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Author: Mak, Peng Un
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Electronic Theses & Dissertations
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Theses
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English
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Cyclotron resonance
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Microwave plasmas
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Plasma etching
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An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
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Electronic Theses & Dissertations
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