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Collection: Electronic Theses & Dissertations
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Copyright Status: In Copyright
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Language: English
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Subject: Sputtering (Physics)
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Subject: Thermodynamics
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Theses
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Subject
Annealing of crystals
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Thermodynamics
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Thin films
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Stress evolution during isothermal and isochronal annealing of sputtered NiTi thin films on (100)-Si
Zhang, Jinping
Text (1997)
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