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Subject: Cyclotron resonance
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Electronic Theses & Dissertations
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Theses
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English
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In Copyright
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Electrons
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Plasma etching
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3D3V simulation of electron cyclotron resonance plasmas
Gopinath, Venkatesh P.
Text (1994)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
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