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Author: Gopinath, Venkatesh P.
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Electronic Theses & Dissertations
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Cyclotron resonance
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Electrons
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Microwave plasmas
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Silicon
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3D3V simulation of electron cyclotron resonance plasmas
Gopinath, Venkatesh P.
Text (1994)
Part of
Electronic Theses & Dissertations
An investigation of methods of evaluating plasma etch damage on silicon
Gopinath, Venkatesh P.
Text (1991)
Part of
Electronic Theses & Dissertations
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