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Collection: Electronic Theses & Dissertations
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Material Type: Theses
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Degree Level: Masters
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Subject: Cyclotron resonance
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Language
English
2
Copyright Status
In Copyright
2
Subject
Anisotropy
1
Fluorescence spectroscopy
1
Laser spectroscopy
1
Plasma etching
1
Silicon
1
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Implementation and testing of a laser induced fluorescence system for the characterization of a multipolar electron cyclotron resonance plasma reactor
King, Gregory Louis
Text (1991)
Part of
Electronic Theses & Dissertations
An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
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