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Creator: Zhu, Xiangwei
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Subject: Chemical vapor deposition
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Collection
Electronic Theses & Dissertations
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Material Type
Theses
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Language
English
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In Copyright
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Subject
Polycrystals
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Thin films
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CVD polycrystalline diamond (poly-C) thin film technology for MEMS packaging
Zhu, Xiangwei
Text (2006)
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Electronic Theses & Dissertations
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