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Subject: Plasma etching
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Subject: Silicon
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Electronic Theses & Dissertations
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Theses
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English
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Anisotropy
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Cyclotron resonance
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Silicon
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An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
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