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Committee Member: Verboncoeur, John
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Subject: Microwave plasmas
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Electronic Theses & Dissertations
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Material Type
Theses
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Language
English
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Copyright Status
In Copyright
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Subject
Diamond thin films
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Diamonds, Artificial
1
Hydrogen plasmas
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Mathematical models
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Plasma-enhanced chemical vapor deposition
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Modeling of hydrogen-based plasmas in microwave plasma-assisted chemical vapor deposition reactors at moderate pressures
Meierbachtol, Collin Stephen
Text (2013)
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