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Content Type: PDF
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Collection: Electronic Theses & Dissertations
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Material Type: Theses
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Subject: Electron cyclotron resonance sources
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Subject: Manufacturing processes
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Subject: Plasma (Ionized gases)--Mathematical models
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Language
English
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In Copyright
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Subject
Manufacturing processes
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Characterization and modeling of a compact ECR plasma source designed for materials processing
Tsai, Meng-Hua
Text (1999)
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