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Modeling and control for micro and nano manipulation

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Details
Material Type

Theses

Authors

Wejinya, Uchechukwu C.

Date

2007

Subjects

Microelectromechanical systems
Microtechnology
Nanoelectromechanical systems
Nanotechnology

Program of Study

Electrical and Computer Engineering

Degree Level

Doctoral

Language

English

Pages

xiii, 140 pages

Permanent Link

https://doi.org/doi:10.25335/M5513V98B

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