MSU Libraries
Digital Repository
Home
About
Collections
Selected facets
Creator: Rummel, Paul
×
Subject: Radio waves
×
Collection
Electronic Theses & Dissertations
1
Material Type
Theses
1
Language
English
1
Copyright Status
In Copyright
1
Subject
Microwave plasmas
1
Plasma engineering
1
Semiconductors--Design and construction
1
Search results
Showing 1 to 1 of 1 results
Results per page
20
50
100
Sort by
Most Relevant
Title (A-Z)
Title (Z-A)
Date (Newest)
Date (Oldest)
Most Recent
Least Relevant
Improved utility of microwave energy for semiconductor plasma processing through RF system stability analysis and enhancement
Rummel, Paul
Text (2000)
Part of
Electronic Theses & Dissertations
First
1
(current)
Last
