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Electronic Theses & Dissertations
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Anisotropy
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Cyclotron resonance
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Diamonds
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Microwave plasmas
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Silicon
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Post-depositional processing of diamond film using electron cyclotron resonance plasmas
Chakraborty, Rabindra Nath
Text (1995)
Part of
Electronic Theses & Dissertations
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition
Zhang, Jie
Text (1993)
Part of
Electronic Theses & Dissertations
An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
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