Low-temperature deposition of transparent diamond films with a microwave cavity plasma reactor

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Ulczynski, Michael J.

Date Published: 1998

Subjects: Diamond thin films
Plasma-enhanced chemical vapor deposition

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xxii, 420 pages

Permalink: https://doi.org/doi:10.25335/5nvm-t419

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