The deposition of AlN thin films, their characterization and the fabrication of surface acoustic wave devices

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Fansler, Charlee

Date Published: 2007

Subjects: Acoustic surface wave devices
Aluminum nitride
Diamond thin films
Piezoelectric materials

Program of Study: Electrical and Computer Engineering

Degree Level: Masters

Language: English

Pages: xii, 118 pages

Permalink: https://doi.org/doi:10.25335/39z9-y297

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