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Electronic Theses & Dissertations
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Anisotropy
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Plasma etching
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Development of a microwave ion and plasma source immersed in a multicusp electron cyclotron resonant magnetic field
Dahimene, Mahmoud
Text (1987)
Part of
Electronic Theses & Dissertations
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
Implementation and testing of a laser induced fluorescence system for the characterization of a multipolar electron cyclotron resonance plasma reactor
King, Gregory Louis
Text (1991)
Part of
Electronic Theses & Dissertations
An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
Design and experimental investigation of a large diameter electron cyclotron resonant plasma source
Sze, Fan Cheung
Text (1993)
Part of
Electronic Theses & Dissertations
3D3V simulation of electron cyclotron resonance plasmas
Gopinath, Venkatesh P.
Text (1994)
Part of
Electronic Theses & Dissertations
Temperature and concentration of ionic and neutral species in resonant microwave cavity plasma discharges
King, Gregory Louis
Text (1994)
Part of
Electronic Theses & Dissertations
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