MSU Libraries
Digital Repository
Home
About
Collections
Selected facets
Content Type: PDF
×
Collection: Electronic Theses & Dissertations
×
Subject: Electron cyclotron resonance sources
×
Subject: Manufacturing processes
×
Material Type
Theses
1
Language
English
1
Copyright Status
In Copyright
1
Subject
Manufacturing processes
1
Plasma (Ionized gases)--Mathematical models
1
Search results
Showing 1 to 1 of 1 results
Results per page
20
50
100
Sort by
Most Relevant
Title (A-Z)
Title (Z-A)
Date (Newest)
Date (Oldest)
Most Recent
Least Relevant
Characterization and modeling of a compact ECR plasma source designed for materials processing
Tsai, Meng-Hua
Text (1999)
Part of
Electronic Theses & Dissertations
First
1
(current)
Last
