Micro-system-based multimodality biomedical imaging and sensing system has been studied by many researchers in the recent decades. Compared to the traditional biomedical system, by using the nano and micro fabrication devices the system size can be dramatically reduced which can be easily used for insertable, implantable and endomicroscope systems. With the emergence of the metalens and microoptoelectromechanical system (MOEMS), the current biomedical and sensing systems can be integrated into a compact size for disease early detection, image-guided surgery and therapy treatment. In this dissertation, we first demonstrate the technique of metalens and metalens based imaging system for ex vivo and in vivo tissue study. And for the second, we demonstrate the MOEMS based miniaturized NIR handheld probe and micro-ring sensor based handheld photoacoustic microscope probe.Metasurfaces have been studied and widely applied to optical systems. A metasurface-based flat lens (metalens) holds promise in wave-front engineering for multiple applications. The metalens has become a breakthrough technology for miniaturized optical system development, due to its outstanding characteristics, such as ultrathinness and cost-effectiveness. Compared to conventional macro- or meso-scale optics manufacturing methods, the micro-machining process for metalens is relatively straightforward and more suitable for mass production. Due to their remarkable abilities and superior optical performance, metalens in refractive or diffractive mode could potentially replace traditional optics.To use the advantages of the metalens, our work aims to develop a metalens based light-sheet fluorescence microscope (MLSFM) for ex vivo and in vivo biomedical imaging applications with high resolution, fast scanning speed and volumetric 3D imaging reconstruction. Chapter 1 introduces and research background and motivation of this study. In Chapter 2, it shows the design and principle of the metalens technology. Software metalens structure simulation, nano-fabrication process and device characterization. In Chapter 3, it demonstrates the metalens based light-sheet fluorescence microscope system introduction, design, biomedical tissue imaging protocol and ex vivo and in vivo imaging result. In Chapter 4, it shows two different imaging system designed for NIR wavelength. And compared the difference between the visible and NIR wavelength imaging effects In Chapter 5, introduces MOEMS based miniaturized NIR confocal handheld system which includes the MEMS device characterization, miniaturized system assembly and phantom imaging. In Chapter 6, the MOEMS and micro-ring sensor based miniaturized optical-resolution photoacoustic microscope system. In Chapter 7, presents a novel line focused metalens based photoacoustic microscope system. In the last chapter, the future work and the ideal for integrated metalens based miniaturized imaging and sensing applications for biomedical study.
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