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Author: Musson, Brian David
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Subject: Anisotropy
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Electronic Theses & Dissertations
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Material Type
Theses
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Language
English
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Subject
Cyclotron resonance
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Plasma etching
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Silicon
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An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
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Electronic Theses & Dissertations
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