Microwave plasma-assisted CVD polycrystalline diamond films deposition at higher pressure conditions

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Zuo, Stanley Shengxi

Date: 2009

Subjects: Diamond thin films
Diamonds, Artificial
Polycrystals
Chemical vapor deposition
Microwave plasmas

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xxvi, 306 pages

Permalink: https://doi.org/doi:10.25335/ebed-rk56