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Program of Study: Electrical Engineering
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Subject: Anisotropy
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Electronic Theses & Dissertations
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Theses
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English
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Cyclotron resonance
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Electromagnetic measurements
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Nondestructive testing
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Plasma etching
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Silicon
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Wave guides
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An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
Nondestructive measurements of electromagnetic parameters of anisotropic materials using an open-ended waveguide probe system
Chang, Chih-Wei
Text (1995)
Part of
Electronic Theses & Dissertations
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