MSU Libraries
Digital Repository
Home
About
Collections
Selected filters
Subject: Plasma engineering
×
Collection
Sort
Alphabetically
By count
Electronic Theses & Dissertations
1
Material Type
Sort
Alphabetically
By count
Theses
1
Language
Sort
Alphabetically
By count
English
1
Copyright Status
Sort
Alphabetically
By count
In Copyright
1
Subject
Sort
Alphabetically
By count
Microwave plasmas
1
Radio waves
1
Semiconductors--Design and construction
1
Year
TO
Apply
Search results
Showing 1 to 1 of 1 results
Results per page
20
50
100
Sort by
Most Relevant
Title (A-Z)
Title (Z-A)
Date (Newest)
Date (Oldest)
Most Recent
Least Relevant
Improved utility of microwave energy for semiconductor plasma processing through RF system stability analysis and enhancement
Rummel, Paul
Text (2000)
Part of
Electronic Theses & Dissertations
First
1
(current)
Last