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Creator: Hopwood, Jeffrey Alan
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Electronic Theses & Dissertations
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Material Type
Theses
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Language
English
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Subject
Cyclotron resonance
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Plasma etching
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Silicon
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Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
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Electronic Theses & Dissertations
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