An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Musson, Brian David

Date Published: 1991

Subjects: Anisotropy
Cyclotron resonance
Plasma etching
Silicon

Program of Study: Electrical Engineering

Degree Level: Masters

Language: English

Pages: xi, 85 pages

Permalink: https://doi.org/doi:10.25335/3njk-9842

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