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Electronic Theses & Dissertations
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Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
Anodic oxidation of silicon in a microwave plasma disk reactor
Roppel, Thaddeus Adam
Text (1986)
Part of
Electronic Theses & Dissertations
Scanning probe spectroscopy of individual dopants in silicon
Gasseller, Morewell
Text (2010)
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Electronic Theses & Dissertations
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