CVD polycrystalline diamond (poly-C) thin film technology for MEMS packaging

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Zhu, Xiangwei

Date: 2006

Subjects: Chemical vapor deposition
Polycrystals
Thin films

Program of Study: Electrical and Computer Engineering

Degree Level: Doctoral

Language: English

Pages: xiii, 134 pages

Permalink: https://doi.org/doi:10.25335/xv5x-wh88