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Material Type: Theses
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Creator: Musson, Brian David
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Subject: Plasma etching
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Electronic Theses & Dissertations
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Language
English
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Copyright Status
In Copyright
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Subject
Anisotropy
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Cyclotron resonance
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Silicon
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An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
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