THESE; ‘.WP m” wwww _w _,t,” «p— — x .- \ 1 (I . ' . I ”it VF“ Vw"? - Va Y x EAL: H 1 E i 1 I‘ i . I ‘73- “l- l 1 [A y o (2“ t a . '2‘... :1."- I; ’ It"? I 1‘ a 6e ‘1 $3 5375‘ ,. ‘5' '- .~. u. _ ~~ ._. . ~ 6‘ (E‘ A “7; ‘ mm :16: a“ r at. ~ 5 133.319 38: 1.. em ‘0» 1, raj-12:. 3: v §' u ~ v 4- % At!) This is to certify that the dissertation entitled Synthesis of Images Through a Diffraction Limited System with High Contrast Recording presented by Yon-Lin Kok has been accepted towards fulfillment of the requirements for M.S. degree in Eiec. Engr. Date l\/\/%3 MSU is an Affirmative Action/Equal Opportunity Institution 0-12771 MSU LIBRARIES RETURNING MATERIALS: Piace in book drop to remove this checkout from your record. FINES wiII be charged if book is returned after the date stamped beIow. SYNTHESIS OF IMAGES THROUGH A OIFFRACTION LIMITED SYSTEM WITH HIGH CONTRAST RECORDING By Yon-Lin Kok A THESIS Submitted to Michigan State University in partiai fulfillment of the requirements for the degree of MASTER OF SCIENCE Department of Eiectrica] Engineering and Systems Science 1983 ABSTRACT SYNTHESIS OF IMAGES THROUGH A DIFFRACTION LIMITED SYSTEM WITH HIGH CONTRAST RECORDING BY Yon-Lin Kok Image synthesis aims at determining the object distribution of the input image which when distorted by an imaging system (e.g. a display device) produces a prescribed image at the output of the given system. The image synthesis problem is encountered in the design of masks for microphotography, microlithography, laser printing and aids for the visually impaired. In this thesis, we solve the problem of generating the prescribed 2-dimensional images through an imaging system that is modeled by a linear bandlimited (diffraction limited) system followed by a noninvertible point nonlinearity (high contrast recording). It is shown that the iterative algorithm presented in the thesis to solve this problem always converges to a solution whenever one exists. The problem of existence of solutions is examined while several patterns of the prescribed output images are successfully produced by using the algorithm with computer simulations. ACKNOWLEDGEMENT I wish to express my sincere gratitude to Professor Soheil I. Sayegh for his expert guidance and stimulating advice throughout the course of this research. This research could not have been accomplished without his encouragement and support. Sincere appreciation is also extended to Division of Engineering Research, Michigan State University, for its offer of financial support. I would like to thank my father and my mother whose support and love have encouraged me to make this thesis possible. To my mother and father TABLE OF CONTENTS Chapter Page l INTRODUCTION ................ . . . l 2 MATHEMATICAL FORMULATION ............ 4 2.1 Problem Formulation ............. 4 2.2 Description of the Algorithm ......... 5 2.3 Proof of Convergence ........... . . 6 3 THE EXISTENCE OF SOLUTIONS . . . . ........ lO 3.1 Problem Formulation ............. lO 3.2 Methold of Eliminations . . . ........ l2 4 EXAMPLES ON IMAGE DESIGN . . . . ..... . . . . 15 4.l Parameter Specifications . .......... 15 4.2 Description of Results ............ l6 5 CONCLUSIONS AND FURTHER RESEARCH ......... 18 APPENDIX A ......................... l9 APPENDIX B . . . ...... . . . . . . . . ........ 2l APPENDIX C-l . .......... . ............ 26 APPENDIX C-2 ........... . . . . ......... 34 FIGURES ........................... 37 REFERENCES ......................... 66 CHAPTER I INTRODUCTION This thesis investigates a new image processing problem, which may be called "image design” (or, perhaps, "image synthesis"). Consider a nonideal imaging system, e.g., a microfilming camera, a laser printing system, or an image display device. An ”input” image is fed to the system and the "output" image is generated (displayed). The goal of image design is to determine the input image that generates a prescribed desired output image. An example of some ad hoc image design procedures which have been adopted in the past by the microprinting and microphotographic industry, are the corrections usually made in the original masks. These corrections are deliberately introduced to compensate for the distortions caused by the microcamera itself. Serifs are introduced around corners to remove rounding effects, and sharp local reductions of thickness are made in intersecting lines to prevent the formation of fillers [1,2]. For instance, Kodak recommends the addition of triangular serifs to corners, the dimension of which were determined by a process of trial and error [2]. At first sight it appears that this problem of “image design“ is mathematically identical to the well known problem of image restoration, the difference between them being mainly one of motive. One subtle difference, however, has to do with the existence of a solution. In an image restoration problem, the measured output results from an actual, albeit unknown, input. In the absence of measured error or noise, at least one solution must exist. In an image design problem, on the other hand, it is possible that no input image is able to produce the desired output image. Therefore, in image design, a problem of great concern is that of existence of a solution. If more than one solution exists, the choice among such solutions is only a matter of convenience. In an image restoration problem, one is usually concerned with uniqueness. Typically, more than one input image could produce the measured output image, and a choice is usually based on a priori statistical information. The imaging system that I will be dealing with in this thesis is a linear low pass system followed by a hard-limiter (clipper) as shown in Figure l. This is an adequate model of a microphotographic system where the linear system represents a diffraction limited micro- camera operating near its resolution limit and the hard-limiter re- presents a very high contrast film. E3 Image design can be applied to fabrication of masks for inte- grated circuits, the fabrication of precision optical instruments like reticles, ronchi rulings and resolution charts (Figure 2,3). Another potential area is in optical data storage (Figure 4). There is no doubt that many other applications will surface as the area of image design becomes more mature. In Chapter 2 of this thesis, the image design problem mentioned above is mathematically formulated and an algorithm is presented for its solution. The question of existence of solutions is examined in Chapter 3. In chapter 4 I give some examples of 2-dimensional patterns that were designed by using the algorithm presented in Chapter 2. Chapter 5 concludes this thesis with a brief summary and directions for further research. CHAPTER 2 MATHEMATICAL FORMULATION 2.l Problem Formulation Image design involves determining the object distribution which produces a prescribed image at the output of a given imaging system. The imaging system as mentioned in Chapter I, is a linear system h followed by a hardlimiting point nonlinearity ®(-) which is not invertible. The overall system is mathematically represented by the Operator G, whose input and output images, f(x) and g(x), are re- lated by g = Gf, as illustrated schematically in Figure l. The system G is known. A prescribed image 9 is to be generated at the output of the system. We would like to address the following questions: (i) Is it possible to find an input image f'E F, which satisfies given properties or conditions represented by the set F, such that the output Gf = g? (ii) If "yes“, how may f be determined? (iii) If “no”, how to determine an appropriate input image f' which produces an output 9' = Gf' that is closer to the desired 9 according to some criterion (metric)? The question of existence of solutions will be examined in the next chapter. In this chapter I present an algorithn1that will find a solution whenever one exists. Referring to Figure l we note that the value of g will be equal l whenever g is above a threshold y (determined by the filn1characteristics) and will be equal to 0 when a is below y. Without loss of generality we shall take y to be equal to zero since the threshold can always be adjusted without affecting g by simply introducing a dc bias in the input function f. 2.2 Description of the algorithm The proposed method is an iterative one starting with the transform of the desired output function g(x) = go(x). The n-th iteration step proceeds as follows: We form the function l,|w|<) ll \——3 l E C) "Tl A E v (D .1. E X C]. E \ l\) :1 We next form the functions where fn(x) = |fn(x)| , for lfn(x)| > e > O i e; , otherwise O<)\ , K = 0:l’--- (1) The convexity of DO ensures that the above sequence AK(n) is well defined and remains in D0. Suppose A* is a fixed point of G in DO’ then using Euclidean norm, - A*H2 HA “MK-1V + <1-neAan K+l XZHAK-AHI2 + (1-i)2HGAK-A*H2 + 2X(l- x) (GAK A) )T(-Ak -A) (2) “AK-GAKHZ = “AK-A*n2 + neAK-A*H2-2HAK-GAKH2 = AHAK-A*“2 + (1-x)HGAK-A*H2 IA “AK-A*u2 For any m 3 O x(l-X) i HAK-GAKH2 5 I [HAK-A*V2-HA A*H21 K=O K=O K+l uAO-A*u2 — nAm,,-A*u2 ' * hAO-A H2 I /\ Therefore, the series ) “AK-GAKH2 on the left side is bounded and each term “AK-GAKH2 is nonnegative, it converges for m + w, in particular, lim “AK—GAKH2 = o K+oo Since “A K+]-A*“ 5 HAK-A*H 5 HAj-A*H 5 “AO-A*“ VK>O,j B 3 O A On the other hand, there are requirements imposed on G(K) by the point nonlinearities such that the prescribed output function g(n), n = O,l,...,N-l is generated. These requirements are 1 N-l , 1%.K N KZO G(K)e 3 e- if g(n) > O (6) -E “If g(n) < 0 I A n = O,l,...,N-l From formulas (5), (6) we can write down the conditions that G(K) should satisfy in terms of a system of inequalities. lO ll G(O)+2{Re[G(l)e ]+Re[G(2)e ]+o--+Re[G(B)e I} 3 Ne:, if g(n) > o (7) -Ne, if g(n) < 0 IA .Zn . . ‘N‘nK Let G(K) = XK + 1yK and e = AnK + J an K = 0,1, ,8 n = O,l, ,N-l (Note that y0 = O, bn0 = O, An0 = l) Therefore, inequality (7) becomes AnOXO+2{(Aanl-bnlyl)+(An2X2-bn2y2)+°°°+(AnBXB-anyB)} 3N6 if g(n) > O (8) E -N€ If g(n) < 0. We multiply those inequalities corresponding to g(n) < O by a factor (-l), then inequality (8) becomes CjoKo + CjiKi +"'+ Cj,ZBKZB 3 C (9) -2b. ., C= N€>O where CjO = l, C.. = 2A.., Cj,i+B = 3,1 J1 J1 2b--,C=N€>O and K = X 12 i = l,2,...,B - O,l,...,N-l Ll. l Formula (9) forms a system of N linear inequalities with (28+l) unknowns which are real parts and imaginary parts of the Discrete Fourier Transform of the bandlimited function g(n). We shall present a method to check for the solvability or consistency of this system in the following section. 3.2 Method of Eliminations For a system of linear inequalities with (28+l) unknowns, the set of solutions, denoted by S 5), forms a convex set in the l ( (28+l) dimensional hyperspace R<2B+ ). An indexed K of real numbers (R K ..,K O’ 1,. ) 5 8(5) if all the inequalities 28 K C. K +~~+C K > C j: O,l,...,(N-l) C 31 1 j,28 28 — jO 0’ + are true statements. Consider legal linear combinations of the given system of linear inequalities (9) dOKO + d1K] +...+ dZBKZB 3 d (10) N-l where d1 = Z UQCRi , 1 = O,l,...,ZB. 2-0 N-l d = C 220 U2 - UN , 2 = O,l,...,N. and U > O. A 13 Since the process of eliminations either yields a solution for S or exhibits the inequality O-KO + O-K1 +---+ 0-KZB > O as a legal linear combination of the inequalities of S, the process of elimination proceeds as follows: (1) Separate the N inequalities of the system into three classes by observing the coefficient CjO’ j = O,l,...N-l ‘ Class I: where CjO > 0 Class II: where CJ.0 < 0 Class III: where CjO = O (2) Define a new system S' of inequalities in the unknowns K0, K1,...,K28 by 0 KO + 0 K1 +.--+ 0 K28 > -1 c. c... C.. c... M0 + (C_J_,1 _ C1 ,1 ) K] +.... (#— EL’Z—BWB 2E _ E" jl’o jll,0 jl,0 :jll,O J'I,O j”,0 (11) for all pairs j and j' with Cj'O > 0, Ci”,0 < O , O"<0 + C3"".1'K1‘L'”+ Cj“'2BKZB > C for all J w1th Cj”',0 = O (3) In case that all the coefficients of K0 are of the same sign then we can set CJ.0 = 0, j = 0,...,N—l (i e. there always exists a real number K0 such that formula (l0) is a true statement). (4) Repeat steps (l) (2) (3) with the coefficient le’ j = 0,...,N-l and then Cjza CJ-39"'9CJ',(ZB_])' 14 This process must end after (28) steps. The right hand side of equation (ll) is always positive (since C = N 6 > O, Cj.0 > O, Cj" 0 <0). Therefore, the system is solvable or consistent if the coefficients (after EB eliminations) of KZB are of the same sign. On the other hand, if there are any two coefficients of K28 among these n in- equalities differing in signs then the system is not solvable. (1.6. solution does not exist.) CHAPTER 4 EXAMPLES ON IMAGE DESIGN Six 2-dimensional exampleson the image design problem previously mentioned are presented in this chapter. Iterative solutions based on A (n) = AA (n) + (l—X)G AK(n) K+l K where G = ¢ RE TO FB n = O,l,...,N-l are illustrated from Figure 6 to Figure ll. 4.l Parameter Specifications Let N = the number of points sampled on the desired output pattern along each dimension (or axis). M = log2 N LN = the bandwidth of the low pass filter along each dimension (or axis). X = the relaxation constant defined in the above equation. Computer simulations by means of FORTRAN programs are implemented digitally with the following parameter values: N = 32 M = 5 l6 LN = {l2 , for pattern l,2 . ( 8 , for pattern 3 - 6 , for pattern 4,5. ‘ 4 , for pattern 6 . X = 0.5 The numerical values of the iterative solution are computed by PROGRAM SETKD (Appendix C-l), where 2-dimensional Discrete Fourier Transform is used (SUBROUTINE FFTZD). These output data are then quantized into l0 levels and each level is assigned a degree of grayness. The graphical representations of the 2-dimensional output data are obtained by PROGRAM GRAF (Appendix C-2). 4.2 Decription of Results I would‘Jike to define R(n) as the ratio of the energy of the image (signal) after n-th iteration within the low pass band of the filter to the total energy of the image (signal). Since R(n) appears as a measure of the rate of convergence of the iterative algorithm, it is always helpful to keep track of R(n) as the iterations are going on. Table 4.l shows some values of R(n) relevant to our results. Patterns LN Starting Intermediate Final Figures ratio; R(O) ratio ratio l l2 0.78572 R(8) = 0.99935 R(40) = 0.999985 6 2 l2 0.80872 R(8) = 0.99818 R(80) = 0.99997 7 3 8 0.86962 R(8) = 0.99955 R(80) = 0.99997 8 4 6 0.77806 R(40) = 0.99925 R(300) = 0.99995 9 5 6 0.90792 R(8) = 0.99946 R(40) = 0.99999 l0 6 4 0.80940 R(8) = 0.99794 R(80) = 0.99999 ll 17 Consider the iterations that pattern I takes (Figure 6). Figure 6.a shows the pattern we want to design. Figure 6.b shows the output pattern from the clipper if the image shown in Figure 6.a is fed into the imaging system. Clearly, Figure 6.b is not the required pattern and therefore the straightforward approach consisting of using the desired pattern as an input is not apprOpriate. Using our algorithm we obtain the pattern shown in Figure 6.c after 8 iterations. Clearly, this is an improvement over Figure 6.b. After forty iterations we succeed in finding the required input image (Figure 6.d) that generates an exact replica of the desired pattern in Figure 6.a. Referring to Table 4.l we see that 99.9985 percent of the energy in the image (Pattern l) falls in the band of the low pass filter. Pattern 2 to pattern 6 are shown from Figure 7 to Figure ll respectively. The figures for each pattern come in the same order as stated above. CHAPTER 5 CONCLUSIONS AND FURTHER RESEARCH The image design problem that I addressed in this thesis consists of finding the input image that should be fed to a known imaging system to generate a prescribed desired output. I have presented an algorithm that solves this problem and I successfully designed several patterns using the algorithm. I also gave a proof of convergence of this algorithm and examinedthe question of solvability of this problem. There are many interesting questions that still need to be examined. The first one is whether we can improve on the rate of convergence of the algorithm. The second is to attempt to find easier methods to check for the existence of solutions. The third one is to study the performance of the algorithm when the problem is known to have no exact solution. Finally we can attempt to design images using other imaging systems. Microlithography, optical data storage and laser printing are only a few of the potential areas of application of image design. 18 APPENDIX A. Definition 1 A mapping G: D CIRN + RN is nonexpansive on a set 00 C10' if HGX-GYH g H X-YH vx, Y e 00 (1) and strictly nonexpansive on 00 if strictly inequality holds in (1) whenever X # Y. . * . . o * * c Any p01nt X in the domain of G for wh1ch X = GX 15 called a fixed point of G. Definition 2 A mapping F: D ClRN + RN is contractive on a set 00 CiD if there is an a < I such that Hex - GYH 5 allX-YH vx, YE DO (2) Theorem l Suppose underEuclideannorm G: D<:_RN‘+ RN is nonexpansive on the closed, convex set 00 C10. Assume, further, that GDO ClDO and that 0 contains a fixed point of G. Then for any X 6 (0,1) 0 and X06 00’ the iteration 19 20 X = XX + (1-X)GX K+1 K K’ Converges to a fixed point of G in D0' K = 0,1,... 21 N In N-dimensional hyperspace R with Euclidean norm, the following four mappings a, T5, T0, and F are nonexpansive: B (i) ¢[X(n)] = |X(n)l- g(n) , O < n < N-l where g(n) is given as the prescribed output function, (Image) and (ll) Té[X(n)] MaxLE, X(n)] , 0 < n < N-l where e > 0 (G = 0.05 for our imaging system) (iii) TOIX(n)] |X(n)l , 0 g n 5 N-l . _ -1 (1v) FB — W BTW where W and W'1 denote the Discrete Fourier Transform and its inverse respectively. BT[X(K)] = { 0 , Ke IBC{0,--~, N-ll X(K) , Otherwise Proof: ¢LX(n)] = |X(n)| g(n), 0 f n < N-l where |g(n)| = l. (IX—1H2 - l M X A 5 v I _< A 3 v N n=0 N-l 2 > I | |X(n)l - |Y(n)ll n=0 N-l 2 = I | |X(n)t9(n) - |Y(n)|°9(n)l n=0 N-1 = 21¢ mm - ¢[Y(n)1|2 n=0 = 11¢ - MHZ => HX-YH 3 HMX) - <1>(Y)H Equality holds if X(n)-Y(x) 3 0 v tie {o,--o, N-1} é ¢ is nonexpansive. (ii) Te [X(n)] Max[e , X(n)] 5;] 1m 36 [X(n)] , o < n < N-l E (3) Tm[X(n)J = MaxtO. X(n)1 2 ”‘1 2 For (I) (2). HX-YH = )0 IX(n)-Y(n)l n: N-l 2 = 2 ILX(O)'EJ'[Y(D)’EJI 94> _ 2 { l|S€(X)-$€(Y)H -l -l 2 HSE (X) SE (0“ Equality holds for all X,Y 6 RN Se, s; are nonexpansive. 2 _ 2 For (3), Hx-YH - ) |X(N)-Y(n)| + C |X(n)-Y(n neIX neIX where X(n) 5 0 if neIX X(n) 3 0 if ne 1; . . . c (a) Part1t1on IX 1nto IxY and IXY where y(n) 5 0 if n e-IXY c y(n) > 0 if n e IXY 2 _ 2 2 E |X(n)-Y(n)| — E |X(n)-Y(n)| + E c |X(n)-Y(n)| neIX neIXY neIXY 3 C (X(n)-v Tm is nonexpansive. 1 Therefore, the composite mapping T5 = 8; TmSe is nonexpansive. (iii) T0£X(n)1 = |X(n)l . 0 5 n 5 N-l N-1 N-1 Hx-YHZ = 2 Mn) - v12 2 2 1mm - 1v112 n=0 n=0 N-1 2 = “20 |T0[X(n)] - T0[Y(n)]| 2 HTO1-IY112+‘N z (0001-1100112 KEIB KQIB 3,1,— ; Hum-11w? kgIB . 1 ieX(K 16Y(K) 2 W 1 ||X(K)le - (Y(KHe I KeelB => HX-YH 3 llFB(X)-FB(Y)H Equality holds if X(K) = Y(K) for 1(6 IB' From (i) (ii) (iii) (iv) we can define the composite mapping 9 FB is nonexpansive. G :‘SEIOFB and GDO C100, where 00 g(n) such that G is nonexpansive on a closed subset D0 ClR associated with the mapping ¢. N is specified by the given image function 89 3O 26 C-l: 2-dimensional zero-crossing Algorithm PROGRAM SETKD (INPUT, OUTPUT, TAPE 1, TAPE 6 = OUTPUT) COMPLEX A(32,32), E(32,32) REAL F(32,32) , T(32,32) INTEGER D(32,32) COMMON/FF/A READ (1,1) M,N,LN,JIT FORMAT (413) N1 = N/2 + 1 LN1 = LN/2-1 LNLT = N1-LN1 LNLZ = LNLT-l LNRT = N1 + LN1 LNRZ = LNRT + 1 READ (1,2) ((D(I,J), J = 1,N), I = 1,N) FORMAT (3212) DO 3 I = 1, N DO 3 J = 1, N F(I,J) = FLOAT (D(I,J)) A(I,J) = CMPLX(F(I,J),0.0) IV = O IN = 0 DO 30 J = 1, N WRITE (6,37)F(1,J),F(2,J),F(3,J),F(4,J),F(5,J) C F(6,J),F(7,J),F(8,J) 37 32 33 34 36 35 31 O 28 27 27 FORMAT (1X,8(E9.3)) DO 32 J = 1,N WRITE (6,33)F(9,J),F(10,J),F(11,J),F(12,J),F(13,J), F(l4,J) ,F(15,J) ,F(l6,J) FORMAT(1X,8(E9.3)) DO 34 J = 1,N WRITE (6,36)F(17,J),F(18,J),F(19,J),F(20,J),F(21,J), F(22,J),F(23,J),F(24,J) FORMAT(1X,8(E9.3)) DO 35 J = 1,N WRITE (6,31)F(25,J),F(26,J),F(27,J),F(28,J),F(29,J), F(30,J),F(31,J),F(32,J) FORMAT(1X,8(E9.3)) IN = IN + 1 IF(IN.EQ.4)GO TO 39 IF(IN.GT.1) GO TO 98 DO 9 I = 1,N DO 9 J = 1,N T(I,J) = REAL(A(I,J)) SIGN = 1.0 CALL FFTD2(N,M,SIGN) DO 27 I 1, LNLZ DO 28 J = 1, LNLZ A(I,J) = 0.0 DO 27 J = LNRZ,N A(I,J) = 0.0 DO 41 I = LNRZ,N DO 42 J = 1, LNLZ 42 41 10 11 98 29 28 A(I,J) = 0.0 DO 41 J = LNRZ,N A(I,J) = 0.0 SIGN = -1.0 CALL FFTD2 (N,M,SIGN) IV = IV + 1 IF (IV.EQ.1) GO TO 10 IF (IV.EQ.8) GO TO 10 GO TO 98 DO 11 I = 1,N DO 11 I = 1,N F(I,J) = REAL(A(I,J)) GO TO 89 DO 29 I = 1,N DO 29 J = 1,N E(I,J) = CONJG(A(I,J)) E(I,J) = E(I,J)*A(I,J) E(I,J) =C$QRT(E(I,J)) REAL(E(I,J)) -n A H U C... V II RE = F(I,J) IF(RE.LT. 0.0S)F(I,J) = 0.05 F(I,J) F(I,J)*D(I,J) F(I,J) = (T(I,J)+F(I,J))/2.0 IF(IV.EQ.80) GO TO 89 DO 38 I 1,N DO 38 J 1,N 38 39 29 A(I,J) = CMPLX(F(I,J),0.0) GO TO 8 STOP END 4o 41 42 43 44 45 46 SUBROUTINE FFTD2(N,M,SIGN) COMPLEX A(32,32),X(32),Y(32) COMMON/FF/A CALL SHIFT2(N) IF(SIGN.LT.0.0) GO TO 43 DO 42 J 1,N DO 41 I 1,N X(I) = A(I,J) CALL FFT2(X,Y,SIGN,M) DO 42 I = 1,N A(I,J) = Y(I) IF(SIGN.LT.0.0) GO TO 46 1,N DO 45 I DO 44 J 1,N X(J) = A(I,J) CALL FFT2(X,Y,SIGN,M) DO 45 J = 1,N A(I,J) = Y(J) IF(SIGN.LT.0.0) GO TO 40 CALL SHIFT2(N) RETURN END 30 47 31 SUBROUTINE SHIFT2(N) COMPLEX A(32,32) COMMON/FF/A COE = -1.0 DO 47 I 1,N DO 47 J 1,N IPOW = I + J CO = COE**IPOW A(I,J) = A(I,J)*C0 RETURN END 48 32 SUBROUTINE FFT2(X,G,SIG,M) DIMENSION X(1),G(1) COMPLEX X,G,W INTEGER R SIGN = -1*SIG N = 2**M N2 = N/2 FLTN = N PHIZN = 2.*3.1415926536/DBLE(FLTN) DO 49 J = 1,M N2J = N/(2**J) NR = N2J N1 = (2**J)/2 DO 48 I = 1,N1 INZJ = (Irl)*N2J FLIN2J = IN2J TEMP = FLIN2J*PH12N*SIGN W = CEXP(CMPLX(0.0, TEMP)) DO 48 R = 1,NR ISUB = R + IN2J ISUB1 = R + IN2J*2 ISUBZ = ISUB1 + N2J ISUBB = ISUB + N2 G(ISUB) = X(ISUBl) + W*X(ISU82) G(ISUBB) = X(ISUBl)-W*X(ISUB2) CONTINUE 49 50 51 52 33 DO 49 R = 1,N IF(SIGN.LT.0.0) GO TO 51 DO 50 R = 1,N G(R) = G(R)/FLTN RETURN DO 52 I = 1,N G(I) = X(I) RETURN END C-2: 21 22 23 24 26 34 PROGRAM GRAF(DATA,TAPE1 = DATA) DIMENSION A(32,32),X(6),Y(6),IBUF(1025) IN = 1 CALL PLOTS(IBUF, 1025,3, PAPER = 15/VEL PEN1 = 2/BLACK PEN2 = NOT USED PEN3 = NOT USED USER = KOK YON-LIN PHONE = 3559078', 90.0,84) CALL SYMBOL(-0.5, -1.0, 0.112, ”PAPER = 15/VELPEN1 = 2/BLACK PEN2 = NOT USED PEN3 = NOT USED USER = KOK YON-LIN PHONE = 3559078') CALL PLIMIT (65.0) VX 0.84 VY = 0.0 READ(1,21)((A(I,J),I 1,8), J = 1,32) FORMAT (8E9.3) READ(1,22)((A(I,J),I 9,16), J = 1,32) FORMAT (8E9.3) READ(1,23)((A(I,J),I 17,24), J = 1,32) FORMAT (8E9.3) READ(1,24)((A(I,J),I 25,32),J 1,32) FORMAT (8E9.3) GO TO 8 VX = 15.0 VY = 0.0 READ(1,26)((A(I,J),I = 1,8),J = 1,32) FORMAT(8E9.3) READ(1,27)((A(I,J),I 9,16), J H .—l v (A) N v 27 28 29 35 FORMAT (8E9.3) READ(1,28)((A(I,J),I = 17,24),J = 1,32) FORMAT(8E9.3) READ(1,29)((A(I,J),I = 25,32),J = 1,32) FORMAT(8E9.3) IF(IN.EQ.4) GO TO 5 DO 4 I = 1,32 00 4 J = 1,32 IF(A(1,J).GT.0.0) GO TO 7 A(I,J) = -2.0 GO TO 4 A(I,J) = 2.0 CONTINUE CALL PLOT(VX,VY,—3) EX = 0.3536 00 2 I = 1,32 00 2 J = 1,32 IV = 33-1 JV = J 1V1 = IV-1 JV1 = JV-1 (1 V*EX X) X() (l) X(2) = JV1*EX X) X) .— — — - .1: (A) ( J X = X(2) (5 = 0 .0 36 X(6 = 1.0 Y(l = IV*EX Y(2 = Y(l) Y( = Y(3) ) ) ) 3) = IV1*EX ) ) 0.0 ) 1.0 S = (A(I,J)+2)/0.4 S = S+1 IF(S.LT.1)S = 1.0 IF(S.GT.10)S = 10.0 K = A1NT(S) D = 0.5/K CALL SHADE(X,Y,4,1,D,45.0,0) IN = IN+1 1F(IN.EQ.5) GO TO 6 GO TO 3 CALL PLOT(0,0,+999) STOP END 37 .o Empmxm mcwmmEH ._ wcsmwd IllllllllllllllllllIlllllJ o _ L--- _ MP A <_. .TT Cam 3% E: _ Q: I Empmam umpwew_ucam A; w 3:822:02 ”ESQ ucmEmZTtEm Laws: _ v _ Ill lllllllllllllllllllL @ 1111111111111111111111111111 + 1111101111111 n\ llllllll Figure 3 39 RETICLES ALIGNMENT TARGETS RONCHI RUUNGS SUTS AND APERTURES LINEAR SCALES RESOLUTION CHARTS Figure 4 '40 Li!"- '.Z:.'."- 'J' 1':- . 3:51' '4' {Jag-1.? :‘HI: u-Jv-I. Jud... :..-'".:-'_-.1. 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Figure 10d. ~ / I l L_ /2,// ,, /2 Figure 11a. \ 6S 2222., 2222222222/// 2222222222222 _ , , 2222222222222. . _ 2/ 222222222222 ./ ////////// 2 2./////////// 2222222 2/ ..... / 2222222222. . . 2222222222 2. . . . 2 2 2222222222V 22222222222 _ _ . 222/2222222222222 22222222 /2 _ _ ./2222222222222222 22222222.//2/2/ . . 222222222222222 222222222 / 22 . . 222222222222222 222222/2 / 22 2/ 2 2222/ 22222222222222 /2222 ////72/,fi//2 .../////////.. 7/ fl///2 . / 22222. / 7// 222222222222/ 2 2222 22222 222 22 2/22/2222/22/2222/ . . . /22/2 / 2 2222/2 22222222 2222 ///22 2 . 2222 22 22 2/ 2/ // /2 / /2/ 7 , 22 H M 222222 //2/2 . . 2227/22/27 . . . 222 2222222 222/2 7222/22/ 222 / 2222222222/27 “2222/2222 22/ 2 , . . . . . . . . / .2 .2 22222 722/ g/ ./ 22222222 2. .. 222222222222 2222222... 222222222/ 222 22222222/2222 2 2 2 / . 2 . . 22222222 22 22222 /2 /2/22222222222222222 2 222 22222222 . 222222222/ 22222222222 / 2222 2 2222222222 2 . . . 2.2222222222222222 . 222222222222 _ . I /2/22222222222 / 222222222222/ 2 2222222222/ 2,22222222222272222222222222227 IIIIIIIIIIII Figure 11d. l0. ll. l2. REFERENCES B.E.A. Saleh and 5.1. Sayegh, "Reduction of errors of microphoto— graphic reproductions by optimal corrections of original masks," Opt. Eng., Vol. 20, p. 781-784, Sept. l98l. Eastman Kodak Co., Techniques of Microphotography. Publications No. P-52, Rochester, New York, I967. G.N.w. Stevens, Microphotography, Butler and Tanner, London, 1968. L; .M. Ortega and w.c. Rheinboldt, Iterivative solution of nonlinear equations in several variables, Computer Science and Applied Mathematics. . Papoulis, ”A New Algorithm in Spectral Analysis and Bandlimited Extrapolation,“ IEEE Trans. Circuits Syst. CAS-22, 735 (l975). 3; '50 .J. Marks II, "Gerchberg's Extrapolation Algorithm in Two Dimension,” IEEE Trans. Applied Optics, Vol. 20, No. lO, l8l5 (l98l). W .W. Shafer, R.M. 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Sayegh, “Image Restoration and Image Design in Nonlinear Optical System," Ph.D. thesis at the University of Wisconsin- Madison, l982. Michigan State University Computer Laboratory, ”Plotting and Graphics Reference Manual”, l979.