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Material Type: Theses
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Creator: Cao, Zongliang
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Subject: Microelectromechanical systems
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Collection
Electronic Theses & Dissertations
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Language
English
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Copyright Status
In Copyright
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Subject
Diamonds, Industrial
1
Polycrystalline semiconductors
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Single-material MEMS using polycyrstalline diamond
Cao, Zongliang
Text (2011)
Part of
Electronic Theses & Dissertations
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