 l smhrhwn=7_— n a0 2 2 e (Wnll'a— 81W) ‘3— n ‘10 4 meez 4 1 20nn% 1%»: 3 2 = 37- r2(21+1)n h ()0 (21+l)n (10 21(1 +1»?2 + 33 (‘anlé— 9:11 | ‘i’n/>= (‘Pn/ l— 3 2 l‘l’nn =0 mer r =><‘III‘I‘¥>—””"2 — 2 1 I — l “ I I - '— " H " n22m+ +1) " ” IwHw+m££ ma) 1 a 2 e2 =>(‘Pn l-—V|‘Pn >= — I rra 1(1+1)(1+2)n3a3 102 The ratio of the energy shift for atomic hydrogen to the Balmer intervals is on the order of 08:1/1372 [42], that is: hz 00 - mee2 2 a=9_=_1_ (5.66) hc 137 772 (1:11) ’22 ._2 2 AIM," __ 2mgc2 r d" n] 2m§c2 (18 :2. _L2 82 32 62 hc 137 200 200 200 Which means A'm can be written as: i I. ° 1 1/2 _, = + 1 62 2 1 2 ] A"hf-“217“” 11 2 3i 0 (+)(+ )n _l+l;j=1—1/2 2 (5.67) i "I. ' I 1/2 _, = + 2 a4 l 2 J < 2,,4 1(1 + l)(l + 2) L 2 _fl;j=1—1/2 This expression will be combined with the relativistic mass correction in the next section. 103 5.5.2 Relativistic Mass Correction The perturbation operator for relativistic mass comes directly from the relativistic energy term: E3, = mgc4 + pzc2 (5.68) p2 p2 p2 1 p2 2 ->En,—m962=mec2 1+ 2 2—1 = - 2 2m? me C Zme Zmec Zme Solving for Alnlz 2 2 2 2 l l e e Alnl : —_—f<\ynll P PPM) : _'_2 2mec 2mg 2mec r r = — 1 [E3 + ZEne2 + e2<-1—>] 2 2 2mec r r (5.69) _ng_( 2 -1] "n 21+] 4n 2 a4( 2n 3] =mec --—— -— 2n4 21+1 4 Now, adding the spin-orbit interaction to the relativistic mass correction, with total angular momentum j substituted for orbital angular momentum 1: Al =_meCZL " -3 (5.70) 104 And the total energy, including rest mass, is [50]: — —— +... (5.71) Briefly, an additional correction term —the Darwin term [51]- allows for s orbital (1:0) corrections in Equation 5.69. Both the Darwin term and Lamb Shift evolve from the relativistic quantum field equation —the Dirac equation. The Lamb shift makes a very small correction to remove the degeneracies in orbital angular momentum [42]. Its effect is nearly negligible for this set of experiments, and will not be pursued here. Equation 5.71 completely describes the energy levels associated with the fine structure of atomic hydrogen. The fine structure of atomic hydrogen, and nominal transition intensities, are addressed further in sections 5.7 and 5.8. 5.5.3 Anomalous Zeeman Effect Degeneracies in the spin-orbit interaction are lifted with an applied magnetic field. This effect is the anomalous Zeeman effect. The perturbation term enters as the electron momentum interacts with the field momentum, the field that produces the magnetic moment. 105 Thus, for a relatively weak magnetic field, A = jgum) z. A = —%(.§By —}7'Bx) 2 2 2 )A ) A p—>p—‘ :>H= p +V— ‘ (p-A+A-p)+ e 0 2m? 2mec Zmec2 (5.72) l pOA = AOp—thOA = A0p+0= AOp =%B(—ypx+xpy)=§BLz A2 = AOA =%Bz(x2 +y2) Ignoring the smaller quadratic term: p2 eB H = + V - (L, + 25,.) (5.73) 2me mec Where the factor of two on the spin term is due to the g-factor of the electron [50]. To summarize: 2 H0: P +V 2m. 1 ldV HLS _ 2 2 (Los) (5.74) Zmec r dr 88 e8 HB — 2 (Lz+25z)_ 2 (Jz+Sz) 2mec 2mec 106 The transformation to total angular momentum and total magnetic moment is given in Equation 5.54 (C lebsch-Gordan coefficients), namely: l = _ I] = Him) = 2) (5.75) l¥m+— = m+—,m —— 21+1 I ’ ‘ 2> Therefore, the first order energy perturbation is: eB , 1 . 1 AIB=- (j=li—,m|(Jz+Sz)|j=li—,m) 2mec 2 2 l _ l l _ l B lim+— 1+m+— hlim+— 1+m+— A18 = _ e 2 2 2 m + +- — (5.76) ZnQC 21+1 21+1 2 21+1 21+1 =— e3 mh[li 1 ] Zmec 21+1 For a stron er field, JZ no lon er commutes; on] L2, 82, L2 and SI remain as g g Y commuting operators. 107 As a result, A'Bz- (1:1: ,m|(Lz+2Sz)|j=I+—,m) Zch 8 =— e h(m,+2m,.) (5.77) mec 2 m m h l a . Zmecz r 3r Not all degeneracies are removed in a strong magnetic field; in], ms combinations yield the same first order energy correction. Line splitting where the applied magnetic field effect exceeds that of the spin-orbit interaction is called the Paschen-Back limit. 5. 6 Rotational Spectrum for Diatomic Hydrogen The intraband rotational spectrum, the series of peaks for a constant vibration eigenvalue and single angular momentum transition, becomes evident as the applied magnetic field removes the degeneracies on orbital and spin angular momentum. Figure 27 shows the energy level diagram for the Zu—Zg transition [52]. Each of the fifteen transitions is associated with a unique energy difference; the reason: the energy split in orbital angular momentum is approximately 50 percent larger (28.4/20) for Eu than 2g [53] due to the higher rotational inertia of the charge-transfer orbitals. Zeeman splitting for a free electron (gEBB) in an applied magnetic field of 5 T is approximately 4.7 cm-l (0.2 A/T at 4627.66 A) [54]. Accordingly, the magnetic field in the plasma can be calculated by tracking the intraband peak separation in the rotational 108 J=3 M=3 Energy J=2 MZ-l M=-2 M=-3 Transitions: AM=O,+/-l M=2 Figure 27 Zeeman Energy Levels. 109 hydrogen spectrum. Peak intensities are a function of the CIebsch-Gordan coefficients, given in Equation 5.54, and energy state population, which is approximately a Boltzmann distribution. Over a narrow energy band, the Boltzmann distribution is linear, with slope l/kT. Plasma magnetic field calculations and temperature estimates from experimental rotational spectra are found in Chapter 7. 5. 7 Fine Structure of Atomic Hydrogen The fine structure of the atomic hydrogen spectrum is composed of the assembly of corrections formulated in section 5.5, and specified for H, and H3 in Figures 28 [50]- 29. Degeneracies are removed by the energy corrections. However, the fine structure of atomic hydrogen is further mixed upon application of an electric field. It is this additional separation in peaks that complicate the atomic hydrogen spectrum in low to medium electric fields (~1000 V/cm-5000 V/cm). Calculations for the electric field directly from the Stark shifted spectrum are summarized in the following chapter. 5. 8 Nominal Fine Structure Transition Intensity Ha nominal atomic hydrogen fine structure line intensity ratios are given in Figure 30. Fine structure line intensity ratios are a product of the Clebsch-Gordan coefficients that construct the fine structure energy levels, and the overlap integrals that connect these energy levels. The inner product of the angular waveforms relies on the following identity [55]: COSQ'YIm=\/(l+m+])(1_m+l)Y/+1m+\[(l+m)(l_m)YI-Im (5.78) ’ (21+l)(21+3) ’ (21+l)(21-1) ’ 110 0.108 0.222 0.036 .................................. “3/2 3/2 M=5/2 M=l/2 M M 3 3 N— lll Figure 28 Ha Fine Structure Transitions [50]. AE=15,232.951 cm-l N: 0.046 0.305 0.015 M=5/2 M=3/2 N=4 M=l/2 M=3/2 3 AE=20,570.502 cm-l Figure 29 H3 Fine Structure Transitions. N: 112 l/2>3/2 5/2>3/2 3/2>3/2 l/2>l/2 3/2>l/2 t!— 0.108 D---—-u- AE=15,232.951 cm-l Figure 30 Ha Fine Structure Relative Transition Intensity. 0.036 0.222 113 0.108 And the orthogonality of the waveforms. As a result, 1\/(j:m)(j:m+1) (5.79) * =— . . J j 2 J(J+1) Using the identity given in Equation 5.78, the transitional wave functions can be summarized by the expressions, l j—m+1 + Rn.j+l/2 _2(j+1) Yj+l/2,m—l/2 =>(5.81) j+m+l _ Rn.j+l/2‘/ij+1 / 2,m+1/2 => (5-82) unJ-Jn =< (C — G) (5.80) j + m 21' + Rn,j—l/2 Y'—1/2,m—l/2 3 (5-83) j—m 2] + Rn,j——1/2 Y'—l/2,m+l/2 => (584) l Where: i (j+m+1)(j—m+2)Y. 4(j+1)(j+2) 1+3/2,m-1/2 Yj+1/2,m_1/2C086=< + (5.81) j—l / 2,m—l / 2 Jmmw—ml) 1 4J'(j+1) ll4 j+3/2,m+l/2 lJ(j—m+1)(j+m+2) 4(j+1)(j+2) Yj+1/2,m+]/2C056=< + (5.82) j—1/2.m+1/2 th—mwmu) 1 4j(j +1) . (j+m)(j-m+1) 4].”. +1) j+l/2,m—1/2 Yj_1/2,m_l/2cost9=< + (5.83) Yj—3 / 2,m—l / 2 Jo—mwm—I) 1 4117—1) lJ(j—m)(j+m+l) . 4j(j+l) 1+1/2.m+1/2 Yj_1 /2,m+1/2 €086 =4 + (5.84) Y-_ 4].”. _1) ) 3/2,m+l/2 \lomxj—m—l) The notation um;m represents both the initial and final wave functions, with fine structure quantum numbers n,j,m as given in section 5.5. The relative amplitude of transitions between energy levels is given by: 2 2 21¢), 1.. >1 = 210%,, |R|un.,j.,m >| (5.85) m;j.j' n0, '0 _- 211,]! —1< ¢n,j 115 Where Equation 5.85 specifies the inner products of radial wave functions in Equations 5.81-84. These inner products are only a subset of all possible transitions, limited by the orthogonality property of spherical harmonics. Specifically, the H0! fine structure transition amplitudes are given by the following, with allowable transitions limited to AJ 2 0, +/-l. 3,P1/2 _ 2 22’51/2 — 2K R3,] 1R1 R2,0 >1 * m=1/2 [J(l/2—m+l)\/(l/2+m)(l/2-—m+l) (l/2+m) 2(1/2+1) 4.1/2(1/2+1) 2-1/2 (5.86) 2 + (l/2—m+l) (l/2+m)(1/2—m+1) (l/2+m) 2(1/2+1) 4-1/2(1/2+1) 2-1/2 =l.O4 2395.18: ZI< R3,61R182,1>12* m=1/2 (l/2+m) (l/2—m+1) (l/2+m)(l/2-m+1) 2.1/2 2(1/2+1) 4-1/2(1/2+1) (5.87) 2 + (1/2—m) (1/2+m+1) (l/2—m)(1/2+m+1) 2-1/2 2(1/2+l) 4-1/2(l/2+l) =0.10 116 3,P3/2 _ 2 22,51/2 — Zl< R31 1R1 R20 >1 * m=l/2 (3/2+m) (3/2—m)(3/2+m—1) (l/2+m) 2-3/2 4-3/2(3/2—1) 2-1/2 (5.88) 2 + (3/2—m) (3/2+m)(3/2-m—l) (l/2—m) 2-3/2 4-3/2(3/2—1) 2-1/2 = 2.08 3.03/2 _ 2 22,Pl/2 " ZI1 * m=l/2 (3/2—m+l) (l/2-m+l) (1/2+m+l)(l/2—m+2) 2(3/2+1)o 2(1/2+1) 4(1/2+1)(1/2+2) + (3/2+m+l) (1/2+m+l) (1/2—m+1)(1/2+m+2) 2 2(3/2+1) 2(1/2+l) 4(1/2+1)(1/2+2) (5.89) = 5.01 3.51/2 _ 2 22,103/2 " Zl< R3.0 1 R l R2.1 >1 * m=l/2 J(l/2+m) (3/2+m) (3/2—m)(3/2+m—1) 2-1/2 2-3/2 4-3/2(3/2—1) (5.90) +\[(1/2-m) (3/2—m) (3/2+m)(3/2—m—1) 2 2-1/2 2-3/2 4-3/2(3/2—1) = 0.20 117 3,D3/2 __ 2 22.P3/2 — 2K R32 1R1 R21 >| * m=1/2,3/2 [J(3/2—m+l)‘/(3/2+m)(3/2—m+l) (3/2+m) 2(3/2+1) 4-3/2(3/2+1) 2-3/2 (5.91) 2 _ (3/2+m+l) (3/2—m)(3/2+m+1) (3/2—m) 2(3/2+l) 4-3/2(3/2+1) 2-3/2 =1.00 23:’B§/§= ZI12* m=1/2,3/2 (5/2+m) (5/2—m)(5/2+m—l) (3/2+m) 2-5/2 4-5/2(5/2—l) 2-3/2 (5.92) 2 + (5/2—m) (5/2+m)(5/2—m—1) (3/2—m) 2-5/2 4-5/2(5/2-—l) 2-3/2 = 9.02 118 Where the pertinent normalized radial wave functions are given as [56]: l 5 (27 — 18R + 2R2)e_R/ 3 (5.93) R =——— 3'0 74920.7 1 640m?“3 R =-——( 3" J2460.375 l _ R26 R/3 R z 3’2 J12,301.875 In a plasma discharge, fine structure line intensities vary dramatically as a function of electron density [57]-[58]. For example, peak l/2>1/2 in Figure 30, barely detectable in the nominal case, becomes as strong or stronger than peaks 5/2>3/2 and 3/2>1/2 at electron densities >10l4 cm'3 [42]. Figures 31 [59]—32 [60] demonstrate fine structure peak ratios in experimental conditions closer to experiments run for this study. Both are taken from low-pressure gas discharges. However, electron densities are not recorded for either experiment. As evident, the characteristic shape of the fine structure peaks can be used as a signature for identifying Stark effect splitting in hydrogen plasmas. 119 5/2(3/2)>1/2 l/2>l/2 5/2(3/2)> 1/2 l/2>l/2 Figure 3] Ha Fine Structure Peaks Near Band Center [59]. I l 1 l I f I l meal :2... m. 120 5/2>3/2 Figure 32 Ha Fine Stucture: Absorption Spectroscopy, Pulsed Dye Laser [60]. 121 3/2>1/2 LambShift 1H 1/2>1/2 LambShift I J L I I I l I I I I r I l I I OGH lOGH Chapter 6 Atomic Hydrogen: Stark Effect Chapter 5 covers Zeeman splitting in the rotation spectrum of molecular hydrogen, and the fine structure of atomic hydrogen. Each of these effects are completely described in spherical coordinates. Chapter 6 addresses Stark splitting in atomic hydrogen. Stark splitting can be expressed in spherical coordinates as well, but spherical coordinates limit spectral analysis of atomic hydrogen when considering the gross structure splitting in combination with fine structure splitting. The gross structure waveforms mix so thoroughly that initiating fine structure points is intractable. Chapter 6 addresses this shortcoming. The following sections first solve for the Stark effect splitting in spherical coordinates, then the problem is moved to parabolic and semi-parabolic coordinates to better match the symmetry of atomic hydrogen. Wave functions that result from a coulombic central force, such as that found in atomic hydrogen, have an additional degree of freedom when expressed in parabolic coordinates. The additional freedom represents an additional symmetry that was hidden —and not necessary- in spherical coordinates. As a result, the Stark effect does not mix the resulting waveforms in parabolic coordinates, and the gross structure is predictable in the presence of fine structure splitting. Sections on Stark fine structure splitting immediately follow the treatment of Stark splitting in parabolic coordinates. For both gross and fine structure splitting, transition amplitudes are included with experimental spectral data in Chapter 7. 122 6. 1 Stark Splitting: Spherical Coordinates The wave functions for atomic hydrogen are developed in spherical coordinates in section 5.2.2.2. The next two sections address the Stark effect for atomic hydrogen in the spherical coordinate system. The first section solves the Schroedinger equation by direct application of perturbation theory, developing the perturbation —or overlap— matrices associated with the given potential operator. Then, solves for the eigenvalues of the perturbation matrices, which immediately give the Stark shifted atomic hydrogen energy levels. The second section details the Stark shifted spectrum for atomic hydrogen. 6.1.1 Perturbation Matrix The perturbation matrix is composed of all possible wave function overlap integrals; that is, the integrals of each pair of degenerate wave functions and the applicable potential energy operator. The potential energy operator for the Stark effect is related to the applied electric field as follows: 852 ; LinearPo/arization VStark = (6'1) eE (x i jy) ; C ircularPo/arization Due to reactor geometry, the polarization of the electric field for this set of experiments is strictly linear. F irst-order approximations to energy level shifts are the eigenvalues of the perturbation matrix. Spherical wave functions of atomic hydrogen associated with electronic energy levels two through four are given on the following pages [56],[6l]. 123 3 1 Z _ 72 . -° _ ==-—————-’-——pe p. sn16 e j¢ 1112.1,1 ,——2”.32 03 Z3 1 W2,1,0- F—Zrt-l6 03 3 1 Z _ ' =._______ 1.. P/Zshjg.e+1¢ WQJAJ EZFTSE agpk' pe’p/zcosd 1r 1 Z:(2- ple p” 3”:°° J27: 9841.5 1 Z3 .. /3 . _'¢ ._ = -——-6-— ) p su16 8 J 11’3"" 727:.1640.25\lag( p p8 W310: 1 2—316-131W-p/30059 ” fim164025 03 3 1 Z — /3 — /2 - +°¢ = -—— 6- )pe p e p snag e 1 V3” f2n-1640.25\lag( p 124 (6.2) (6.3) 4 . g Ze _p/3sin26.e—j2¢ Wn’ 2=—— 27: 6561 6;" Z3 W352, 1: l gfepz p/3sin6cos6l-e_j¢ 72;: 1640.25 00 W _ 123p2e—p/3(3c0526—1) 3’2’0 J27: 19683 Z3 = sin6cos6-e J V33“ (27: 1640. 25 \1 _ep Ze —p/3 sin2 (9 - e+j2¢ lV3,,2+2=————— 2” 6561 a—:pe 3 W400 = l 12701192—144/2'1‘24PZ __-p3Lp/4 72;: 1179648 52: 1310720 3 '#410 = 1 1123 (80 201022021 M40086 «[27: 655360 ’_ 3 W4,1,—1 = 1 Z (3)—(80 20p+p2}- p/4sin6. e+j¢ 727: 1310720 3 11’4,1,-1=1 12735 (80— 20p+p2¥ p/4sinl9- e M (6.4) 125 l//4,2,—2 = Jz 1 ‘23 2 /4 2 _.2 —(12 -e,0)p p sin 8.9 J ¢ 3 o l _3'1‘2(Z“1€’P)P2 p/4sin6cosa.e‘J¢ Ir-786432 a3 3 I Z 2 /4 2 2 —p 3cos 6—1 47185921103—0 plpe 1 ) W4,2,—1 = J2 V4.20 = J2” V4,2,+l = J Zn- 3 . 7186432 11002 "—0 1"?- P10213—p/4sintélcost9-e‘Vi’> W4.2,+2 = J2 3 e l -Z_—(12—p)p2e—p/451n268+12¢ n~3145728 03 'Z—333P3 p/4sin36.e‘f3¢ 18874368 03 Z:3P3 p/4sin2 610030 6 J24) 3145728 00 Eiep3 —p/4 Sin‘(65cos 2.6—1) e J¢ 31457280 a3 3e_p/4( (5/3cos36— 0086) oh: -262 1440 1100 —3'3P3 p/4sin6(25cos 0—1)e+J¢ 31457280 0(3) P36 —p/4sin2 6cos6l e+J2¢ £313 3 .23 3145728 gap P33 p/4sin3 0 e+J3¢ W4,3,—3 = 42” W4,3,—2 = J27; W4,3,-1 = 42” W430 = J27; V4,3,+1 = J27: V4,3,+2 = «[22- V4,3,+3 = ‘5”. 18874368]’::M 126 The non-zero elements of the perturbation matrices for each energy level can be summarized in the following: n = 2: 02 =< W2,0,0 | Z l W4,1,0 >= 30000 n = 3: a3 =< W3,0,0 | Z l W3,1,0 >= 7-3500 1’3 =< W3,1,—1 lz | W3,2,—1 >= 45000 C3 =< W3,1,0 | Z l W3,2,0 >= 53000 d3 =< W3,1,+1 IZ | W3,2,+1 >= 45000 n=4: 04 =< W4,0,0 I Z | W4,1,0 >=13-4200 b4 =< W4,1,-1 |2 | W4,2,—1 >= 93000 C4 =< W4,1,0 I Z | W4,2,0 >=10-73ao d4 =< W4,1,+1 I Z | W4,2,+1 >= 93000 64 =< W4,2,-2 lz l W4,3,—2 >= 60000 f4 =< W4,2,-1 | Z | W4,3,-1 >= 7-5900 84 =< W4,2,0 |2 | W4,3,0 >= 8«0500 ’14 =< W4,2,+1 I Z | W4,3,+1 >= 7-5900 i4 =< W4,2,+2 | Z | W4,3,+2 >= 63000 (6.5) Where the perturbation -or overlap- matrices are expressed by the following for each of the electronic energy levels two through four: 127 0 0 0 0 0 0 000 012400 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 O 0 0 0 0 00000 0 0 6’4 00000 b4 0 O 0 00000 0d4OOOO 0 a4 0 0 0 0 0 0 0 00064 0 0 0 0 0 O 0 0 0 0000/4 00000g4 00000 0 C4 000d4 0 0 i4 00000 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 00000 00000 6’4 0 0f4 0 00000 0 0 0 0 00000 0084 0000 ’14 0 0 0 0 0 0 14000 O 0 0 0000 ) 6. 6 ( .000000000 000%300000 0003000000 0.030000000 000000000 0000000..w30 @OOOOOQOO 0000063000 00 @000000 — __ I3 H 128 The characteristic equation and solution for each of the electronic energy levels is given by the following: i 0,0,0 4502:0th a2+g2+c2)-4a2g3 L (6.7) 129 Substituting from Equation 6.5 gives the following Stark energy level shifts in electronic energy levels two through four for linearly polarized electric fields: n = 2 : _ 0 — i 36(10E n = 3 0 (SE = i4.5eaOE It 9.0600E n = 4 : ' 0 (6.8) + g = < ._ 6.060013 i 12.08001? 1:18.08ea05 Which can be summarized easily by the following equation: E = 60015 ' -:—m' (6.9) OSi+|1,0>+|2,0> / 5E=4.5a0eE (typ) / |1,+/-1>+|2,+/-1> N=3 12,-2>, |2,2> |1,+/-1>+|2,+/-1> 10,0>+11,0>+|2,0> l0.0>+| 1 .0> / 5E=3.aneE (typ) N=2 / |1,1>, |1,1> [0,0>+|1,0> Figure 33 Ha Stark Energy Spectrum: Spherical Coordinates. 132 |0,0>+| l ,0>+|2,0>+|3,0> |1,+/-l>+|2,+/- l>+|3,+/-l> f 5E=6.0aneE (Wu) / l0,0>+| l ,0>+|2,0>+|3,0> |2,+/-2>+|3,+/-2> N=4 I33-3>9 I393) |0,0>+| l ,0>+|2,0>+|3,0> |2,+/-2>+|3,+/-2> I l ,+/-l>+|2,+/— l>+l3,+/- l > |0,0>+|1,0>+|2.0>+|3.0> |0,0>+| l ,0> / 5E=3.0aneE (tvnl :2 / lls'l>all,l> |0,0>+| l ,0> Figure 34 H5 Stark Energy Spectrum: Spherical Coordinates. 133 the orbital wave functions are no longer separable in spherical coordinates. More importantly, the mixing of the wave functions that results from perturbation analysis makes ferreting out the spherical harmonic components associated with each energy level very difficult. Both issues are resolved by moving to a new coordinate system that matches the symmetries of the problem. 6.2.1 Parabolic Transform Cylindrical symmetry is retained when folding up R3 space in such a way that the x-y plane forms a right circular cone about the z axis, and each additional plane with constant 2 folds into hyperboloid sheets, as shown in Figure 35. Every plane intersects the infinite set of hyperboloid sheets to form circles, ellipses, parabolas, and hyperbolas; conic sections that define the dynamics associated with a central force proportional to l/R. (Each conic section is actually a geodesic with respect to rotated SO(2,1) space, or Lorentzian measure [62]). The inverse map of this three-dimensional folding is the parabolic transformation. The parabolic transform map is shown in Figure 36; this map generates the parabolic coordinate system [63]. Using complex variables: q =§w2 =-;-(€+M)2 =l(¢'2 -772)+j§n Fag—.772) (6.10) 2 R=J[§(62-n2)] +8612 =§(:2+n2) constant +x +z \ s s s \ \ s ‘ s \ s \ \ ‘ ‘\ ‘s I ~ ’ --- ....... ‘ ’-":--- \ \ s \ \ s‘ ’ I I I I I I I I I I I I I I I I I I I I I I I, ’ I I I I, ’ i I I I , I , I I I I I I I I’ I I 1’ ’ I I I I ---’ - ........................ I I I +Y Figure 35 Hyperbolic Transform of Constant z Surfaces. 135 +jv u Z + + W.) _ _ + _ am - 2 o . n u . — . .- «M g . u .. . . . _ u a .. :II - . . . o . \\ I — ~ . ._ 111111 . . 4 / . . IIIIII _IIIII.II|I£IIIIIIIIIII — a \ I . s - - a — \ I. u . . u .. . ss I. .. \nl “ " e0 .. x a. 11111 u: . V . . . .s or .I’ H u . . as \’ I . a Q ( ..... T--"q"'If"""-"---'-'-' O. . \ 0” - I . w s s . u u . ... . . . . ... . . .. . ~ . . . . . .s. . .s . C . . n . . .oa . la. 6 u . a. . P 3 . — l . . . . Z k — _ s o u. p . . . . .. m . . s .. . O . . x s as ob - P OJ 1 “ C u . + x .3 .— C o . u s .o a cam . . s - o — n . . . . . . . . . . . a Q m . . . . . . . . l O . o a u n s o O Q Q O N“ n . . ~ . — . . . 1+. mm . . . . . . . ( C . . av a; ~. ~ u “I- u " ls. .. 6 Im . - s r . . a . u up. .. P . - s 6 H n W— A \s 3 g m Now, R2 is separable as the difference of fourth-order terms. Further, the Laplacian can be found directly from the differentials generated by the map [64]. l a a a V2=———8§A +85A -— 8634 --— (SVOI{ [ ’79 BS§J+ [ :6 BSU]+ { 6’7 850 J} 2- 1 _. .3. .9. .2. __ 1 __j’: V —§n(§2+nz){3§[&736] 3 “[6 Gem} 527720612 (6.11) With a change of variables, 6:6 (6.12) 77:5 The Laplacian can be expressed as, 2 V2: 4 1(u3—j4u3—(vi) 4.1-3— (6.13) u+v Bu Bu 8v 3v uvagz And, 1 2:50-» (6.14) 1 R=-— + 26 v) 137 Consequently, the Schroedinger equation in parabolic coordinates, with a coulombic central force and applied electric field, is written as, hz ——V2+V (Iszw 2m 2: 4 1(,2)._a_(,2).1_2: 6,, 2m u+v Bu Bu 8v av uvag2 W (' ) Z62 + 1 +eE-l—(u—v) t/I=Wi// 5(U'1'V) 2 Where Z is the number of protons of the single electron atom (Rydberg atom), which is equal to one in the case of hydrogen. The energy term (W) must match the electronic energy found in spherical coordinates. Equation 6.15 is separable into the following independent equations: 2 2 h— i[ui)—l 31— —-]—Wu+lZue?’+1195}:2 U=0 2m au Bu 4 u 4 2 8 2 2 h_ i(,,.§.]-l '"_ _le+lzve2_leEv2 V=O (6.16) 2m 0v 3v 4 v 4 2 8 Z=Zu+Zv=1 138 The separation of equations in u and v requires the existence of an additional invariant of motion, covered in the next section. The inability to make this further separation in spherical coordinates is the reason that spherical harmonics remain mixed after solving for the eigenfunctions of the Stark shifted energy levels. The Stark effect perturbation matrices for both equations in u and v, on the other hand, are diagonal. This will be demonstrated in section 6.2.3. 6.2.2 Runge-Lenz Vector Figure 37 illustrates an additional constant of motion, the Runge-Lenz vector, particular to dynamics where the central potential is proportional to UK A classical development for the procedure follows: mR2 =Z mR2(I1X(3xR)= I: xié=Zx—iié=ix,3 (6.17) -mk(i€xg§xl§ 2 R \_/ 139 +Y ‘/2(pr) A0~focal length +x Figure 37 Classical Relationships for Runge-Lenz Vector. 140 The quantum mechanics form of the Runge-Lenz vector is [65]: ) (“xp—px”)+me2R (6.18) Where, — ARcosq) = —Z 0(Rxfi) + mezR = -L2 +mezR (6.19) 2 2 1 me me —= 1+ cos¢]=—[l+acos¢] R L2 [ me2 1.2 a z i me2 Therefore, the Runge-Lenz invariant fixes the eccentricity of the orbital trajectory. Section 6.3.1 and 6.3.3 use Equation 6.19 to develop operators that connect elliptical paths of constant energy, but differing eccentricity. The Runge-Lenz vector is not independent of the other two invariants, angular momentum and energy. The operator relationships are given as follows: (6.20) A2 = 2W(L2 +1)+1 141 With units of electron mass and charge, and c=l. The Runge-Lenz vector does not commute with angular momentum L, but upon rescaling: [aha/1 = jgijkLk (6.21) [Lil/'1: jgijkLk [Liaaj] = Jggjkak Now, let: 1 112 = 5(1. i a) (6.22) Equation 6.22 gives, [JaJ’JflJ] = j§afl£UkJa,k (6-23) Linear combinations of the invariants angular momentum and the scaled Runge- Lenz vector yield two uncoupled, commuting angular momenta (J 1, 12). As a result, 142 1 JEZ=Z(L2iL0AiA0L+a2) =l(L2+az)='l-[L2+ ‘ A2] (6.24) 4 4 -2W =l(_l__1)=l(n2_1) 4 2W 4 Where W is discrete energy, with principle quantum number 11. Now, each angular momentum satisfies the previously derived central potential relationships. That is, 2 . . . . 1 , J1 llimi >= Ji(Ji +1)l Jim! >= 3(n-1)(n+1)|11mi> Jz,i | jimi >= ”’1' l Jimi > (6-25) " Ji ‘5 mi 5 11 6.2.3 Parabolic Energy Levels and Wave Functions Removing the quadratic Stark effect, solutions to Equations 6.16 are identical. Each equation is equivalent to the Schroedinger equation in spherical coordinates, with m/2 replacing angular momentum 1. With the following substitutions: U=e 2 uzfu(u),x= (6.26) 1 m ——nv — 1 V=e2 v2 v, = v fv()y W 143 The two differential equations can be written as functions of x and y as: 2 [xi-5+ (m+l—x)§;+[—_LZWZ,, —%(m+ 1)]qu = 0 (6.27) a2 a 1 1 —— 1—4— ——Z —— 1 =0 [yay2+(m+ })ay+( ,—__2W v 2(m+ )va Where Equations 6.27 are of exactly the same form as the reduced differential equation for the radial component of the wave function in spherical coordinates, given in Equation 5.38. As a result, the solutions are: r(" nu +P) r0") ii ix-nu—m—lex F(- nu) l"(m+19) p! H“ fl, =F(— nu,m+l,x)= i p=0 F(— nv + p) l"(m) xp __ _ -n -m—l x fv-F(—nv,m+1,X)—p§0 r(_nv) r(m+p)?—__)x-9°° x V e (6.28) nu: l Zu—-1-(m+l)=nZu-l(m+l) -2W 2 2 nv= I ——]—(m+1)=nZ ——1-(m+l) J—2W 2 “ 2 144 Where the last equality for nu and 11V holds for the zero perturbation case. Now, f.” converges if the polynomial is finite, that is: — nu‘v = 0,—l,—2,—3,... :> nu», = O,1,2,3,... (6.29) :> n(Zu +Zv)=n = nu +nv+m+l The energy levels in parabolic coordinates are discrete and degenerate, defined by two electric quantum numbers, nu and n,, which replace the angular momentum quantum number 1 found in spherical coordinates. Wave functions in parabolic coordinates are of the same form as the radial component of the wave function in spherical coordinates, both generated by the same differential equation form. The radial component in spherical coordinates and the parabolic wave function are given in the following. The radial component in spherical coordinates is taken directly from Equations 5.37 and 5.39; the parabolic wave function is taken directly from Equations 6.26 and 6.28. 1 p Rm, =crple 2 F(—(n—I—l),21+2,p) Wnu,nv,m = W (6.30) m 1 —-—u U=c;',u2e 2 F(—nu,m+l,u) V =c;v2e 2 F(-nv,m+1,v) 145 Now, the orthogonality of the radial wave function, (6.31) 2 Jdrr Rnl'Jl' an‘Jj = 6!] lmplies the following inner product relationship for the parabolic wave functions: [ 2U . U . = .. id“ nL,m "5,... 5'! < (6.32) 2 — .- LJ‘dVV VnL,mVn‘-{,m — 6’] Therefore, the perturbation matrix is diagonal in parabolic coordinates, and the eigenfunctions, or wave functions, do not mix; the parabolic manifold is unchanged [66]. As a result, the allowed transitions and transition amplitudes are tractable. 6. 3 Stark Effect Perturbation The linear Stark effect perturbation removes degeneracy from the parabolic wave functions, and further mixes the fine structure of atomic hydrogen in response to the application of a constant value electric field. The next two sections address the Stark effect with respect to both parabolic wave functions (gross structure) and the fine structure of atomic hydrogen, and develop the transition intensities for both gross and fine structure that govern Ha and H13 bands of the atomic hydrogen spectrum. For comparison, transition intensity bar charts are included along side experimental spectra results in Chapter 7. 146 6.3.] Stark Effect: Parabolic Wave Functions From the previous sections, specifically Equations 6.16, 6.28, 6.30, and 6.32, the perturbation matrix elements can be calculated as follows: _ 1 1 —u[ m I2 5211“,»: — ZeE —2W (nu :“m)!3 Iduuz-u me Lnu+m(u) _ 2 2 —+—eE (621,, +6num+m +6nu+3m+2) (2 —l E l d V[L’" 12 633 "Wm—4e —2W(n,, + n)m!3 I v v2 vm 8 WWW ( ' ) --lE (62+6 + 2+6 +3 +2) 14,,“ m+m(u)= (- 1) m(nu+m)!(n " +m]F(—nu,m+l,u) m Where the last equation gives the relationship between the Lagurre polynomials and the hypergeometric function [67]. Summing Z terms from Equations 6.28 and 6.33, 1: J— 2W(nu +%(m+ 1))+ J- 2W(nv +%(m+ 1)] +leE- 4 1 6n2+6n m+m2+6n +3m+2 (6.34) W ll u ll (6m? + 6nvm + m2 + 6nv + 3m + 2) 147 Which, for small 5W, gives [68], 1: \l—2Wn+-:—eEn2 -n(nu -n,.) (6.35) [W = —-—l—+3eE-n(nu -n,,) 2112 2 ”14,12 2 O,1,2,3,... [ n=nu+nv+m+l The Stark energy levels in parabolic coordinates exactly match the eigenvalues for spherical coordinates, found in Equation 6.9. Figures 38-39 illustrate the Stark shifted energy levels for atomic hydrogen bands Ha and Hg, and transitions resulting from linear and circular polarization [69]. Wave functions associated with the shifted energy levels are not mixed in parabolic coordinates. Transition amplitudes can be found from direct integration of the unperturbed eigenfunctions. Gordon [70] determines atomic hydrogen transition amplitudes resulting from linear polarization, as represented in parabolic coordinates, in the following: 148 =3 8E=4.5aer (typ) n1-n2=+2 11 1:2, n2=0, m=0 n l -n2=+ l Am: n1=l,n2=0,m=1 n1-n2=0 |Am|=l nl=l, n2=l, m=0 nl=0, n2=0, m=2 n1-n2=-1 n1=0, n2=l, m=1 n 1 -n2=-2 nl=0, n2=2, m=0 nl-n2=+1 n1=1, n2=0,m=0 n1-n2=0 V nl=0, n2=0, m=1 nl-n2=-l =2 8E=3.0aer (typ) Figure 38 Ha Stark Effect Transitions: Parabolic Coordinates. 149 nl=0, n2=1, m=0 I N=4 II 8E=6.aneE(typ) I 11 1:3. n2=0, m=0 m |Am| 1 nl-n2=+2 nl=2, n2=0, m=1 n1—n2=+1 ill I n1=2(l),n2=1(0), m=0(2) I n l -n2=0 nl=l, n2=l, m=1 n l -n2=-1 I n1=l(0),n2=2(1),m=0(2) I nl-n2=-2 I .— n l=0, n2=2, m=0 n l -n2=-3 E. 11 .o E; 11 E" B 5 nl-n2=l nl=l, n2=0, m=0 n l -n2=0 5 II o :1 N O B u a s n 1-n2=-l V V o :1 N 3 <9: :3 u a I N=2 II 8E=3.aneE(typ) Figure 39 H5 Stark Effect Transitions: Parabolic Coordinates. 150 I I znf”"1”m = (_1)”il +"i; 2a0 (”u ‘1' m)! ("v + m)! (nu + m)! (nv + m)! flu aann . 4m!2 nu! "V! "I"! "I"! I "1+2 I 11+", 4nn In—n) X —-—,2 I (n—n) n+n 2 I2 ’ , , n +n 2nn , , xII(n1 — n2 )-——7-2- — (n1 — "2 )*—, 2 IWm("1"1)Wm("1"1) (n + n) (n + n) (6.36) " ["1Vm(nln1 _1)Wm(n2n’2)_ n2V/m("ln1)'//m(n2n’2 "' 1)] I Where, 1 , , —4nn' (—n-)(—n1) 1 -—4nn' . . = F __ ,’_ ,’ +1, :l+_—L_—l__ _ +... 6.37 Wm(",",) n, n, m ("_nr)2I (m+1) I!I(n_nr)2I ( ) Figure 63 and Figure 69 in Chapter 8 give the HCl and Hg transition intensities. 6.3.2 Stark Effect: Fine Structure The Stark effect on the fine structure of atomic hydrogen, which is negligible with respect to Stark splitting in high external fields, is important under conditions of a relatively low applied electric fields (<1000 V/cm) [60]. Energy level shifts are a function of the atomic hydrogen non-degenerate fine structure (Equation 5.71), the associated Clebsch-Gordan coefficients (Equation 5.53), and results from overlap integrals similar to those calculated in section 6.1.1 (Equation 6.5). Calculating the energy perturbation elements for states defined by total angular momentum (njm): 151 aE =< V’n,j—l/2.m 1 Z l V’n,j+l/2,m > =< Rn.j—l/2 IR 1 Rn,j+1/2 > (6-38) V 1IJ+m* ‘Ij— m+l < Y;1—/,—2m 1/ 2|0059|——Yj+1/2.m—1/2> ‘I2j 1I2j+2 -< j—m . —Jj+m+l < . Yj—1/2.m+1/2|C039| . Yj+1/2,m+1/2> I ‘IZJ J2j+2 The inner product of the radial waveforms can be found in closed form with the use of the generating function for Laguerre polynomials, namely: 1) r 1’— "I' (TE—[FTw- :24 (30’: (6.39) Where the radial waveforms are given by, R ,(R): (n—l-l)! (3)3/2e-RMI2R) [42,7185] n, (n+1)!3(2n) n n "+ n R I 1(R)= (n-I)! (ET/ze—R/"IZ—RI L21111I2_RI "’_ (n+1—1)13(2n) n n "+ n (6.40) 152 Substituting, _- a - 21+ (n +1)! dn-I-l e—pl—l; Ln [11,013 1 1 2! 2 (n—I—l)!da"" (l-a) + _ aa=0 (6.41) ' ,2.“ +1—1 ' d"“’ ""3 L21-111(p )_ (n ) 8 02—0! d6“ (1-13)” L _ [3:0 Which gives, 1 I "2 _12 < RnJ-l IR 1 RnJ >:_ . 4(n+l)!(n-1)1 _ a 1 ' )3 ‘ _p_ ‘P— d 21+2e —p 61"”-1 e "a . dn-l 3 Hg 1 pp da""“ (1— a)”+2 dfl’” (l-my p: _ —a=0 — ~P=0 2, .-p[1+.—“-+.—”2l —a — [dpp + _1 nz—l2 (inn-[:1 dn—jP 2 2 -I-1 n-l :1 ,In _, (21+2)! d" d -a)(1-fl)3 (6.42) 4(n+1)!(n-I)! da”"“ 46"" l(l-amm a=fl=0 153 Now, using differentials of the geometric series, 1 (IN 1 __ : (N+i)! N! aim/3)” (1 —afl)"’+' N!i! (afl)’ =i i=0 Equation 6.42 is reduced to: l \lnz—l2 Z(n+1)1(n -1)1' < RnJ—l I R I RnJ >= 00 - 2 i=0 (21+ 2 +1)! d"”" I! [WI-00] -dn—[ 0... dan-I-I 0 dfln—I 3 = -§n\/n2 —I2 And, (6.43) [M - 2613] H (6.44) 3 . < Rn.j—1/2 | R 1 R2221” >= 74'? -(1+1/2)2 The inner product of the angular waveforms Equation 5.78, and repeated here: (6.45) relies on the identity given in 0086.),1'" =‘/(1+m+1)(/-m+l) ’ (21+1)(2I+ 3) 154 (I + m)(1 — m) Y’H’m + [(21 + 1)(2/ — 1) Y’"”" (6.46) And the orthogonality of the waveforms. As a result, l\[(j-T~m)(jim+l) (6.47) * =— j—l / 2,mi'l / 2 H / .Jnil / 2 - - 1 2 1(1 +1) Using Equations 6.38, 6.45, and 6.47, the fine structure perturbation matrix elements connecting each orbital pair (njm) can be expressed explicitly by the following [70]: aEnjm :< ij—l/ZJn I Z I Wn,j+l/2,m > 3 2 - 2 En‘fiz —(J+l/2) [(j+m)(j_m+])—(j—m)(j+m+l)] BEN-m =eEa - (6.48) J 0 2Jj(j+ I) ZJJ'U' +1) 2_ . 2 =eEa0--3-‘/n .(y+1/2) nm 4 J(J+1) Thus, each fine structure energy level is split into 2j+1 equally spaced energy levels, identified by magnetic quantum number m, where— j S m S + j. The uppermost energy level in each fine structure element (j=n-1/2) remains degenerate. The Stark effect energy level shifts in the atomic hydrogen Ha fine structure line are summarized in Figure 40. The fine structure Stark effect is critically important to the spectral analysis of data in Chapter 7. 155 -A .............. 156 J """"""""""""""""""""""""""""""""""""""""" q ............. . . . . . . 2 . m . / . / . I... . V . . z . . . . m . . m . . . . w . . . . . . __ 2 2 . 2 2 . . E / / c / / c p 3 II .I. 3 . . . . . . __ m u __ __ u u m . m m . 2 . «III. . . V. . .I.. . . __ . . . . __ . . m . m . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . m . . . k . . . . . . V . . . 0 . . . __ . . E . . . . 2 2 2 y y H m a __ __ __ __ __ J J J J J =3 =2 N N Figure 40 Ha Stark Effect Fine Structure Splitting. 6. 4 Coordinate Transforms Connecting spherical and parabolic coordinates requires the development in section 6.2.2, which generates two uncoupled, commuting angular momenta that are operators for the coulombic central force problem in any coordinate system in which R2 is separable, given stationary L2. Consequently, spherical and parabolic coordinates are connected by ladder operators that follow in form the ladder operators developed for angular momentum in section 5.2.1.1. In the next sections, the ladder operators in parabolic coordinates are developed; then, the ladder operators are shown as the connection between parabolic and spherical coordinates, generating the associated Clebsch-Gordan coefficients [71]. Finally, semi- parabolic coordinates are used to represent the angular momentum operators found in parabolic coordinates as two coupled, two dimensional harmonic oscillators (Schwinger) acting in three dimensional Lorentz space SO(2,1), for constant LZ [60]; that is, oscillators composing angular momenta on the hyperboloid surfaces described in section 6.2.1. 6.4.1 Parabolic Ladder Operators The angular momentum operators in parabolic coordinates, and their associated properties, are developed in section 6.2.2, and given in Equation 6.25. With the additional constraint of Equation 6.35, 157 . . . . 1 . J12 111’"; >= Ji(./i +1)| Jimi >= 3(n-1)(n+1)| Jimi > Jz,1' ljimi >= ”71 l 11% > (6.49) ‘jismigji n=nl+n2+m+1 Where u is replaced by l, and v is replaced by 2 in the last equation to match the angular momenta notation. Now, the angular momentum operators in parabolic coordinates exactly mirror the angular momentum operator developed in section 5.2.2.]. Consequently, ladder operators in parabolic coordinates can be composed in an identical way, and the ladder operators themselves, with exception given to the additional constraint of Equation 6.38, yield identical results. That is, Jf-fz = J,’f2 i le-fz (6.50) And, 1 Jli |n1,n2,ml,m2 >= ‘lzmz -1)-m1(m1i1) lan-l,n2,ml i1,m2 > (6.51) 1 J2i |n1,n2,m],m2 >= \lzmz —1)—m2(m2 il) l n],n2 T- 1,m],m2 i1 > 158 Where, n=nl+n2+m+l (6.52) m = m1 + ”12 But, ml and m; are arbitrary. Setting them equal, and using Equation 6.28, 1 n1=§(n—l)-m1 (6.53) l nl=§(n—1)—ml Which results in the following ladder operators in parabolic coordinates [72], J? | n,n],n2,m >= 1("l("‘"1) I n,n1 —1,n2,m+l > J1- | n,n],n2,m >= \/("1 +l)[n—(nl +1)] | n,n1 +1,n2,m—1 > (6.54) J; I n,n1,n2,m >= ‘1n2(n—n2) |n,n],n2 -1,m+1> J2— | n,n1,n2,m >= J(n2 + l)[n-(n2 +1)] I n,n],n2 +1,m-l > By symmetry, the operators H, L2, and AZ commute in parabolic coordinates. Consequently, the Stark perturbation potential can be expressed in terms of the rescaled 159 Runge-Lenz vector a such that it commutes with H and L2, and its eigenvalues are equal to the Stark energy level shifts found in Equation 6.35. 3 V5mrk = eEz,r —-> -2-na 3 :> VStark [n,nl,n2,m >= -2—eEnaz |n,n1,n2,m > 3 = EeEnULZ —J2,z) | n,nl,n2,m > (6.55) 3 = EeEn(m1—m2)|n,n1,n2,m > 3 = EeEnOrz “’71) | n,n1,n2,m > Mixing J); in 80(3) x 80(3) space generates a single three dimensional angular momentum operator 3. in 80(4), defined as follows [60]: ,1 =(1x24y242) = (11,): - 124,11)» — j2,y’jl,z + 12,2) [473/111 = fey/(’11: 22 1112131212 >= AM +1) 1 1121221222 > (6.56) 22 1112162222 >= m 1 13131222 > wig/12st 160 Motivation for this transform is given in section 6.2.1. The rotation operator ROFe‘0le connects ellipses with constant energy (W) but different eccentricity (or), where ‘3 . . . 0t =A/me", as g1ven in section 6.2.2. 6.4.2 Clebsch-Gordan Coefficients Wave functions in spherical and parabolic coordinates each have exactly one state in which the shared quantum number m is a maximum. That is, | 11,] = n — 1,m = n —l >sphericalEl mm = O,n2 = 0,m = n -1 >lmmh0h-C (6.57) As a result, these states are identical functions in both coordinate systems. Operating on each side of Equation 6.57 with its prescribed ladder operator L’ yields: L_ |n,l = n — 1,m = n—l >5th~mlz ‘/2(n— l) | 11,]: n —l,m = n— 2 >spherical 17 1’79"] : 0,)?2 : 0”" = "—1 >parabolic = (J1- +J2-) I "’"l = 0372 : 0,m : "—1 >parabolic = MI mm 21,112 = 0,m = n—2 >pamb0h-c +Vn—l |n,n] 2 0,112 = 1,m = "—2 >parab0/ic (6.58) 161 Setting the spherical and parabolic results equal generates the expected Clebsch- Gordan coefficientsi 1/J2 , matching results from eigenvalue/eigenvector calculations, and mechanizing the process. The following tables give Clebsch-Gordan coefficients, transforming from spherical to parabolic coordinates, for constant values of n-m== 2, 3, and 4, respectively [73]-[74]. The rows are defined by parabolic quantum number m, the columns by the spherical quantum number t=l-m. 61~61~o 61:61-— 0 1 2 m+2 l 1 m+1 112(2m + 3) 72 212(2),: + 3) 1 m+l 0 m+2 2m+3 2m+3 m+2 -l m+l 2(2m + 3) 72 2(2m + 3) 162 0 1 2 3 0 1 m+3 _1_ ’3m+9 1’3m+3 _l_ ’m+1 2 2m+3 2 2m+5 2 2m+3 2 2m+5 1 l ’m+1 -1 [m+3 —1 ’3m+9 - - 2m+5 7 2m+3 -2_ 2m+5 2 113m+3 __1 m+l :1,m+3 l ’3m-1-9 2 2m+3 2 2m+5 2 2m+3 2 2m+5 3 l,m+3 —_1 3m+9 _l_/3m+3 :_1 m+1 (6.59) 2 2m+3 2 2m+5 2 2m+3 2 2m+5 Such that: n1+n2 _ 1,m ¢n1.n2.m - IZISI C 1.1m, 1.2m W221)" (6.60) =m Where (1) and ‘1’ are the parabolic and spherical wave functions, respectively. 6.4.3 Semi-Parabolic Coordinates Returning to the original parabolic transform given in Equations 6.10 and 6.11, the Schroedinger equation for a central coulombic potential can be written: l 1 {i[fni]+—a-[§n-a—J}+—l—-i w 2 :0“? +712) Bf af 3?] 377 52,72 362 (6.61) 2 + W+—+—— w=0 [ (31:02)] 163 And is easily separable, for constant LZIm, into the following: 2 2 -a—2+i—a——i”—+2W.§2 +42l F(,‘)=0 a; 535 :2 2 2 _B__ +l—a———m7+2Wrz2 +4Z2 Gm): 0 (6-62) 817277377 77 214-22:1 1n units of electron charge and mass, c=1. Each differential equation in Equation 6.62 represents a two dimensional oscillator in polar coordinates. The angular momentum (m2), potential energy (W), and charge fractions (Z13) connect the two equations. For a harmonic oscillator with unit frequency, operators for the first of the two equations can be written: =— D 19:55: 5 V562 (6-63) 22-2 .2 2-232 _2D,,,_m_: E53 84‘ :2 :2 6 164 Where D is shorthand for the first derivative with respect to Q. As a result: [pi1,V(H—V)] =0 [Pi l2V](H -V) = -V[p2H - V] (6.64) [PiLV] =1§D2Vl = €[D2V]+[§2V]D = 2V :>[pil,H—V]=-2(H—V) And, 1(H-V>,V1=;:,-D¢D:-§—:-D§Déé= (p+1)2 — 9:53.32 r _.-moo.m- oo+wood Sumood o Tmooé >oom >02. (v) wanna ma 07mom... OTMOON o..-mom.N or-mco.m 170 All of the aforementioned adjustments allowed for resolution fine enough to correlate fine structure peaks present in atomic hydrogen spectra, providing a signature for each spectrum. Peaks could be identified that were separated by as little as 0.08 cm", approximately 0.04 A. at the HO, line (6562.85 A.) —7.5 times better than the FWHM resolution of the spectrometer. Evidence for resolution of this order is demonstrated in the atomic hydrogen Ha peaks, presented in Section 7.4.1.1. The line shape of the spectral responses appeared to have first-order decay at the trailing edge; although not universal, often enough for concern. Reducing the accelerating voltage did effect a change, but did not eliminate the decay from the hydrogen rotational band. To determine whether the decay was real or measurement error, all measurements were run forward and backward. In each case, with the reduced accelerating voltages, the forward and backward curves matched exactly; the data was real, and the fine structure peaks were further confirmed. 7. 2 Argon Results The electron density is measured experimentally and compared to the global model predictions for Argon. Gas temperatures for the Argon plasmas in this study are taken from Rogers [77]. The theoretical and experimental data can be expected to diverge at higher pressures (>100 torr), as convective flows begin to dominate diffusion as the major transport mechanism [77]. The first section presents the results from the global model, based on experimental inputs. The next section summarizes the set of experiments run to determine the electron density for the Argon plasma and compares the experimental 171 results for electron density to the global model. The final section suggests an alternative model for electron density based on the line shape of the Argon spectrum at 4300.1 A. 7.2.1 Global Model Results The global model predicts electron density and electron temperature as a function of input power, pressure, gas concentrations, and plasma geometry. In this case, the global model prediction for electron density will be compared with experimental values. The tables in Tables 1-3 and the plots given in Figures 43-44 summarize the global model results. 7.2.2 Argon Spectroscopy Measurements Hydrogen was added to the argon plasma at a ratio of 1:25. Stark broadening in the atomic Hydrogen beta (Hg) spectrum was used to determine the electron density for the argon plasma, a result first calculated by Griem [22],[78], and parameterized by Nikolic, et a] [79]. The following summarizes the electron density estimate: 3 Ne = [3.99x108 0 (MN 2 cm—3 a 2 2 2 A"l'Stark = \/A’1 — A2175 - Ajllrzstrument a = 0.0762 (7.1) Alps = 0.07724 AAlrlstrument = 0'30 172 0:003000 0P+0F00000 03000090 34000000 070000050 3+000000é 0F+0000v0 0:0000000 852: o: 0.0 00.0 00.0 0.? 0... 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S: E: .5053 :3... .8323 o :9: :9: :9: :9: :9: 29305. 29305. 26.. 8.02 n. 00-0 «00.0 00-00 00.? 00-0000 0000000 00000000 0000000 00000000 0000000 .EonBEm. 00¢0.0¢0— 30.00% 000.0009 v.0.VOF 00006000 00000000 000.000 0000.000v 33?: 0: 0:00000 000.0000 0:0000é 0P+0000.F 0?000.0 0?000.0 3+0000 0:0000 8:539. 000.0 000.0 0000030 0000030 000.0 000.0 000.0 000.0 $3 :2» 000 000 00v 00v 000 000 000 000 a: 3 000 000 000 09 F ...0 50 9000 .83 a 000 000 000 00 F 0.0 ..0.0 0000 E2. a 00 0F 0e 00 0e 00 0F 00 .663 4 0w 0: 00 0P 00 0: 0r 0: .EE. 4 IDIDIDIDIDIDIDlD .55. m IDIOI-Dl-OLOIDIDID .663 m .maEmmE :ow..< .60 £5.86on .0032 .320 0 20:. 175 Power=40W,(R,L)=(5mm,5mm) Electron Temperature Pressure (log torr) Power=40W,(R,L)=(5mm,1 0mm) (eV) Electron Temperature .4 -2 0 2 4 Pressure (log torr) Power=40W,(R,L)=(5mm,15mm) Electron Temperature (0V) -4 -2 0 2 4 Pressure (log torr) Figure 43 Global Model Predictions for Argon Plasma Electron Temperature. 176 Power=40W,(R,L)=(5mm,5mm) Electron Temperature (9V) Pressure (log torr) Power=40W,(R,L)=(5mm,10mm) (eV) Electron Temperature -4 -2 0 2 4 Pressure (log torr) Power-40W,(R,L)=(5mm,1 5mm) Electron Temperature (9V) -4 -2 O 2 4 Pressure (log torr) Figure 44 Global Model Predictions for Argon Plasma Electron Density. 177 Equation 7.1 is specified for the Hydrogen beta (Hg) line in plasmas with approximate electron temperatures of 5000K, and electron densities on the order of 10”- 10'5 cm’3; ALA/1,3,A/l,w,-m,mu, are full-width half-maximum (FWHM) line widths for the spectrum, fine structure, and spectrometer resolution, respectively. The H5 spectrum is shown in Figure 45 for a pressure of 100 Torr. Figure 46 plots both the Stark broadened electron density from experiment and the global model prediction for pressure ranging from 100 mtorr to 100 Torr. 7.2.3 Argon 4300.1 A Line Shape Argon spectroscopy concentrated on the Ar*->Ar transition at 4300.1 A. In all readings, accelerating voltage for the photomultiplier tube was set to 300 V. Figure 47 demonstrates the Argon line shape at 4300.1 A, with a pressure of 100 Torr. The wavelength shift from center of the lower (L1) and upper (L2) sidelobes are plotted against pressure in Figures 48-49, as suggested by Milosavljevic, et al [80]. The L1 curve is similar to the theoretical electron density plotted in Figure 46; the L2 curve is similar to the electron density plotted in Figure 46 for experimental data. 7. 3 Hydrogen Results: Diatomic Hydrogen Hydrogen results are divided into two categories: diatomic and atomic hydrogen. First, spectrographic data is used to find the rotational temperature of molecular hydrogen; calculations are made for data both within a single vibration band and within a single rotation band. Then, Zeeman splitting applied to the fine structure of the rotational spectrum is used to estimate the internal magnetic field of the hydrogen plasma. 178 .< mmoNH—zIz/L :3 co .._r as“; GE..— nI mv 0.53m 2. 58226; Nmmv omwv mwmv owmv vwwv Nwmv ommv w 5v oo+woo.o s N..-woo.m :mooé FTwomé T FTmooN (V) 1091103 .le PTwomN PTmood s _ -l ii: .385 179 .35 o3 bacon Shoo—m :ow.< ow 0.59m Atot 9532.. no; oomN oooN come oooé oomd oood oomd- 80. F- oom . 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T oomdl ,| T, l- - l l- _l5 til}?! oowd . r if. |.-!.-l l- t 183 7.3.1 Diatomic Hydrogen: Rotational Spectrum Diatomic hydrogen spectroscopy concentrates on the rotational transitions in the first vibration band of the electronic transition Zu-Zg; that is, the excited ground state -or ls state- of H2 to the ground state of H3. Transitions in this region emit photons in the visible spectrum, from 4540-4600 A. In this region, the fine structure is simplified, as there is no orbital angular momentum (1:0) intrinsic to the molecule. First, rotational temperature calculations are made based on the intensity of peaks across the band of rotational transitions (interband transitions). Next, temperature is calculated based on populations in fine structure peaks within a single rotation transition (intraband transitions). Energy differences for fine structure transitions are small, and provide linear temperature curves. Finally, the curves will be compared across the pressure regime. 7.3.1.1 Diatomic Hydrogen Temperature: Interband Transitions Allowed diatomic hydrogen transitions are prescribed in Figure 27, section 5.7. Relative transition line strengths are a fimction of the rotational level of the upper vibration band [53]. Relative populations in the upper band (J ’) are a function of the rotational energy term and rotational inertia of H2. As a result, the relative line intensity for an approximate Boltzmann distribution is given in the following formula: B,,'J’(J’+I)hc] kTr 1 oc (J’ + l)e-[ (7.2) 184 The H2 rotational spectrum is very difficult to analyze, as can be seen in Figure 50; it is difficult to identify transition peaks. Table 4 gives a hypothesis set of transition peaks. Transitions that lose one unit of angular momentum (R branch) emit photons of shorter wavelength (higher energy) than the band center; transitions that gain one unit of angular momentum (P branch) emit photons of longer wavelength (lower energy) than the band center. The lowest energy transition (highest emitted wavelength) in H2 is not the ground transition. This is due to the rotational inertia increase in H2 from 20.0 cm'l to 28.4 cm'1 in transitions from 2,, to 23 [53]; that is, the excited state electrons, concentrated at the center of the molecule, effectively pull in the protons, reducing the rotational inertia. In H2, a nonlinear centrifugal stretching term reduces the rotational energy at low frequencies; that is, the rotational inertia of the protons increases proportional to J(J+l), the rotational energy of the electrons decreases proportional to .IZ(J+1)2 [81]. The Fortrat diagram, which plots quantum number as a function of transition energy, is one available test to confirm transition peak identification. The Fortrat diagram is defined by the set of equations given in the following [82]: 185 .528on 35:33. Emcee»: cm 95w."— 2. smegma; 23 88 89. 83 2.2 89. 83 on? oomood , some? _/ Se 5: a: a} E .893 . womooa m 3?. 1 3 .momooe m . w , M mo-moo.m 83 .893 # . . 2 moms.» Ed _ A . 2 _. Smog 186 187 god- 8.8 8.5 we. F I. 8 oo.\. NBA 5. ooooov mBo oodomv ooo 30.7 oodv ooo mmomorw ooo tomorm 91.29. om: 8.3.9. oo.m ooo. F- 8.9.” oo.m 9.. F 55 oo.m mod 55 3.89. o3... mo. Poms ooé momo- ooow ooé oodnm E ooé 3.9% E mmomov ommd om. Ema oo.m ooo.o ooNv oo.m om. Em Fm oo.m moovm E mmdvov cums 8.33 ooN moo; ooo ooN vmocm Fm oo.~ @063 _.~ otovov ouch omoomv ooé vooo ooN ooé 8.53 E ooé Doom 5 mmdmov omoé @3me So oo.o 3.8on oo.o ofioooE cosmos ooo.o oodmmv E55 315.: _2 €2va E 285m 5882 _ < cocmbi _. 9398th >89; Eton. “Eton. Emu .mcoEmcmfi. _mcocflom cowoco»: v 035—. E = 50 — (B; + 3;)»: — (B; — 13;)»:2 — a4(aB(,2 — 8332 )2:sz mverrex : _EW (7.3) l (B’ +B'.)2 E.. ) —E z ___v__t_ vertex 0 4 (3:, _85) J +1;Rbranch — J : Pbranch Figure 51 compares the resulting Fortrat diagram with the R-branch from Table 4. The Fortrat diagram was generated using coefficients from an OriginR curve fit. Coefficients matched rotational inertia values to within 10%; that is: (B; + 3;) = 54.24 (B; — 3;) = —12.09 (7.4) a4(aB;2 — 3332): —0.046 The match should confirm the peak transition identification. Figure 52 plots from Table 4 the log of the scaled peak intensity vs. the energy of the upper transition band, or rotational energy number, following Equation 7.2. Assuming a Boltzmann energy distribution, the slope of the curve is given as: 188 .8: 3an _m 2%.... cod ooK coo oo.m ooé oo.m ooN ooé oo.o _ _ _ omm _.N .. ovmwm l T owmvm v 7 ommwm . com—.N owe—N a. ovwFN (pure) .(Bieua EoEtoaxw owmwm Y omm—N , ootw _, r . omhwm _ s 2 B r l in - -.-l:li....-..,- oz. a boon... 189 .5538... Queen _mcocfiom Nm flaw:— .oz >925 35:33. 00.00 00.00 00.0». 00.0w 00.0w 000—. 00.0 1 00nd- . 000.N- r 000.? 0.0mRédE T 000.7 1 00nd- l“II u"I (ll 17111111111! 1 , , .. _- ...... _. -1 000.0 .. com .0 a 000.? 2 fioome 190 B'hc _ _l_._7_ m. = —— slope 1(7). 30 (7.4) => 7, = —28.8 . 1 = 508K = 235C s/opeu'm-l ) Repeating rotational temperature calculations generates the pressure vs. rotational temperature plot of interband rotation transitions given in Figure 53. 7.3.1.2 Diatomic Hydrogen Temperature: Intraband Transitions As can be seen in Figure 52, the plot of the log of the scaled peak intensity vs. the energy of the upper transition band is not entirely linear. This indicates that either the energy distribution is not a Boltzmann distribution, or the rotation transition peaks are too difficult to identify accurately in H2. A solution to both of these difficulties is to calculate temperature within one rotation band. The theory from section 5.6 provides background. Each rotation transition peak in Figure 50 is degenerate; angular momentum is constant, but Jz is not. Application of an electric or magnetic field destroys the spherical symmetry, and removes the degeneracies. The electric field effect (Stark) is second order —and negligible- for spherically symmetric wavefunctions such as Eu and 28; the magnetic field effect (Zeeman) is first order, and causes splitting in Eu and 28 energy levels, and corresponding peak splitting in transitions. 191 .2335 .m> 8332.th 22.22301 mm 0.52m 03.: 2:32.; we.— mo o mo- 7 m. T 0 r on T 00? T 09. j . omw (3) emuuedwal . 00m own .. 00v r on». J 00m 192 Figures 54-55 represent a pair of high-resolution images of the peak identified as m=2 (J: 2->2) in the R-branch of the diatomic hydrogen rotation spectrum, taken directly from Figure 50. Fine structure due to Zeeman splitting is identified. There are fifteen main peaks, corresponding to fifteen transitions within the band. Figure 27 in section 5.7 indicates this peak must represent m=3 (J: 3->2). The bands in Figure 50 were incorrectly assigned; that is, the side lobe at 4581.3 A in Figure 50 is the new m=1 peak, and each assigned m must be incremented by one (parenthetical values). The resulting Fortrat diagram is shifted, but unperturbed. The magnetic field strength is not strong enough to decouple the orbital angular momentum and spin. Consequently, Clebsch-Gordan coefficients from section 5.4 determine energy levels for both upper and lower bands. Calculations are simplified by concentrating on the orbital angular momentum shifts, the first term in equation 5.73. This term alone is the Larmor precession, or normal Zeeman effect. ehB A'B = - (B’n — B’m) 2mec —3SnS3,—2$m$2;m=nil,n (7.5) B' = 20.0,B' = 28.4 193 use 2 in am: 4523 5&3 N: em 9.5.". As 5929“; Q33 mémmv . _ 5 N0 m0 «.0 .mo 8 no 00 00 o_. 5 NF 9 3 m— iéffljélii 8?m8.° m w I _. romeo; EBQL L 969? 19670969? 99996 V699 VZQLG 1697 16288 7699 1.1008 769? 19811 vssv 896697697 91099 769? 69667769? 989W'9697 929997697 98991 #697 2001769? 63599996751?” I :0-mo0.m l _. w0-mo0.m .l :0-m00.v (v)1uauno Md 1. :0-w00.m l :0-w00.w “Em NI mw-mm.m H:me 355m I . ”Em NI memd Hzoom Emzcou II I. :0-w00.n cmom 623$. I cmom Emzcou I . l :0-m00.m 194 .to._. no mam was—om nwcmczom cuEuoN N: mm 9...»:— 20 59.2%; 0609. _ 000+woo.o I :0-w00.v 99489611829; ‘Zfihlil’éist? 196707697 139107597 96867697 89676 V699 93999 veer QEMVPé‘s'v {$151914 9%? 36639991567 WWv esew'vssv new 929% 769v 881%: W ms: 7697 5861:5031??? rsevo 9697 T :o-w00.~ I :0-m00.m .I :0-m00.v (v) iuauno .LWd I :0-moo.m I :0-m00.0 “Em NI mm-mm.m ”cmom omcm>mm I “Em NI mm-mm.m Emom Emacon. | cmow weo>om | $8 9928 l I $38.5 195 Table 5 fits energy levels from Equation 7.5 onto Figures 54-55, for a given magnetic field strength B. In Table 5, the mean-squared error is minimized for B=35 mT; experimental vs. theoretical magnetic field magnitude is plotted in Figure 56. Figure 57 plots magnetic field strength for pressures from 0.5-50 Torr. Transition amplitudes come directly from application of the spherical tensor Tq(k). Briefly, the spherical tensor is related to the angular momentum eigenvectors in the following way: k k [12.71; ’I=th.§ ’ (7.6) [1.73“] = Mk .—. q)(k :q +1)Tq(k) And, the spherical tensor is transformed from representation or to or’ by a multi- dimensional Clebsch-Gordan rotation, that is: (a’;j’,M'| Tq(k) |a;j,m> = (7.7) «221’ II T)“ ll an”) JZj +1 47r(21 + 1) 196 0000000 05000.0- 00300 00000...- 000050 0 0000.00 00000... ..05000.0 05000.0 e. .5:% C 8.86»... 6E 0000000 0500.0- 5050..00 0000.0- 005000 0 0000.00 0000.0 0000000 0500.0 8. .eg:% C mmodum. BE 00 00. ..- 05005.0- 0 0050050 00000. .- 00000.0- 0 0500050 005.0 000.0 000.? 000.0 000.00... 000000... 005.0 .5236 .50:va C mmmodum. SE 00005.0- 00000.0- 0000.0- 00 05. F- 0000 w. ..- 00000.0- 00500.0- 0 0005000 0000000 00000.... 050.05... 0000.0 0000000 0500050 .Eoiwo 5000.0- 0005.0- 0.000.0- 00005. ..- ..5000. T 00000- 000 00- 0 0000000 0000 .50 0050.. 7. 050505. F 0000000 0 _.0000.0 00000.0 .850 C mmodum. a: 0. 005.0 0000 000... 0000 005.0 00000. F- 00000.0- 0 00500050 0000000... .5300 005000.0- 00005.0- 00 .0000- 00005. e- 005000. T 0 00000- 0 «00 0.0- 0 05000000 00000.50 .0050. F... 050505... 00000000 5. 00000 5000000 .5236 000.0000 000000 0000000 000000 .000000 0070000 005. .000 000.0000 050.000 0 000.0000 Foam 8.09.03 000.5000 0 00.00 000.0000 005.0000 000.0000 000.0000 000.0000 000.0000 005.0000 0000000 0050000 .000000 000.000 .0 000.0000 00.0000 005.0000 000. .000 000.0000 000. .000 500.0000 000.0000 000.0000 005.0000 005.0000 ..50.0000 05.0000 505.000 0 000.0000 00.0000 0.00000 .5800 8698.. 0000 000.. 050.0 000.0 00.0 fm: :00 000.0 000.0 000.0 .000 Em: .m.o>o-. 35:0 .3250”. 500.05: 0 Bank 000.0000 000.0000 000.0000 000.5000 02.5000 4 50.0000 0 ..0.0000 50 .. .0000 00.0000 000.0000 000.0000 005.0000 0 5.0000 000.0000 000.0000 050.0000 000.0000 000.0000 0.. F0000 ..50.0000 000.- 00.0- 00.0 00.0 00.0.. c.m|E:m 9mm. 00.00- 00.00- 00.00- 00.07 00. r F- 00.0- 00.0- 00.0 00.0 00.0 00. E. 00.0.. 00.00 00.00 00.00 c.mlE=m 0.00 0A0- TA.- o Ao . A. 0 A0 FA0memQ 0A.- 73 o A. 0.0. F A0 TAP- 0 A o Ao 0-Am- . A. ..A0. 0 A0 o A.- P Ao 0 A. FA0nxme 197 005..0.0 00000.0- .0050..- 00000..- 005.0 0.00.0.0 00000..- 00000.0- 05000.0- 0000 .000.0.0 0 0 0 000.. 0000.0.0 00000.. 5000000 0500000 0000 000.000 00000.0 0.0050,. .00050.. 005.0 3. .8050“. .5250... 2.2.0.. m C Rod-m. a: C owed-m. 85 000000. .- 005000.0- 0 0500000 0000050. . .5250“. 000.0000 000.0000 .00 000.0000 050.0000 000.0 .00.000.0 00.0000 000.0 000. .000 000.0000 050.0 000.0000 000.0000 000.0 .525 8.883. ...-m._ 5.0.0000 000.0000 5.5.0000 000.0000 000.0000 00.0.- 00.0- 00.0 00.0 00.0. c.m-E..m Ema NAN- .-A.- 0 Ac . A. 0 A0 .A0nxmma 198 .25. 5.5 .685 .coetaxm 3| I. I‘ll.» Ill «III. Tll- - i ll. .0- II I- I-II.- U .CE 2an 2...: m em 95?. (L-wa) mus Kfilaua Mosul 199 0.. 0.5.... 2:32.. 00.. 0.0 6.3.8:. .m> 20.“. m 50 0.50.... 0.0- T 000.0 - .00 . 0.0.0 - 00.0 . 000.0 _ ill-II I lull. IL .- 3... .11 t- (alsaL) a 200 Equations 7.10 and 7.11 by dipoles rotating about the z-axis. Finally, the following three special cases account for dipole transitions: _§_\/(L+M+l)(L—M+l) dQYM“ , Y0 ’ YM ’ :‘/ I L (19¢)1(19¢)L+I(’9¢) 4,, (2L+1)(2L+3) (L+M+l)(L—M+l) (2L+ l)(2L+3) => JdQYLM (29,¢>2YL“1.(29,¢)=\/ YM“ y. M+l :J: (L+M+1)(L+M+2) Ida L (09¢) l(§9¢)YL+l (09¢) SIZ'J (2L+1)(2L+3) M* .,YM :_\/I (L+M+1)(L+M+2) :> deYL (29,¢)(x+1)) “101W 2 (2L+l)(2L+3) (mix ’ Y4 YM+I , :JE (L-M)(L-M-l) I L (19¢)1 (19415)“: (29¢) ml (2L—1)(2L+1) M“ _. M+l _1 (L-M)(L-M-1) : [my]. (19,¢)(X Jy)YL—l (12¢) _J;\/ (2L—1)(2L+1) (7.9) (7.10) (7.11) Equation 7.9 accounts for transitions effected by dipoles in the z direction; Table 5. Transition rates are proportional to the z dipole strength. Transition rates from Equation 7.9 are included with peak amplitudes found in Figures 54-55, and charted in Deconvolved transition amplitudes divided by transition probabilities (rates) distribution [54]. 201 given in Equation 7.9 are plotted against ml energy level differences in Figure 58; the slope, calculated in the following, is proportional to rotational temperature, regardless of 62:5ng xwaocm 9:33.:— wm Paw:— 3.E3 3.83:5 >985 _ucozsom Ll..l l‘l r _._1 _ ________ _____._...._ ._ v m m P o T N- n. v. m- o n . _ T mood , m 1 5.0 m owEoofiE E” .W ”W 90.0 m m A. m m mod all 202 a 1/10 R 0.017 [16 BE ms/Upe : 0018 . = = _ cm BEE 8.0 H", 17, in '(7.12) :> Tr :1-44' 1 = 556K 2 283C slope( (In—l ) R represents transition probabilities, I the transition amplitudes. The constant 0.018 comes directly from the discrete Gaussian deconvolution of the amplitudes, specifically: 0' 0.018: “2’: 1 A— (7.13) 47; #peaks/O' 1__0.2fl 0' The deconvolved spectrum is negligibly wider; the second-order energy term on the RHS of Equation 7.12 is not used in this calculation, but accurately depicts the slight parabolic deflection of Figure 58. The accuracy of Equation 7.12 is independent of rotational level distribution. Figure 59 plots intraband rotational temperature vs. pressure. 203 m... Eat 2:395 a3 md .2385 .m> 23209.8 ._1 338E. am 25w.”— __+ o 00? com com oov com com com com (3) mniexadwal 204 7.3.2 Diatomic Hydrogen: Zeeman Shift Peaks for the Zeeman shifted rotation bands were found by deconvolution of a collection of forward and reverse spectral scans. Scans in both directions were necessary to verify peak location, and to avoid increased photomultiplier tube signal-to-noise level evident on the falling edge of the band, as discussed in section 7.] and demonstrated in Figure 42. To verify Zeeman peaks, both forward and reverse scans were band-passed filtered to remove modulation at the sampling frequency. The band-pass filter results are given at the baseline of Figures 54-55. The reverse scans are flipped to align with the forward scans. The forward scan amplitudes in Figure 54 are artificially reduced. All spectral readings were taken with the accelerating voltage set to 550 V. The plasma conditions were identical for each reading; the pressure was 0.5 Torr, the gap size 5 mm, the power set to 60 W, and the hydrogen flow rate was 100 sccm. The wavelength of the spectrum served as the time element for the band-pass filter; that is, l A = 1 second. Figures 54-55 attempt to demonstrate the consistency of the spectral data; peaks lined up vertically —as demonstrated by the band-pass filter results- confirm peak location. Peaks are identified by the OriginR cross-correlation software package. Band-pass filter results suffer from time shifts, as is expected from broadband finite impulse response (FIR) filters. This is seen in Figure 54; the cut-off frequency on the forward scan is set to 15 Hz. Figure 54 identifies peaks with amplitudes greater than 0.2 E-ll A. Time shifis from the FIR filter are evident. Sofiware peak identification is unreliable for time shifts of this magnitude; as an example, peaks 5-6 should register for both forward and reverse scans, and do not. 205 Figure 55 examines the same two spectral scans with relaxed band-pass filters (fcut-off=25 Hz) on both forward and reverse scans. Additionally, peak triggers are raised to 0.5 E-ll A. on both forward and reverse scans to counteract the raised noise floor associated with the wider filters. Peaks identified in Figure 55 are cataloged in Table 5 and compared to peaks expected from normal Zeeman splitting for the J: 3->2 band of the Zu->2g transition in molecular hydrogen. A second filtering method combined both inputs in a moving average windowed cross-correlation filter. Results from this filter are shown graphically in Figure 60, with results from Figure 55 given along the baseline for comparison. Results for both filtering methods (Figure 55, Figure 60) identify peaks consistent with normal Zeeman splitting for hydrogen in the given rotational band, further strengthening the evidence for Zeeman energy shifts in the diatomic hydrogen rotational spectrum. Figures 61-62 are plots of the H2 rotational spectrum for pressures of 5.0 Torr and 50 Torr. The five transition peaks identified represent transitions effected by the circumferential electric field. Magnetic field strengths are calculated for the given pressures and included in Table 5 and plotted in Figure 57 in section 7.3.1.2. The magnetic field strengths at 5.0 Torr and 50 Torr are 28 mT and 25 mT, respectively. 7. 4 Hydrogen Results: Atomic Hydrogen J. Balmer described atomic Hydrogen lines, in the visible spectrum, in 1885. N. Bohr first explained the Balmer Series in 1913. The energy differences (13,.) found in the Schrodinger equation with central potential energy match the Balmer series. Three of these lines, Ha, H3, and H7, are investigated in this study. 206 .to... md c3?— =o_§otou-mm80 ”wEEEm :wEooN N: 3 9...»:— @5829; 039. 0.39 name 983 _ . _ . _ . _ 5 8 8 3 88 8 8 8 9 :m E 2 3 9 2v V v 7 v 77 v 7 V”: P _- fimmm mwmmmmm.m mmmmmm E .e a 1,. v .- . r t1 0 s 1:38.- mm a m.- .. mmm mmm Wmamw-f 2.2.5...- 2x «A. Xo \\ oA 1 :o.m8.~ I :Qm8.m 1 :38;- 1:38.... . . 1:38...- uamfimmammamom 855ml dam n: 3.8.» $8 Egon | . c8m oflm>om ‘. «A- $8 Egon | Z 1 238.5 207 .3 8 Hoe a.“ ”Seam sea-N N: 5 9...»... i gauges; msmmv $.39. v.39. ~59. name @6me Qommv v.83 Nmmmv oo+woo.o NTmood 1/ . 3&2: . Samoa; (v) 1081103 ma EmmooN - $-womd “ OAO pi____ -— F A F . B . - $-moo.m 208 .>> cc 50,—. on ”wast—am :mEooN N: me 95»:— 2. 59.23.25 mdmmv Yommv Ndmmv mane Qmmmv ohmmfi Ymmm». memw mmmv admmv 0.39... v.53. oo+moo.o )2) \<.\<. ovmoo. . OTMOON - OTMOOM NAN- oF-moo.v (v) wanna ma o..-moo.m TAT afiwooe OAo X. _. . 1 _ . Emacs 209 Gross and fine structure spectral results from atomic hydrogen lines Ha, Hg, and HY are studied in the next section to determine the resident electric field in the hydrogen plasma. In the final section, the Stark broadened H5 line is used to determine the electron density of the plasma. 7.4.1 Atomic Hydrogen: Stark Shift Section 6.3.1 develops the concepts that govern Stark effect energy shifts and transitions for the atomic hydrogen gross structure. Included are direct calculations for the resulting H; and Hg energy spectrum shifts (Figures 38-39), and Equations 6.36-6.37 defining relative transition amplitudes. Gross structure splitting is dominant with applied fields on the order of 5000 V/cm [60] and larger. Section 6.3.2 develops the concepts that govern the Stark effect for the fine structure of atomic hydrogen. Fine structure analysis is in general limited to fields on the order of 1000 V/cm [60]; larger fields mix the fine structure wave functions, complicating the analysis. Analysis of intermediate fields requires coupling both gross and fine structure effects. For exact solutions, all perturbation potentials must be reformulated in the Schroedinger equation. Accurate approximate solutions have been found up to the field limits, where gross and fine structures mix. Electric fields in this investigation are anticipated to be on the order of 2000-5000 V/cm (see section 8.1.2) —a consequence of the small electrode gap that was necessary to confine miniature plasmas. Fields at this level effect a uniform distortion in the parabolic orbital wave functions [60]; the outer shell of the wave function retains parabolic symmetry, the wave function core approximates spherical symmetry. The anticipated 210 spectral response is an interleaving of the gross structure splitting and fine structure splitting. It is anticipated that gross structure spectral shifts and relative amplitudes should follow closely those outlined in section 6.3.1. Further, it is anticipated that the fine structure splitting should be convolved with the gross structure. The fine structure amplitudes will deviate from the nominal values found in section 5.8 (Figure 30), a result of the relatively high electron density (N- ~ 10”- 10IS cm'3) of the plasma [60]. The fine structure signature should more closely follow that of experiments at approximately the same electron densities. Figures 31-32 in section 5.8 demonstrate fine structure spectrums from experiments conducted in low- pressure gas discharges under similar conditions. Even at much higher applied electric fields, the parabolic wave functions do not interact with each other. Instead, each series of components {(n.,n2,m), (n1+1,n2,m)...} are superimposed, with spacing proportional to E3”4 [60]. 7.4.1.1 Stark Shift: Ha Sections 6.3.1-6.3.2 develop the gross structure and fine structure for Stark effect atomic hydrogen transitions from principle quantum numbers n=3 to n=2, the Ha energy spectrum. Figures 38 and 40 give a graphical depiction of the gross and fine structure Stark effect for the H(x spectrum. Figure 63 [83] gives the Ha transition amplitudes for the parabolic eigenvectors, calculated using Equations 6.36-6.37 in section 6.3.]. Figure 65 and Figures 67-68 are the Ha spectrums from discharge experiments where the pressure was controlled at 50 Torr, 5.0 Torr, and 0.5 Torr, respectively. In each case, discharge conditions were set to 211 1:: linear polarization -8 -6 -4 -2 0 0': circular polarization Figure 63 Ha Parabolic Transition Intensities. 212 .to._. on 6.202% oci v.5 $20 ”omcoamom _mbooam d: we 9...»:— Eo\> ocov ooom OOON ooor o _ , mmwm , m. _ r .. 1 - . m _ r l . . gufimuz m . 1.. . - . . 3 Na.”- Nux u t 1 . . -1 1 , e O '1 .nm . ,.A. m.m .-U . U U . I I . . I - . . . ‘ I . . . I . . . O I C O ' L N y 1 l n mm _ Nan-max , W. o.o o.ouo - uo-.u...u.un = 0 f . l 1 .1 1 . - .0 2 . Nan-+3. m , ......... - .o.......... V a. . E ,_. - _ R _ Ir . 11 l l r . mm _ - 213 3mm Qowmo p v.83 E 5222...; «dame mwmo Qmmmo Qmwmo «:8. on .2550on _ScoEtoaxm 5: me 959... «.mmmo wamo b mmmo mm- or me C Fm @— mm mm mm mm 8+wcod - oTMOON . oVwOOé . o—-moo.© T o7mood .. momooé moms.— (v) wanna ma 214 .Ezzczcou Eo\>ooov.c ”omconmom .38on .2.— 3 Bani 52> o uov ooom ooow 090.. o _ . 3mm , 88. u , "at: _ _ _ m. $7“..an V £9L0'0 = uun L :Afiieua 1 1 1 l 215 .to._. oh .828on _flcoEcoaxm .0: be 0.53,.— 2. 59.296; mdmmm «dame «.mmmm ammo m.m~mm Qmmmm v.33 «.mmmm mmmm mémmo oémmm tvmmm oo+moo.o ($83. - OTwOOm momooé . momomé T mo-moo.~ (v) means 1ch . mo-wom.N - momood o v mo-mom.m mo-moo.v 216 Eek md 8:58am _ScoEtomxm d: we «Sufi 2. £822.25 ~88 88 3.88 3.8.. 38.. ~38 88 8.88 0.88 «.88 ~88 . .3: 888.0 NTMOOh _ .. . .783 Zamomé (v) wanna ma _.w-woo.N . _ m :-mom.m , C-woo.m 217 maximize power density; the electric probe gap fixed at 5 mm, the input power at the maximum power level of the microwave supply, 60 W. Hydrogen flow meters were set uniformly to 100 sccm. Critical peaks are identified on each of the three figures. Figure 64 shows graphically the theoretical mixing of gross and fine structures at 50 Torr. The theoretical Ha spectrum given in Figure 64 and the experimental spectrum given in Figure 65 are consistent with an electric field estimate of 3858 V/cm. Critical peaks in Figures 64 and 65 are labeled. The gross spectrum peaks are separated uniformly by 6 units (0.1 A) in Figure 64, approximately equal to the expected gross structure splitting (~6.40 units=0.1067 A) for the given electric field. The sharp nature of the peaks is unexpected; that is, Doppler broadening is not evident in the fine structure transitions. This point is addressed in Chapter 8 (section 8.1.3). Figures 67-68, representing pressures of 5 Torr and 0.5 Torr, do not give as much detail. However, peak identification is still possible. Figure 66 gives the theoretical Ha spectrum response for applied electric fields that vary continuously through 4000 V/cm. Figure 66 connects the fine structure with no applied field to the mixing at ~4000 V/cm (3858 V/cm at 50 Torr). The peaks identified in Figure 66 map onto Figures 67-68; the associated electric fields are 2083 V/cm and 1875 V/cm for 5 and 0.5 Torr. 7.4.1.2 Stark Shift: Hg Sections 5.8 and 6.3.1 develop the fine structure and gross structure for atomic hydrogen transitions from principle quantum numbers n=4 to n=2, the Hg energy spectrum. Figure 29 and Figure 39 give a graphical depiction of the fine and gross Hg 218 spectum. Note that the k=0 transition is allowed for Hg (Figure 39), but the composite parabolic functions (1,1,1) and (0,0,1) are orthogonal. Figure 69 [83] gives the Hg transition amplitudes for the parabolic eigenvectors, calculated using Equations 6.36-6.37 in section 6.3.1. Figure 71 and Figures 73-74 are the Hg spectrums from discharge experiments where the pressure was controlled at 50 Torr, 5.0 Torr, and 0.5 Torr, respectively, and all other operating conditions matched those given in the previous section for Ha experiments. Critical peaks are identified on each of the three figures. The Hg peaks do not present the striking character of the Ha peaks; the peaks are neither sharp nor is the fine structure as easily unraveled. Gross structure peaks are Doppler broadened. However, it is still very possible to repeat the theoretical spectrum analysis of the previous chapter with fewer points. Figure 70 shows graphically the theoretical mixing of gross and fine structures at 50 Torr for Hg. Figure 72 connects the fine structure with no applied field to the response at «4000 V/cm (3890 V/cm at 50 Torr). The peaks identified in Figure 70 and Figure 72 map onto Figures 71 and Figures 73-74, respectively. The associated electric fields are given in Figure 72. As can be seen, the electric field strength of the hydrogen plasma taken from Hu and Hg spectral data, under identical operating conditions, are nearly idenficaL In the theoretical Hg spectrum given in Figure 72, the gross spectrum begins to emerge and dominate at fields >4000 V/cm, and it becomes possible to estimate the electric field from gross structure splitting alone. Parabolic wave function energy levels 219 1t: linear polarization o: circular polarization Figure 69 Hg Parabolic Transition Intensities. 220 .to._. cm 6.32:8 05m 9:. $90 ”omcoamox 3.8on a: E. PEEK Eo\> ooov ooom Doom 000.. o - . .Omwm/ 8.2. q p - 1 EN. . 1 1 .1 OOOOOIIllllt 11 11 11 1 00.00.!!! mm Nan-.93. 8.8. :. .1 1 . l l 1 1 1 1 _ 9.... _...1- 1 11 1.. 1 11 -1. - .11 2. . .. ...,..ununuuuu. .. H FF. 4 o I o I I o I I Nanjwnflx 2.— W... 111.; .1 11% n m IOU! OOOIOIIOCU O. .om m1 I3. .0... .‘...'I . man-.05. 1. 111 l 1. 111 l ,1 .1, n a m. 1' o h .. ........ .o... __ m . .1.. . . 1 1 1 emu-aux W n m L . 9 L m . V :8 m. ....... m. .......uuuu"». 1 , ...... 1 -1 Nan-.016. 2m: . . _ 221 .tob on 828on _ficoEcoaxm 3I :. «Sui 2. 5%.-.52. ©6va Ymmmv «.83. mm? méwmv oéwmv .3.me ~6me vmmv Qmmmv Ommwv oo+wood - momood mo-moo.v cm-.©N-.wN-.om- - mo-moo.© mar--576..- . momood (v) iuauno 1ch Nrdfimfi: -womooe m M - momomé .- . 1.111: 1:.-. .1 momové 222 Eo\> Ogov .Eszczcoo Eo\>ooov1o nomcoamox .88on a: 2. «Eur. ooor o "omwm coon coon 85.» "S: «\Fnsduz v 19100 =11un L IKBJeua 223 ~8va hmmv mbwmv 06va 2. 59.2855 Yowmv New? own? Qmmwv .to... on £5.8on _ScoEtoaxm 8: 2. 0..—arm Qmmmv Ymmmv Ndwmv x... oo+moo.o momoo. _. . momood T momood (v) wanna ma - moflooé mo-moo.m wo-moo.m 224 mva wémwv wémwfi vémwv ~6va .to._. wd 838on 882:8me 8: E. flaw... 2. 59.8352. Qmwwv Qmmwv immwv Ndmov vwov mmwv NF- m7 . 3...}... oo+wood wo-moo.—. . wo-woo.w . wo-moo.m - wo-woo.v wo-woo.m mo-moo.m . QOMOOK womood . - l wo-moo.m (v) wanna ma 225 are separated uniformly by 3.3 units, or 0.236 cm'l (0.056 A). The corresponding electric field can be calculated by the following: A/llg 33 . —- . ((17115 54: AWfl = 1.23 = 6.0101175 :100 Ea 4%. Mg 4861.33A 2 ' ,13, 16562.85/11 (7.14) :> £3 =1.00Ea = 3858v/c'm The electric field estimate for Hg using only the parabolic energy level shifts is nearly the same as the full spectrum estimate, and identical to the electric filed estimate for the H.- band. 7.4.1.3 Stark Shift: HY Figure 75 [83] gives the parabolic transition intensities for both linear and circular electric dipoles. Figure 76 gives the H7 spectral data for operating conditions identical to those for H0l and Hg, at 50 Torr. Although noisier, it is still relatively easy to see the Doppler broadened gross structure peaks, separated by 2.7 units, or 0.237 cm’] (0.045 A). Accordingly, the estimated electric field from the HY data is: A —AZ 2.7um'ts 2 51: AW? = ’17 : 3.3um'ts 2103 Eli “’3 fl [434mm]2 22g 4861.33A (7.15) :> E), 21.03Efl = 3959v/cm 226 11:: linear polarization 1111|11J11|11l111|11l11|111|11 - -5 -15 10 0 5 10 15 0: circular polarization Figure 75 H‘y Parabolic Transition Intensities. 227 mdomv momv mNomv .3 35.5.32. 88 .to._. on .thzaosbm 8.53 E28on .8888me >1 3. 0.53m 38.. 59 @89- 8.888 «588 $-83 d w l. m. :88. u m M :m8.~ 3-831. 3&8...” 228 Therefore, the electric field strength of the hydrogen plasma at 50 Torr, taken independently from Ha, Hg, and H7 spectral data, agrees to within less than 3%. The electric field is plotted vs. pressure in Figure 77 on the following page. The resulting electric field strength is considerably greater in this set of experiments than that found in previous spectroscopic studies using higher principle quantum numbers (n=l4-20) [84]. 7.4.2 Electron Density Stark broadening measurements of Hg lines were carried out in section 7.2.2 to ascertain electron densities for Argon. Stark broadening measurements for hydrogen follow this procedure; a sample Hg line is given at 100 Torr, in Figure 78. Figure 79 plots hydrogen electron density estimates of the hydrogen plasma for pressures from 0.1- 100 Torr. For each experiment, the probe separation was set to 5 mm, the flow rate 100 sccm, the power 60 W. 229 8:8on .m> 22”. 2.805 E. «Suw— Eob 2335 me; n. F m.. o m.v CD 1- 11168-1 .11. 1. 1800.111 1111. 1 1, 831-11-, -1 1L ‘ 881 11.11 1. 2 188111-- 1 (um/A) Pl9!:l 01113613 188 1-1-1 . .11111111 11 L. 1 111.11 .F.Oomm1 1.1-1 111 .111 1. 1 .1- 1 1-1-- 1. .1 .1, 11 11108...-1111- , 1 . . 1 1.1.Oomv11 1-- 1 111. 230 .< E. _uzzza :3 8 ES 2: 5.23.-am a: E- 2&5 .5 530.0225 mev mva thv wwmv mva Vva mmwv Nva PNQV DAY-mood \/ . oTwooe 1 O TwOON - o Tmood Or-WOOé - O r1wOO© - . -1- --1--. afimoow 231 .lfld .35 o8 838i .w> 56:00 5:85 comet»: an charm that 2:38.“. Go.— oomN oooN com; coo; oomd 000.0 08.0. 08. 7 com. 7 — $1111-11 8.0 i 1 - . - .. o3 11- o? - - 11 - - - 8a (11?” ”30“) 9N omN A cod . 1L----1-.1.§ 232 Chapter 8 Conclusion The purpose of this investigation was to design and build a miniature microwave plasma system and associated diagnostic optics to collect spectroscopic information that would possibly reveal reasons for the plasma behavior as pressures are increased. To this end, a new plasma system was created as a flexible test bed for experiments. A new optical system was designed and built to bring the collection lens system to within 5 mm of the plasma center. A sophisticated measurement technique was discovered to zero in on some of the fine structure associated with hydrogen and argon lines; taking advantage of nonlinearities in the response of the photomultiplier tube (PMT), the monochromagraph resolution was pushed beyond performance specifications. The following sections target specific areas where the experimental results appeared contradictory or at odds with what might be expected from the experimental parameters. 8. 1 Experimental Results Results from molecular and atomic hydrogen studies must be consistent with each other, and with each element of the theory that predicts these results. The next few sections examine the consistency of the results with respect to the electric field polarization, electric field magnitude, and atomic hydrogen spectral resolution. 8.1.1 Results: Electric Field Polarization Assumptions made about the polarization of the electric field resident in the plasma were corroborated by experiments with atomic hydrogen: the absence of a center peak in both Ho- and H7 spectrums eliminates the possibility of a rotating electric field. 233 Further, the solid match of the atomic hydrogen experimental data to the theoretical spectrum verifies the presence of a linearly polarized electric field, a field that changes strength with changing pressure. The experimental data for molecular hydrogen appears to contradict the absence of a rotating electric field. Zeeman splitting generates fifteen peaks; five peaks result from transitions involving linearly polarized fields, and five each from right and left hand circularly polarized fields. This apparent contradiction is resolved graphically in Figure 80. The linearly polarized electric field is fixed along the z-axis, connecting the electric probes of a nearly capacitive discharge. In the reference frame of molecular hydrogen spinning about the circumferential axis, the electric field appears to be rotating; molecular orbitals experience a circularly polarized field. In the reference frame of molecular hydrogen spinning about the z-axis, the electric field appears stationary, and linearly polarized. The combination of hydrogen rotations —the molecular hydrogen domains aligned helically around the cylindrical discharge- explain the transitions associated with both linearly polarized and circularly polarized fields. 8.1.2 Results: Electric Field Magnitude The electric field, calculated from the Stark shift spectral data, approximates an independent electric field calculation that follows from resonance principles. The quality factor can be expressed in two ways; the ratio of the resonant frequency to the full-width half-maximum (FWHM) frequency band, and the ratio of the stored energy to the applied 234 Figure 80 Electric Field Polarization for Molecular Hydrogen. 235 power. The former can be used to find the quality factor while the experiment is running; the latter allows for an approximation of the resident electric field. The quality factor for the resonant cavity was found for experimental conditions identical to those of the experimental set that was used to find the Stark shifi in the hydrogen plasma, with pressure set to 50 Torr. At low power, the input power dropped to half of its original value when the cavity length was increased by approximately 0.5 cm. As a result, Q = fres 1V FWHM 3 3 fres — =——' " =18.73cm 2 A738 2 C 3 E AFWHM =18.73cm + 0.5cm = 19.23cm (8.1) AfFWHM = 2[f,.,, — C 1: 0.2200112 AFWHM Qz—f’“ =11.15 FWHM 236 The transverse electric field in the resonant cavity (E,) can be approximated by, 2 wnsW ={ZZVI‘CS'80EV P P Q= 5V0] 2 _ 2%.).95053 3 R0 (8.2) 2 2 2 = (271') R0805, iclni P 2 = 1.063x10‘3 Erz(v/cm) Where R/Ro is the ratio of the outer to inner coaxial diameters. For gaps (Ad) much less than one-quarter wavelength, the resonant (transverse) field E, is related to the field between the two probes Ep by, _AV_ 1 WEde R0_ E_C__R01n P: Ad Ad IM “R0 2 er _lresl (8.3) = 0.266Er(v/cm) Now, the ratio of the electric field at the plasma sheath (Es) to the electric field between the probes is approximately equal to the ratio of their surface areas. Combining with Equations 8.1-8.3: 237 2 2 2 : Asheath : flsheath : [Bx/teat}: ] : [1.0mm ] 2 0.01 7mm: - Aprohe — fig 00 10mm ES 2 —]—Ep(v/cm) = 0266 1 Q 3 (8.4) 7 area 7 area 1.063xl 0— E 2725(v/cm) The electric field at the sheath is of the same order of magnitude as that found in sections 7.4.1-7.4.3 (3858 V/cm) using the Stark effect shift. Figure 81 illustrates the electric field structure in the resonant cavity. 8.1.3 Results: Atomic Hydrogen Spectral Resolution The spectral resolution is sharper and the magnitude greater in the set of peaks corresponding to H0- fine structure transitions (n,j)=(3,3/2)>(n,j)=(2,1/2), and to a lesser extent, the other peaks as well. Normally, these peaks are not this sharp, the resolution reduced by instrument broadening and Doppler broadening. The effects of Instrument broadening were reduced by adjusting the accelerating voltage to push the photo-multiplier tube (PMT) to operate in its nonlinear range (section 7.1, Figure 42). As a result, the slope of each dI/dt response from the PMT that was above the threshold was magnified. The PMT effectively took on characteristics of a detector. The narrowing of Doppler broadened spectra is more involved. Figure 64, in Section 7.4.], shows the theoretical interweaving of the Stark effect for both gross and 238 Resonant Field --------------1-------------- .--------------.E.------------- L r Er Ep S E plasma Er Figure 81 Electric Field in Resonant Reactor Chamber. 239 fine structure in the HCl line. Figure 64 allows for the location of 25 independent transitions, shown graphically on Figure 65. Figure 64 also helps explain why the H; peaks are much sharper than expected, and why H5 and H7 peaks are not. The explanation follows. With an applied field of exactly 3858 V/cm, levels j=3/2 and j=l/2 in n=2 are coupled by the microwave power source at 2.45 GHz. Electrons in the lower level are raised to the upper level by the strong overlap between (n,j)=(3,5/2) and (n,j)=(2,3/2) waveforms. Now, transitions from (n,j)=(3,5/2) to (n,j)=(2,3/2) and (n,j)=(2,l/2) are recorded by the spectrometer. Additionally, the photon released in these transitions interacts with atomic hydrogen orbitals that are immersed in a strong microwave standing field. This modulates the interaction energy of the photon by +/-2.45 GHz. The new modulated energy of the photon is exactly the amount necessary to raise electrons from the (n,j)=(2,l/2) and (n,j)=(2,3/2) levels into several of the (n,j)=(3,1/2) gross structures. The energy released in the transition of these energy levels to a lower state is modulated, and continues a chain reaction in which each of the upper states are tied to each other through a series of transitions in the optically thick plasma. The important point is that this chain reaction is initiated by microwave energy absorbed in the lower band [85], and kept going by the same strong microwave source, frequency modulating the photon energy released in upper-to-lower band transitions. To absorb the exact amount of energy, the hydrogen atoms must be relatively stationary with respect to the standing electromagnetic field [86]. Thus, the emission in the visible spectrum will come from atoms with very small velocities, defeating Doppler 240 broadening. This effect is similar to that found in laser spectroscopy [87], and was only observed in this set of experiments where the electric field was found to be ~3800 V/cm. Another explanation for the relative absence in Doppler broadening is that, as the plasma is optically thick, the only emissions escaping to the PMT are emissions from atoms along the perimeter of the plasma. Whether confined in motion by the quartz tube, or confined by the same forces that constrain the plasma, atoms at the perimeter of the plasma have very low velocity; the edge of the plasma is the turning point for atoms with velocities less than escape velocity. As a result, the Doppler broadened line width is narrowed, reflecting the nearly static hydrogen atoms at the plasma edge, in the direction that the light is emitted. This condition is not related to the constant velocity, or Bohm velocity (uB), of hydrogen ions at the plasma sheath (section 4.1.1). Obviously, H+ ions have no electrons, and therefore no electronic emission. One additional point. The gross structure Stark splitting at 3858 V/cm is predicted to be 0.1067 A, or 6.40 units, from theory. The gross structure splitting on either side of the centerline is exactly 6.0 units. The gross structure splitting between the lefi and right side —that is, the energy difference between the k=+2 and k=—2 parabolic energy levels- does appear to be exactly 6.40 units. A rigorous explanation for this effect would be very difficult. The gross structure energy levels are locked to the fine structure transitions by the nonlinear nature of the interaction between photon and the atomic orbital and spin-orbit coupling, and in this case the microwave field. This effect, called mode locking, is common place in physics; 241 from optical scattering in multi-mode fiber, to clock pendulums mounted on a common wall. 8. 2 Discussion Results from this investigation indicate that a constant magnitude magnetic field and a constant magnitude electric field are both sustained by the plasma, evident in the hydrogen spectrum by strong Zeeman and Stark splitting. These fields are not the applied microwave electromagnetic components; the applied microwave components are sinusoidal, and would imprint a continuous spectrum about the center wavelength, which is also evident. Furthermore, the impressed magnetic and electric field strengths are not related; the magnetic field decreases with pressure, the electric field increases, as shown in Figures 57 (section 7.3.1.2) and 77 (section 7.4.2). One possible explanation for the constant magnitude magnetic field is the following: the hydrogen molecules spin in the same direction and align in concentric rings around the plasma center under the strong influence of the microwave H field. Hydrogen is diamagnetic, with very small k (~-0.2x10'2) [53], but the collection of hydrogen molecules forms domains that are circumferential to the plasma. If this were the case, one would expect very high rotation temperatures at low pressures. Rotation temperatures should first decrease, due to collisions, then increase as the pressure is increased. This is seen in experimental data. As with domains in ferrous material, the hydrogen magnetic field does not flip until the microwave field has reversed itself hard enough. At that point, the molecular 242 spin reverses to its maximum value nearly at once. As a result, the H vs. B plot looks like a standard hysterisis curve. Furthermore, contractions at higher pressures can be seen as a direct interaction of the spinning hydrogen molecules and the magnetic field gradient set up at the edge of the plasma by internal collisions. The Lorentz force imbalance exerted on the current loop defined by the protons rotating about their center axis pushes the plasma to the center of the reactor. At lower pressures, the magnetic field gradient is not present. The constant electric field is more difficult to understand, and there will be no proposal for its mechanism at this time. Improvements to the experiment mostly involve equipment. Hydrogen bonding and spin effects could be monitored by infrared and microwave spectroscopy, respectively. In the optical spectrum, higher pressures could be monitored by CCD spectroscopy; the higher frame rates would eliminate the concern for noise jitter due to instabilities in contraction. Further, spatial resolution —multiple optics channels- would provide interesting comparisons between the plasma center and edge, where magnetic field gradients are suspected. It is uncertain whether higher resolution optical spectroscopy is the answer. The Lummer-Gehrcke plate [88] requires no slit, increasing signal intensity, and provides spectral data accurate to 10‘4 cm". But, the sinusoidal microwave fields may overwhelm the finer structure, and blur out any advantage. At this point, there are more questions than answers, and almost limitless avenues to pursue in the understanding of the miniature plasma formed by microwave plasma sources. 243 Appendix A Plasma System and Components Figure 82 Miniature Microwave Plasma System. 244 .- “.11!“ 1x a ‘u .v. ““1111th I- 1" » - Figure 83 Gas Flow Meter Bank (4 Channel). Figure 84 Electronics Control Board. 245 Figure 85 Plasma Reactor Chamber- 246 -._ - . . 4 . Figure 87 Optical Fiber Micro-Positioner (CBS). 247 Figure 88 Hydrogen Plasma: 0.5 Torr, 60 W. Figure 89 Hydrogen Plasma; 5.0 Torr, 60 W- 248 Figure 90 Hydrogen Plasma; 10.0 Torr, 60 W. Figure 91 Hydrogen Plasma; 50 Torr, 60 W. 249 Appendix B Fiber Optic Feed-Through Figure 92 Reactor Chamber with Fiber Optic Feed-Through. Figure 93 Fiber Optic Feed—Trough. 250 \{L‘ , «'4 hannels). 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