An investigation of methods of evaluating plasma etch damage on silicon
- In Collections
-
Electronic Theses & Dissertations
- Copyright Status
- In Copyright
- Material Type
-
Theses
- Authors
-
Gopinath, Venkatesh P.
- Date
- 1991
- Subjects
-
Silicon
- Program of Study
-
Electrical Engineering
- Degree Level
-
Masters
- Language
-
English
- Pages
- viii, 86 pages
- Permalink
- https://doi.org/doi:10.25335/2emx-2c86