An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Mak, Peng Un

Date: 1997

Subjects: Cyclotron resonance
Microwave plasmas
Plasma etching

Program of Study: Electrical Engineering

Degree Level: Doctoral

Language: English

Pages: xxv, 439 pages

Permalink: https://doi.org/doi:10.25335/faxk-3730